KR101650487B1 - Auto probe inspection apparatus and inspection method of panel using the same - Google Patents
Auto probe inspection apparatus and inspection method of panel using the same Download PDFInfo
- Publication number
- KR101650487B1 KR101650487B1 KR1020150176241A KR20150176241A KR101650487B1 KR 101650487 B1 KR101650487 B1 KR 101650487B1 KR 1020150176241 A KR1020150176241 A KR 1020150176241A KR 20150176241 A KR20150176241 A KR 20150176241A KR 101650487 B1 KR101650487 B1 KR 101650487B1
- Authority
- KR
- South Korea
- Prior art keywords
- panel
- unit
- probe
- work table
- moving
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
- G01R1/02—General constructional details
- G01R1/06—Measuring leads; Measuring probes
- G01R1/067—Measuring probes
- G01R1/073—Multiple probes
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
- G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
- G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2855—Environmental, reliability or burn-in testing
- G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
- G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
- G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
- G01R31/2889—Interfaces, e.g. between probe and tester
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
- G01R31/28—Testing of electronic circuits, e.g. by signal tracer
- G01R31/2851—Testing of integrated circuits [IC]
- G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers
Landscapes
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Environmental & Geological Engineering (AREA)
- Multimedia (AREA)
- Measuring Leads Or Probes (AREA)
Abstract
Description
The present invention relates to an automatic probe inspection apparatus and a panel inspection method using the same.
2. Description of the Related Art In general, an organic light emitting panel is a display device using organic light emitting diodes (OLED), in which RGB pixels of an organic electroluminescent device are arranged in a matrix form, Output.
For inspection of such an organic electroluminescent display type panel, Korean Patent Laid-Open Publication No. 2013-0020475 discloses an inspection method of an auto-probe in which a probe block located on the lower side of a panel housed in a work table is driven upward to contact a pad portion of a panel Device is disclosed.
However, when performing the panel inspection using the disclosed auto-probe inspection apparatus, when the probe unit and the pad portion are brought into contact with each other, the panel is lifted upward or out of the accommodated position, There was a problem that it was slow. Particularly, in the trend of the recent enlargement of the panel, such a problem becomes more prominent.
SUMMARY OF THE INVENTION It is an object of the present invention to provide an auto-probe inspection apparatus that can accurately contact a pad portion of a panel at the time of panel inspection and has a simple structure.
According to an aspect of the present invention, there is provided an apparatus for inspecting an auto-probe according to the first aspect of the present invention, comprising: a panel fixing unit for fixing a panel to a lower surface; A work table located below the panel fixing part and moving the panel to the panel fixing part; A first driving unit for moving the work table in a vertical direction; A plurality of probe units which are positioned under the panel fixing portion and contact the pad portions of the panel fixed to the panel fixing portion to perform inspection for the panel; A housing in which a plurality of probe units are mounted and in which a first driving unit is located; And a second driving unit for moving the housing in the vertical direction so that the plurality of probe units are brought into contact with or released from contact with the pad portions of the panel, wherein the plurality of probe units are moved upward by the second driving unit, .
According to a second aspect of the present invention, there is provided a panel inspection method comprising: loading a panel onto a work table; Moving the work table upward; Fixing the panel to the panel fixing portion; And moving the probe unit upward to contact the pad portion of the panel to perform the inspection.
According to the above-mentioned problem solving means of the present invention, when the panel is inspected, the panel is brought into close contact with the panel fixing portion so that the probe unit can accurately contact the pad portion of the panel, and the work table is located inside the housing, The effect can be greatly improved.
1 is a schematic view of an automatic probe inspection apparatus according to an embodiment of the present invention.
2 is an enlarged view of A in Fig.
3 is a partial perspective view of an apparatus for inspecting a probe head according to an embodiment of the present invention.
4 to 7 are views for explaining a method of operating the auto-probe inspection apparatus according to an embodiment of the present invention.
8 is a view for explaining a method for applying an auto-probe inspection apparatus according to an embodiment of the present invention to panels of various sizes.
9 is a flowchart of a panel inspection method according to an embodiment of the present invention.
10 is a flowchart illustrating a method of fixing a panel to a panel fixing unit according to an embodiment of the present invention.
Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. It should be understood, however, that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In the drawings, the same reference numbers are used throughout the specification to refer to the same or like parts.
Throughout this specification, when a part is referred to as being "connected" to another part, it is not limited to a case where it is "directly connected" but also includes the case where it is "electrically connected" do.
