KR950028666U - Dry photoresist removal device for semiconductor device manufacturing - Google Patents

Dry photoresist removal device for semiconductor device manufacturing

Info

Publication number
KR950028666U
KR950028666U KR2019940004854U KR19940004854U KR950028666U KR 950028666 U KR950028666 U KR 950028666U KR 2019940004854 U KR2019940004854 U KR 2019940004854U KR 19940004854 U KR19940004854 U KR 19940004854U KR 950028666 U KR950028666 U KR 950028666U
Authority
KR
South Korea
Prior art keywords
photoresist removal
semiconductor device
dry photoresist
removal device
device manufacturing
Prior art date
Application number
KR2019940004854U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019940004854U priority Critical patent/KR950028666U/en
Publication of KR950028666U publication Critical patent/KR950028666U/en

Links

KR2019940004854U 1994-03-11 1994-03-11 Dry photoresist removal device for semiconductor device manufacturing KR950028666U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019940004854U KR950028666U (en) 1994-03-11 1994-03-11 Dry photoresist removal device for semiconductor device manufacturing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019940004854U KR950028666U (en) 1994-03-11 1994-03-11 Dry photoresist removal device for semiconductor device manufacturing

Publications (1)

Publication Number Publication Date
KR950028666U true KR950028666U (en) 1995-10-20

Family

ID=60882991

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019940004854U KR950028666U (en) 1994-03-11 1994-03-11 Dry photoresist removal device for semiconductor device manufacturing

Country Status (1)

Country Link
KR (1) KR950028666U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100433032B1 (en) * 2000-08-04 2004-05-24 주식회사 선익시스템 Photo-resister ashing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100433032B1 (en) * 2000-08-04 2004-05-24 주식회사 선익시스템 Photo-resister ashing system

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Legal Events

Date Code Title Description
WITN Withdrawal due to no request for examination