KR100645349B1 - 금속부재 내장 소결체의 제조 방법 - Google Patents
금속부재 내장 소결체의 제조 방법 Download PDFInfo
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- KR100645349B1 KR100645349B1 KR1020050047469A KR20050047469A KR100645349B1 KR 100645349 B1 KR100645349 B1 KR 100645349B1 KR 1020050047469 A KR1020050047469 A KR 1020050047469A KR 20050047469 A KR20050047469 A KR 20050047469A KR 100645349 B1 KR100645349 B1 KR 100645349B1
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- alumina
- sintered body
- metal member
- electrode
- sintering
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- 238000004519 manufacturing process Methods 0.000 title claims abstract description 41
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims abstract description 195
- 229910052751 metal Inorganic materials 0.000 claims abstract description 59
- 239000002184 metal Substances 0.000 claims abstract description 59
- 238000005245 sintering Methods 0.000 claims abstract description 46
- 238000007639 printing Methods 0.000 claims abstract description 40
- 239000003870 refractory metal Substances 0.000 claims abstract description 7
- 238000000034 method Methods 0.000 claims description 41
- 239000000843 powder Substances 0.000 claims description 40
- 239000011230 binding agent Substances 0.000 claims description 15
- 229910052721 tungsten Inorganic materials 0.000 claims description 11
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 claims description 7
- 239000010937 tungsten Substances 0.000 claims description 7
- 238000007731 hot pressing Methods 0.000 claims description 5
- 238000002844 melting Methods 0.000 claims description 4
- 230000008018 melting Effects 0.000 claims description 4
- 238000003825 pressing Methods 0.000 claims description 3
- 239000000919 ceramic Substances 0.000 description 81
- 239000000758 substrate Substances 0.000 description 57
- 239000010410 layer Substances 0.000 description 42
- 239000004065 semiconductor Substances 0.000 description 20
- 230000008569 process Effects 0.000 description 16
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 12
- 238000009792 diffusion process Methods 0.000 description 9
- 238000011156 evaluation Methods 0.000 description 9
- 238000011068 loading method Methods 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 239000010955 niobium Substances 0.000 description 8
- 239000010948 rhodium Substances 0.000 description 8
- 239000010936 titanium Substances 0.000 description 8
- 229910001182 Mo alloy Inorganic materials 0.000 description 7
- 229910039444 MoC Inorganic materials 0.000 description 6
- 238000011109 contamination Methods 0.000 description 6
- 229910052750 molybdenum Inorganic materials 0.000 description 6
- 238000000465 moulding Methods 0.000 description 6
- 238000001179 sorption measurement Methods 0.000 description 6
- 230000002411 adverse Effects 0.000 description 5
- 238000010438 heat treatment Methods 0.000 description 5
- QIJNJJZPYXGIQM-UHFFFAOYSA-N 1lambda4,2lambda4-dimolybdacyclopropa-1,2,3-triene Chemical compound [Mo]=C=[Mo] QIJNJJZPYXGIQM-UHFFFAOYSA-N 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 4
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 4
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 4
- 229910001080 W alloy Inorganic materials 0.000 description 4
- 230000007797 corrosion Effects 0.000 description 4
- 238000005260 corrosion Methods 0.000 description 4
- 238000005530 etching Methods 0.000 description 4
- 239000010408 film Substances 0.000 description 4
- 239000007789 gas Substances 0.000 description 4
- 239000008187 granular material Substances 0.000 description 4
- 229910052735 hafnium Inorganic materials 0.000 description 4
- VBJZVLUMGGDVMO-UHFFFAOYSA-N hafnium atom Chemical compound [Hf] VBJZVLUMGGDVMO-UHFFFAOYSA-N 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 239000011733 molybdenum Substances 0.000 description 4
- MGRWKWACZDFZJT-UHFFFAOYSA-N molybdenum tungsten Chemical compound [Mo].[W] MGRWKWACZDFZJT-UHFFFAOYSA-N 0.000 description 4
- 229910052758 niobium Inorganic materials 0.000 description 4
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 description 4
- 229910052697 platinum Inorganic materials 0.000 description 4
