KR101666162B1 - Auto probe inspection apparatus and inspection method of panel using the same - Google Patents

Auto probe inspection apparatus and inspection method of panel using the same Download PDF

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Publication number
KR101666162B1
KR101666162B1 KR1020150179446A KR20150179446A KR101666162B1 KR 101666162 B1 KR101666162 B1 KR 101666162B1 KR 1020150179446 A KR1020150179446 A KR 1020150179446A KR 20150179446 A KR20150179446 A KR 20150179446A KR 101666162 B1 KR101666162 B1 KR 101666162B1
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KR
South Korea
Prior art keywords
panel
work table
unit
probe
housing
Prior art date
Application number
KR1020150179446A
Other languages
Korean (ko)
Inventor
안윤태
윤희동
Original Assignee
(주) 루켄테크놀러지스
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Priority to KR1020150179446A priority Critical patent/KR101666162B1/en
Application granted granted Critical
Publication of KR101666162B1 publication Critical patent/KR101666162B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Tests Of Electronic Circuits (AREA)

Abstract

The present invention proposes an auto-probe inspection apparatus. A probe inspection apparatus according to an embodiment of the present invention includes a plurality of probe units which are in contact with a pad portion of a panel and perform inspection for the panel, a first work table on which the panel is seated on an upper surface, And a second work table located at a predetermined distance apart in the upper direction of the first work table, wherein the plurality of probe units are housed in the housing or the first work table, 2 is detachably fixed to the work table.

Description

TECHNICAL FIELD [0001] The present invention relates to an auto-probe inspection apparatus and a panel inspection method using the same.

The present invention relates to an automatic probe inspection apparatus and a panel inspection method using the same.

2. Description of the Related Art In general, an organic light emitting panel is a display device using organic light emitting diodes (OLED), in which RGB pixels of an organic electroluminescent device are arranged in a matrix form, Output.

For inspection of such an organic electroluminescent display type panel, Korean Patent Laid-Open Publication No. 2013-0020475 discloses a method of inspecting a panel in which a probe block located on the lower side of a panel accommodated in a first work table is driven upward, A probe inspection apparatus is disclosed.

However, when performing the panel inspection using the disclosed auto-probe inspection apparatus, there is a problem in that different auto-probe inspection apparatuses must be used depending on the positions of the pad portions of the panel.

It is an object of the present invention to provide an automatic probe inspection apparatus that can be used regardless of the position of a pad portion of a panel.

According to a first aspect of the present invention, there is provided an apparatus for inspecting an auto-probe, comprising: a plurality of probe units which are in contact with a pad portion of a panel and perform inspection of the panel; A first drive unit for moving the first work table in the up and down direction, a housing in which the first drive unit is located, and a second workpiece table positioned at a predetermined distance in the upward direction of the first work table, And a plurality of probe units are detachably fixed to the housing or the second work table.

The auto-probe inspection method according to the second aspect of the present application is characterized by the steps of loading the panel into the first work table, moving the first work table in the upward direction, fixing the panel to the second work table, Is moved to the upper part and is contacted with the pad part of the panel to perform inspection.

The auto-probe inspection method according to the third aspect of the present application is characterized in that the step of loading the panel onto the first work table, the step of adsorbing the panel on the first work table, the position being adjusted so that the panel corresponds to the position of the probe unit, And the first work table is moved in the upward direction so that the probe unit is brought into contact with the pad portion of the panel to perform the inspection.

According to the above-mentioned problem solving means of the present invention, the probe unit which is in contact with the pad portion of the panel can be selectively installed on the upper portion or the lower portion, so that the probe unit can be used irrespective of the position of the pad portion of the panel.

1 is a schematic view of an automatic probe inspection apparatus according to an embodiment of the present invention.
2 is a schematic view of an automatic probe inspection apparatus according to another embodiment of the present invention.
Figure 3 is an enlarged view of Figure 1 of the present invention.
4 to 8 are views for explaining a method of operating the auto-probe inspection apparatus according to an embodiment of the present invention.
9 is a view for explaining a method for applying an auto-probe inspection apparatus according to an embodiment of the present invention to panels of various sizes.
10 is a view for explaining a method of operating an auto-probe inspection apparatus according to another embodiment of the present invention.
11 is a view for explaining a method for applying an auto-probe inspection apparatus according to another embodiment of the present invention to panels of various sizes.
12 is a flowchart of a panel inspection method according to an embodiment of the present invention.
13 is a flowchart of a panel inspection method according to another embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. It should be understood, however, that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In the drawings, the same reference numbers are used throughout the specification to refer to the same or like parts.

