KR101650487B1 - Auto probe inspection apparatus and inspection method of panel using the same - Google Patents

Auto probe inspection apparatus and inspection method of panel using the same Download PDF

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Publication number
KR101650487B1
KR101650487B1 KR1020150176241A KR20150176241A KR101650487B1 KR 101650487 B1 KR101650487 B1 KR 101650487B1 KR 1020150176241 A KR1020150176241 A KR 1020150176241A KR 20150176241 A KR20150176241 A KR 20150176241A KR 101650487 B1 KR101650487 B1 KR 101650487B1
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KR
South Korea
Prior art keywords
panel
unit
probe
work table
moving
Prior art date
Application number
KR1020150176241A
Other languages
Korean (ko)
Inventor
안윤태
윤희동
Original Assignee
(주) 루켄테크놀러지스
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Priority to KR1020150176241A priority Critical patent/KR101650487B1/en
Application granted granted Critical
Publication of KR101650487B1 publication Critical patent/KR101650487B1/en

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2887—Features relating to contacting the IC under test, e.g. probe heads; chucks involving moving the probe head or the IC under test; docking stations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R1/00—Details of instruments or arrangements of the types included in groups G01R5/00 - G01R13/00 and G01R31/00
    • G01R1/02—General constructional details
    • G01R1/06—Measuring leads; Measuring probes
    • G01R1/067—Measuring probes
    • G01R1/073—Multiple probes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/282—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere
    • G01R31/2825—Testing of electronic circuits specially adapted for particular applications not provided for elsewhere in household appliances or professional audio/video equipment
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2832—Specific tests of electronic circuits not provided for elsewhere
    • G01R31/2834—Automated test systems [ATE]; using microprocessors or computers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2863—Contacting devices, e.g. sockets, burn-in boards or mounting fixtures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2855—Environmental, reliability or burn-in testing
    • G01R31/286—External aspects, e.g. related to chambers, contacting devices or handlers
    • G01R31/2865—Holding devices, e.g. chucks; Handlers or transport devices
    • G01R31/2867—Handlers or transport devices, e.g. loaders, carriers, trays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2886—Features relating to contacting the IC under test, e.g. probe heads; chucks
    • G01R31/2889—Interfaces, e.g. between probe and tester
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
    • G01R31/28—Testing of electronic circuits, e.g. by signal tracer
    • G01R31/2851—Testing of integrated circuits [IC]
    • G01R31/2893—Handling, conveying or loading, e.g. belts, boats, vacuum fingers

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Environmental & Geological Engineering (AREA)
  • Multimedia (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

The present invention proposes an auto probe inspection apparatus. According to an embodiment of the present invention, the auto probe inspection apparatus comprises: a panel fixing unit which fixes a panel to a lower surface; a work table which is disposed below the panel fixing unit and moves the panel to the panel fixing unit; a first driving unit which moves the work table upward and downward; a plurality of probe units which are disposed below the panel fixing unit and contact a pad portion of the panel fixed to the panel fixing unit to perform a test on the panel; and a housing which is mounted with the probe units and accommodates the first driving unit; and a second driving unit which upwardly moves the housing such that the probe units contact or are detached from the pad portion of the panel, wherein the probe units are upwardly moved by the second driving unit to contact the pad portion of the panel.

Description

TECHNICAL FIELD [0001] The present invention relates to an auto-probe inspection apparatus and a panel inspection method using the same.

The present invention relates to an automatic probe inspection apparatus and a panel inspection method using the same.

2. Description of the Related Art In general, an organic light emitting panel is a display device using organic light emitting diodes (OLED), in which RGB pixels of an organic electroluminescent device are arranged in a matrix form, Output.

For inspection of such an organic electroluminescent display type panel, Korean Patent Laid-Open Publication No. 2013-0020475 discloses an inspection method of an auto-probe in which a probe block located on the lower side of a panel housed in a work table is driven upward to contact a pad portion of a panel Device is disclosed.

 However, when performing the panel inspection using the disclosed auto-probe inspection apparatus, when the probe unit and the pad portion are brought into contact with each other, the panel is lifted upward or out of the accommodated position, There was a problem that it was slow. Particularly, in the trend of the recent enlargement of the panel, such a problem becomes more prominent.

