KR100657891B1 - 반도체 나노결정 및 그 제조방법 - Google Patents
반도체 나노결정 및 그 제조방법 Download PDFInfo
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- KR100657891B1 KR100657891B1 KR1020030049547A KR20030049547A KR100657891B1 KR 100657891 B1 KR100657891 B1 KR 100657891B1 KR 1020030049547 A KR1020030049547 A KR 1020030049547A KR 20030049547 A KR20030049547 A KR 20030049547A KR 100657891 B1 KR100657891 B1 KR 100657891B1
- Authority
- KR
- South Korea
- Prior art keywords
- group
- zinc
- cadmium
- metal
- mercury
- Prior art date
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- 239000004054 semiconductor nanocrystal Substances 0.000 title claims abstract description 38
- 238000000034 method Methods 0.000 title claims description 52
- 239000002243 precursor Substances 0.000 claims abstract description 88
- 229910052751 metal Inorganic materials 0.000 claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 64
- 229910052798 chalcogen Inorganic materials 0.000 claims abstract description 55
- 239000002904 solvent Substances 0.000 claims abstract description 32
- 238000006243 chemical reaction Methods 0.000 claims abstract description 28
- 239000013078 crystal Substances 0.000 claims abstract description 23
- 239000002270 dispersing agent Substances 0.000 claims abstract description 21
- 238000004519 manufacturing process Methods 0.000 claims abstract description 19
- 238000002156 mixing Methods 0.000 claims abstract description 10
- 238000010438 heat treatment Methods 0.000 claims abstract description 6
- 239000002159 nanocrystal Substances 0.000 claims description 27
- 125000004432 carbon atom Chemical group C* 0.000 claims description 17
- 150000002739 metals Chemical class 0.000 claims description 16
- 239000011669 selenium Substances 0.000 claims description 16
- 125000000026 trimethylsilyl group Chemical group [H]C([H])([H])[Si]([*])(C([H])([H])[H])C([H])([H])[H] 0.000 claims description 15
- 150000003973 alkyl amines Chemical class 0.000 claims description 12
- 239000000203 mixture Substances 0.000 claims description 10
- -1 alkyl sulfonic acid Chemical compound 0.000 claims description 8
- 239000000843 powder Substances 0.000 claims description 8
- WRIDQFICGBMAFQ-UHFFFAOYSA-N (E)-8-Octadecenoic acid Natural products CCCCCCCCCC=CCCCCCCC(O)=O WRIDQFICGBMAFQ-UHFFFAOYSA-N 0.000 claims description 7
- LQJBNNIYVWPHFW-UHFFFAOYSA-N 20:1omega9c fatty acid Natural products CCCCCCCCCCC=CCCCCCCCC(O)=O LQJBNNIYVWPHFW-UHFFFAOYSA-N 0.000 claims description 7
- QSBYPNXLFMSGKH-UHFFFAOYSA-N 9-Heptadecensaeure Natural products CCCCCCCC=CCCCCCCCC(O)=O QSBYPNXLFMSGKH-UHFFFAOYSA-N 0.000 claims description 7
- ZQPPMHVWECSIRJ-UHFFFAOYSA-N Oleic acid Natural products CCCCCCCCC=CCCCCCCCC(O)=O ZQPPMHVWECSIRJ-UHFFFAOYSA-N 0.000 claims description 7
- 239000005642 Oleic acid Substances 0.000 claims description 7
- NINIDFKCEFEMDL-UHFFFAOYSA-N Sulfur Chemical group [S] NINIDFKCEFEMDL-UHFFFAOYSA-N 0.000 claims description 7
- 239000002253 acid Substances 0.000 claims description 7
- QXJSBBXBKPUZAA-UHFFFAOYSA-N isooleic acid Natural products CCCCCCCC=CCCCCCCCCC(O)=O QXJSBBXBKPUZAA-UHFFFAOYSA-N 0.000 claims description 7
- XTAZYLNFDRKIHJ-UHFFFAOYSA-N n,n-dioctyloctan-1-amine Chemical compound CCCCCCCCN(CCCCCCCC)CCCCCCCC XTAZYLNFDRKIHJ-UHFFFAOYSA-N 0.000 claims description 7