Throughout this specification, when a part is referred to as being "connected" to another part, it is not limited to a case where it is "directly connected" but also includes the case where it is "electrically connected" do.

Throughout this specification, when a member is " on " another member, it includes not only when the member is in contact with the other member, but also when there is another member between the two members.

Throughout this specification, when an element is referred to as "including " an element, it is understood that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise. The terms "about "," substantially ", etc. used to the extent that they are used throughout the specification are intended to be taken to mean the approximation of the manufacturing and material tolerances inherent in the stated sense, Accurate or absolute numbers are used to help prevent unauthorized exploitation by unauthorized intruders of the referenced disclosure. The word " step (or step) "or" step "used to the extent that it is used throughout the specification does not mean" step for.

The present invention relates to an auto-probe inspection apparatus (10) and a panel inspection method using the same.

The probe unit 320 contacts the pad portion 22 of the panel 20 before the panel 20 is mounted on the product and the probe unit 320 contacts the pad portion 22 of the panel 20 It may be a device for checking whether there is a defect. The panel 20 may be a display panel such as a plasma display panel (PDP), a liquid crystal display (LCD), a light emitting diode (LED), an organic light emitting diode (OLED), an active matrix organic light emitting diode (AMOLED) .

FIG. 1 is a schematic view of an automatic probe inspection apparatus 10 according to an embodiment of the present invention, FIG. 2 is a schematic view of an automatic probe inspection apparatus according to another embodiment of the present invention, FIG. 3 is a cross- FIG. 9 is an exploded perspective view of an automatic probe inspection apparatus according to an embodiment of the present invention. FIG. 9 is a cross-sectional view of an automatic probe inspection apparatus according to an embodiment of the present invention. FIG. 10 is a view for explaining a method of operating the auto-probe inspection apparatus according to another embodiment of the present invention, and FIG. 11 is a view for explaining a method for applying the same to another embodiment of the present invention FIG. 12 is a flowchart of a panel inspection method according to an embodiment of the present invention, FIG. 13 is a view for explaining a method for applying an auto- Of a flow chart of a panel inspection method according to another embodiment.

1 to 3, the automatic probe inspection apparatus 10 includes a plurality of probe units 320, a first work table 100, a second work table 200, a first drive unit 120, (300), and a second driver (400).

In addition, the present auto-probe inspection apparatus 10 may be configured such that a plurality of probe units 320 are detachably attached to the housing 300 or the second work table 200.

In other words, the plurality of probe units 320 are fixed to the housing 300 when the pad portion 22 of the panel 20 is positioned at the bottom, and the pad portion 22 of the panel 20 is fixed to the upper portion It can be fixed to the second work table 200. Accordingly, the present auto-probe inspection apparatus 10 can selectively install the plurality of probe units 320 on the upper portion or the lower portion thereof, so that the effect that the probe unit 320 can be used irrespective of the position of the pad portion 22 of the panel 20 have.

Hereinafter, an auto-probe inspection apparatus 10 according to an embodiment of the present invention will be described with reference to FIGS. 1 and 3. FIG.

An automatic probe inspection apparatus 10 according to an embodiment of the present invention includes a plurality of probe units 320, a first work table 100, a first drive unit 120, a housing 300, 200).

The plurality of probe units 320 contact the pad portion 22 of the panel 20 to perform inspection for the panel 20. [ In addition, the plurality of probe units 320 may be detachably fixed to the housing 300.

The first work table 100 is capable of transferring the panel 20 to the second work table 200 with the panel 20 mounted thereon and located under the second work table 200.

In other words, the first work table 100 moves the panel 20 in the upward direction to be fixed to the second work table 200, but moves the panel 20 inspected to be detached from the second work table 200 It can be moved in the downward direction.

The first driving part 120 moves the first work table 100 in the vertical direction.

In other words, the first work table 100 can be moved upward by the first driving unit 120 to bring the upper surface of the panel 20 into close contact with the lower surface of the second work table 200.

The first work table 100 is provided on the second work table 200 so that the probe unit 320 does not interfere with the panel 20 when the probe unit 320 contacts the pad portion 22 of the panel 20. [ And then moved into the interior of the housing 300.