SUMMARY OF THE INVENTION It is an object of the present invention to provide an auto-probe inspection apparatus that can accurately contact a pad portion of a panel at the time of panel inspection and has a simple structure.

According to an aspect of the present invention, there is provided an apparatus for inspecting an auto-probe according to the first aspect of the present invention, comprising: a panel fixing unit for fixing a panel to a lower surface; A work table located below the panel fixing part and moving the panel to the panel fixing part; A first driving unit for moving the work table in a vertical direction; A plurality of probe units which are positioned under the panel fixing portion and contact the pad portions of the panel fixed to the panel fixing portion to perform inspection for the panel; A housing in which a plurality of probe units are mounted and in which a first driving unit is located; And a second driving unit for moving the housing in the vertical direction so that the plurality of probe units are brought into contact with or released from contact with the pad portions of the panel, wherein the plurality of probe units are moved upward by the second driving unit, .

According to a second aspect of the present invention, there is provided a panel inspection method comprising: loading a panel onto a work table; Moving the work table upward; Fixing the panel to the panel fixing portion; And moving the probe unit upward to contact the pad portion of the panel to perform the inspection.

According to the above-mentioned problem solving means of the present invention, when the panel is inspected, the panel is brought into close contact with the panel fixing portion so that the probe unit can accurately contact the pad portion of the panel, and the work table is located inside the housing, The effect can be greatly improved.

1 is a schematic view of an automatic probe inspection apparatus according to an embodiment of the present invention.
2 is an enlarged view of A in Fig.
3 is a partial perspective view of an apparatus for inspecting a probe head according to an embodiment of the present invention.
4 to 7 are views for explaining a method of operating the auto-probe inspection apparatus according to an embodiment of the present invention.
8 is a view for explaining a method for applying an auto-probe inspection apparatus according to an embodiment of the present invention to panels of various sizes.
9 is a flowchart of a panel inspection method according to an embodiment of the present invention.
10 is a flowchart illustrating a method of fixing a panel to a panel fixing unit according to an embodiment of the present invention.

Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings so that those skilled in the art can easily carry out the present invention. It should be understood, however, that the present invention may be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. In the drawings, the same reference numbers are used throughout the specification to refer to the same or like parts.

Throughout this specification, when a part is referred to as being "connected" to another part, it is not limited to a case where it is "directly connected" but also includes the case where it is "electrically connected" do.

Throughout this specification, when a member is " on " another member, it includes not only when the member is in contact with the other member, but also when there is another member between the two members.

Throughout this specification, when an element is referred to as "including " an element, it is understood that the element may include other elements as well, without departing from the other elements unless specifically stated otherwise. The terms "about "," substantially ", etc. used to the extent that they are used throughout the specification are intended to be taken to mean the approximation of the manufacturing and material tolerances inherent in the stated sense, Accurate or absolute numbers are used to help prevent unauthorized exploitation by unauthorized intruders of the referenced disclosure. The word " step (or step) "or" step "used to the extent that it is used throughout the specification does not mean" step for.

The present invention relates to an auto-probe inspection apparatus (10) and a panel inspection method using the same.

FIG. 1 is a schematic view of an automatic probe inspection apparatus 10 according to an embodiment of the present invention, FIG. 2 is an enlarged view of FIG. 1, and FIG. 3 is a cross- FIGS. 4 to 8 are views for explaining a method of operating the auto-probe inspection apparatus 10 according to an embodiment of the present invention. FIG. FIG. 9 is a flowchart of a method of inspecting a panel 20 according to an embodiment of the present invention, and FIG. 10 is a flowchart illustrating a method of inspecting a probe inspection apparatus according to an embodiment of the present invention In which the panel 20 is fixed to the panel fixing part 200 according to the first embodiment of the present invention.

First, an auto-probe inspection apparatus 10 (hereinafter referred to as "the present autoclave inspection apparatus 10") according to an embodiment of the present invention will be described.

