KR960019073U - 저압화학기상증착장치용 석영관의 이송장치 - Google Patents
저압화학기상증착장치용 석영관의 이송장치Info
- Publication number
- KR960019073U KR960019073U KR2019940029352U KR19940029352U KR960019073U KR 960019073 U KR960019073 U KR 960019073U KR 2019940029352 U KR2019940029352 U KR 2019940029352U KR 19940029352 U KR19940029352 U KR 19940029352U KR 960019073 U KR960019073 U KR 960019073U
- Authority
- KR
- South Korea
- Prior art keywords
- vapor deposition
- low pressure
- chemical vapor
- quartz tube
- pressure chemical
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
Landscapes
- Chemical & Material Sciences (AREA)
- General Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029352U KR0119748Y1 (ko) | 1994-11-05 | 1994-11-05 | 저압화학기상증착장치용 석영관의 이송장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940029352U KR0119748Y1 (ko) | 1994-11-05 | 1994-11-05 | 저압화학기상증착장치용 석영관의 이송장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR960019073U true KR960019073U (ko) | 1996-06-19 |
KR0119748Y1 KR0119748Y1 (ko) | 1998-08-17 |
Family
ID=19397492
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940029352U KR0119748Y1 (ko) | 1994-11-05 | 1994-11-05 | 저압화학기상증착장치용 석영관의 이송장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0119748Y1 (ko) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR101029026B1 (ko) * | 2009-10-20 | 2011-04-15 | 한국표준과학연구원 | 대전류 변성기 교정장치의 동부스바 이송장치 |
-
1994
- 1994-11-05 KR KR2019940029352U patent/KR0119748Y1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR0119748Y1 (ko) | 1998-08-17 |
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Legal Events
Date | Code | Title | Description |
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A201 | Request for examination | ||
E701 | Decision to grant or registration of patent right | ||
REGI | Registration of establishment | ||
FPAY | Annual fee payment |
Payment date: 20090223 Year of fee payment: 12 |
|
EXPY | Expiration of term |