The second work table 200 can fix the panel 20 to the lower surface.

Specifically, the second work table 200 is configured such that when the upper edge of the panel 20 and the lower portion of the second work table 200 are in contact with each other, the upper edge of the panel 20 and the second work table 200, So that the panel 20 can be fixed to the lower surface of the second work table 200. A detailed description thereof will be given later.

The above-mentioned upper surface is a surface located at 12 o'clock direction in Fig. 1, and the lower side can be 6 o'clock direction in Fig.

In addition, the second work table 200 can fix the panel 20 which is in close contact with the lower surface of the second work table 200. At this time, the panel 20 can be fixed to the second work table 200 with the pad portion 22 facing downward.

The second work table 200 serves not only to fix the panel 20 but also to support the pad unit 22 when the probe unit 320 contacts the pad unit 22 of the panel 20 .

4, a plurality of probe units 320 are arranged at positions corresponding to the pad portions 22 along the upper circumferential surface of the housing 300 so as to be in contact with the pad portions 22 of the panel 20, Can be located with a gap.

The probe unit 320 may be moved upward by the second driving unit 400 to contact the pad unit 22 of the panel 20. However, the present invention is not limited to this, and the second work table 200 may be moved downward so that the pad portion 22 of the panel 20 may contact the plurality of probe units 320.

In the housing 300, a plurality of probe units 320 are mounted, and the first driving unit 120 is located inside.

The second driving unit 400 moves the housing 300 in the vertical direction so that the plurality of probe units 320 are brought into contact with or released from the pad unit 22 of the panel 20. 1, the second driving unit 400 may be disposed on a side surface of the housing 300 to move the housing 300 in the vertical direction, but the present invention is not limited thereto. For example, the housing 300 As shown in Fig.

The auto-probe inspection apparatus 10 photographs the position of the probe unit 320 before the plurality of probe units 320 contact the pad portion 22 of the panel 20, The probe unit 320 is automatically adjusted in the X, Y, and theta directions so that the positions of the unit 320 and the pad unit 22 correspond to each other, (22).

For this purpose, the present autoprobe inspection apparatus 10 is provided with a plurality of photographing units 340 for photographing the pad unit 22 and a plurality of photographing units 340 for photographing the pad unit 22 And a position adjusting unit 500 for adjusting the position of the housing 300 so that the position of the probe unit 320 and the position of the probe unit 320 correspond to each other.

As shown in Fig. 3, the photographing unit 340 is located at the lower portion of the probe unit 320 and can photograph the pad unit 22.

The position adjustment unit 500 can move the housing 300 on a plane parallel to the panel 20. [ Illustratively, the position adjustment unit 500 includes a first position shifting portion for moving the housing 300 in the X-axis direction located on a plane parallel to the panel 20, a second positioning portion for positioning the housing 300 in a plane parallel to the panel 20 A second position shifting unit for shifting the housing 300 in the Y-axis direction perpendicular to the X-axis direction, and a third position shifting unit for rotating the housing 300 about the Z-axis orthogonal to the X-axis and the Y-axis can do.

In other words, as the position of the housing 300 is adjusted by the position adjusting unit 500, the probe unit 320 can be moved to a position corresponding to the pad portion 22 of the panel 20. [

5 to 8, an operation method of the probe inspection apparatus 10 according to an embodiment of the present invention will be described.

5, the probe inspection apparatus 10 moves the first work table 100 in the upward direction after the panel 20 is seated on the first work table 100, Can be brought into close contact with the lower surface of the second work table 200.

The second work table 200 is configured so that the upper edge portion of the panel 20 and the lower portion of the second work table 200 are in contact with the upper edge portion of the panel 20 and the upper edge portion of the second work table 200 The panel 20 can be fixed to the second work table 200 by providing an attraction force between the lower portions.

Referring to FIG. 6, the second work table 200 includes a plurality of low pressure forming portions 220 having a lower surface recessed upward and a gas suction portion (not shown) for lowering the inside of the low pressure forming portion 220, Time).

For example, the gas suction unit may suck gas inside the low-pressure forming unit 220, thereby making the inside of the low-pressure forming unit 220 low-pressure. Accordingly, an attraction force can be formed between the lower surface of the second work table 200 and the upper surface of the panel 20.

