KR101771440B1 - Linear stage including a slider positioned a plurality of air orifice - Google Patents

Linear stage including a slider positioned a plurality of air orifice Download PDF

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Publication number
KR101771440B1
KR101771440B1 KR1020150140514A KR20150140514A KR101771440B1 KR 101771440 B1 KR101771440 B1 KR 101771440B1 KR 1020150140514 A KR1020150140514 A KR 1020150140514A KR 20150140514 A KR20150140514 A KR 20150140514A KR 101771440 B1 KR101771440 B1 KR 101771440B1
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KR
South Korea
Prior art keywords
air
slider
guide rails
base
right guide
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KR1020150140514A
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Korean (ko)
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KR20170041054A (en
Inventor
강순천
장진영
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주식회사 태경정반
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Priority to KR1020150140514A priority Critical patent/KR101771440B1/en
Publication of KR20170041054A publication Critical patent/KR20170041054A/en
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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
    • H02K41/02—Linear motors; Sectional motors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00—Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/10—Suppression of vibrations in rotating systems by making use of members moving with the system
    • F16F15/16—Suppression of vibrations in rotating systems by making use of members moving with the system using a fluid or pasty material
    • F16F15/161—Suppression of vibrations in rotating systems by making use of members moving with the system using a fluid or pasty material characterised by the fluid damping devices, e.g. passages, orifices

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Electromagnetism (AREA)
  • Power Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)

Abstract

A linear stay including an air orifice portion is disclosed. The disclosed linear stage includes a base made of a stone, left and right guide rails arranged in parallel to each other with an interval therebetween, and a bottom surface opposed to the upper surface of the base, and both side inclined surfaces are inclined surfaces of the left and right guide rails And a slider having a trapezoidal shape opposite to the slider.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention [0001] The present invention relates to a linear stage including a slider having a plurality of air orifices,

The present invention relates to a linear stage, and more particularly to a linear stage including a slider having a plurality of air orifices.

In general, the term "linear stage" refers to a conveying method by driving a linear motor. Recently, most of the products are supplied to the line in the semi-assembly line of an automobile factory, High-speed movement stop of loaded pallet, and other production line of various parts in the production factory of electronic OA related equipment. Particularly, since wafer cleanliness is high in a semiconductor manufacturing factory, it is frequently utilized.

Recently, it is mainly used in PDP and LCD assembly inspection equipment. Typical types are bearings, linear motors, linear encoders, and servo controllers. Bearing supporting these sliders is a linear unit Which plays an important role in the components of ultra-precision linear motion units.

Although ball or roller bearings are widely used as support bearings of the general linear motion system, there are limitations in achieving high-precision position accuracy due to the up-and-down shaking due to elastic deformation of balls and rollers and ball uniformity, Due to vibration and heat generated at the time of rapid transportation due to the frictional force due to the contact, the sharpening of the system is remarkably deteriorated.

In order to improve this, the development of a fluid bearing supporting the slider using lubrication fluid such as air has been proceeded so that the slider and the guide surface are in contact with each other in order to achieve high precision transfer of the object and high precision plane motion, The bearing has a problem in that it is easily broken by an external force because of its strong brittleness.

Korean Patent No. 10-0445848 (Notification Date: Feb. 23, 2005)

An object of the present invention is to prevent the air pressure of discharged air from concentrating on one side and improve the operation and precision of the linear stage.

In order to achieve the above object, a base made of stone; Left and right guide rails disposed parallel to each other at an interval above the base; And a trapezoidal slider whose bottom surface is opposed to the upper surface of the base and whose both side inclined surfaces are opposed to the inclined surfaces of the left and right guide rails; And a control unit.

The left and right guide rails and the slider may be made of a ceramic material.

Wherein the slider includes a pair of air supply pipes disposed at an interval inside the slider; And an air orifice portion communicating with the pair of air supply pipes and simultaneously injecting air toward an upper surface of the base and an inclined surface of the left and right guide rails, And a control unit.

The air orifice portion includes a plurality of first air orifices disposed at equal intervals on the inner side of the slider and facing the inclined surfaces of the left and right guide rails; And a plurality of second air orifices disposed at equal intervals on the inner side of the slider and facing the upper surface of the base; And a control unit.

Wherein each of the first and second air orifices includes: a body having at least one helical groove formed along an inner circumferential surface thereof; An air inlet communicating with the air supply pipe at one end of the body; And an air discharge hole disposed at the other end of the body for spraying air; And a control unit.

Wherein the first and second air orifices discharge air rotated by the helical grooves toward the left and right guide rails and the upper surface of the base through the air discharge holes and between the bottom surface of the slider and the upper surface of the base, And an air layer having a constant thickness is formed between the both side slopes of the slider and the left and right guide rails.

