KR900017265A - 정전 챠크의 전압인가 방법 및 그의 장치 - Google Patents

정전 챠크의 전압인가 방법 및 그의 장치 Download PDF

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KR900017265A
KR900017265A KR1019900005692A KR900005692A KR900017265A KR 900017265 A KR900017265 A KR 900017265A KR 1019900005692 A KR1019900005692 A KR 1019900005692A KR 900005692 A KR900005692 A KR 900005692A KR 900017265 A KR900017265 A KR 900017265A
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voltage
application
adsorption
predetermined
value
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KR1019900005692A
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KR930006102B1 (ko
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도시야 와다나베
데쯔오 키다바야시
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고가요시네
도또기끼 가부시끼 가이샤
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23Q—DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g. ARRANGEMENTS FOR COPYING OR CONTROLLING; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OF PARTICULAR DETAILS OR COMPONENTS; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOT DIRECTED TO A PARTICULAR RESULT
    • B23Q3/00—Devices holding, supporting, or positioning work or tools, of a kind normally removable from the machine
    • B23Q3/15—Devices for holding work using magnetic or electric force acting directly on the work
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N13/00—Clutches or holding devices using electrostatic attraction, e.g. using Johnson-Rahbek effect

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Jigs For Machine Tools (AREA)

Abstract

내용 없음.

Description

정전 챠크의 전압인가 방법 및 그의 장치
본 내용은 요부공개 건이므로 전문내용을 수록하지 않았음
제1도는 본 발명에 관한 정전 챠크의 전압인가 장치의 블록 구성도를 나타내며,
제2도는 및 제3도는 정전 챠크에 흡착된 피흡착제의 전류 흡착력의 측정결과를 나타내는 그래프이며,
제4도는 단극형의 정전 챠크의 구성도이다.

Claims (6)

  1. 정전 챠크의 전극에 흡착전압 VN을 인가하여 피흡착제를 흡착시키는 스텝과, 그후, 피흡착제를 탈리시키기 전에 소정치의 잔류 흡착력 소멸전압 VR을 소정시간 인가하는 스텝으로 되고, 이 잔류 흡착력 소멸전압 VR은 상기 흡착전압 VN과는 역극성에서 그의 상기소정치는 상기 흡착전압 VN의 전압치보다도 큰 정전 챠크의 전압 인가방법.
  2. 제1항에 있어서, 잔류 흡착력 소멸전압 VR의 소정 인가시간은 소멸전압의 인가전압에 역비례시켜 설정되는 전압 인가방법.
  3. 제2항에 있어서, 잔류 흡착력 소멸전압 VR의 전기 소정치는 흡착전압 VN의 소정치의 1.5~2배의 범위에서 설정되며, 소멸전압 VR의 소정 인가시간은 소멸전압 VR의 상기 설정 전압치에 응하여 10~5초의 범위에서 설정되는 전압인가방법.
  4. 제1항에 있어서, 잔류 흡착력 소멸전압 VR은 그의 인가시에 전기소정치에 다다를 때까지 서서히 승압하도록 하는 전압 인가방법.
  5. 정전 챠크(1)에 플러스와 마이너스 극성의 전압을 출력하는 1쌍의 출력 4 단자(7,8)와, 전압 공급원 수단(14)와, 이 전압 공급원 수단(14)와 상기 정전챠크(1)과의 사이에 개설되며, 정전 챠크으로 인가하는 전압의 극성을 입력된 전압 인가제어신호에 응하여 절환하는 스윗치 수단(15)과, 상기 전원 공급원 수단(14)에 대하여 소정 전압치를 지시함과 동시에 상기 스윗치수단(15)에 대하여 흡착전압의 상기 전압인가 제어신호 또는 잔류 흡착력 소멸전압의 상기 전압 인가제어신호를 선택적으로 출력하는 인가전압 제어수단(11)이며, 상기 잔류 흡착력 소멸전압의 전압인가 제어신호는 소정시간 출력되는 인가전압 제어수단(11)으로 되고, 상기 스윗치 수단(15)는 잔류 흡착력 소멸전압의 상기 전압 인가제어신호가 입력되면 흡착전압이 상기 전압인가 제어신호가 될 때와 역의 극성의 전압을 상기 1쌍의 출력단자(7,8)에 출력하도록 구성되어 있으며, 잔류 흡착력 소멸전압의 상기 소정 전압치는 흡착전압의 상기 소정 전압치보다 크게 설정되어 있는 정전 챠크의 전압인가 장치.
  6. 제5항에 있어서, 인가전압 제어수단(11)에는 흡착전압치 및 흡착전압 인가시간에 대하여 최적인 잔류 흡착력 소멸 전압치 및 이 소멸 전압 인가시간에 관한 데이터가 격납되어 있는 전압인가장치.
    ※ 참고사항 : 최초출원 내용에 의하여 공개하는 것임.
KR1019900005692A 1989-04-25 1990-04-23 정전 척의 전압인가 방법 및 그의 장치 KR930006102B1 (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP89-105679 1989-04-25
JP1105679A JP2779950B2 (ja) 1989-04-25 1989-04-25 静電チャックの電圧印加方法および電圧印加装置
JP1-105679 1989-04-25

Publications (2)

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KR900017265A true KR900017265A (ko) 1990-11-15
KR930006102B1 KR930006102B1 (ko) 1993-07-07

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Country Link
US (1) US5117121A (ko)
EP (1) EP0395340B1 (ko)
JP (1) JP2779950B2 (ko)
KR (1) KR930006102B1 (ko)
CA (1) CA2015383A1 (ko)
DE (1) DE69009849T2 (ko)
MY (1) MY105566A (ko)

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DE69009849T2 (de) 1994-09-22
CA2015383A1 (en) 1990-10-25
US5117121A (en) 1992-05-26
JP2779950B2 (ja) 1998-07-23
EP0395340A3 (en) 1991-09-11
KR930006102B1 (ko) 1993-07-07
DE69009849D1 (de) 1994-07-21

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