Throughout this specification, when a member is " on " another member, it includes not only when the member is in contact with the other member, but also when there is another member between the two members.
Throughout this specification, when an element is referred to as "including " an element, it is understood that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise. The terms "about "," substantially ", etc. used to the extent that they are used throughout the specification are intended to be taken to mean the approximation of the manufacturing and material tolerances inherent in the stated sense, Accurate or absolute numbers are used to help prevent unauthorized exploitation by unauthorized intruders of the referenced disclosure. The word " step (or step) "or" step "used to the extent that it is used throughout the specification does not mean" step for.
The present invention relates to an auto-probe inspection apparatus (10) and a panel inspection method using the same.
FIG. 1 is a schematic view of an automatic
First, an auto-probe inspection apparatus 10 (hereinafter referred to as "the present
The
1 to 3, the auto-
The
The
The above-mentioned upper surface is a surface located at 12 o'clock direction in Fig. 1, and the lower side can be 6 o'clock direction in Fig.
The work table 100 is located below the
In other words, the work table 100 moves the
The
In other words, the work table 100 can be moved upward by the first driving
The
The
The work table 100 is provided on the lower side of the
The
3, a plurality of
The
In the
The
The auto-
For this purpose, the present
As shown in Fig. 2, the photographing
The
4 to 6, an operation method of the
4, the
The
5, the
For example, the gas suction unit may suck gas inside the low-
Referring to FIG. 6, after the
7, the
Referring to FIG. 8, the present
In other words, the present auto-
Specifically, the
7, the
At this time, the work table 100 can be replaced with the work table 100 corresponding to the size of the
The automatic
That is, the present
9 and 10, a panel inspection method according to an embodiment of the present invention will be described.
In step S100, the
Illustratively, in step S100, the
Step s100 is a step of replacing the
In step S200, the work table 100 is moved upward.
In other words, in step S200, the work table 100 is moved to the
In step S300, the
As described above, when the
10, step S300 includes a step S310 of making the interior of the low-
Specifically, in step S310, when the upper edge of the
In step S400, the
In step S400, as the
At this time, between step S300 and step S400, the work table 100 may be returned in the downward direction.
Between step S300 and step S400 is included the step of photographing the
In step S500, the
The
In step S600, the work table 100 may be moved upward.
In other words, in step S600, the work table 100 is moved upward so that the upper surface of the work table 100 can be brought into contact with the lower surface of the
In step S700, the supply of the suction force of the gas suction unit is stopped, and the
More specifically, in step S700, the suction force of the gas suction unit is removed, the
In step S800, the inspected
Illustratively, in step S800, the inspected
It will be understood by those of ordinary skill in the art that the foregoing description of the embodiments is for illustrative purposes and that those skilled in the art can easily modify the invention without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.
The scope of the present invention is defined by the appended claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.
10: Auto-probe inspection device
20: panel 22: pad portion
100: work table 120: first driving section
200: panel fixing part 220: low pressure forming part
300: housing 320: probe unit
340:
400:
500: probe control unit
Claims (14)
A panel fixing part fixing the panel to the lower surface;
A work table located at a lower portion of the panel fixing portion and closely adhering the panel to the lower surface of the panel fixing portion;
A first driving unit for moving the work table in a vertical direction;
A plurality of probe units positioned below the panel fixing unit and contacting the pad portion of the panel fixed to the lower surface of the panel fixing portion to perform inspection of the panel;
A housing in which the plurality of probe units are mounted and in which the first driving unit is located; And
And a second driving unit for moving the housing in a vertical direction so that the plurality of probe units are brought into contact with or released from the pad unit of the panel,
The plurality of probe units are moved upward by the second driving unit to contact the pad portions of the panel,
Wherein the work table is moved to the inside of the housing after the panel is brought into close contact with the lower surface of the panel fixing portion.
The panel fixing portion
And an attracting force is provided between an upper edge of the panel and a lower portion of the panel fixing portion when the upper edge of the panel contacts the lower portion of the panel fixing portion.
The panel fixing portion
A plurality of low-pressure forming portions formed in a lower surface of the lower surface to be recessed;
And a gas suction unit for bringing the interior of the low-pressure forming unit into a low-pressure state.
A unit driver for moving the probe unit in an outward or inward direction; And
Further comprising a suction part driving part for moving the low pressure forming part outward or inward.
A unit interval adjusting unit adjusting the interval between the probe units; And
And an adsorption unit interval adjusting unit for adjusting the interval between the low pressure forming units.
