PT3411695T - Método e sistema para medição topográfica tridimensional ótica - Google Patents

Método e sistema para medição topográfica tridimensional ótica

Info

Publication number
PT3411695T
PT3411695T PT168896397T PT16889639T PT3411695T PT 3411695 T PT3411695 T PT 3411695T PT 168896397 T PT168896397 T PT 168896397T PT 16889639 T PT16889639 T PT 16889639T PT 3411695 T PT3411695 T PT 3411695T
Authority
PT
Portugal
Prior art keywords
optical
dimensional topography
topography measurement
measurement
dimensional
Prior art date
Application number
PT168896397T
Other languages
English (en)
Original Assignee
Kla Tencor Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kla Tencor Corp filed Critical Kla Tencor Corp
Publication of PT3411695T publication Critical patent/PT3411695T/pt

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2513—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object with several lines being projected in more than one direction, e.g. grids, patterns
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
    • G01B11/0608—Height gauges
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G01B11/25—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures by projecting a pattern, e.g. one or more lines, moiré fringes on the object
    • G01B11/2518—Projection by scanning of the object
    • G01B11/2522—Projection by scanning of the object the position of the object changing and being recorded
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/95—Investigating the presence of flaws or contamination characterised by the material or shape of the object to be examined
    • G01N21/956—Inspecting patterns on the surface of objects
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B30/00—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images
    • G02B30/50—Optical systems or apparatus for producing three-dimensional [3D] effects, e.g. stereoscopic images the image being built up from image elements distributed over a 3D volume, e.g. voxels
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/56—Measuring geometric parameters of semiconductor structures, e.g. profile, critical dimensions or trench depth
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/39—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers
    • G01N2021/395—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using tunable lasers using a topographic target

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Vision & Pattern Recognition (AREA)
  • Engineering & Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
PT168896397T 2016-02-01 2016-11-04 Método e sistema para medição topográfica tridimensional ótica PT3411695T (pt)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201662289889P 2016-02-01 2016-02-01

Publications (1)

Publication Number Publication Date
PT3411695T true PT3411695T (pt) 2022-03-03

Family

ID=59500792

Family Applications (1)

Application Number Title Priority Date Filing Date
PT168896397T PT3411695T (pt) 2016-02-01 2016-11-04 Método e sistema para medição topográfica tridimensional ótica

Country Status (12)

Country Link
US (2) US10634487B2 (pt)
EP (2) EP3411695B1 (pt)
JP (2) JP6846441B2 (pt)
KR (1) KR102668017B1 (pt)
CN (2) CN108603848B (pt)
ES (1) ES2908695T3 (pt)
MY (1) MY196634A (pt)
PH (1) PH12018501598A1 (pt)
PT (1) PT3411695T (pt)
SG (2) SG10201912769PA (pt)
TW (2) TWI723129B (pt)
WO (1) WO2017136011A2 (pt)

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KR102008890B1 (ko) * 2019-01-25 2019-08-08 단국대학교 산학협력단 3차원 프로파일 측정 방법
KR102260563B1 (ko) * 2019-07-02 2021-06-07 한국과학기술연구원 체커보드 패턴 기반 구조 조명 현미경 시스템
US10921721B1 (en) * 2019-09-13 2021-02-16 Applied Materials, Inc. Measurement system and grating pattern array
US11053540B1 (en) 2020-01-17 2021-07-06 Element Biosciences, Inc. High performance fluorescence imaging module for genomic testing assay
CN111721231B (zh) * 2020-06-03 2021-11-19 华东师范大学 一种基于光频梳的植物生态监测***

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Also Published As

Publication number Publication date
EP3411695B1 (en) 2022-01-26
TW201732263A (zh) 2017-09-16
TW202127008A (zh) 2021-07-16
EP3411695A2 (en) 2018-12-12
JP7166375B2 (ja) 2022-11-07
TWI723129B (zh) 2021-04-01
CN108603848A (zh) 2018-09-28
PH12018501598A1 (en) 2019-04-08
US11287248B2 (en) 2022-03-29
SG11201805467TA (en) 2018-08-30
US20180209784A1 (en) 2018-07-26
JP6846441B2 (ja) 2021-03-24
EP3998477A1 (en) 2022-05-18
US10634487B2 (en) 2020-04-28
JP2019503499A (ja) 2019-02-07
WO2017136011A3 (en) 2018-02-22
ES2908695T3 (es) 2022-05-03
US20200217651A1 (en) 2020-07-09
JP2021081446A (ja) 2021-05-27
MY196634A (en) 2023-04-25
KR102668017B1 (ko) 2024-05-21
KR20180101612A (ko) 2018-09-12
SG10201912769PA (en) 2020-02-27
WO2017136011A2 (en) 2017-08-10
TWI775331B (zh) 2022-08-21
CN113607088A (zh) 2021-11-05
EP3411695A4 (en) 2019-10-02
CN108603848B (zh) 2021-08-10

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