KR102401058B1 - 소자핸들러 - Google Patents

소자핸들러 Download PDF

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Publication number
KR102401058B1
KR102401058B1 KR1020150065769A KR20150065769A KR102401058B1 KR 102401058 B1 KR102401058 B1 KR 102401058B1 KR 1020150065769 A KR1020150065769 A KR 1020150065769A KR 20150065769 A KR20150065769 A KR 20150065769A KR 102401058 B1 KR102401058 B1 KR 102401058B1
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KR
South Korea
Prior art keywords
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Application number
KR1020150065769A
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English (en)
Korean (ko)
Other versions
KR20160133125A (ko
Inventor
유홍준
Original Assignee
(주)제이티
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by (주)제이티 filed Critical (주)제이티
Priority to KR1020150065769A priority Critical patent/KR102401058B1/ko
Priority to CN201680024865.9A priority patent/CN107533102B/zh
Priority to PCT/KR2016/004948 priority patent/WO2016182352A1/ko
Priority to SG11201708899UA priority patent/SG11201708899UA/en
Priority to TW105114786A priority patent/TWI601965B/zh
Publication of KR20160133125A publication Critical patent/KR20160133125A/ko
Application granted granted Critical
Publication of KR102401058B1 publication Critical patent/KR102401058B1/ko

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2601—Apparatus or methods therefor
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2607—Circuits therefor
    • G01R31/2608—Circuits therefor for testing bipolar transistors
    • G01R31/2619—Circuits therefor for testing bipolar transistors for measuring thermal properties thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/26—Testing of individual semiconductor devices
    • G01R31/2644—Adaptations of individual semiconductor devices to facilitate the testing thereof
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Computer Hardware Design (AREA)
KR1020150065769A 2015-05-12 2015-05-12 소자핸들러 KR102401058B1 (ko)

Priority Applications (5)

Application Number Priority Date Filing Date Title
KR1020150065769A KR102401058B1 (ko) 2015-05-12 2015-05-12 소자핸들러
CN201680024865.9A CN107533102B (zh) 2015-05-12 2016-05-11 元件处理器
PCT/KR2016/004948 WO2016182352A1 (ko) 2015-05-12 2016-05-11 소자핸들러
SG11201708899UA SG11201708899UA (en) 2015-05-12 2016-05-11 Device handler
TW105114786A TWI601965B (zh) 2015-05-12 2016-05-12 Component Processor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
KR1020150065769A KR102401058B1 (ko) 2015-05-12 2015-05-12 소자핸들러

Publications (2)

Publication Number Publication Date
KR20160133125A KR20160133125A (ko) 2016-11-22
KR102401058B1 true KR102401058B1 (ko) 2022-05-23

Family

ID=57249200

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020150065769A KR102401058B1 (ko) 2015-05-12 2015-05-12 소자핸들러

Country Status (5)

Country Link
KR (1) KR102401058B1 (zh)
CN (1) CN107533102B (zh)
SG (1) SG11201708899UA (zh)
TW (1) TWI601965B (zh)
WO (1) WO2016182352A1 (zh)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106206348B (zh) * 2015-05-27 2019-06-14 细美事有限公司 测试处理机
KR102319412B1 (ko) * 2017-03-23 2021-11-01 (주)테크윙 핸들러
JP2019045169A (ja) * 2017-08-30 2019-03-22 セイコーエプソン株式会社 電子部品搬送装置および電子部品検査装置
KR20190105893A (ko) * 2018-03-06 2019-09-18 (주)제이티 소자핸들러
WO2019177326A1 (ko) * 2018-03-11 2019-09-19 (주)제이티 소자검사장치
KR20190120678A (ko) * 2018-04-16 2019-10-24 (주)제이티 소자핸들러
JP7430154B2 (ja) * 2021-03-29 2024-02-09 Ｔｏｗａ株式会社 加工装置、及び加工品の製造方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100261957B1 (ko) 1996-11-18 2000-07-15 오우라 히로시 수평 반송 테스트 핸들러

Family Cites Families (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20010058702A (ko) * 1999-12-30 2001-07-06 서성원 프로브 장비의 프로브 카드 교환기 및 브리지의 일체형 모듈
JP4327335B2 (ja) * 2000-06-23 2009-09-09 株式会社アドバンテスト コンタクトアームおよびこれを用いた電子部品試験装置
DE10204963A1 (de) * 2002-02-06 2003-08-14 Isco Inc Fotometrische Sonde für Untersuchungen an Flüssigkeiten sowie Verfahren hierfür
KR100491304B1 (ko) * 2003-09-18 2005-05-24 미래산업 주식회사 번인 테스터용 소팅 핸들러
KR100560729B1 (ko) * 2005-03-22 2006-03-14 미래산업 주식회사 반도체 소자 테스트용 핸들러
EP1752778A3 (en) * 2005-08-09 2008-10-29 Mirae Corporation IC Sorter
TW200741219A (en) * 2006-04-25 2007-11-01 Chroma Ate Inc Rotary disk type testing and sorting device
KR101188841B1 (ko) * 2006-06-13 2012-10-08 미래산업 주식회사 번인 소터 및 이를 이용한 번인 소팅 방법
KR20080084216A (ko) * 2007-03-15 2008-09-19 한미반도체 주식회사 번인 테스트용 소팅 핸들러
KR100910727B1 (ko) * 2007-11-27 2009-08-05 미래산업 주식회사 반도체 소자 회전장치, 이를 포함하는 핸들러, 및 이를이용한 반도체 소자 제조방법
KR100928633B1 (ko) * 2007-11-27 2009-11-26 미래산업 주식회사 테스트트레이 이송장치, 이를 포함하는 핸들러, 이를이용한 반도체 소자 제조방법, 및 테스트트레이 이송방법
KR101133188B1 (ko) * 2009-03-27 2012-04-09 (주)제이티 소자소팅장치 및 그 방법
SG169317A1 (en) * 2009-09-03 2011-03-30 Jt Corp Sorting apparatus for semiconductor device
KR101169406B1 (ko) * 2010-04-12 2012-08-03 (주)제이티 반도체소자 검사장치 및 반도체소자 검사방법
KR101177321B1 (ko) * 2010-07-06 2012-09-03 (주)제이티 소자픽업모듈 및 그를 가지는 소자핸들러
KR101216359B1 (ko) * 2011-03-25 2012-12-28 (주)제이티 소자검사장치
KR101291583B1 (ko) * 2011-10-19 2013-08-07 (주)제이티 소자검사장치 및 그에 사용되는 소자가압장치
CN103293458B (zh) * 2012-02-29 2017-03-01 宰体有限公司 元件检测装置
KR101973687B1 (ko) * 2012-09-11 2019-04-29 (주)제이티 소자검사장치

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR100261957B1 (ko) 1996-11-18 2000-07-15 오우라 히로시 수평 반송 테스트 핸들러

Also Published As

Publication number Publication date
CN107533102A (zh) 2018-01-02
TW201702618A (zh) 2017-01-16
TWI601965B (zh) 2017-10-11
KR20160133125A (ko) 2016-11-22
WO2016182352A1 (ko) 2016-11-17
CN107533102B (zh) 2020-09-08
SG11201708899UA (en) 2017-11-29

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