KR100871037B1 - 다이싱용 점착 시트 - Google Patents
다이싱용 점착 시트 Download PDFInfo
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- KR100871037B1 KR100871037B1 KR1020020036221A KR20020036221A KR100871037B1 KR 100871037 B1 KR100871037 B1 KR 100871037B1 KR 1020020036221 A KR1020020036221 A KR 1020020036221A KR 20020036221 A KR20020036221 A KR 20020036221A KR 100871037 B1 KR100871037 B1 KR 100871037B1
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- dicing
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- ethylene
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L21/6835—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L21/6836—Wafer tapes, e.g. grinding or dicing support tapes
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J123/00—Adhesives based on homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Adhesives based on derivatives of such polymers
- C09J123/02—Adhesives based on homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Adhesives based on derivatives of such polymers not modified by chemical after-treatment
- C09J123/16—Elastomeric ethene-propene or ethene-propene-diene copolymers, e.g. EPR and EPDM rubbers
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J7/00—Adhesives in the form of films or foils
- C09J7/20—Adhesives in the form of films or foils characterised by their carriers
- C09J7/22—Plastics; Metallised plastics
- C09J7/24—Plastics; Metallised plastics based on macromolecular compounds obtained by reactions involving only carbon-to-carbon unsaturated bonds
- C09J7/241—Polyolefin, e.g.rubber
- C09J7/243—Ethylene or propylene polymers
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L23/00—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers
- C08L23/02—Compositions of homopolymers or copolymers of unsaturated aliphatic hydrocarbons having only one carbon-to-carbon double bond; Compositions of derivatives of such polymers not modified by chemical after-treatment
- C08L23/04—Homopolymers or copolymers of ethene
- C08L23/06—Polyethene
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
- C08L2666/00—Composition of polymers characterized by a further compound in the blend, being organic macromolecular compounds, natural resins, waxes or and bituminous materials, non-macromolecular organic substances, inorganic substances or characterized by their function in the composition
- C08L2666/02—Organic macromolecular compounds, natural resins, waxes or and bituminous materials
- C08L2666/04—Macromolecular compounds according to groups C08L7/00 - C08L49/00, or C08L55/00 - C08L57/00; Derivatives thereof
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- C—CHEMISTRY; METALLURGY
- C09—DYES; PAINTS; POLISHES; NATURAL RESINS; ADHESIVES; COMPOSITIONS NOT OTHERWISE PROVIDED FOR; APPLICATIONS OF MATERIALS NOT OTHERWISE PROVIDED FOR
- C09J—ADHESIVES; NON-MECHANICAL ASPECTS OF ADHESIVE PROCESSES IN GENERAL; ADHESIVE PROCESSES NOT PROVIDED FOR ELSEWHERE; USE OF MATERIALS AS ADHESIVES
- C09J2203/00—Applications of adhesives in processes or use of adhesives in the form of films or foils
- C09J2203/326—Applications of adhesives in processes or use of adhesives in the form of films or foils for bonding electronic components such as wafers, chips or semiconductors
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/77—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate
- H01L21/78—Manufacture or treatment of devices consisting of a plurality of solid state components or integrated circuits formed in, or on, a common substrate with subsequent division of the substrate into plural individual devices
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2221/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof covered by H01L21/00
- H01L2221/67—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere
- H01L2221/683—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping
- H01L2221/68304—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support
- H01L2221/68327—Apparatus for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components; Apparatus not specifically provided for elsewhere for supporting or gripping using temporarily an auxiliary support used during dicing or grinding
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2809—Web or sheet containing structurally defined element or component and having an adhesive outermost layer including irradiated or wave energy treated component
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/28—Web or sheet containing structurally defined element or component and having an adhesive outermost layer
- Y10T428/2848—Three or more layers
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
- Y10T428/00—Stock material or miscellaneous articles
- Y10T428/31504—Composite [nonstructural laminate]
- Y10T428/31855—Of addition polymer from unsaturated monomers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Adhesive Tapes (AREA)
- Laminated Bodies (AREA)
- Dicing (AREA)
- Adhesives Or Adhesive Processes (AREA)
- Polishing Bodies And Polishing Tools (AREA)
Abstract
Description
실 모양 부스러기의 크기(㎛)마다의 갯수 | |||
100 ㎛ 미만 | 100 내지 500 ㎛ | 500 ㎛ 이상 | |
실시예 1 | 51 | 0 | 0 |
실시예 2 | 13 | 0 | 0 |
실시예 3 | 0 | 0 | 0 |
실시예 4 | 0 | 0 | 0 |
비교예 1 | 100 이상 | 100 이상 | 100 이상 |
비교예 2 | 100 이상 | 100 이상 | 67 |
비교예 3 | 100 이상 | 100 이상 | 67 |
칩핑 카운트(개) | 수율(%) | |||||
칩핑 사이즈 | ||||||
25 ㎛∼ | 50 ㎛∼ | 75 ㎛∼ | 100 ㎛∼ | 합계 | ||
실시예 5 | 5 | 0 | 0 | 0 | 5 | 100 |
실시예 6 | 8 | 1 | 0 | 0 | 9 | 98 |
비교예 4 | 8 | 5 | 3 | 1 | 17 | 82 |
비교예 5 | 2 | 2 | 3 | 10 | 17 | 70 |
Claims (23)
- 기재 필름의 한 면 이상에 점착제층이 구비된 다이싱용 점착 시트에 있어서,상기 기재 필름이 프로필렌과 에틸렌 또는 탄소수 4 내지 8의 α-올레핀 중 적어도 하나와의 랜덤 공중합체로 이루어진 올레핀계 열가소성 엘라스토머로서,융점 피크 온도가 120℃ 이상 170℃ 이하이고, 용매로서 o-디클로로벤젠을 사용하여 온도 0 내지 140℃에서 수행한 온도상승용리분별에서 0℃에서의 용출 분율이 전체 용출량에 대하여 10 내지 60 중량%인 올레핀계 열가소성 엘라스토머와,폴리프로필렌에 대해 결정 조핵 작용을 하는 결정 조핵제를 기재 필름 전체에 대하여 0.0001 내지 1 중량% 함유하는 것을 특징으로 하는 다이싱(dicing)용 점착 시트.
- 삭제
- 삭제
- 삭제
- 제 1 항에 있어서,결정 조핵제가 폴리 3-메틸-1-부텐인 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 있어서,기재 필름이 단층필름이며, 상기 올레핀계 열가소성 엘라스토머를 50 중량% 이상 함유하는 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 있어서,기재 필름이 다층필름이며, 상기 다층필름중 하나 이상의 층이 올레핀계 열가소성 엘라스토머를 50 중량% 이상 함유하는 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 있어서,기재 필름이 중합성분으로서 에틸렌을 50%몰 이상 함유하는 에틸렌계 중합체를 추가로 포함하는 것을 특징으로 하는 다이싱용 점착 시트.
- 삭제
- 제 8 항에 있어서,에틸렌계 중합체의 함유량이 올레핀계 열가소성 엘라스토머에 대하여 5 내지 50 중량%인 것을 특징으로 하는 다이싱용 점착 시트.
- 제 8 항에 있어서,에틸렌계 중합체가 밀도 0.94 내지 0.97 g/cm3의 고밀도 폴리에틸렌, 밀도 0.91 내지 0.94 g/cm3의 직쇄형 저밀도 폴리에틸렌, 또는 이들의 혼합물인 것을 특징으로 하는 다이싱용 점착 시트.
- 제 8 항에 있어서,기재 필름이 단층필름이며, 상기 올레핀계 열가소성 엘라스토머와 에틸렌계 중합체를 이들의 합계량으로서 50 중량% 이상 함유하는 것을 특징으로 하는 다이싱용 점착 시트.
- 제 8 항에 있어서,기재 필름이 다층필름이며, 상기 다층필름중 하나 이상의 층이 올레핀계 열가소성 엘라스토머와 에틸렌계 중합체를 이들의 합계량으로서 50 중량% 이상 함유하는 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 있어서,점착제층의 두께가 1 내지 200 ㎛인 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 있어서,점착제층이 방사선 경화형 점착제로부터 형성되는 것을 특징으로 하는 다이싱용 점착 시트.