- ZQPPMHVWECSIRJ-KTKRTIGZSA-N oleic acid group Chemical group C(CCCCCCC\C=C/CCCCCCCC)(=O)O ZQPPMHVWECSIRJ-KTKRTIGZSA-N 0.000 claims description 7
- 229910052717 sulfur Inorganic materials 0.000 claims description 7
- 150000001336 alkenes Chemical class 0.000 claims description 6
- 229910052793 cadmium Inorganic materials 0.000 claims description 6
- OKIIEJOIXGHUKX-UHFFFAOYSA-L cadmium iodide Chemical compound [Cd+2].[I-].[I-] OKIIEJOIXGHUKX-UHFFFAOYSA-L 0.000 claims description 6
- 239000011593 sulfur Chemical group 0.000 claims description 5
- POILWHVDKZOXJZ-ARJAWSKDSA-M (z)-4-oxopent-2-en-2-olate Chemical compound C\C([O-])=C\C(C)=O POILWHVDKZOXJZ-ARJAWSKDSA-M 0.000 claims description 4
- XLOMVQKBTHCTTD-UHFFFAOYSA-N Zinc monoxide Chemical compound [Zn]=O XLOMVQKBTHCTTD-UHFFFAOYSA-N 0.000 claims description 4
- LHQLJMJLROMYRN-UHFFFAOYSA-L cadmium acetate Chemical compound [Cd+2].CC([O-])=O.CC([O-])=O LHQLJMJLROMYRN-UHFFFAOYSA-L 0.000 claims description 4
- KPWJBEFBFLRCLH-UHFFFAOYSA-L cadmium bromide Chemical compound Br[Cd]Br KPWJBEFBFLRCLH-UHFFFAOYSA-L 0.000 claims description 4
- YKYOUMDCQGMQQO-UHFFFAOYSA-L cadmium dichloride Chemical compound Cl[Cd]Cl YKYOUMDCQGMQQO-UHFFFAOYSA-L 0.000 claims description 4
- CXKCTMHTOKXKQT-UHFFFAOYSA-N cadmium oxide Inorganic materials [Cd]=O CXKCTMHTOKXKQT-UHFFFAOYSA-N 0.000 claims description 4
- IPCSVZSSVZVIGE-UHFFFAOYSA-N hexadecanoic acid Chemical compound CCCCCCCCCCCCCCCC(O)=O IPCSVZSSVZVIGE-UHFFFAOYSA-N 0.000 claims description 4
- 229910052714 tellurium Inorganic materials 0.000 claims description 4
- PORWMNRCUJJQNO-UHFFFAOYSA-N tellurium atom Chemical compound [Te] PORWMNRCUJJQNO-UHFFFAOYSA-N 0.000 claims description 4
- VNDYJBBGRKZCSX-UHFFFAOYSA-L zinc bromide Chemical compound Br[Zn]Br VNDYJBBGRKZCSX-UHFFFAOYSA-L 0.000 claims description 4
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 claims description 4
- BHHYHSUAOQUXJK-UHFFFAOYSA-L zinc fluoride Chemical compound F[Zn]F BHHYHSUAOQUXJK-UHFFFAOYSA-L 0.000 claims description 4
- UAYWVJHJZHQCIE-UHFFFAOYSA-L zinc iodide Chemical compound I[Zn]I UAYWVJHJZHQCIE-UHFFFAOYSA-L 0.000 claims description 4
- ONDPHDOFVYQSGI-UHFFFAOYSA-N zinc nitrate Chemical compound [Zn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O ONDPHDOFVYQSGI-UHFFFAOYSA-N 0.000 claims description 4
- FJLUATLTXUNBOT-UHFFFAOYSA-N 1-Hexadecylamine Chemical compound CCCCCCCCCCCCCCCCN FJLUATLTXUNBOT-UHFFFAOYSA-N 0.000 claims description 3
- BUGBHKTXTAQXES-UHFFFAOYSA-N Selenium Chemical compound [Se] BUGBHKTXTAQXES-UHFFFAOYSA-N 0.000 claims description 3
- 150000001335 aliphatic alkanes Chemical class 0.000 claims description 3
- 239000000956 alloy Substances 0.000 claims description 3
- 229910045601 alloy Inorganic materials 0.000 claims description 3
- 150000001412 amines Chemical class 0.000 claims description 3
- BDOSMKKIYDKNTQ-UHFFFAOYSA-N cadmium atom Chemical compound [Cd] BDOSMKKIYDKNTQ-UHFFFAOYSA-N 0.000 claims description 3
- 229940075417 cadmium iodide Drugs 0.000 claims description 3
- CFEAAQFZALKQPA-UHFFFAOYSA-N cadmium(2+);oxygen(2-) Chemical compound [O-2].[Cd+2] CFEAAQFZALKQPA-UHFFFAOYSA-N 0.000 claims description 3
- 150000002391 heterocyclic compounds Chemical class 0.000 claims description 3
- 229910052753 mercury Inorganic materials 0.000 claims description 3