Referring to FIG. 7, after the panel 20 is fixed to the second work table 200, the first work table 100 is moved downward and returned to the inside of the housing 300. Thereafter, the pad unit 22 of the panel 20 is photographed by the plurality of photographing units 340, and based on the image of the pad unit 22 photographed by the photographing unit 340, the pad unit 22 The position of the housing 300 can be adjusted so that the positions of the probe units 320 correspond to each other.

8, the probe unit 320 adjusts the position of the housing 300 so that the positions of the probe unit 320 and the pad unit 22 correspond to each other, So that it can contact the pad portion 22 to perform the panel inspection.

Referring to FIG. 9, the present auto-probe inspection apparatus 10 is applicable to panels 20 of various sizes.

In other words, the present auto-probe inspection apparatus 10 is configured such that the probe unit 320 contacting the pad portion 22 of the panel 20 and the low pressure forming portion 220 for adsorbing the panel 20 are mounted on the panel 20 The position can be adjusted to correspond to the size.

Specifically, the autoclave inspection apparatus 10 includes a unit driving unit (not shown) for moving the probe unit 320 in an outward or inward direction, and an adsorption unit driving unit (Not shown).

7, the autoclave inspection apparatus 10 is configured such that when the panel 20 having a small size is inspected, the probe unit 320 and the low-pressure forming unit 220 are moved in the inward direction .

At this time, the first work table 100 can be replaced with the first work table 100 corresponding to the size of the panel 20, so that the first work table 100 can be replaced with the first drive part 120. However, the present invention is not limited to this, but the first work table 100 may be an extension table having a separate extension driver and capable of enlarging or reducing the area of the upper surface by the extension driver.

The automatic probe inspection apparatus 10 further includes a unit interval adjusting unit (not shown) for adjusting the interval between the probe units 320 and a suction unit interval adjusting unit (not shown) for adjusting the interval between the low pressure forming units 220, As shown in FIG.

That is, the present autoprobe inspection apparatus 10 can adjust the interval between the probe units 320 for use in the panel 20 having a different interval between the pad units 22 according to the size, And the gap between the low-pressure forming portions 220 may be adjusted.

Hereinafter, a probe inspection apparatus 10 according to another embodiment of the present invention will be described with reference to FIG.

The probe inspection apparatus 10 according to another embodiment of the present invention is different from the probe inspection apparatus 10 according to an embodiment of the present invention in that a plurality of probe units 320 are detachably attachable to the second work table 200 .

The first work table 100 provides an attraction force between the lower edge of the panel 20 and the upper portion of the first work table 100 to fix the panel 20 to the upper surface of the first work table 100 .

In addition, the first work table 100 may include a plurality of low pressure forming portions 140 whose upper surface is depressed downward and a gas suction portion which lowers the inside of the low pressure forming portion 140.

The panel 20 is attracted to the upper surface of the first work table 100 and thereafter the first work table 100 is moved upward by the first driving part 120 so that the pad 20 of the panel 20 22 can be brought into contact with the probe unit 320 located in the second work table 200. The first work table 100 is moved upward by the second driving unit 400 so that the pad unit 22 of the panel 20 can be brought into contact with the probe unit 320. [

The automatic probe inspection apparatus 10 according to another embodiment of the present invention may be configured such that the plurality of probe units 320 are connected to the pad portions 22 of the panel 20 before the probe units 320 contact the pad portions 22 of the panel 20. [ And automatically positions the panel 20 in the X, Y, and theta directions so that the positions of the probe unit 320 and the pad unit 22 correspond to each other based on the photographed image, The probe unit 320 can be brought into contact with the pad portion 22 of the panel 20.

The autoprobe inspection apparatus 10 according to another embodiment of the present invention includes a plurality of photographing units 340 for photographing the pad unit 22 and an image of the pad unit 22 photographed by the photographing unit 340 The position adjustment unit 500 may adjust the position of the panel 20 such that the positions of the pad unit 22 and the probe unit 320 correspond to each other.

As shown in Fig. 2, the photographing unit 340 is located above the probe unit 320, and can take a picture of the pad unit 22.

The position adjusting unit 500 includes a first position shifting portion for moving the panel 20 in the X-axis direction located on a plane parallel to the panel 20, a second positioning portion for positioning the panel 20 in the X- And a third position shifting unit for rotating the panel 20 about a Z axis orthogonal to the X axis and the Y axis.