The probe unit 320 contacts the pad portion 22 of the panel 20 before the panel 20 is mounted on the product and the probe unit 320 contacts the pad portion 22 of the panel 20 It may be a device for checking whether there is a defect. The panel 20 may be a display panel such as a plasma display panel (PDP), a liquid crystal display (LCD), a light emitting diode (LED), an organic light emitting diode (OLED), an active matrix organic light emitting diode (AMOLED) .

1 to 3, the auto-probe inspection apparatus 10 includes a panel fixing unit 200, a work table 100, a first driving unit 120, a plurality of probe units 320, a housing 300, And a second driving unit 400.

The panel fixing part 200 fixes the panel 20 to the lower surface.

The panel fixing part 200 is positioned between the upper edge of the panel 20 and the lower part of the panel fixing part 200 when the upper surface of the panel 20 is in contact with the lower part of the panel fixing part 200. [ So that the panel 20 can be fixed to the lower surface of the panel fixing part 200. A detailed description thereof will be given later.

The above-mentioned upper surface is a surface located at 12 o'clock direction in Fig. 1, and the lower side can be 6 o'clock direction in Fig.

The work table 100 is located below the panel fixing part 200 and moves the panel 20 to the panel fixing part 200.

In other words, the work table 100 moves the panel 20 in the upward direction so as to be fixed to the panel fixing part 200, but moves the inspected panel 20 in the downward direction to be separated from the panel fixing part 200 .

The first driving unit 120 moves the work table 100 in the vertical direction.

In other words, the work table 100 can be moved upward by the first driving part 120 to bring the panel 20 into close contact with the lower surface of the panel fixing part 200.

The panel fixing part 200 can fix the panel 20 which is in close contact with the lower surface of the panel fixing part 200. At this time, the panel 20 may be fixed to the panel fixing part 200 such that the pad part 22 faces downward.

The panel fixing part 200 serves not only to fix the panel 20 but also to support the pad part 22 when the probe unit 320 contacts the pad part 22 of the panel 20.

The work table 100 is provided on the lower side of the panel fixing part 200 so that the probe unit 320 does not interfere with the panel 20 when the probe unit 320 contacts the pad part 22 of the panel 20. [ And then can be moved into the interior of the housing 300.

The probe unit 320 contacts the pad portion 22 of the panel 20 which is located under the panel fixing portion 200 and fixed to the panel fixing portion 200 to perform the inspection of the panel 20 .

3, a plurality of probe units 320 are arranged at positions corresponding to the pad portions 22 along the upper circumferential surface of the housing 300 so as to be in contact with the pad portions 22 of the panel 20, Can be located with a gap.

The probe unit 320 may be moved upward by the second driving unit 400 to contact the pad unit 22 of the panel 20. However, the present invention is not limited thereto, and the panel fixing portion 200 may be moved downward, so that the pad portion 22 of the panel 20 may contact the plurality of probe units 320.

In the housing 300, a plurality of probe units 320 are mounted, and the first driving unit 120 is located inside.

The second driving unit 400 moves the housing 300 in the vertical direction so that the plurality of probe units 320 are brought into contact with or released from the pad unit 22 of the panel 20. 1, the second driving unit 400 may be disposed on a side surface of the housing 300 to move the housing 300 in the vertical direction, but the present invention is not limited thereto. For example, the housing 300 As shown in Fig.

The auto-probe inspection apparatus 10 photographs the pad portion 22 of the panel 20 before the plurality of probe units 320 contact the pad portion 22 of the panel 20, Y and theta directions so that the position of the probe unit 320 corresponds to the position of the pad unit 22 and the position of the probe unit 320 is aligned with the position of the pad unit 22, To the pad portion 22 of the pad.

For this purpose, the present autoprobe inspection apparatus 10 is provided with a plurality of photographing units 340 for photographing the pad unit 22 and a plurality of photographing units 340 for photographing the pad unit 22 22 and the probe unit 320 may correspond to each other.

As shown in Fig. 2, the photographing unit 340 is located at the lower portion of the probe unit 320, and can photograph the pad unit 22.

