KR101868566B1 - Solar cell - Google Patents
Solar cell Download PDFInfo
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- KR101868566B1 KR101868566B1 KR1020160146666A KR20160146666A KR101868566B1 KR 101868566 B1 KR101868566 B1 KR 101868566B1 KR 1020160146666 A KR1020160146666 A KR 1020160146666A KR 20160146666 A KR20160146666 A KR 20160146666A KR 101868566 B1 KR101868566 B1 KR 101868566B1
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- butting
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- 239000004065 semiconductor Substances 0.000 claims abstract description 108
- 239000012535 impurity Substances 0.000 claims abstract description 89
- 239000000758 substrate Substances 0.000 claims abstract description 54
- 230000004888 barrier function Effects 0.000 claims abstract description 40
- 238000000034 method Methods 0.000 claims description 24
- 239000000463 material Substances 0.000 claims description 8
- 239000012528 membrane Substances 0.000 claims description 2
- 238000002161 passivation Methods 0.000 description 25
- 230000001965 increasing effect Effects 0.000 description 6
- 238000005215 recombination Methods 0.000 description 6
- 230000006798 recombination Effects 0.000 description 6
- 239000000969 carrier Substances 0.000 description 5
- 230000005684 electric field Effects 0.000 description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 5
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 4
- 238000009792 diffusion process Methods 0.000 description 4
- 238000010248 power generation Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 229910052814 silicon oxide Inorganic materials 0.000 description 4
- 229910021417 amorphous silicon Inorganic materials 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 238000005468 ion implantation Methods 0.000 description 3
- 229910052581 Si3N4 Inorganic materials 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 2
- 238000000059 patterning Methods 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 2
- 230000003746 surface roughness Effects 0.000 description 2
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 description 1
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- WATWJIUSRGPENY-UHFFFAOYSA-N antimony atom Chemical compound [Sb] WATWJIUSRGPENY-UHFFFAOYSA-N 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 description 1
- 229910052797 bismuth Inorganic materials 0.000 description 1
- JCXGWMGPZLAOME-UHFFFAOYSA-N bismuth atom Chemical compound [Bi] JCXGWMGPZLAOME-UHFFFAOYSA-N 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003245 coal Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 230000002708 enhancing effect Effects 0.000 description 1
- 230000001747 exhibiting effect Effects 0.000 description 1
- 229910052733 gallium Inorganic materials 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 125000004435 hydrogen atom Chemical class [H]* 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- APFVFJFRJDLVQX-UHFFFAOYSA-N indium atom Chemical compound [In] APFVFJFRJDLVQX-UHFFFAOYSA-N 0.000 description 1
- 239000011810 insulating material Substances 0.000 description 1
- 229910021424 microcrystalline silicon Inorganic materials 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 150000004767 nitrides Chemical class 0.000 description 1
- 239000003921 oil Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 239000011574 phosphorus Substances 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000002310 reflectometry Methods 0.000 description 1
- 238000007650 screen-printing Methods 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
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Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
- H01L31/06—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier
- H01L31/072—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN heterojunction type
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0236—Special surface textures
- H01L31/02366—Special surface textures of the substrate or of a layer on the substrate, e.g. textured ITO/glass substrate or superstrate, textured polymer layer on glass substrate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/0256—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by the material
- H01L31/0264—Inorganic materials
- H01L31/032—Inorganic materials including, apart from doping materials or other impurities, only compounds not provided for in groups H01L31/0272 - H01L31/0312
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/0248—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies
- H01L31/036—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes
- H01L31/0368—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof characterised by their semiconductor bodies characterised by their crystalline structure or particular orientation of the crystalline planes including polycrystalline semiconductors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/546—Polycrystalline silicon PV cells
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Abstract
A solar cell according to an embodiment of the present invention includes a semiconductor substrate, a semiconductor layer formed on the semiconductor substrate opposite to a surface on which light is received, a semiconductor layer formed on the semiconductor layer and including n-type impurities and p- type region and a p-type region, an intrinsic barrier region located between the n-type region and the p-type region and dividing the n-type region and the p-type region, and an n-type impurity or a p- And a butting region connecting the n-type region and the p-type region, wherein the butting region is formed only in a part of the barrier region.
Description
The present invention relates to a solar cell with improved efficiency.
With the recent depletion of existing energy sources such as oil and coal, interest in alternative energy to replace them is increasing. Among them, solar cells are attracting attention as a next-generation battery that converts solar energy into electric energy.
In such solar cells, various layers and electrodes can be fabricated by design. The solar cell efficiency can be determined by the design of these various layers and electrodes. In order to commercialize solar cells, it is required to overcome low efficiency, and various layers and electrodes are required to be designed and manufactured so as to maximize the efficiency of the solar cell.
On the other hand, when reverse bias is applied in the rear contact type solar cell having both the emitter and the rear electric field portion on the rear surface, the emitter and the back electric field portion are not separated from each other in a part of the region of the solar cell, The hot spot problem occurs.
