KR950704670A - 공초점광학장치 - Google Patents

공초점광학장치

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Publication number
KR950704670A
KR950704670A KR1019950701905A KR19950701905A KR950704670A KR 950704670 A KR950704670 A KR 950704670A KR 1019950701905 A KR1019950701905 A KR 1019950701905A KR 19950701905 A KR19950701905 A KR 19950701905A KR 950704670 A KR950704670 A KR 950704670A
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South Korea
Prior art keywords
light
array
lens
photodetector
pinhole
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KR1019950701905A
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English (en)
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히데유키 와카이
키요카주 미조구찌
토루 스즈끼
케이지 테라다
마사토 모리야
마나부 앤도
코지 시오
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가따다 데쯔야
가부시끼가이샤 고마쯔 세이사꾸쇼
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Publication of KR950704670A publication Critical patent/KR950704670A/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/32—Holograms used as optical elements

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Measurement Of Optical Distance (AREA)

Abstract

광원과, 상기 광원으로부터 발생한 광을 통과시켜 점광원광으로 하는 제1개구부와, 상기 제1개구부를 통과한 광을 피계측물체상에 집광하는 대물렌즈와, 상기 피계측물체상의 집광면에 공액인 면에 위치하는 제2개구부와, 상기 제2개구부를 통과한 광을 검출하는 광검출기를 가지는 공초점광학장치에 있어서, 상기 제1 및 제2개구부를 동일위치에 배치하여 동일개구부로 공용함과 함께 상기 광검출기의 검출면을 상기 공용되는 동일개구부와 거의 동일면상에 배설함에 의해 장치의 소형화를 꾀함과 함께 3차원형상계측을 고속으로 정도좋게 이룰 수 있으며, 또한 각 부의 위치맞춤을 용이하게 할 수 있게 한다.

Description

공초점광학장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명의 제1실시예를 나타내는 도면, 제2도는 본 발명을 원리적으로 나타내는 도면, 제3a도 내지 제3c도는 홀로그램의 노광태양등을 나타내는 도면, 제4도는 홀로그램, 렌즈어레이 및 광검출기어레이등의 부분의 구성을 나타내는 사시단면도, 제6a도 내지 제6j도는 광검출기어레이 및 핀홀어레이부분의 제조수순의 일예를 나타내는 공정도, 제11도는 본 발명의 제2실시예를 나타내는 도면, 제12도는 본 발명의 제3실시예를 나타내는 도면, 제13도는 본 발명의 제4실시예를 나타내는 도면.

Claims (10)