The probe adjustment unit 500 can move the probe unit 320 on a plane parallel to the panel 20. [ Illustratively, the probe adjusting unit 500 includes a first probe moving unit for moving the probe unit 320 in the X-axis direction located on a plane parallel to the panel 20, a second probe moving unit for moving the probe unit 320 on a plane parallel to the panel 20 A second probe moving unit for moving the probe unit 320 in the Y axis direction perpendicular to the X axis direction and a third probe moving unit for rotating the probe unit 320 about the Z axis orthogonal to the X axis and the Y axis, And a moving part.

4 to 6, an operation method of the probe inspection apparatus 10 according to an embodiment of the present invention will be described.

4, the probe inspection apparatus 10 moves the work table 100 in the upward direction after the panel 20 is seated on the upper portion of the work table 100, Can be brought into close contact with the lower surface of the container (200).

The panel fixing portion 200 is provided between the upper edge of the panel 20 and the lower portion of the panel fixing portion 200 when the upper edge portion of the panel 20 is in contact with the lower portion of the panel fixing portion 200 The panel 20 can be fixed to the panel fixing part 200 by providing an attraction force.

5, the panel fixing part 200 includes a plurality of low-pressure forming parts 220, the lower surface of which is recessed in the upward direction, and a gas suction part (not shown) ).

For example, the gas suction unit may suck gas inside the low-pressure forming unit 220, thereby making the inside of the low-pressure forming unit 220 low-pressure. Accordingly, an attraction force can be formed between the lower surface of the panel fixing part 200 and the upper surface of the panel 20.

Referring to FIG. 6, after the panel 20 is fixed to the panel fixing portion 200, the work table 100 is moved downward and returned to the inside of the housing 300. Thereafter, the pad unit 22 of the panel 20 is photographed by the plurality of photographing units 340, and based on the image of the pad unit 22 photographed by the photographing unit 340, the pad unit 22 The position of the housing 300 can be adjusted so that the positions of the probe units 320 correspond to each other.

7, the probe unit 320 adjusts the position of the housing 300 so that the positions of the probe unit 320 and the pad unit 22 correspond to each other, So that it can contact the pad portion 22 to perform the panel inspection.

Referring to FIG. 8, the present autoprobe inspection apparatus 10 is applicable to panels 20 of various sizes.

In other words, the present auto-probe inspection apparatus 10 is configured such that the probe unit 320 contacting the pad portion 22 of the panel 20 and the low pressure forming portion 220 for adsorbing the panel 20 are mounted on the panel 20 The position can be adjusted to correspond to the size.

Specifically, the autoclave inspection apparatus 10 includes a unit driving unit (not shown) for moving the probe unit 320 in an outward or inward direction, and an adsorption unit driving unit (Not shown).

7, the autoclave inspection apparatus 10 is configured such that when the panel 20 having a small size is inspected, the probe unit 320 and the low-pressure forming unit 220 are moved in the inward direction .

At this time, the work table 100 can be replaced with the work table 100 corresponding to the size of the panel 20, so as to be replaceably mounted on the first driving part 120. However, the present invention is not limited to this, and the work table 100 may include an extension driving unit and may be an extension table capable of enlarging or reducing the area of the upper surface by the expansion driving unit.

The automatic probe inspection apparatus 10 further includes a unit interval adjusting unit (not shown) for adjusting the interval between the probe units 320 and a suction unit interval adjusting unit (not shown) for adjusting the interval between the low pressure forming units 220, As shown in FIG.

That is, the present autoprobe inspection apparatus 10 can adjust the interval between the probe units 320 for use in the panel 20 having a different interval between the pad units 22 according to the size, And the gap between the low-pressure forming portions 220 may be adjusted.

9 and 10, a panel inspection method according to an embodiment of the present invention will be described.

In step S100, the panel 20 is loaded onto the work table 100.

Illustratively, in step S100, the panel 20 may be seated on top of the work table 100 by a transfer device.

Step s100 is a step of replacing the probe unit 320 and the low pressure forming part 220 with the work table 100 corresponding to the size of the panel 20 in correspondence to the size of the panel 20 (S120); And placing the panel 20 on the work table 100 (S130).