2 and 9, a method of operating the probe inspection apparatus 10 according to another embodiment of the present invention will be described.

Referring to FIG. 2, a probe inspection apparatus 10 according to another embodiment of the present invention includes a panel 20 mounted on an upper portion of a first work table 100, 1, the panel 20 can be fixed to the second work table 100 by providing an attraction force between the upper portions of the work table 100.

The first work table 100 may include a plurality of low pressure forming portions 140 in which the upper surface is recessed upward and a gas suction portion (not shown) for lowering the inside of the low pressure forming portion 140 have.

Illustratively, a gas suction unit (not shown) may suck gas inside the low-pressure forming unit 140 to make the inside of the low-pressure forming unit 140 a low-pressure state. Thus, an attraction force can be formed between the upper surface of the first work table 100 and the lower edge of the panel 20. [

After the panel 20 is fixed to the first work table 100, the plurality of photographing units 340 photographs the pad unit 22 of the panel 20 and the pad unit photographed by the photographing unit 340 The position of the housing 300 can be adjusted so that the positions of the pad unit 22 and the probe unit 320 correspond to each other.

10, after the position of the housing 300 is adjusted so that the positions of the probe unit 320 and the pad unit 22 correspond to each other, the panel 20 is moved to the first driving unit 100 or the second driving unit 400 to be brought into contact with the pad portion 22 to perform the panel inspection.

The auto-probe inspection apparatus 10 according to another embodiment of the present invention is applicable to panels 20 of various sizes.

In other words, the auto-probe inspection apparatus 10 according to another embodiment of the present invention can adjust the position of the probe unit 320 contacting the pad portion 22 of the panel 20 to correspond to the size of the panel 20 .

In more detail, the auto-probe inspection apparatus 10 according to another embodiment of the present invention may further include a unit driving unit (not shown) for moving the probe unit 320 in the outside or inside direction.

Illustratively, as shown in FIG. 11, when the automatic probe inspection apparatus 10 inspects the small-sized panel 20, the probe unit 320 can be moved inward.

At this time, the first work table 100 can be replaced with the first work table 100 corresponding to the size of the panel 20, so that the first work table 100 can be replaced with the first drive part 120. However, the present invention is not limited to this, but the first work table 100 may be an extension table having a separate extension driver and capable of enlarging or reducing the area of the upper surface by the extension driver.

Further, by replacing the first work table 100, the interval of the low-pressure forming portion 140 that adsorbs the panel 20 positioned in the first work table 100 can be adjusted.

In addition, the automatic probe inspection apparatus 10 according to another embodiment of the present invention may further include a unit interval adjusting unit (not shown) for adjusting the interval between the probe units 320.

That is, the automatic probe inspection apparatus 10 according to another embodiment of the present invention can adjust the interval between the probe units 320 for use in the panel 20 in which the intervals of the pad portions 22 are different depending on the size .

Referring to FIG. 12, a panel inspection method according to an embodiment of the present invention will be described.

In step S110, the panel 20 is loaded into the first work table 100.

Illustratively, in step S110, the panel 20 may be seated on top of the first work table 100 by a transfer device.

The step S110 includes a step S111 of mounting the probe unit 320 to the housing 300, a step S112 of replacing the probe unit 320 with the first workpiece table 100 corresponding to the size of the panel 20, A step S113 of adjusting the position of the unit 320 and the low pressure forming part 220 so as to correspond to the size of the panel 20 and a step S114 of placing the panel 20 on the work table 100 .

In step S120, the first work table 100 is moved upward.

In other words, in step S120, the first work table 100 is moved in the vertical direction so that the panel 20 positioned on the upper portion of the first work table 100 can be brought into close contact with the lower surface of the second work table 200 1 driving unit 120. [0050] FIG.

In step S130, the panel 20 is fixed to the second work table 200.

As described above, the second work table 200 is configured such that when the upper rim portion of the panel 20 and the lower portion of the second work table 200 are in contact, the upper surface of the panel 20 and the second work table 200 , So that the panel 20 can be brought into close contact with the lower surface of the second work table 200 by the panel 20.

Step S130 is a step S131 of making the inside of the low pressure forming part 220 into a low pressure state, a step S132 of adsorbing the panel 20 to the second work table 200, (S133) of returning to the lower direction.