SUMMARY OF THE INVENTION The present invention has been made to overcome the above problems, and it is an object of the present invention to solve the hot spot problem in which a current is concentrated in one place by forming a shunt path that can bypass a current when a reverse bias is applied to the solar cell.
A solar cell according to an embodiment of the present invention includes a semiconductor substrate, a semiconductor layer formed on the semiconductor substrate opposite to a surface on which light is received, a semiconductor layer formed on the semiconductor layer and including n-type impurities and p- type region and a p-type region, an intrinsic barrier region located between the n-type region and the p-type region and dividing the n-type region and the p-type region, and an n-type impurity or a p- And a butting region connecting the n-type region and the p-type region, wherein the butting region is formed only in a part of the barrier region.
The butting region includes only an n-type impurity, and the impurity concentration of the butting region is substantially equal to the impurity concentration of the n-type region.
The butting region includes only a p-type impurity, and the impurity concentration of the butting region is substantially equal to the impurity concentration of the p-type region.
The butting region includes both an n-type impurity and a p-type impurity, and the impurity concentration of the butting region is higher than the impurity concentration of the n-type region and the impurity concentration of the p-type region.
The n-type impurity concentration of the butting region is higher than the concentration of the p-type impurity in the vicinity of the n-type region, and the concentration of the p-type impurity adjacent to the p- high.
The area of the butting region with respect to the area of the semiconductor substrate is 10% or less.
The butting region is uniformly distributed over the semiconductor substrate.
A solar cell according to another embodiment of the present invention includes a semiconductor substrate, a semiconductor layer formed on the semiconductor substrate opposite to a surface on which light is received, a semiconductor layer formed on the semiconductor layer and including n-type impurities and p- An n-type region and a p-type region, an intrinsic barrier region located between the n-type region and the p-type region and dividing the n-type region and the p-type region, An electrode and a p-type electrode, and a butting electrode connecting the n-type region and the p-type region.
The butting electrode is formed of the same material in the same layer as the n-type electrode and the p-type electrode.
A portion of the butting electrode contacts the n-type region and the other portion contacts the p-type region.
The n-type region, the barrier region, and the p-type region are alternately arranged along the first direction, and are formed to be long in the second direction intersecting the first direction.
The n-type electrode and the p-type electrode are divided in a region where the butting electrode is located.
The solar cell is formed over the semiconductor layer and includes a first contact hole exposing the n-type region and a p-type region, a second contact hole exposing a part of the n-type region, the barrier region, And a passivation film.
The area of the butting electrode is 10% or less of the area of the semiconductor substrate.
The butting electrode is uniformly distributed over the semiconductor substrate.
A solar cell according to this embodiment forms a shunt path to a pn junction, induces a current to flow through the shunt path when a reverse bias is applied to the solar cell, and when the reverse bias is applied, Reduce hot spot problems that are happening.
1 shows a rear view of a solar cell according to a first embodiment of the present invention.
FIG. 2 shows a cross-sectional view taken along the line AA 'in FIG.
FIG. 3 shows a rear view of a solar cell according to a second embodiment of the present invention.
4 shows a cross-sectional view taken along the line B-B 'in Fig.
5 to 8 are enlarged views of the portion "I" in Fig. 4, illustrating the distribution of impurities in the butting region.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. However, it is needless to say that the present invention is not limited to these embodiments and can be modified into various forms.
In the drawings, the same reference numerals are used for the same or similar parts throughout the specification. In the drawings, the thickness, the width, and the like are enlarged or reduced in order to make the description more clear, and the thickness, width, etc. of the present invention are not limited to those shown in the drawings.
Wherever certain parts of the specification are referred to as "comprising ", the description does not exclude other parts and may include other parts, unless specifically stated otherwise. Also, when a portion of a layer, film, region, plate, or the like is referred to as being "on" another portion, it also includes the case where another portion is located in the middle as well as the other portion. When a portion of a layer, film, region, plate, or the like is referred to as being "directly on" another portion, it means that no other portion is located in the middle.
Hereinafter, a solar cell according to an embodiment of the present invention will be described in detail with reference to the drawings.
FIG. 1 partially shows a rear view of a solar cell according to a first embodiment of the present invention, and FIG. 2 shows a sectional view taken along line A-A 'of FIG.
1 and 2, the
The photovoltaic cell of the first embodiment includes a
The
The
The
When the
An antireflection structure capable of minimizing reflection can be formed on the front surface of the
The rear surface of the
As a result, unevenness due to texturing is not formed on the rear surface of the
A first
This first
A
In this embodiment, the
Thus, the n-
This
The p-
The p-
In this embodiment, the p-
If the p-
At this time, as the impurity for forming the conductive type region, various materials capable of exhibiting n type or p type can be used. When the impurity is p-type, materials such as boron (B), aluminum (Al), gallium (Ga), and indium (In) are used. In the case of n-type, materials such as phosphorus (P), arsenic (As), bismuth (Bi) and antimony (Sb) are used.