- FQGYCXFLEQVDJQ-UHFFFAOYSA-N mercury dicyanide Chemical compound N#C[Hg]C#N FQGYCXFLEQVDJQ-UHFFFAOYSA-N 0.000 claims description 3
- 229910000474 mercury oxide Inorganic materials 0.000 claims description 3
- UKWHYYKOEPRTIC-UHFFFAOYSA-N mercury(ii) oxide Chemical compound [Hg]=O UKWHYYKOEPRTIC-UHFFFAOYSA-N 0.000 claims description 3
- 229910052711 selenium Inorganic materials 0.000 claims description 3
- 229910052725 zinc Inorganic materials 0.000 claims description 3
- 239000011701 zinc Substances 0.000 claims description 3
- GTLDTDOJJJZVBW-UHFFFAOYSA-N zinc cyanide Chemical compound [Zn+2].N#[C-].N#[C-] GTLDTDOJJJZVBW-UHFFFAOYSA-N 0.000 claims description 3
- NWONKYPBYAMBJT-UHFFFAOYSA-L zinc sulfate Chemical compound [Zn+2].[O-]S([O-])(=O)=O NWONKYPBYAMBJT-UHFFFAOYSA-L 0.000 claims description 3
- 229910000368 zinc sulfate Inorganic materials 0.000 claims description 3
- 229960001763 zinc sulfate Drugs 0.000 claims description 3
- NHXVNEDMKGDNPR-UHFFFAOYSA-N zinc;pentane-2,4-dione Chemical compound [Zn+2].CC(=O)[CH-]C(C)=O.CC(=O)[CH-]C(C)=O NHXVNEDMKGDNPR-UHFFFAOYSA-N 0.000 claims description 3
- TZRNHZPZYFPUOH-UHFFFAOYSA-N $l^{1}-selanyl(trimethyl)silane Chemical compound C[Si](C)(C)[Se] TZRNHZPZYFPUOH-UHFFFAOYSA-N 0.000 claims description 2
- DOBUSJIVSSJEDA-UHFFFAOYSA-L 1,3-dioxa-2$l^{6}-thia-4-mercuracyclobutane 2,2-dioxide Chemical compound [Hg+2].[O-]S([O-])(=O)=O DOBUSJIVSSJEDA-UHFFFAOYSA-L 0.000 claims description 2
- IGPFOKFDBICQMC-UHFFFAOYSA-N 3-phenylmethoxyaniline Chemical compound NC1=CC=CC(OCC=2C=CC=CC=2)=C1 IGPFOKFDBICQMC-UHFFFAOYSA-N 0.000 claims description 2
- QVJAEHWIKHNTSX-UHFFFAOYSA-N C[Si](C)(C)[S] Chemical compound C[Si](C)(C)[S] QVJAEHWIKHNTSX-UHFFFAOYSA-N 0.000 claims description 2
- 229910000661 Mercury cadmium telluride Inorganic materials 0.000 claims description 2
- 235000021314 Palmitic acid Nutrition 0.000 claims description 2
- 235000021355 Stearic acid Nutrition 0.000 claims description 2
- FMRLDPWIRHBCCC-UHFFFAOYSA-L Zinc carbonate Chemical compound [Zn+2].[O-]C([O-])=O FMRLDPWIRHBCCC-UHFFFAOYSA-L 0.000 claims description 2
- ZOIORXHNWRGPMV-UHFFFAOYSA-N acetic acid;zinc Chemical group [Zn].CC(O)=O.CC(O)=O ZOIORXHNWRGPMV-UHFFFAOYSA-N 0.000 claims description 2
- WRYNUJYAXVDTCB-UHFFFAOYSA-M acetyloxymercury Chemical compound CC(=O)O[Hg] WRYNUJYAXVDTCB-UHFFFAOYSA-M 0.000 claims description 2
- 229910000011 cadmium carbonate Inorganic materials 0.000 claims description 2
- LVEULQCPJDDSLD-UHFFFAOYSA-L cadmium fluoride Chemical compound F[Cd]F LVEULQCPJDDSLD-UHFFFAOYSA-L 0.000 claims description 2
- XIEPJMXMMWZAAV-UHFFFAOYSA-N cadmium nitrate Inorganic materials [Cd+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O XIEPJMXMMWZAAV-UHFFFAOYSA-N 0.000 claims description 2
- QCUOBSQYDGUHHT-UHFFFAOYSA-L cadmium sulfate Chemical compound [Cd+2].[O-]S([O-])(=O)=O QCUOBSQYDGUHHT-UHFFFAOYSA-L 0.000 claims description 2
- 229910000331 cadmium sulfate Inorganic materials 0.000 claims description 2
- GKDXQAKPHKQZSC-UHFFFAOYSA-L cadmium(2+);carbonate Chemical compound [Cd+2].[O-]C([O-])=O GKDXQAKPHKQZSC-UHFFFAOYSA-L 0.000 claims description 2
- PSIBWKDABMPMJN-UHFFFAOYSA-L cadmium(2+);diperchlorate Chemical compound [Cd+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O PSIBWKDABMPMJN-UHFFFAOYSA-L 0.000 claims description 2
