KR960019073U - 저압화학기상증착장치용 석영관의 이송장치 - Google Patents

저압화학기상증착장치용 석영관의 이송장치

Info

Publication number
KR960019073U
KR960019073U KR2019940029352U KR19940029352U KR960019073U KR 960019073 U KR960019073 U KR 960019073U KR 2019940029352 U KR2019940029352 U KR 2019940029352U KR 19940029352 U KR19940029352 U KR 19940029352U KR 960019073 U KR960019073 U KR 960019073U
Authority
KR
South Korea
Prior art keywords
vapor deposition
low pressure
chemical vapor
quartz tube
pressure chemical
Prior art date
Application number
KR2019940029352U
Other languages
English (en)
Other versions
KR0119748Y1 (ko
Inventor
정경철
Original Assignee
엘지반도체주식회사
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 엘지반도체주식회사 filed Critical 엘지반도체주식회사
Priority to KR2019940029352U priority Critical patent/KR0119748Y1/ko
Publication of KR960019073U publication Critical patent/KR960019073U/ko
Application granted granted Critical
Publication of KR0119748Y1 publication Critical patent/KR0119748Y1/ko

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
    • C23C16/54—Apparatus specially adapted for continuous coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
KR2019940029352U 1994-11-05 1994-11-05 저압화학기상증착장치용 석영관의 이송장치 KR0119748Y1 (ko)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940029352U KR0119748Y1 (ko) 1994-11-05 1994-11-05 저압화학기상증착장치용 석영관의 이송장치

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940029352U KR0119748Y1 (ko) 1994-11-05 1994-11-05 저압화학기상증착장치용 석영관의 이송장치

Publications (2)

Publication Number Publication Date
KR960019073U true KR960019073U (ko) 1996-06-19
KR0119748Y1 KR0119748Y1 (ko) 1998-08-17

Family

ID=19397492

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940029352U KR0119748Y1 (ko) 1994-11-05 1994-11-05 저압화학기상증착장치용 석영관의 이송장치

Country Status (1)

Country Link
KR (1) KR0119748Y1 (ko)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR101029026B1 (ko) * 2009-10-20 2011-04-15 한국표준과학연구원 대전류 변성기 교정장치의 동부스바 이송장치

Also Published As

Publication number Publication date
KR0119748Y1 (ko) 1998-08-17

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