In step S200, the work table 100 is moved upward.

In other words, in step S200, the work table 100 is moved to the first driving part 120 so that the panel 20 positioned on the upper part of the work table 100 can be brought into close contact with the lower surface of the panel fixing part 200. [ To a predetermined height.

In step S300, the panel 20 is fixed to the panel fixing part 200. [

As described above, when the panel fixing portion 200 is in contact with the upper edge portion of the panel 20 and the lower portion of the panel fixing portion 200, the upper edge portion of the panel 20 and the lower portion of the panel fixing portion 200 The panel 20 can be brought into close contact with the lower surface of the panel fixing part 200 by the panel 20.

10, step S300 includes a step S310 of making the interior of the low-pressure forming part 220 low in pressure and a step S320 in which the panel 20 is adsorbed to the panel fixing part 200 .

Specifically, in step S310, when the upper edge of the panel 20 is in contact with the lower portion of the panel fixing part 200, the gas inside the low pressure forming part 220 is sucked using the gas suction part, The inside of the forming portion 220 can be brought into a low pressure state. Accordingly, in step S320, the panel 20 may be adsorbed and fixed on the lower surface of the panel fixing part 200.

In step S400, the probe unit 320 is moved upward and contacts the pad unit 22 of the panel 20 to perform the inspection.

In step S400, as the housing 300 with the probe unit 320 mounted thereon is moved upward by the second driving unit 400, the probe unit 320 is moved in the upward direction by the second driving unit 400, And the probe unit 320 and the pad unit 22 are electrically connected to each other to perform inspection of the panel 20.

At this time, between step S300 and step S400, the work table 100 may be returned in the downward direction.

Between step S300 and step S400 is included the step of photographing the pad part 22 of the panel 20 and the step of adjusting the position of the probe unit 320 based on the photographed image . In other words, in order for the probe unit 320 and the pad portion 22 of the panel 20 to make an accurate contact, the pad portion 22 is photographed using the photographing portion 340, and based on the photographed image, The position of the probe unit 320 is automatically adjusted to correspond to the position of the probe unit 320 and the pad unit 22 of the panel 20 using the probe adjustment unit 500, And the pad portion 22 can be in contact with each other.

In step S500, the probe unit 320 can be disengaged from the pad portion 22 of the panel 20.

The second drive unit 400 is driven to move the housing 300 downward to move the probe unit 320 to the pad unit 22 of the panel 20, As shown in Fig.

In step S600, the work table 100 may be moved upward.

In other words, in step S600, the work table 100 is moved upward so that the upper surface of the work table 100 can be brought into contact with the lower surface of the panel 20.

In step S700, the supply of the suction force of the gas suction unit is stopped, and the panel 20 can be seated on the work table 100. [

More specifically, in step S700, the suction force of the gas suction unit is removed, the panel 20 is seated on the upper portion of the work table 100, and the work table 100 can be moved downward.

In step S800, the inspected panel 20 can be transferred to the outside.

Illustratively, in step S800, the inspected panel 20 can be transferred out of the work table 100 using a transfer unit.

It will be understood by those of ordinary skill in the art that the foregoing description of the embodiments is for illustrative purposes and that those skilled in the art can easily modify the invention without departing from the spirit or essential characteristics thereof. It is therefore to be understood that the above-described embodiments are illustrative in all aspects and not restrictive. For example, each component described as a single entity may be distributed and implemented, and components described as being distributed may also be implemented in a combined form.

The scope of the present invention is defined by the appended claims rather than the detailed description, and all changes or modifications derived from the meaning and scope of the claims and their equivalents should be construed as being included within the scope of the present invention.