The work table
And is mounted to be exchangeable to the first driving unit.
A plurality of photographing portions for photographing the pad portion; And
And a probe adjusting unit for adjusting the position of the housing in the X, Y, and theta directions so that the positions of the pad unit and the probe unit correspond to each other based on the image of the pad unit photographed by the photographing unit In auto-probe inspection device.
The probe adjustment unit
A first probe moving unit moving the probe unit in an X axis direction on a plane parallel to the panel;
A second probe moving unit positioned on a plane parallel to the panel and moving the probe unit in a Y-axis direction perpendicular to the X-axis direction; And
And a third probe moving unit rotating the probe unit with respect to a Z axis orthogonal to the X axis and the Y axis.
(a) loading a panel onto a work table;
(b) moving the work table upward;
(c) fixing the panel to the lower surface of the panel fixing part;
(d) performing the inspection by contacting the pad portion of the panel fixed to the lower surface of the panel fixing portion by moving the probe unit upward,
Between the steps (c) and (d)
And returning the work table to the interior of the housing.
The step (a)
(a-1) replacing with the work table corresponding to the size of the panel;
(a-2) adjusting the position of the probe unit and the low-pressure forming portion to correspond to the size of the panel; And
(a-3) placing the panel on the work table.
The panel fixing portion
And a low-pressure forming portion for adsorbing and fixing the panel,
The step (c)
(c-1) bringing the inside of the low-pressure forming portion into a low-pressure state; And
(c-2) the panel is attracted to the panel fixing portion.
Between the steps (c) and (d)
Photographing a pad portion of the panel; And
And adjusting the position of the probe unit based on the photographed image.
(e) the probe unit is released from the pad portion of the panel;
(f) moving the work table in an upward direction;
(g) stopping the adsorption of the low-pressure forming portion, and placing the panel on the work table; And
(g) the panel having been inspected is further transferred to the outside.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150176241A KR101650487B1 (en) | 2015-12-10 | 2015-12-10 | Auto probe inspection apparatus and inspection method of panel using the same |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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KR1020150176241A KR101650487B1 (en) | 2015-12-10 | 2015-12-10 | Auto probe inspection apparatus and inspection method of panel using the same |
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Publication Number | Publication Date |
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KR101650487B1 true KR101650487B1 (en) | 2016-08-23 |
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KR1020150176241A KR101650487B1 (en) | 2015-12-10 | 2015-12-10 | Auto probe inspection apparatus and inspection method of panel using the same |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116298863A (en) * | 2023-02-01 | 2023-06-23 | 深圳市致诚达科技有限公司 | Quick inspection system and control method for BLDC motor production line |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070028004A (en) * | 2005-08-30 | 2007-03-12 | 엘지.필립스 엘시디 주식회사 | Apparatus for testing lcd panel |
KR20100058395A (en) * | 2008-11-24 | 2010-06-03 | 주식회사 코디에스 | Testing apparatus for flat panel display |
KR20130020475A (en) * | 2011-08-19 | 2013-02-27 | 엘지디스플레이 주식회사 | Auto probe inspection appratus and inspecting method of the same |
KR20140126799A (en) * | 2013-04-22 | 2014-11-03 | (주) 루켄테크놀러지스 | Auto probe inspection apparatus and inspection method of organic light emmiting pannel using the same |
-
2015
- 2015-12-10 KR KR1020150176241A patent/KR101650487B1/en active IP Right Grant
Patent Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR20070028004A (en) * | 2005-08-30 | 2007-03-12 | 엘지.필립스 엘시디 주식회사 | Apparatus for testing lcd panel |
KR20100058395A (en) * | 2008-11-24 | 2010-06-03 | 주식회사 코디에스 | Testing apparatus for flat panel display |
KR20130020475A (en) * | 2011-08-19 | 2013-02-27 | 엘지디스플레이 주식회사 | Auto probe inspection appratus and inspecting method of the same |
KR20140126799A (en) * | 2013-04-22 | 2014-11-03 | (주) 루켄테크놀러지스 | Auto probe inspection apparatus and inspection method of organic light emmiting pannel using the same |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN116298863A (en) * | 2023-02-01 | 2023-06-23 | 深圳市致诚达科技有限公司 | Quick inspection system and control method for BLDC motor production line |
CN116298863B (en) * | 2023-02-01 | 2024-05-10 | 深圳市致诚达科技有限公司 | Quick inspection system and control method for BLDC motor production line |
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