Specifically, in step S131, when the upper edge of the panel 20 is in contact with the lower portion of the second work table 200, the gas inside the low-pressure forming portion 220 is sucked by using the gas suction portion, The inside of the low-pressure forming portion 220 can be brought into a low-pressure state. Accordingly, in step S132, the panel 20 can be adsorbed and fixed on the lower surface of the second work table 200.

Step S130 further includes a step S134 of photographing the pad unit 22 of the panel 20 and a step S135 of adjusting the position of the probe unit 320 based on the photographed image . In other words, in order to accurately contact the probe unit 320 and the pad portion 22 of the panel 20, the pad portion 22 of the panel 20 is photographed using the photographing portion 340, The position of the probe unit 320 is automatically adjusted so that the positions of the probe unit 320 and the pad unit 22 of the panel 20 correspond to each other using the position adjustment unit 500, The probe unit 320 and the pad portion 22 of the panel 20 can be brought into contact with each other.

In step S140, the probe unit 320 is moved upward and contacts the pad unit 22 of the panel 20 to perform the inspection.

In detail, in step S140, as the housing 300 with the probe unit 320 mounted thereon is moved upward by the second driving unit 400, the probe unit 320 is moved to the pad part of the panel 20 And the probe unit 320 and the pad unit 22 are electrically connected to perform inspection of the panel 20.

In step S150, the probe unit 320 may be disengaged from the pad portion 22 of the panel 20.

The second drive unit 400 is driven to move the housing 300 downward to move the probe unit 320 to the pad unit 22 of the panel 20, As shown in Fig.

In step S160, the first work table 100 may be moved in the upward direction.

In other words, in step S160, the first work table 100 is moved in the upward direction, and the upper surface of the first work table 100 can be brought into contact with the lower surface of the panel 20. [

In step S170, the supply of the suction force of the gas suction unit is stopped, and the panel 20 can be seated on the first work table 100.

More specifically, in step S170, the suction force of the gas suction unit is removed so that the panel 20 is seated on the first work table 100 and the first work table 100 is moved downward have.

In step S180, the inspected panel 20 can be transferred to the outside.

Illustratively, in step S180, the inspected panel 20 can be transferred out of the first work table 100 using a transfer unit.

Referring to FIG. 13, a panel inspection method according to another embodiment of the present invention will be described.

In step S210, the panel 20 is loaded in the first work table 100. [

Illustratively, in step S210, the panel 20 may be seated on top of the first work table 100 by a transfer device.

The step S210 includes a step S211 of mounting the probe unit 320 to the second work table 200 and a step S212 of replacing the probe unit 320 with the first work table 100 corresponding to the size of the panel 20 (Step S213) of adjusting the position of the probe unit 320 to correspond to the size of the panel 20 and step S214 of seating the panel 20 on the first work table 100 have.

In step S220, the panel 20 is adsorbed on the first work table 100. [

The first work table 100 provides the attraction force between the lower edge of the panel 20 and the upper surface of the first work table 100 so that the panel 20 is moved to the first work table 100, As shown in FIG.

The step S220 may include a step S221 of making the inside of the low pressure forming part 140 into a low pressure state and a step S222 in which the panel 20 is adsorbed to the first work table 100.

Specifically, in step S221, the gas inside the low pressure forming portion 140 of the first work table 100 is sucked by using the gas suction portion to make the inside of the low pressure forming portion 140 into a low pressure state have. Accordingly, in step S222, the panel 20 can be fixed to the first work table 100. [

In step S230, the position of the panel 20 is adjusted so as to correspond to the position of the probe unit 320.

Step S230 may include the step S231 of photographing the pad portion 22 of the panel 20 and the step S232 of adjusting the position of the panel 20 based on the photographed image. In other words, in order to accurately contact the probe unit 320 and the pad portion 22 of the panel 20, the pad portion 22 of the panel 20 is photographed using the photographing portion 340, The position of the panel 20 is automatically adjusted so that the positions of the probe unit 320 and the pads 22 of the panel 20 correspond to each other using the position adjusting unit 500. Then, The unit 320 and the pad portion 22 of the panel 20 may be in contact with each other.

In step S240, the first work table 100 is moved in the upward direction, and the probe unit 320 contacts the pad unit 22 of the panel 20 to perform inspection.