- VFFDVELHRCMPLY-UHFFFAOYSA-N dimethyldodecyl amine Natural products CC(C)CCCCCCCCCCCN VFFDVELHRCMPLY-UHFFFAOYSA-N 0.000 claims description 2
- JRBPAEWTRLWTQC-UHFFFAOYSA-N dodecylamine Chemical compound CCCCCCCCCCCCN JRBPAEWTRLWTQC-UHFFFAOYSA-N 0.000 claims description 2
- GJWAEWLHSDGBGG-UHFFFAOYSA-N hexylphosphonic acid Chemical compound CCCCCCP(O)(O)=O GJWAEWLHSDGBGG-UHFFFAOYSA-N 0.000 claims description 2
- DLINORNFHVEIFE-UHFFFAOYSA-N hydrogen peroxide;zinc Chemical compound [Zn].OO DLINORNFHVEIFE-UHFFFAOYSA-N 0.000 claims description 2
- NGYIMTKLQULBOO-UHFFFAOYSA-L mercury dibromide Chemical compound Br[Hg]Br NGYIMTKLQULBOO-UHFFFAOYSA-L 0.000 claims description 2
- 229910001987 mercury nitrate Inorganic materials 0.000 claims description 2
- 229910000370 mercury sulfate Inorganic materials 0.000 claims description 2
- SCTINZGZNJKWBN-UHFFFAOYSA-M mercury(1+);fluoride Chemical compound [Hg]F SCTINZGZNJKWBN-UHFFFAOYSA-M 0.000 claims description 2
- QKEOZZYXWAIQFO-UHFFFAOYSA-M mercury(1+);iodide Chemical compound [Hg]I QKEOZZYXWAIQFO-UHFFFAOYSA-M 0.000 claims description 2
- YWFWDNVOPHGWMX-UHFFFAOYSA-N n,n-dimethyldodecan-1-amine Chemical compound CCCCCCCCCCCCN(C)C YWFWDNVOPHGWMX-UHFFFAOYSA-N 0.000 claims description 2
- WQEPLUUGTLDZJY-UHFFFAOYSA-N n-Pentadecanoic acid Natural products CCCCCCCCCCCCCCC(O)=O WQEPLUUGTLDZJY-UHFFFAOYSA-N 0.000 claims description 2
- DRXYRSRECMWYAV-UHFFFAOYSA-N nitrooxymercury Chemical compound [Hg+].[O-][N+]([O-])=O DRXYRSRECMWYAV-UHFFFAOYSA-N 0.000 claims description 2
- QIQXTHQIDYTFRH-UHFFFAOYSA-N octadecanoic acid Chemical compound CCCCCCCCCCCCCCCCCC(O)=O QIQXTHQIDYTFRH-UHFFFAOYSA-N 0.000 claims description 2
- OQCDKBAXFALNLD-UHFFFAOYSA-N octadecanoic acid Natural products CCCCCCCC(C)CCCCCCCCC(O)=O OQCDKBAXFALNLD-UHFFFAOYSA-N 0.000 claims description 2
- FTMKAMVLFVRZQX-UHFFFAOYSA-N octadecylphosphonic acid Chemical compound CCCCCCCCCCCCCCCCCCP(O)(O)=O FTMKAMVLFVRZQX-UHFFFAOYSA-N 0.000 claims description 2
- NJGCRMAPOWGWMW-UHFFFAOYSA-N octylphosphonic acid Chemical compound CCCCCCCCP(O)(O)=O NJGCRMAPOWGWMW-UHFFFAOYSA-N 0.000 claims description 2
- 235000021313 oleic acid Nutrition 0.000 claims description 2
- HSAJRDKFYZAGLU-UHFFFAOYSA-M perchloryloxymercury Chemical compound [Hg+].[O-]Cl(=O)(=O)=O HSAJRDKFYZAGLU-UHFFFAOYSA-M 0.000 claims description 2
- NMHMNPHRMNGLLB-UHFFFAOYSA-N phloretic acid Chemical compound OC(=O)CCC1=CC=C(O)C=C1 NMHMNPHRMNGLLB-UHFFFAOYSA-N 0.000 claims description 2
- 239000008117 stearic acid Substances 0.000 claims description 2
- BVQJQTMSTANITJ-UHFFFAOYSA-N tetradecylphosphonic acid Chemical compound CCCCCCCCCCCCCCP(O)(O)=O BVQJQTMSTANITJ-UHFFFAOYSA-N 0.000 claims description 2
- 239000004246 zinc acetate Substances 0.000 claims description 2
- 229940102001 zinc bromide Drugs 0.000 claims description 2
- 239000011667 zinc carbonate Substances 0.000 claims description 2
- 229910000010 zinc carbonate Inorganic materials 0.000 claims description 2
- 235000004416 zinc carbonate Nutrition 0.000 claims description 2
- 239000011592 zinc chloride Substances 0.000 claims description 2
- 235000005074 zinc chloride Nutrition 0.000 claims description 2
- 239000011787 zinc oxide Substances 0.000 claims description 2
- 229940105296 zinc peroxide Drugs 0.000 claims description 2