A
Preferably, the
For example, after a semiconductor layer including a semiconductor material is formed, a p-
However, the present invention is not limited thereto. For example, the
A
This second
In addition, the second
On the other hand, the p-
At this time, the area of the p-
The p-
In one embodiment, the p-
On the other hand, the butting
The
Thus, when a reverse bias is applied to the solar cell, the reverse bias causes a current to flow into the shunt, whereby electrons are collected by the butting
If a reverse bias is applied in the conventional rear-contact solar cell having both the emitter and the rear electric field portion on the rear surface, the current should not flow because the solar cell is a diode. However, in some areas of the solar cell, The hot spot problem occurs because current and current flow to the backplane and backplane due to various factors (for example, technical problems and purpose of bypassing).
On the other hand, in this embodiment, since the shunt path is formed by the butting
The butting
In a preferred form, the size or shape of the butting
The area of the butting
In this embodiment, since the p-
The
The
The
The
Hereinafter, a second embodiment of the present invention will be described. In comparison with the first embodiment described above, the same reference numerals are used for the same components, and a detailed description thereof will be omitted. FIG. 3 shows a rear view of a solar cell according to a second embodiment of the present invention. FIG. 4 shows a sectional view taken along the line B-B 'in FIG. 1, In which the impurity distribution in the butting region is exemplified.
Comparing this second embodiment with the first embodiment, there is a difference only in the manner in which the p-
In this embodiment, the
However, the difference between the n-
In this embodiment, the
The n-
For example, if the n-
The burring
Thereby, the n-
When the
On the other hand, the impurity concentration included in the
FIG. 5 illustrates a case where a butting region is formed by doping a part of the
7 illustrates a case where a butting region is formed by doping an n-type impurity and a p-type impurity into a part of the barrier region, respectively.
The
Since the majority of the n-type impurity is adjacent to the n-
8 illustrates a case where the burring
8, the n-type impurity and the p-type impurity are doped twice by exposing the
In the above description, it is explained that the
Claims (18)
A semiconductor layer formed on a surface of the semiconductor substrate opposite to a surface on which light is received;
An n-type region and a p-type region which are formed in the semiconductor layer and each include an n-type impurity and a p-type impurity;
An intrinsic barrier region located between the n-type region and the p-type region and dividing the n-type region and the p-type region; And
A butting region formed in the barrier region and including at least one of the n-type impurity and the p-type impurity to connect the n-type region and the p-type region;
/ RTI >
Wherein the butting region is formed only in a part of the barrier region,
Wherein the butting region includes only an n-type impurity, only a p-type impurity, or both an n-type impurity and a p-type impurity.
Wherein the impurity concentration of the butting region is equal to the impurity concentration of the n-type region.
And the impurity concentration of the butting region is equal to the impurity concentration of the p-type region.
Wherein the impurity concentration of the butting region is higher than the impurity concentration of the n-type region and the impurity concentration of the p-type region.
The n-type impurity concentration of the butting region is higher than the concentration of the p-type impurity in the vicinity of the n-type region, and the concentration of the p-type impurity adjacent to the p- High solar cells.
Wherein an area of the butting region with respect to an area of the semiconductor substrate is 10% or less.
Wherein the butting region is uniformly distributed over the semiconductor substrate.
A semiconductor layer formed on a surface of the semiconductor substrate opposite to a surface on which light is received;
An n-type region and a p-type region which are formed in the semiconductor layer and each include an n-type impurity and a p-type impurity;
An intrinsic barrier region located between the n-type region and the p-type region and dividing the n-type region and the p-type region;
An n-type electrode and a p-type electrode connected to the n-type region and the p-type region, respectively; And
A butting electrode connecting the n-type region and the p-type region;
/ RTI >
And a second contact hole formed on the semiconductor layer, the second contact hole exposing a portion of the n-type region, a portion of the barrier region, and the p-type region simultaneously, the first contact hole exposing the n-type region and the p- A solar cell further comprising a membrane.
Wherein the butting electrode is formed of the same material as the n-type electrode and the p-type electrode.
Wherein a portion of the butting electrode is in contact with the n-type region and the other portion is in contact with the p-type region.
Wherein the n-type region, the barrier region, and the p-type region are alternately arranged along a first direction, and are arranged in parallel in a second direction intersecting the first direction.
Wherein the n-type electrode and the p-type electrode are divided in a region where the butting electrode is located, respectively.
Wherein an area of the butting electrode is 10% or less of an area of the semiconductor substrate.
Wherein the butting electrode is uniformly distributed over the semiconductor substrate.
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CN108987503A (en) * | 2018-07-11 | 2018-12-11 | 泰州隆基乐叶光伏科技有限公司 | A kind of finger-like intersection back contacts solar cell and preparation method thereof with area of isolation |
Citations (7)
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KR20050039273A (en) * | 2003-10-24 | 2005-04-29 | 준 신 이 | Module integrated solar cell and method for manufacturing the same |
JP2005322780A (en) | 2004-05-10 | 2005-11-17 | Toyota Motor Corp | Solar cell |
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