In detail, in step S240, as the first work table 100 on which the panel 20 is mounted is moved upward by the first driving part 120 or the second driving part 400, the probe unit 320 Is in contact with the pad portion 22 of the panel 20 and the probe unit 320 and the pad portion 22 are electrically connected to perform inspection of the panel 20.

In step S250, the first work table 100 is moved in the downward direction so that the probe unit 320 can be disengaged from the pad portion 22 of the panel 20.

After the inspection of the panel 20 is completed, the first driving unit 120 or the second driving unit 400 is driven to move the first work table 100 in the downward direction to move the probe unit 320 Can be released from the pad portion (22) of the panel (20).

In step S260, provision of the attraction force of the low-pressure forming portion can be stopped.

In step S270, the inspected panel 20 can be transferred to the outside.

Illustratively, in step S270, the inspected panel 20 may be transferred out of the first work table 100 using a transfer unit.

It will be understood by those of ordinary skill in the art that the foregoing description of the embodiments is for illustrative purposes and that those skilled in the art can easily modify the invention without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

10: Auto-probe inspection device
20: panel 22: pad portion
100: first work table 120: first drive section
140: Low pressure forming part
200: second work table 220: low pressure forming part
300: housing 320: probe unit
340:
400:
500: Position control unit

Claims (22)

In an auto-probe inspection apparatus,
A plurality of probe units contacting the pad portion of the panel and performing an inspection on the panel;
A first work table on which the panel is seated on an upper surface;
A second work table positioned at a predetermined distance in the upward direction of the first work table;
A first driving unit for moving the first work table in a vertical direction;
A housing in which the first driving unit is located; And
And a second driving unit for moving the housing in the vertical direction,
The plurality of probe units
A second work table detachably fixed to the housing or the second work table,
When the plurality of probe units are fixed to the housing,
Wherein the panel is fixed to the second work table and the plurality of probe units are moved upward by the second driving unit to contact the pad portion of the panel,
When the plurality of probe units are fixed to the second work table,
Wherein the panel is fixed to the first work table and the plurality of probe units are moved upward in the first driving part or the second driving part to contact the pad part of the panel.
delete The method according to claim 1,
When the plurality of probe units are fixed to the housing,
The second work table
And provides an attraction force between the upper edge of the panel and the lower portion of the second work table when the upper edge of the panel contacts the lower portion of the second work table.
The method of claim 3,
The second work table
A plurality of low-pressure forming portions formed in a lower surface of the lower surface to be recessed; And
And a gas suction unit for bringing the interior of the low-pressure forming unit into a low-pressure state.
delete The method according to claim 1,
When the plurality of probe units are fixed to the second work table,
The first work table
And provides an attraction force between the bottom edge of the panel and the top of the first work table.
The method according to claim 6,
The first work table
A plurality of low-pressure forming portions formed on the upper surface so as to be depressed downward; And
And a gas suction unit for bringing the interior of the low-pressure forming unit into a low-pressure state.
The method according to claim 1,
A plurality of photographing portions for photographing the pad portion; And
And a position adjusting unit for adjusting the position of the housing in the X, Y, and theta directions so that the positions of the pad unit and the probe unit correspond to each other based on the image of the pad unit photographed by the photographing unit,
Wherein the photographing unit is detachably fixed to the housing or the second work table.
9. The method of claim 8,
The position adjustment unit
A first position shifter for moving the housing in an X-axis direction on a plane parallel to the panel;
A second position shifter positioned on a plane parallel to the panel and moving the housing in a Y axis direction perpendicular to the X axis direction; And
And a third position shifting unit for rotating the housing with respect to a Z-axis orthogonal to the X-axis and the Y-axis.
The method according to claim 1,
The first work table
And is detachably attached to the first driving unit.
8. The method of claim 7,
A unit driver for moving the probe unit in an outward or inward direction; And
Further comprising a suction part driving part for moving the low pressure forming part outward or inward.
12. The method of claim 11,
A unit interval adjusting unit adjusting the interval between the probe units; And
And an adsorption unit interval adjusting unit for adjusting the interval between the low pressure forming units.