- RXBXBWBHKPGHIB-UHFFFAOYSA-L zinc;diperchlorate Chemical compound [Zn+2].[O-]Cl(=O)(=O)=O.[O-]Cl(=O)(=O)=O RXBXBWBHKPGHIB-UHFFFAOYSA-L 0.000 claims description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 claims 1
- CPELXLSAUQHCOX-UHFFFAOYSA-M Bromide Chemical compound [Br-] CPELXLSAUQHCOX-UHFFFAOYSA-M 0.000 claims 1
- BVKZGUZCCUSVTD-UHFFFAOYSA-L Carbonate Chemical compound [O-]C([O-])=O BVKZGUZCCUSVTD-UHFFFAOYSA-L 0.000 claims 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims 1
- XFXPMWWXUTWYJX-UHFFFAOYSA-N Cyanide Chemical compound N#[C-] XFXPMWWXUTWYJX-UHFFFAOYSA-N 0.000 claims 1
- RCTYPNKXASFOBE-UHFFFAOYSA-M chloromercury Chemical compound [Hg]Cl RCTYPNKXASFOBE-UHFFFAOYSA-M 0.000 claims 1
- 150000004694 iodide salts Chemical class 0.000 claims 1
- 229910001512 metal fluoride Inorganic materials 0.000 claims 1
- 229910001960 metal nitrate Inorganic materials 0.000 claims 1
- 150000004706 metal oxides Chemical group 0.000 claims 1
- GYHFUZHODSMOHU-UHFFFAOYSA-N nonanal Chemical compound CCCCCCCCC=O GYHFUZHODSMOHU-UHFFFAOYSA-N 0.000 claims 1
- CCCMONHAUSKTEQ-UHFFFAOYSA-N octadecene Natural products CCCCCCCCCCCCCCCCC=C CCCMONHAUSKTEQ-UHFFFAOYSA-N 0.000 claims 1
- VLTRZXGMWDSKGL-UHFFFAOYSA-N perchloric acid Chemical class OCl(=O)(=O)=O VLTRZXGMWDSKGL-UHFFFAOYSA-N 0.000 claims 1
- 150000002978 peroxides Chemical class 0.000 claims 1
- QXKXDIKCIPXUPL-UHFFFAOYSA-N sulfanylidenemercury Chemical compound [Hg]=S QXKXDIKCIPXUPL-UHFFFAOYSA-N 0.000 claims 1
- 150000003467 sulfuric acid derivatives Chemical class 0.000 claims 1
- 150000001875 compounds Chemical group 0.000 abstract description 26
- 238000001308 synthesis method Methods 0.000 abstract description 6
- 239000000126 substance Substances 0.000 abstract description 5
- 239000000243 solution Substances 0.000 description 58
- 239000000463 material Substances 0.000 description 23
- 239000004065 semiconductor Substances 0.000 description 18
- 239000011541 reaction mixture Substances 0.000 description 16
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 15
- 238000000103 photoluminescence spectrum Methods 0.000 description 14
- 239000002096 quantum dot Substances 0.000 description 14
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 10
- 239000002244 precipitate Substances 0.000 description 10
- 238000003756 stirring Methods 0.000 description 10
- MJNSMKHQBIVKHV-UHFFFAOYSA-N selenium;trioctylphosphane Chemical compound [Se].CCCCCCCCP(CCCCCCCC)CCCCCCCC MJNSMKHQBIVKHV-UHFFFAOYSA-N 0.000 description 9
- UHYPYGJEEGLRJD-UHFFFAOYSA-N cadmium(2+);selenium(2-) Chemical compound [Se-2].[Cd+2] UHYPYGJEEGLRJD-UHFFFAOYSA-N 0.000 description 8
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 238000009826 distribution Methods 0.000 description 6
- 239000010408 film Substances 0.000 description 6
- 229910004613 CdTe Inorganic materials 0.000 description 5
- 238000005119 centrifugation Methods 0.000 description 5
- 238000005259 measurement Methods 0.000 description 5
- 238000010992 reflux Methods 0.000 description 5
- 239000007810 chemical reaction solvent Substances 0.000 description 4
- 239000011258 core-shell material Substances 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 229910001849 group 12 element Inorganic materials 0.000 description 4
- 230000035484 reaction time Effects 0.000 description 4
- SBIBMFFZSBJNJF-UHFFFAOYSA-N selenium;zinc Chemical compound [Se]=[Zn] SBIBMFFZSBJNJF-UHFFFAOYSA-N 0.000 description 4