And the thickness of the air layer is 5 mu m.

The first and second air orifices discharge the air rotated by the helical groove through the air discharge holes at the same angle toward the left and right guide rails and the upper surface of the base, respectively.

The slider may be formed with a coupling pipe into which the air orifice portion communicating with the pair of air supply pipes and the pair of air supply pipes respectively can be inserted.

As described above, according to the present invention, it is possible to prevent the air pressure of the discharged air from concentrating on one side, and also to improve the operation and precision of the linear stage.

Further, the guide rail can be prevented from being deformed by the trapezoidal slider.

Also, due to the structural characteristics of the air orifice disposed inside the slider, the air can be discharged more quickly and uniformly by the rotating air current generated in the discharged air, and the exhaust air pressure rises and the rigidity of the linear stage can be maximized .

1 is a perspective view showing a linear stage according to an embodiment of the present invention.
2 is a plan view of the linear stage.
3 is a side view of the linear stage shown in FIG.
4 is a front view of a slider in which an air duck is disposed.
5A is a side cross-sectional view of the linear stage for explaining the arrangement of the air orifices.
5B is an enlarged view showing part D shown in FIG. 5A.
6A is an enlarged view showing part E shown in FIG. 5A.
FIG. 6B is a front view of the air orifice shown in FIG. 6A. FIG.
7 is a perspective view showing part F shown in FIG. 6A.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. It is to be understood that the embodiments described below are provided for illustrative purposes only, and that the present invention may be embodied with various modifications and alterations. In the following description, well-known functions or constructions are not described in detail to avoid obscuring the subject matter of the present invention. In addition, the attached drawings are not drawn to scale in order to facilitate understanding of the invention, but the dimensions of some of the components may be exaggerated.

According to various embodiments of the present invention, the linear stage is a linear stage in which a base made of stone and a slider opposed to the upper surface of the base are guided by guide rails arranged on the left and right sides. At this time, when the slider horizontally reciprocates along the upper surface of the base, a structural characteristic is required to improve the operation and precision of the linear stage. According to the embodiment of the present invention, the operation and accuracy of the linear stage can be improved by using the trapezoidal slider and the air orifice disposed inside the slider capable of constantly maintaining the air pressure of the air.

1 to 3, a linear stage 100 according to an embodiment of the present invention includes a base 200, a guide rail 300, and a slider 400. FIG. 1 is a perspective view of a linear stage according to an embodiment of the present invention, and FIG. 2 is a plan view of a linear stage. Fig. 3 is a side view of the linear stage viewed from the direction A in Fig. 1; Fig.

The base 200 is a portion made of stone. As in the present embodiment, and is formed in the form of a stone quartz. And a guide rail 300 and a slider 400 to be described later are disposed on the upper surface 210 thereof.

The guide rail 300 is made of a ceramic material. Specifically, since the guide rail 300 is made of a ceramic material, the guide rail 300 has a configuration in which the degree of change does not occur with a change in temperature. The guide rail 300 may be fixedly coupled to the upper surface 210 of the base 200 by a plurality of support pins. At this time, the guide rail 300 may have support pin holes 301a, 301b, 302a, and 302b through which a plurality of support pins can pass.

Specifically, the guide rail 300 is composed of a left guide rail 300a and a right guide rail 300b, and the cross section may be formed in an inverted trapezoidal shape. The bottom surfaces 415a and 415b of the slider 400 to be described later are opposed to the top surfaces 210a and 210b of the base 200 and the both surfaces 410a and 410b of the slider 400 are disposed on the left side The right side surface 310a of the rail 300a and the left side surface 310b of the right side guide rail 300b. Accordingly, the slider 400 can be guided by the guide rails 300 and horizontally reciprocated along the upper surface 210 of the base 200 (direction B or C).

The slider 400 may be formed of a ceramic material, a metal, or the like, but is not limited thereto. The slider 400 has a trapezoidal shape formed by downward inclination of both sides 410a and 410b and the left and right guide rails 300a and 300b have surfaces 310a and 310b facing the slider 400 The inclination corresponding to the both surfaces 410a and 410b of the slider 400 can be formed.

Specifically, the slider 400 includes an air supply pipe 430, an air orifice portion 440, and an air injection nozzle (not shown). The slider 400 may be formed with a through region 425 have. At this time, since the penetration area 425 through which the center part of the slider 400 is inserted is formed, the load of the slider 400 is reduced, and the accuracy of movement of the slider 400 can be increased. 4 is a front view of a slider in which an air orifice is disposed. Hereinafter, the configuration of the slider 400 will be described in detail.