- 제 1 항에 따른 다이싱용 점착 시트를 피절단체에 접착시킨 후, 상기 점착 시트의 기재 필름까지 절삭을 실시함으로써 피절단체를 다이싱하는 것을 특징으로 하는 다이싱 방법.
- 삭제
- 제 8 항에 따른 다이싱용 점착 시트를 피절단체에 접착시킨 후, 상기 점착 시트의 기재 필름까지 절삭을 실시함으로써 피절단체를 다이싱하는 것을 특징으로 하는 다이싱 방법.
- 제 9 항에 따른 다이싱용 점착 시트를 피절단체에 접착시킨 후, 상기 점착 시트의 기재 필름까지 절삭을 실시함으로써 피절단체를 다이싱하는 것을 특징으로 하는 다이싱 방법.
- 제 16 항에 있어서,피절단체가 반도체 소자인 것을 특징으로 하는 다이싱 방법.
- 삭제
- 삭제
- 제 1 항에 있어서,올레핀계 열가소성 엘라스토머가 적어도 2단계 이상의 축차 중합법에 의해 제조되는 것으로서,프로필렌, 또는 프로필렌과 에틸렌 또는 탄소수 4 내지 8의 α-올레핀 중 적어도 어느 하나를, 촉매 존재하에서 온도가 50 내지 150℃이고 프로필렌의 분압이 0.5 내지 4.5 MPa인 조건으로 중합하는 것에 의해, 프로필렌 단독 중합체, 또는 프로필렌과 에틸렌 또는 탄소수 4 내지 8의 α-올레핀의 적어도 어느 하나와의 랜덤 공중합체를 제조한 후,프로필렌과 에틸렌 또는 탄소수 4 내지 8의 다른 α-올레핀의 적어도 어느 하나를추가로 첨가하여, 촉매의 존재하에서 온도가 50 내지 150℃이고 프로필렌, 에틸렌 또는 탄소수 4 내지 8의 α-올레핀의 적어도 어느 하나의 분압이 각각 0.3 내지 4.5 MPa인 조건으로 중합하는 것에 의해 제조되는 것을 특징으로 하는 다이싱용 점착 시트.
Applications Claiming Priority (6)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JPJP-P-2001-00194021 | 2001-06-27 | ||
JP2001194021A JP3443110B2 (ja) | 2001-06-27 | 2001-06-27 | ダイシング用粘着シート |
JP2002051693A JP3984076B2 (ja) | 2002-02-27 | 2002-02-27 | ダイシング用粘着シート |
JPJP-P-2002-00051682 | 2002-02-27 | ||
JPJP-P-2002-00051693 | 2002-02-27 | ||
JP2002051682A JP3984075B2 (ja) | 2002-02-27 | 2002-02-27 | ダイシング用粘着シート |
Publications (2)
Publication Number | Publication Date |
---|---|
KR20030004077A KR20030004077A (ko) | 2003-01-14 |
KR100871037B1 true KR100871037B1 (ko) | 2008-11-27 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1020020036221A KR100871037B1 (ko) | 2001-06-27 | 2002-06-27 | 다이싱용 점착 시트 |
Country Status (8)
Country | Link |
---|---|
US (1) | US7141300B2 (ko) |
EP (1) | EP1270696B1 (ko) |
KR (1) | KR100871037B1 (ko) |
CN (2) | CN1225771C (ko) |
AT (1) | ATE321825T1 (ko) |
DE (1) | DE60210166T2 (ko) |
SG (1) | SG107599A1 (ko) |
TW (1) | TWI232235B (ko) |
Families Citing this family (23)
Publication number | Priority date | Publication date | Assignee | Title |
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JP3838637B2 (ja) * | 2002-06-10 | 2006-10-25 | 日東電工株式会社 | ガラス基板ダイシング用粘着シートおよびガラス基板ダイシング方法 |
US7700707B2 (en) | 2002-10-15 | 2010-04-20 | Exxonmobil Chemical Patents Inc. | Polyolefin adhesive compositions and articles made therefrom |
CA2499951C (en) | 2002-10-15 | 2013-05-28 | Peijun Jiang | Multiple catalyst system for olefin polymerization and polymers produced therefrom |
JP4554908B2 (ja) * | 2003-10-24 | 2010-09-29 | 日東電工株式会社 | ダイシング用粘着シート、ダイシング方法および半導体素子の製造方法 |