  1. 광원과, 상기 광원으로부터 발생한 광을 통과시켜 점광원광으로 하는 제1개구부와, 상기 제1개구부를 통과한 광을 피계측물체상에 집광하는 대물렌즈와, 상기 피계측물체상의 집광면에 공액인 면에 위치하는 제2개구부와, 상기 제2개구부를 통과한 광을 검출하는 광검출기를 가지는 공초점광학장치에 있어서, 상기 제1 및 제2개구부를 동일위치에 배치하여 동일개구부로 공용함과 함께 상기 광검출기의 검출면을 상기 공용되는 동일개구부와 거의 동일면상에 배설하도록 한 것을 특징으로 하는 공초점광학장치.
  2. 광원과, 상기 광원으로부터의 광을 입사하여 하프미러 및 회절격자의 작용을 이루는 광학소자와, 상기 광학소자에 밀착 또는 근접하여 배설되며, 광학소자로부터의 0차광을 집광하는 제1집광수단과, 상기 제1집광 수단에 의해 집광된 광을 통과시키는 핀홀과, 상기 핀홀을 통과한 광을 집광하여 피계측물체에 투광함과 함께 피계측물체에서 산란된 광을 상기 핀홀에 집광하는 제2집광수단을 구비함과 함께 상기 광학소자는 상기 핀홀 및 상기 제1집광수단을 통하여 재입사된 광의 1차회전광응 상기 제1집광수단에 입사하는 것이며, 또한 상기 제1집광수단에 의해 집광된 상기 1차회절광을 수광하는 광검출기를 구비하도록 한 공초점광학장치.
  3. 순차이동주사되는 평행슬리트광을 발생하는 평행슬리트광발생수단과, 광통과용의 개구가 복수개 2차원적으로 배치되며, 상기 평행광발생수단으로부터의 평행슬리트광을 입사하는 개구어레이와, 상기 개구어레이를 통과한 광이 입사되며 하프미러 및 회절소자의 작용을 이루는 광학소자와, 상기 광학소자에 근접하여 배설되며 광학소자로부터의 0차광을 집광하는 렌즈가 복수개 2차원적으로 배열된 렌즈어레이와, 상기 렌즈어레이의 각 렌즈에 의해 집광된 광을 통과시키는 핀홀이 복수개 2차원적으로 배열된 핀홀어레이와, 상기 각 핀홀을 통과한 광을 집광하여 피계측물체에 투광함과 함께, 피계측물체에서 산란된 광을 각 핀홀에 집광하는 집광수단을 구비함과 함께 상기 광학소자는 상기 각 핀홀 및 상기 렌즈어레이를 통하여 재입사된 광의 1차회절각을 상기 렌즈어레이에 입사하는 것이며, 또한 상기 렌즈어레이의 각 렌즈에 의해 집광된 상기 1차회절광을 수광하는 광검출기가 복수개 2차원배열된 광검출기어레이와, 상기 평행슬리트광발생두단, 개구어레이, 광학소자, 렌즈어레이, 핀홀어레이, 집광수단 및 검출어레이의 적어도 일부를 광축방향으로 이동시키는 이동제어수단과, 상기 평행슬리트광의 이동주사 및 상기 이동제어수단의 이동제어에 대응하는 상기 각 검출기의 출력에 근거하여 상기 피계측물체의 3차원거리계축을 행하는 3차원거리계측수단을 구비하도록 한 공초점광학장치.
  4. 제3항에 있어서, 상기 개구어레이, 광학소자, 렌즈어레이, 핀홀어레이 및 광검출기어레이는 적층구조로 되어 있는 것을 특징으로 하는 공초점광학장치.
  5. 제3항에 있어서, 상기 광검출기어에리의 각 광검출기는 매트릭스상으로 2차원 배치되며, 이들 검출기는 복수의 블록으로 구분됨과 함께 각 블록의 광검출기는 공통인 접속선으로 접속되어 각 블록마다 공통의 신호취출회로에 접속되어 있는 것을 특징으로 하는 공초점광학장치.
  6. 제3항에 있어서, 3차원거리계측수단은 상기 평행슬리트광의 이동주사에 따라서 각 블록단위로 광검출기의 검출심호의 독취를 순차적으로 실행하는 것을 특징으로 하는 공초점광학장치.
  7. 면광선을 발생하는 면광선발생수단과, 광통과용의 개구가 복수개 2차원적으로 배치되며, 상기 면광선발생수단으로부터의 면광선을 입사하는 개구어레이와, 상기 개구어레이를 통과한 광이 입사되며, 하프미러 및 회절소자의 작용을 이루는 광학소자와, 상기 광학소자에 근접하여 배설되며, 광학소자로부터의 0차광을 집광하는 렌즈가 복수개 2차원적으로 배열된 렌즈어레이와, 상기 렌즈어레이의 각 렌즈에 의해 집광된 광을 통과시키는 핀홀이 복수개 2차원배열된 핀홀어레이와, 상기 각 핀홀을 통과한 광을 집광하여 피계측물체에 투광함과 함께 피계측물체에서 산란된 광을 각핀홀에 집광하는 집광수단을 구비함과 함께 상기 광학소자는 상기 각 핀홀 및 상기 렌즈어레이를 통하여 재입사된 광의 1차원회절광을 상기 렌즈어레이에 입사하는 것이며, 또한 상기 렌즈어레이의 각 렌즈에 의해 집광된 상기 1차회절광을 수광하는 광검출기가 복수개 2차원배열된 광검출기어레이와, 상기 면광선발생수단, 개구어레이, 광학소자, 렌즈어레이, 핀홀어레이, 집광수단 및 광검출기어레이의 적어도 일부를 광축방향으로 이동시키는 이동제어수단과, 상기 이동제어수단의 이동제어에 대응하는 상기 각광검출기의 출력에 근거하여 상기 피계측물체의 3차원거리계측을 행하는 3차원거리계측수단을 구비하도록 한 공초점광학장치.
  8. 제 7항에 있어서, 상기 개구어레이, 광학소자, 렌즈어레이, 핀홀어레이 및 광검출기어레이는 적층구조를 갖고 있는 것을 특징으로 하는 공초점광학장치.
  9. 제 7항에 있어서, 상기 면광선수단은 복수의 발광소자가 매트릭스상으로 배열된 광원어레이인 것을 특징으로 하는 공초점광학장치.
  10. 광통과용의 개구가 복수개 2차원 배치된 개구어레이와, 하프미러 및 회절격자의 작용을 이루는 광학소자와, 상기 개구어레이의 각 개구를 통과한 광을 집광하는 렌즈가 복수개 2차원배열된 렌즈어레이와, 상기 각렌즈에 의해 집광된 광을 통과시키는 핀홀이 복수개 2차원배열된 핀홀어레이와, 상기 핀홀어레이의 각 핀홀에 재입사된 광의 상기 광학소자에서의 반사광의 상기 렌즈에 의한 집광광이 입사되는 광검출기가 복수개 2차원배열된 광검출기어레이를 가지며, 이들 개구어레이, 광학소자, 렌즈어레이, 핀홀어레이, 관검출기어레이의 적층 구조로 이루어진 광학장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019950701905A 1993-09-30 1994-09-30 공초점광학장치 KR950704670A (ko)

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JP24543893 1993-09-30
JP245438 1993-09-30
PCT/JP1994/001633 WO1995009346A1 (fr) 1993-09-30 1994-09-30 Appareil optique a foyer commun

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EP (1) EP0679864A4 (ko)
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