KR960019095U - Semiconductor Device Dry Etching Equipment - Google Patents

Semiconductor Device Dry Etching Equipment

Info

Publication number: KR960019095U
Authority: KR; South Korea
Prior art keywords: semiconductor device; dry etching; etching equipment; device dry; equipment
Prior art date: 1994-11-15

Application number

KR2019940030118U

Other languages

Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)

1994-11-15

Filing date

1994-11-15

Publication date

1996-06-19

1994-11-15 Application filed filed Critical

1994-11-15 Priority to KR2019940030118U priority Critical patent/KR960019095U/en

1996-06-19 Publication of KR960019095U publication Critical patent/KR960019095U/en

Links

KR2019940030118U 1994-11-15 1994-11-15 Semiconductor Device Dry Etching Equipment KR960019095U (en)

Priority Applications (1)

Application Number	Priority Date	Filing Date	Title
KR2019940030118U KR960019095U (en)	1994-11-15	1994-11-15	Semiconductor Device Dry Etching Equipment

Applications Claiming Priority (1)

Application Number	Priority Date	Filing Date	Title
KR2019940030118U KR960019095U (en)	1994-11-15	1994-11-15	Semiconductor Device Dry Etching Equipment

Publications (1)

Publication Number	Publication Date
KR960019095U true KR960019095U (en)	1996-06-19

Family

ID=60841005

Family Applications (1)

Application Number	Title	Priority Date	Filing Date
KR2019940030118U KR960019095U (en)	1994-11-15	1994-11-15	Semiconductor Device Dry Etching Equipment

Country Status (1)

Country	Link
KR (1)	KR960019095U (en)

1994
- 1994-11-15 KR KR2019940030118U patent/KR960019095U/en not_active Application Discontinuation

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Legal Events

Date	Code	Title
1994-11-15	A201	Request for examination
1998-02-20	E902	Notification of reason for refusal
1998-06-08	E601	Decision to refuse application