10: Auto-probe inspection device
20: panel 22: pad portion
100: work table 120: first driving section
200: panel fixing part 220: low pressure forming part
300: housing 320: probe unit
340:
400:
500: probe control unit

Claims (14)

In an auto-probe inspection apparatus,
A panel fixing part fixing the panel to the lower surface;
A work table located at a lower portion of the panel fixing portion and closely adhering the panel to the lower surface of the panel fixing portion;
A first driving unit for moving the work table in a vertical direction;
A plurality of probe units positioned below the panel fixing unit and contacting the pad portion of the panel fixed to the lower surface of the panel fixing portion to perform inspection of the panel;
A housing in which the plurality of probe units are mounted and in which the first driving unit is located; And
And a second driving unit for moving the housing in a vertical direction so that the plurality of probe units are brought into contact with or released from the pad unit of the panel,
The plurality of probe units are moved upward by the second driving unit to contact the pad portions of the panel,
Wherein the work table is moved to the inside of the housing after the panel is brought into close contact with the lower surface of the panel fixing portion.
The method according to claim 1,
The panel fixing portion
And an attracting force is provided between an upper edge of the panel and a lower portion of the panel fixing portion when the upper edge of the panel contacts the lower portion of the panel fixing portion.
3. The method of claim 2,
The panel fixing portion
A plurality of low-pressure forming portions formed in a lower surface of the lower surface to be recessed;
And a gas suction unit for bringing the interior of the low-pressure forming unit into a low-pressure state.
The method of claim 3,
A unit driver for moving the probe unit in an outward or inward direction; And
Further comprising a suction part driving part for moving the low pressure forming part outward or inward.
5. The method of claim 4,
A unit interval adjusting unit adjusting the interval between the probe units; And
And an adsorption unit interval adjusting unit for adjusting the interval between the low pressure forming units.
5. The method of claim 4,
The work table
And is mounted to be exchangeable to the first driving unit.
The method according to claim 1,
A plurality of photographing portions for photographing the pad portion; And
And a probe adjusting unit for adjusting the position of the housing in the X, Y, and theta directions so that the positions of the pad unit and the probe unit correspond to each other based on the image of the pad unit photographed by the photographing unit In auto-probe inspection device.
8. The method of claim 7,
The probe adjustment unit
A first probe moving unit moving the probe unit in an X axis direction on a plane parallel to the panel;
A second probe moving unit positioned on a plane parallel to the panel and moving the probe unit in a Y-axis direction perpendicular to the X-axis direction; And
And a third probe moving unit rotating the probe unit with respect to a Z axis orthogonal to the X axis and the Y axis.
In a panel inspection method using an auto-probe inspection apparatus,
(a) loading a panel onto a work table;
(b) moving the work table upward;
(c) fixing the panel to the lower surface of the panel fixing part;
(d) performing the inspection by contacting the pad portion of the panel fixed to the lower surface of the panel fixing portion by moving the probe unit upward,
Between the steps (c) and (d)
And returning the work table to the interior of the housing.
10. The method of claim 9,
The step (a)
(a-1) replacing with the work table corresponding to the size of the panel;
(a-2) adjusting the position of the probe unit and the low-pressure forming portion to correspond to the size of the panel; And
(a-3) placing the panel on the work table.
10. The method of claim 9,
The panel fixing portion
And a low-pressure forming portion for adsorbing and fixing the panel,
The step (c)
(c-1) bringing the inside of the low-pressure forming portion into a low-pressure state; And
(c-2) the panel is attracted to the panel fixing portion.
delete 10. The method of claim 9,
Between the steps (c) and (d)
Photographing a pad portion of the panel; And
And adjusting the position of the probe unit based on the photographed image.
10. The method of claim 9,
(e) the probe unit is released from the pad portion of the panel;
(f) moving the work table in an upward direction;
(g) stopping the adsorption of the low-pressure forming portion, and placing the panel on the work table; And
(g) the panel having been inspected is further transferred to the outside.
KR1020150176241A 2015-12-10 2015-12-10 Auto probe inspection apparatus and inspection method of panel using the same KR101650487B1 (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116298863A (en) * 2023-02-01 2023-06-23 深圳市致诚达科技有限公司 Quick inspection system and control method for BLDC motor production line

Citations (4)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116298863A (en) * 2023-02-01 2023-06-23 深圳市致诚达科技有限公司 Quick inspection system and control method for BLDC motor production line
CN116298863B (en) * 2023-02-01 2024-05-10 深圳市致诚达科技有限公司 Quick inspection system and control method for BLDC motor production line

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