KR100753114B1 - 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹나노와이어의 제조방법 - Google Patents
실리카 분말의 열적 반응을 이용한 실리콘계 세라믹나노와이어의 제조방법 Download PDFInfo
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- KR100753114B1 KR100753114B1 KR1020050067768A KR20050067768A KR100753114B1 KR 100753114 B1 KR100753114 B1 KR 100753114B1 KR 1020050067768 A KR1020050067768 A KR 1020050067768A KR 20050067768 A KR20050067768 A KR 20050067768A KR 100753114 B1 KR100753114 B1 KR 100753114B1
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- silicon
- nanowires
- silicon nitride
- silica
- nitrogen
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/113—Silicon oxides; Hydrates thereof
- C01B33/12—Silica; Hydrates thereof, e.g. lepidoic silicic acid
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B21/00—Nitrogen; Compounds thereof
- C01B21/06—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron
- C01B21/068—Binary compounds of nitrogen with metals, with silicon, or with boron, or with carbon, i.e. nitrides; Compounds of nitrogen with more than one metal, silicon or boron with silicon
- C01B21/0682—Preparation by direct nitridation of silicon
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- C—CHEMISTRY; METALLURGY
- C04—CEMENTS; CONCRETE; ARTIFICIAL STONE; CERAMICS; REFRACTORIES
- C04B—LIME, MAGNESIA; SLAG; CEMENTS; COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDING MATERIALS; ARTIFICIAL STONE; CERAMICS; REFRACTORIES; TREATMENT OF NATURAL STONE
- C04B35/00—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products
- C04B35/515—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics
- C04B35/58—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides
- C04B35/584—Shaped ceramic products characterised by their composition; Ceramics compositions; Processing powders of inorganic compounds preparatory to the manufacturing of ceramic products based on non-oxide ceramics based on borides, nitrides, i.e. nitrides, oxynitrides, carbonitrides or oxycarbonitrides or silicides based on silicon nitride
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- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01P—INDEXING SCHEME RELATING TO STRUCTURAL AND PHYSICAL ASPECTS OF SOLID INORGANIC COMPOUNDS
- C01P2004/00—Particle morphology
- C01P2004/10—Particle morphology extending in one dimension, e.g. needle-like
- C01P2004/16—Nanowires or nanorods, i.e. solid nanofibres with two nearly equal dimensions between 1-100 nanometer
Abstract
Description
Claims (7)
- 환원제로서 탄소 또는 흑연분말과 실리카 분말을 혼합하여 볼밀링을 수행한 후 환원시켜 생성된 산화규소를 1-20 리터/분의 속도로 질소를 함유한 기체 분위기 하에서 공급하면서 1200-1500 ℃에서 질화 열처리하여 질화규소 나노와이어를 생성하는 단계(단계 1); 및상기 단계 1에서 제조된 질화규소 나노와이어를 공기, 수증기, 또는 공기나 수증기를 포함하는 아르곤, 또는 헬륨 기체 분위기 하에서 추가적으로 열처리하여 실리카볼이 규칙적으로 배열된 질화규소 나노와이어를 형성하는 단계(단계 2)를 포함하는 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹 나노와이어의 제조방법.
- 삭제
- 제 1항에 있어서, 상기 추가적 열처리가 공기 분위기 하에서 100 내지 200 ℃의 온도로 1시간 동안 수행되는 것을 특징으로 하는 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹 나노와이어의 제조방법.
- 제 1항에 있어서, 상기 단계 1)의 볼밀링에 사용되는 볼은 세라믹 볼이나 금속 볼인 것을 특징으로 하는 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹 나노와이어의 제조방법.
- 삭제
- 제 1항에 있어서, 상기 질소를 함유한 기체는 질소, 암모니아 또는 질소 및 수소의 혼합기체인 것을 특징으로 하는 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹 나노와이어의 제조방법.
- 삭제
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KR1020050067768A KR100753114B1 (ko) | 2005-07-26 | 2005-07-26 | 실리카 분말의 열적 반응을 이용한 실리콘계 세라믹나노와이어의 제조방법 |
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KR100872332B1 (ko) * | 2007-05-28 | 2008-12-05 | 연세대학교 산학협력단 | 인장응력을 이용한 단결정 열전 나노선 제조 방법 |
KR101360775B1 (ko) | 2012-12-04 | 2014-02-12 | 연세대학교 산학협력단 | 다공성 재료의 표면 및 내부 기공에 대규모로 와이어를 형성할 수 있는 방법 및 장치 |
CN116768635B (zh) * | 2023-07-10 | 2023-11-28 | 兰溪泛翌精细陶瓷有限公司 | 一种改性氮化硅复合材料及其制备方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138312A (ja) | 1985-12-09 | 1987-06-22 | Tohoku Metal Ind Ltd | 窒化硅素微粉末の製造方法 |
JPS6350307A (ja) | 1986-08-19 | 1988-03-03 | Kawasaki Steel Corp | 窒化けい素微粉末の製造方法 |
US5814290A (en) | 1995-07-24 | 1998-09-29 | Hyperion Catalysis International | Silicon nitride nanowhiskers and method of making same |
JP2004231456A (ja) | 2003-01-29 | 2004-08-19 | National Institute For Materials Science | 窒化硅素(Si3N4)ナノロッドとその製造方法 |
JP2005170701A (ja) | 2003-12-09 | 2005-06-30 | National Institute For Materials Science | 単結晶α型窒化珪素ナノリボンおよびβ型窒化珪素ナノリボンの製造方法 |
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Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS62138312A (ja) | 1985-12-09 | 1987-06-22 | Tohoku Metal Ind Ltd | 窒化硅素微粉末の製造方法 |
JPS6350307A (ja) | 1986-08-19 | 1988-03-03 | Kawasaki Steel Corp | 窒化けい素微粉末の製造方法 |
US5814290A (en) | 1995-07-24 | 1998-09-29 | Hyperion Catalysis International | Silicon nitride nanowhiskers and method of making same |
JP2004231456A (ja) | 2003-01-29 | 2004-08-19 | National Institute For Materials Science | 窒化硅素(Si3N4)ナノロッドとその製造方法 |
JP2005170701A (ja) | 2003-12-09 | 2005-06-30 | National Institute For Materials Science | 単結晶α型窒化珪素ナノリボンおよびβ型窒化珪素ナノリボンの製造方法 |
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