The air supply pipe 430 is a passage through which air is supplied. In an embodiment of the present invention, a pair of air supply pipes 430 may be disposed inside the slider 400. [ Specifically, one air supply pipe 430 may be disposed inside the left side of the slider 400, and another air supply pipe 430 may be disposed inside the right side of the slider 400 symmetrical with the air supply pipe 430. In addition, the air supply pipe 430 may be connected to an air injection nozzle (not shown) to be described later, and a plurality of air orifice parts 440 may communicate with each other.

Referring to FIG. 4, the air orifice 440 according to an embodiment of the present invention includes first air orifices 440a and 440c and second air orifices 440b and 440d. The orifice part 440 is formed by a pair of the first air orifices 440a and 440c and the second air orifices 440b and 440d and is communicated with the pair of air supply pipes 430a and 430b by a predetermined distance. At this time, a pair of air supply pipes 430a and 430b and a plurality of orifices 440 communicating with the pair of air supply pipes 430a and 430b may be mounted on both sides of the slider 400, A tube can be created. In another embodiment, the slider 400, the air supply pipe 430, and the orifice portion 440 may be integrally formed. This can be variously modified by user setting.

Referring to FIGS. 5A, 5B, 6A, 6B, and 7, in one embodiment of the present invention, a plurality of first air orifices 440c are disposed inside the slider 400. FIG. The air discharge holes 448 of the first air orifices 440c are connected to the guide rails 300a and 300b through the guide rails 300. The first air orifices 440c are spaced apart from each other by a predetermined distance through the air supply pipe 430a, The inclined surfaces 310a and 310b of the first and second elastic members 310 and 320 are opposite to each other. The plurality of second air orifices 440d are disposed inside the slider 400 and can be spaced apart from each other at regular intervals through the air supply pipe 430a. At this time, the air discharge hole 448 of the second air orifice 440d may be formed to face the upper surface 210 of the base 200.

Specifically, the first air orifices 440a and 440c and the second air orifices 440b and 440d include bodies 441a and 441b, air inlets 447a and 447b, and air outlet holes 448, And the second air orifices 440a, 440b, 440c, and 440d may be inserted into the holes formed in the slider 400 through the air supply pipe 430a. 5A is a side sectional view of the linear stage for explaining the arrangement of the air orifices, and FIG. 5B is an enlarged view showing the D portion shown in FIG. 5A. 6A is an enlarged view showing part E shown in FIG. 5A, FIG. 6B is a front view of the air orifice shown in FIG. 6A, and FIG. 7 is a perspective view showing part F shown in FIG. 6A.

At least one helical groove 442a, 443a, 444a, 445a, 442b, 443b, 444b, 445b may be formed in the bodies 441a, 441b along the inner circumferential surface in a cylindrical structure.

The air inlets 447a and 447b are formed at one end of the cylindrical bodies 441a and 441b. At this time, the air inlets 447a and 447b communicate with the air supply pipe 430a to receive air.

6A, the ends of the inner circumferential surfaces of the bodies 441a and 441b form a substantially triangular shape 446, and air discharge holes 448c and 448d may be formed at the end of the triangular shape 446. [ Other air discharge holes 448c and 448d may be formed at the positions of the outer circumferential surfaces of the bodies 441a and 441b corresponding to the air discharge holes 448c and 448d formed at the end of the triangular shape 446 on the inner peripheral surface.

The air supply nozzle (not shown) may be connected to one end of the air supply pipe 430 to supply air to the air supply pipe 430. At this time, the shape and material of the air supply nozzle (not shown) may be variously modified by the user.

When air is supplied to the air supply pipe 430 using the air injection nozzle (not shown) of the present invention assembled as described above, an air orifice (not shown) communicated with a pair of air supply pipes 430 formed inside the slider 400 The portion 440 is supplied with air. Thereafter, the first air orifices 440a and 440c are rotated in a helical groove direction formed on the inner circumferential surface of the body and are sprayed toward the left and right guide rails 300 through the air discharge holes 448. [ At this time, an air layer is formed between the one side inclined surfaces 410a and 410b of the slider 400 and the inclined surfaces 310a and 310b of the left and right guide rails 300 by the air injected to the first orifices 440a and 440c . Specifically, the spacing of the formed air layer may be about 5 탆. The second air orifices 440b and 440d rotate in the direction of the spiral groove formed on the inner circumferential surface of the body so that the upper surfaces 210a and 210b of the base 200 are connected to the second air orifices 440b and 440d through the air discharge holes 448, . At this time, the air discharged through the air discharge hole 448 may be discharged at the same angle toward the left and right guide rails 300 and the base 200. An air layer of about 5 mu m is formed between the bottom surfaces 415a and 415b of the slider 400 and the top surfaces 210a and 210b of the base 200 by the air blown to the second orifice 440b.