- 150000001345 alkine derivatives Chemical class 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000000295 emission spectrum Methods 0.000 description 3
- 230000005525 hole transport Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 239000002105 nanoparticle Substances 0.000 description 3
- 238000001350 scanning transmission electron microscopy Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- HEDRZPFGACZZDS-UHFFFAOYSA-N Chloroform Chemical compound ClC(Cl)Cl HEDRZPFGACZZDS-UHFFFAOYSA-N 0.000 description 2
- 238000003917 TEM image Methods 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 238000000862 absorption spectrum Methods 0.000 description 2
- 150000007513 acids Chemical class 0.000 description 2
- 125000003342 alkenyl group Chemical group 0.000 description 2
- 230000000903 blocking effect Effects 0.000 description 2
- 238000001194 electroluminescence spectrum Methods 0.000 description 2
- 239000003960 organic solvent Substances 0.000 description 2
- 229920000128 polypyrrole Polymers 0.000 description 2
- 230000003595 spectral effect Effects 0.000 description 2
- 238000001228 spectrum Methods 0.000 description 2
- 239000010409 thin film Substances 0.000 description 2
- TVIVIEFSHFOWTE-UHFFFAOYSA-K tri(quinolin-8-yloxy)alumane Chemical compound [Al+3].C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1.C1=CN=C2C([O-])=CC=CC2=C1 TVIVIEFSHFOWTE-UHFFFAOYSA-K 0.000 description 2
- RMZAYIKUYWXQPB-UHFFFAOYSA-N trioctylphosphane Chemical compound CCCCCCCCP(CCCCCCCC)CCCCCCCC RMZAYIKUYWXQPB-UHFFFAOYSA-N 0.000 description 2
- NLECPILJYUVNEH-UHFFFAOYSA-N 1-[octoxy(octyl)phosphoryl]oxyoctane Chemical compound CCCCCCCCOP(=O)(CCCCCCCC)OCCCCCCCC NLECPILJYUVNEH-UHFFFAOYSA-N 0.000 description 1
- QZCSIAPWHFXTLJ-UHFFFAOYSA-N 2,3-diphenyl-1-propan-2-ylaziridine Chemical compound CC(C)N1C(C=2C=CC=CC=2)C1C1=CC=CC=C1 QZCSIAPWHFXTLJ-UHFFFAOYSA-N 0.000 description 1
- WKFQMDFSDQFAIC-UHFFFAOYSA-N 2,4-dimethylthiolane 1,1-dioxide Chemical compound CC1CC(C)S(=O)(=O)C1 WKFQMDFSDQFAIC-UHFFFAOYSA-N 0.000 description 1
- OGGKVJMNFFSDEV-UHFFFAOYSA-N 3-methyl-n-[4-[4-(n-(3-methylphenyl)anilino)phenyl]phenyl]-n-phenylaniline Chemical compound CC1=CC=CC(N(C=2C=CC=CC=2)C=2C=CC(=CC=2)C=2C=CC(=CC=2)N(C=2C=CC=CC=2)C=2C=C(C)C=CC=2)=C1 OGGKVJMNFFSDEV-UHFFFAOYSA-N 0.000 description 1
- 229910016036 BaF 2 Inorganic materials 0.000 description 1
- 229910004262 HgTe Inorganic materials 0.000 description 1
- 229920000265 Polyparaphenylene Polymers 0.000 description 1
- 241001233278 Scalopus aquaticus Species 0.000 description 1
- 229910007709 ZnTe Inorganic materials 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- RZJRJXONCZWCBN-UHFFFAOYSA-N alpha-octadecene Natural products CCCCCCCCCCCCCCCCCC RZJRJXONCZWCBN-UHFFFAOYSA-N 0.000 description 1
- JLATXDOZXBEBJX-UHFFFAOYSA-N cadmium(2+);selenium(2-);sulfide Chemical compound [S-2].[Se-2].[Cd+2].[Cd+2] JLATXDOZXBEBJX-UHFFFAOYSA-N 0.000 description 1
- 238000005234 chemical deposition Methods 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- LAWOZCWGWDVVSG-UHFFFAOYSA-N dioctylamine Chemical compound CCCCCCCCNCCCCCCCC LAWOZCWGWDVVSG-UHFFFAOYSA-N 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- RBTKNAXYKSUFRK-UHFFFAOYSA-N heliogen blue Chemical compound [Cu].[N-]1C2=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=NC([N-]1)=C(C=CC=C3)C3=C1N=C([N-]1)C3=CC=CC=C3C1=N2 RBTKNAXYKSUFRK-UHFFFAOYSA-N 0.000 description 1