A first work table on which the panel is mounted on an upper surface, and a second work table on the upper side of the first work table, A first driving unit for moving the first work table in a vertical direction, a housing in which the first driving unit is located, and a second driving unit for moving the housing in the vertical direction, A method of inspecting a panel using an auto-probe inspection apparatus detachably attached to a housing or the second work table,
(a) loading the panel into the first work table;
(b) moving the first work table in an upward direction;
(c) fixing the panel to the second work table; And
(d) moving the probe unit fixed to the housing upward by the second driving unit to contact the pad unit of the panel to perform the inspection.
14. The method of claim 13,
The step (a)
(a-1) mounting the probe unit to a housing;
(a-2) replacing with the first workpiece table corresponding to the size of the panel;
(a-3) adjusting the position of the probe unit and the low-pressure forming portion to correspond to the size of the panel; And
(a-4) placing the panel on the first work table.
14. The method of claim 13,
The second work table
And a low-pressure forming portion for adsorbing and fixing the panel,
The step (c)
(c-1) bringing the inside of the low-pressure forming portion into a low-pressure state;
(c-2) the panel is adsorbed on the second work table; And
(c-3) returning the first work table in a downward direction.
16. The method of claim 15,
The step (c)
(c-4) photographing the pad portion of the panel; And
(c-5) adjusting the position of the probe unit based on the photographed image.
14. The method of claim 13,
(e) the probe unit is released from the pad portion of the panel;
(f) moving the first work table in an upward direction;
(g) the provision of the attraction force of the low-pressure forming portion is stopped, and the panel is seated on the first work table; And
(g) the panel having been inspected is further transferred to the outside.
A first work table on which the panel is mounted on an upper surface, and a second work table on the upper side of the first work table, A first driving unit for moving the first work table in a vertical direction, a housing in which the first driving unit is located, and a second driving unit for moving the housing in the vertical direction, A method of inspecting a panel using an auto-probe inspection apparatus detachably attached to a housing or the second work table,
(a) loading the panel into the first work table;
(b) the panel is adsorbed on the first work table;
(c) adjusting the position so that the panel corresponds to the position of the probe unit; And
(d) the first work table is moved upward by the first driving unit or the second driving unit, and the probe unit fixed to the second work table contacts the pad unit of the panel to perform inspection A method of inspecting a panel comprising the steps of:
19. The method of claim 18,
The step (a)
(a-1) mounting the probe unit to a second work table;
(a-2) replacing with the first workpiece table corresponding to the size of the panel;
(a-3) adjusting the position of the probe unit to correspond to the size of the panel; And
(a-4) placing the panel on the first work table.
19. The method of claim 18,
The first work table
And a low-pressure forming portion for adsorbing and fixing the panel,
The step (b)
(b-1) lowering the interior of the low-pressure forming portion to a low pressure state; And
(b-2) the panel is attracted to the first work table.
19. The method of claim 18,
The step (c)
(c-1) photographing the pad portion of the panel; And
(c-2) adjusting the position of the panel based on the photographed image.
19. The method of claim 18,
(e) the first work table is moved in a downward direction so that the probe unit is released from the pad portion of the panel;
(f) stop providing the suction force of the low-pressure forming portion; And
(g) the panel having been inspected is further transferred to the outside.
KR1020150179446A 2015-12-15 2015-12-15 Auto probe inspection apparatus and inspection method of panel using the same KR101666162B1 (en)

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Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040100628A (en) * 2003-05-23 2004-12-02 주식회사 파이컴 Liquid crystal display panel vacuum absorption apparatus
KR20080001961A (en) * 2006-06-30 2008-01-04 엘지.필립스 엘시디 주식회사 Inspection apparatus for liquid crystal panel and setting method and changing method for work table unit using the same
KR20100107175A (en) * 2009-03-25 2010-10-05 엘지디스플레이 주식회사 Auto probe inspection devise for liquid crystal panel and inpecting method for the same
KR20150129935A (en) * 2014-05-12 2015-11-23 참엔지니어링(주) Apparatus and method for testing a substrate

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20040100628A (en) * 2003-05-23 2004-12-02 주식회사 파이컴 Liquid crystal display panel vacuum absorption apparatus
KR20080001961A (en) * 2006-06-30 2008-01-04 엘지.필립스 엘시디 주식회사 Inspection apparatus for liquid crystal panel and setting method and changing method for work table unit using the same
KR20100107175A (en) * 2009-03-25 2010-10-05 엘지디스플레이 주식회사 Auto probe inspection devise for liquid crystal panel and inpecting method for the same
KR20150129935A (en) * 2014-05-12 2015-11-23 참엔지니어링(주) Apparatus and method for testing a substrate

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