JP4565609B2 (ja) * | 2003-10-31 | 2010-10-20 | ニットウ ヨーロッパ エヌ. ブイ. | 粘着テープ |
JP4412463B2 (ja) * | 2003-12-11 | 2010-02-10 | 藤森工業株式会社 | 複室容器 |
JP4699075B2 (ja) * | 2005-04-20 | 2011-06-08 | 日東電工株式会社 | 防水気密用両面粘着テープ |
JP4699076B2 (ja) * | 2005-04-20 | 2011-06-08 | 日東電工株式会社 | 防水気密用粘着テープ |
JP4925173B2 (ja) * | 2006-06-02 | 2012-04-25 | 日東電工株式会社 | ダイシング用粘着シート、及びそれを用いた被切断体の加工方法 |
JP5027460B2 (ja) | 2006-07-28 | 2012-09-19 | 東京応化工業株式会社 | ウエハの接着方法、薄板化方法、及び剥離方法 |
US8207270B2 (en) | 2006-09-29 | 2012-06-26 | Exxonmobil Chemical Patents Inc. | Thermoplastic elastomer compositions, methods of making and articles made from the same |
JP4767144B2 (ja) * | 2006-10-04 | 2011-09-07 | 日東電工株式会社 | レーザ加工用粘着シート |
JP5863157B2 (ja) * | 2006-12-18 | 2016-02-16 | 日東電工株式会社 | 粘着シート |
KR101019063B1 (ko) * | 2007-05-25 | 2011-03-07 | 주식회사 엘지화학 | 아크릴 점착제 조성물 및 이를 이용한 다이싱 테이프 |
JP5246583B2 (ja) * | 2008-02-29 | 2013-07-24 | 旭硝子株式会社 | ガラス基板吸着テーブル、及びガラス基板加工方法 |
US9315692B2 (en) * | 2010-03-31 | 2016-04-19 | Lintec Corporation | Base material film for dicing sheet and dicing sheet |
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KR102476430B1 (ko) * | 2015-12-08 | 2022-12-09 | 린텍 가부시키가이샤 | 다이싱 시트 및 다이싱 시트의 제조 방법 |
CN110872474A (zh) * | 2018-08-31 | 2020-03-10 | 翊圣企业股份有限公司 | 切割片胶膜用基膜及其制作方法 |
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- 2002-06-18 EP EP20020013544 patent/EP1270696B1/en not_active Expired - Lifetime
- 2002-06-18 DE DE2002610166 patent/DE60210166T2/de not_active Expired - Lifetime
- 2002-06-20 TW TW91113528A patent/TWI232235B/zh not_active IP Right Cessation
- 2002-06-26 SG SG200203892A patent/SG107599A1/en unknown
- 2002-06-27 KR KR1020020036221A patent/KR100871037B1/ko active IP Right Grant
- 2002-06-27 CN CNB021244154A patent/CN1225771C/zh not_active Expired - Lifetime
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Also Published As
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CN1395293A (zh) | 2003-02-05 |
US20030031862A1 (en) | 2003-02-13 |
CN1304509C (zh) | 2007-03-14 |
US7141300B2 (en) | 2006-11-28 |
CN1683463A (zh) | 2005-10-19 |
CN1225771C (zh) | 2005-11-02 |
KR20030004077A (ko) | 2003-01-14 |
EP1270696A3 (en) | 2003-06-25 |
ATE321825T1 (de) | 2006-04-15 |
EP1270696B1 (en) | 2006-03-29 |
SG107599A1 (en) | 2004-12-29 |
DE60210166T2 (de) | 2007-03-15 |
EP1270696A2 (en) | 2003-01-02 |
DE60210166D1 (de) | 2006-05-18 |
TWI232235B (en) | 2005-05-11 |
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