- 125000000623 heterocyclic group Chemical group 0.000 description 1
- 238000002173 high-resolution transmission electron microscopy Methods 0.000 description 1
- 238000002347 injection Methods 0.000 description 1
- 239000007924 injection Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000004020 luminiscence type Methods 0.000 description 1
- 229960002523 mercuric chloride Drugs 0.000 description 1
- LWJROJCJINYWOX-UHFFFAOYSA-L mercury dichloride Chemical compound Cl[Hg]Cl LWJROJCJINYWOX-UHFFFAOYSA-L 0.000 description 1
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- 238000001451 molecular beam epitaxy Methods 0.000 description 1
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Abstract
Description
Claims (22)
- (a) 12족 금속 또는 12족 금속의 아세테이트(acetate), 12족 금속의 아세틸아세토네이트(acetylacetonate), 12족 금속의 아이오다이드(iodide), 12족 금속의 브로마이드(bromide), 12족 금속의 클로라이드(chloride), 12족 금속의 플루오라이드(fluoride), 12족 금속의 카보네이트(carbonate), 12족 금속의 시아나이드(cyanide), 12족 금속의 니트레이트(nitrate), 12족 금속의 옥사이드(oxide), 12족 금속의 퍼옥사이드(peroxide), 12족 금속의 퍼클로레이트(perchlorate), 12족 금속의 설페이트(sulfate), 12족 금속의 포스파이드 또는 그 혼합물 중의 어느 하나인 12족 금속 전구체를 분산제 및 용매와 혼합하고, 이를 가열하여 12족 금속 전구체 용액을 얻는 단계;(b) 16족 원소, 또는 분말 형태의 16족 원소 또는 16족 원소의 트리메틸실릴(TMS=Trimethylsilyl)의 16족 원소 전구체를, 이와 배위 가능한 용매에 용해하여 16족 원소 전구체 용액을 얻는 단계;(c) 상기 12족 금속 전구체 용액과 16족 원소 전구체 용액을 혼합하여 반응시킨 후, 결정을 성장시키는 단계를 포함하는 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 상기 (b) 단계의 16족 원소 또는 그 전구체로서 2종 이상의 16족 원소 전구체를 사용하는 경우,상기 (c) 단계에 있어서, 상기 12족 금속 전구체 용액에 상기 2종 이상의 16족 원소 또는 그 전구체 용액을 부가하는 경우, 2종 이상의 16족 원소 전구체 용액을 동시에 부가하거나 또는 순차적으로 부가하는 것을 특징으로 하는 반도체 나노 결정의 제조방법.
- 제1항에 있어서, 상기 12족 금속은 Zn, Cd, Hg 또는 그 혼합물 중의 어느 하나인 것을 특징으로 하는 반도체 나노 결정의 제조 방법.
- 제1항에 있어서, 상기 12족 금속 전구체는 아세트산아연, 아연 아세틸아세토네이트, 요도화 아연, 브롬화아연, 염화아연, 불화아연, 아연 카보네이트, 아연 시아나이드(Zinc cyanide), 질산아연(Zinc nitrate), 아연 옥사이드(Zinc oxide), 아연 퍼옥사이드(Zinc peroxide), 아연 퍼클로레이트(Zinc perchlorate), 아연 설페이트(Zinc sulfate), 카드뮴 아세테이트(Cadmium acetate), 카드뮴 아세틸아세토네이트(Cadmium acetylacetonate), 요도화카드뮴(Cadmium iodide), 브롬화카드뮴, 염화카드뮴, 불화카드뮴, 카드뮴 카보네이트, 질산카드뮴, 카드뮴 옥사이드, 카드뮴 퍼클로레이트, 카드뮴 포스파이드, 황산카드뮴, 아세트산수은, 요도화수은, 브롬화수은, 염화수은, 불화수은, 수은 시아나이드(Mercury cyanide), 질산수은(Mercury nitrate), 수은 옥사이드(Mercury oxide), 수은 퍼클로레이트(Mercury perchlorate), 황산수은(Mercury sulfate) 또는 그 혼합물 중의 어느 하나인 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 상기 분산제는 탄소수 2내지 18의 알킬카르복실산, 탄소수 2 내지 18의 알케닐카르복실산, 탄소수 2 내지 18의 알킬술폰산, 탄소수 2 내지 18의 알케닐술폰산, 탄소수 2 내지 18의 알킬아민, 탄소수 2 내지 18의 알케닐아민 및 탄소수 6 내지 18의 알킬 포스피닉산으로 이루어진 군으로부터 선택된 하나 이상인 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 상기 분산제는 올레인산, 스테아르산, 팔미트산, 헥실 포스포닉산(hexyl phosphonic acid), n-옥틸포스포닉산, 테트라데실 포스포닉산, 옥타데실 포스포닉산, n-옥틸 아민 및 헥실데실 아민으로 이루어진 군으로부터 선택된 하나 이상인 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 12족 금속 또는 12족 금속 전구체와, 분산제의 혼합비는 1:0.1에서 1:100 몰비인 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 상기 (a) 및 (b) 단계의 용매는 1차 알킬 아민, 2차 알킬 아민, 3차 알킬 아민, 질소 함유 헤테로고리 화합물, 황 함유 헤테로고리 화합물, 탄소수 6 내지 22개의 알칸, 탄소수 6 내지 22개의 알켄 및 탄소수 6내지 22개의 알킨으로 이루어진 군으로부터 선택된 하나 이상인 것을 특징으로 하는 반도체 나노결정의 제조 방법
- 제8항에 있어서, 상기 용매는 트리옥틸아민, 도데실아민, 헥사데실아민, 디메틸도데실아민, 옥사데센(octadecene)으로 이루어진 군으로부터 선택된 하나 이상인 것을 특징으로 하는 반도체 나노결정의 제조 방법.
