KR970064163U - Photoresist coating device for semiconductor manufacturing process - Google Patents

Photoresist coating device for semiconductor manufacturing process

Info

Publication number
KR970064163U
KR970064163U KR2019960012786U KR19960012786U KR970064163U KR 970064163 U KR970064163 U KR 970064163U KR 2019960012786 U KR2019960012786 U KR 2019960012786U KR 19960012786 U KR19960012786 U KR 19960012786U KR 970064163 U KR970064163 U KR 970064163U
Authority
KR
South Korea
Prior art keywords
manufacturing process
semiconductor manufacturing
coating device
photoresist coating
photoresist
Prior art date
Application number
KR2019960012786U
Other languages
Korean (ko)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to KR2019960012786U priority Critical patent/KR970064163U/en
Publication of KR970064163U publication Critical patent/KR970064163U/en

Links

KR2019960012786U 1996-05-21 1996-05-21 Photoresist coating device for semiconductor manufacturing process KR970064163U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
KR2019960012786U KR970064163U (en) 1996-05-21 1996-05-21 Photoresist coating device for semiconductor manufacturing process

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR2019960012786U KR970064163U (en) 1996-05-21 1996-05-21 Photoresist coating device for semiconductor manufacturing process

Publications (1)

Publication Number Publication Date
KR970064163U true KR970064163U (en) 1997-12-11

Family

ID=60930439

Family Applications (1)

Application Number Title Priority Date Filing Date
KR2019960012786U KR970064163U (en) 1996-05-21 1996-05-21 Photoresist coating device for semiconductor manufacturing process

Country Status (1)

Country Link
KR (1) KR970064163U (en)

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