KR950028666U - Dry photoresist removal device for semiconductor device manufacturing - Google Patents
Dry photoresist removal device for semiconductor device manufacturingInfo
- Publication number
- KR950028666U KR950028666U KR2019940004854U KR19940004854U KR950028666U KR 950028666 U KR950028666 U KR 950028666U KR 2019940004854 U KR2019940004854 U KR 2019940004854U KR 19940004854 U KR19940004854 U KR 19940004854U KR 950028666 U KR950028666 U KR 950028666U
- Authority
- KR
- South Korea
- Prior art keywords
- photoresist removal
- semiconductor device
- dry photoresist
- removal device
- device manufacturing
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940004854U KR950028666U (en) | 1994-03-11 | 1994-03-11 | Dry photoresist removal device for semiconductor device manufacturing |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR2019940004854U KR950028666U (en) | 1994-03-11 | 1994-03-11 | Dry photoresist removal device for semiconductor device manufacturing |
Publications (1)
Publication Number | Publication Date |
---|---|
KR950028666U true KR950028666U (en) | 1995-10-20 |
Family
ID=60882991
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR2019940004854U KR950028666U (en) | 1994-03-11 | 1994-03-11 | Dry photoresist removal device for semiconductor device manufacturing |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR950028666U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100433032B1 (en) * | 2000-08-04 | 2004-05-24 | 주식회사 선익시스템 | Photo-resister ashing system |
-
1994
- 1994-03-11 KR KR2019940004854U patent/KR950028666U/en not_active Application Discontinuation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100433032B1 (en) * | 2000-08-04 | 2004-05-24 | 주식회사 선익시스템 | Photo-resister ashing system |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
WITN | Withdrawal due to no request for examination |