- 제1항에 있어서, 상기12족 금속 전구체 용액의 농도는 0.001M 내지 2M 인 것을 특징으로 하는 반도체 나노결정의 제조 방법.
- 제1항에 있어서, 상기 (a) 단계에 있어서, 가열이 100 내지 400℃에서 실시되는 것을 특징으로 하는 반도체 나노결정의 제조방법.
- 제1항에 있어서, 상기 16족 원소는 S, Se, Te 또는 그 혼합물 중의 어느 하나인 것을 특징으로 하는 반도체 나노 결정의 제조 방법.
- 제1항에 있어서, 상기 16족 원소의 전구체는 황 분말, 셀레늄 분말, 텔러륨 분말, 트리메틸실릴 설퍼 (S(TMS), TMS=Trimethylsilyl), 트리메틸실릴 셀레늄 (Se(TMS)) 또는 트리메틸실릴 텔러륨 (Te(TMS))중의 어느 하나인 것을 특징으로 하는 반도체 나노결정의 제조 방법.
- 제1항에 있어서, 상기 16족 원소 전구체 용액의 농도는 0.001M 내지 2M 인 것을 특징으로 하는 반도체 나노 결정의 제조방법.
- 제1항에 있어서, 상기 16족 원소의 전구체 용액과 용매의 혼합비는0.1:1 내지 1:100 몰비인 것을 특징으로 하는 제조 방법.
- 제1항에 있어서, 상기 (c) 단계에 있어서, 반응 온도는 50℃ 내지 400℃인 것을 특징으로 하는 반도체 나노 결정의 제조방법.
- 제1항에 있어서, 상기 결정 성장에 걸리는 시간이 1초 내지 10시간인 것을 특징으로 하는 반도체 나노 결정의 제조 방법.
- 1종 이상의 12족 금속과, 1종 이상의 16족 원소로 구성되는 삼성분계 또는 사성분계 합금이 ZnSSe, ZnSeTe, ZnSTe, CdSSe, CdSeTe, CdSTe, HgSSe, HgSeTe, HgSTe, ZnCdS, ZnCdSe, ZnCdTe, ZnHgS, ZnHgSe, ZnHgTe, CdHgS, CdHgSe, CdHgTe, ZnCdSSe, ZnHgSSe, ZnCdSeTe, ZnHgSeTe, CdHgSSe 또는 CdHgSeTe 중의 어느 하나인 것을 특징으로 하는 유기 전계 발광 소자용 반도체 나노 결정.
- 삭제
- 제18항에 있어서, 상기 나노결정의 양자구조가 구형, 막대형, 트리포드(tripod)형, 테트라포드(tetrapod)형, 입방체(cube)형, 박스(box)형 또는 스타(star)형 중의 어느 하나인 것을 특징으로 하는 유기 전계 발광 소자용 반도체 나노결정.
- 한 쌍의 전극 사이에 발광층을 포함하는 유기 전계 발광 소자에 있어서,상기 발광층이 제18항의 반도체 나노 결정을 포함한 것을 특징으로 하는 유기 전계 발광 소자.
- 제21항에 있어서, 상기 발광층이 삼성분계 또는 사성분계 반도체 나노 결정으로서, 상기 나노 결정의 양자 구조가 구형, 막대형, 트리포드(tripod)형, 테트라포드(tetrapod)형, 입방체(cube)형, 박스(box)형 또는 스타(star)형 중의 어느 하나인 반도체 나노 결정을 포함하는 것을 특징으로 하는 유기 전계 발광 소자.
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