Accordingly, the slider 400 is formed with an air gap of a predetermined distance between the base 200 and the left and right guide rails 300, so that the rigidity of the slider due to the physical impact energy dispersion effect of the slider can be improved. The operation and precision of the stage can be improved.

While the present invention has been particularly shown and described with reference to exemplary embodiments thereof, it is to be understood that the invention is not limited to the disclosed exemplary embodiments. It will be understood by those skilled in the art that various changes in form and details may be made therein without departing from the spirit and scope of the invention.

100: Linear stage 200: Base
210: upper surface of the base 300a, 300b: guide rail
301a, 301b, 302a, 302b: Support pin hole 400: Slider
410: one side of the slider 420: side of the slider
425: space portion between the slider and the base 430: air supply pipe

Claims (9)

A base made of stone;
Left and right guide rails arranged parallel to each other with an interval therebetween and having inclined surfaces facing each other; And
A slider having a trapezoidal shape in which a bottom surface is opposed to an upper surface of the base, and both side surfaces are opposed to sloped surfaces of the left and right guide rails; Lt; / RTI >
Wherein the slider includes a pair of air supply pipes disposed at an interval inside the slider; And an air orifice portion communicating with the pair of air supply pipes respectively and having a cylindrical structure with at least one helical groove formed along an inner circumferential surface thereof,
Wherein the air orifice part simultaneously blows air rotated by the spiral groove toward an upper surface of the base and an inclined surface of the left and right guide rails. The method according to claim 1,
Wherein the left and right guide rails and the slider are made of a ceramic material. delete The method according to claim 1,
The air-
A plurality of first air orifices disposed at equal intervals on the inner side of the slider and facing the inclined surfaces of the left and right guide rails; And
A plurality of second air orifices disposed at equal intervals inside the slider and facing the upper surface of the base; And a linear stage. A base made of stone;
Left and right guide rails arranged parallel to each other with an interval therebetween and having inclined surfaces facing each other; And
A slider having a trapezoidal shape in which the bottom surface is opposed to the upper surface of the base and the both side inclined surfaces are opposed to the inclined surfaces of the left and right guide rails; Lt; / RTI >
Wherein the slider includes a pair of air supply pipes disposed at an interval inside the slider; And an air orifice portion communicating with the pair of air supply pipes and simultaneously injecting air toward an upper surface of the base and an inclined surface of the left and right guide rails, Lt; / RTI >
The air-
A plurality of first air orifices disposed at equal intervals on the inner side of the slider and facing the inclined surfaces of the left and right guide rails; And
A plurality of second air orifices disposed at equal intervals on the inner side of the slider and facing the upper surface of the base; Lt; / RTI >
Wherein the first and second air orifices each comprise:
A body having at least one helical groove formed along an inner peripheral surface thereof; An air inlet communicating with the air supply pipe at one end of the body; And an air discharge hole disposed at the other end of the body for spraying air; And a linear stage. 6. The method of claim 5,
Wherein the first and second air orifices discharge air rotated by the helical grooves toward the upper surfaces of the left and right guide rails and the base through the air discharge holes,
Wherein an air layer having a constant thickness is formed between the bottom surface of the slider and the upper surface of the base, and between the both side slopes of the slider and the left and right guide rails. The method according to claim 6,
Wherein the thickness of the air layer is 5 占 퐉. 6. The method of claim 5,
Wherein the first and second air orifices each comprise:
And the air discharged by the spiral groove is discharged through the air discharge hole toward the upper surfaces of the left and right guide rails and the base at the same angle. The method according to claim 1,
Wherein the slider has a coupling pipe into which the air orifice portion communicating with the pair of air supply pipes and the pair of air supply pipes respectively can be inserted.
KR1020150140514A 2015-10-06 2015-10-06 Linear stage including a slider positioned a plurality of air orifice KR101771440B1 (en)

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KR101771440B1 true KR101771440B1 (en) 2017-08-28

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102144686B1 (en) 2020-03-09 2020-08-14 주식회사 태경정반 Manufacturing method of ceramic slider applied to air floating ceramic linear stage

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102651501B1 (en) * 2021-10-18 2024-03-27 여지원 drying apparatus for a bench

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102144686B1 (en) 2020-03-09 2020-08-14 주식회사 태경정반 Manufacturing method of ceramic slider applied to air floating ceramic linear stage

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