- 229910052702 rhenium Inorganic materials 0.000 description 4
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 4
- 229910052703 rhodium Inorganic materials 0.000 description 4
- MHOVAHRLVXNVSD-UHFFFAOYSA-N rhodium atom Chemical compound [Rh] MHOVAHRLVXNVSD-UHFFFAOYSA-N 0.000 description 4
- 239000002002 slurry Substances 0.000 description 4
- 229910052715 tantalum Inorganic materials 0.000 description 4
- GUVRBAGPIYLISA-UHFFFAOYSA-N tantalum atom Chemical compound [Ta] GUVRBAGPIYLISA-UHFFFAOYSA-N 0.000 description 4
- 239000010409 thin film Substances 0.000 description 4
- 229910052719 titanium Inorganic materials 0.000 description 4
- UONOETXJSWQNOL-UHFFFAOYSA-N tungsten carbide Chemical compound [W+]#[C-] UONOETXJSWQNOL-UHFFFAOYSA-N 0.000 description 4
- 238000001035 drying Methods 0.000 description 3
- 239000002994 raw material Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000002230 thermal chemical vapour deposition Methods 0.000 description 3
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 2
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000005234 chemical deposition Methods 0.000 description 2
- 238000009694 cold isostatic pressing Methods 0.000 description 2
- 238000000280 densification Methods 0.000 description 2
- 239000003344 environmental pollutant Substances 0.000 description 2
- 238000010304 firing Methods 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 238000007737 ion beam deposition Methods 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000000203 mixture Substances 0.000 description 2
- 229910052757 nitrogen Inorganic materials 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000005289 physical deposition Methods 0.000 description 2
- 231100000719 pollutant Toxicity 0.000 description 2
- 238000007650 screen-printing Methods 0.000 description 2
- 239000007921 spray Substances 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- 239000001856 Ethyl cellulose Substances 0.000 description 1
- ZZSNKZQZMQGXPY-UHFFFAOYSA-N Ethyl cellulose Chemical compound CCOCC1OC(OC)C(OCC)C(OCC)C1OC1C(O)C(O)C(OC)C(CO)O1 ZZSNKZQZMQGXPY-UHFFFAOYSA-N 0.000 description 1
- 239000004372 Polyvinyl alcohol Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 239000000853 adhesive Substances 0.000 description 1
- 230000001070 adhesive effect Effects 0.000 description 1
- 239000012790 adhesive layer Substances 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 229910052799 carbon Inorganic materials 0.000 description 1
- 230000015556 catabolic process Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 239000002131 composite material Substances 0.000 description 1
- 238000013329 compounding Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000002270 dispersing agent Substances 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 229920001249 ethyl cellulose Polymers 0.000 description 1
- 235000019325 ethyl cellulose Nutrition 0.000 description 1
- 238000009766 low-temperature sintering Methods 0.000 description 1
- 238000005459 micromachining Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000005240 physical vapour deposition Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920002451 polyvinyl alcohol Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000011819 refractory material Substances 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007493 shaping process Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007569 slipcasting Methods 0.000 description 1
- 210000000813 small intestine Anatomy 0.000 description 1
- 238000003892 spreading Methods 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 230000003746 surface roughness Effects 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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Abstract
Description
실시예 1 | 실시예 2 | 실시예 3 | 실시예 4 | 실시예 5 | 실시예 6 | |
바인더 | 있음 | 없음 | ||||
인쇄 페이스트 | Mo, W | MoC, WC | W, Al2O3 | Mo, W | MoC, WC | W, Al2O3 |
확산 상태 | 확산있음 | 확산없음 | 확산없음 | 확산있음 | 확산없음 | 확산있음 |
체적저항율(Ωㆍcm) | 1×1012 | 1×1017 | 1×1017 | 1×1012 | 1×1017 | 1×1017 |
계면전단강도(MPa) | 100 | 0 | 130-300 | 80 | 30 | 80-150 |
실시예 7 | 실시예 8 | 실시예 9 | 실시예 10 | 실시예 11 | |
알루미나 첨가량(중량%) | 0 | 5 | 10 | 20 | 30 |
체적 저항율(Ωㆍcm) | 1×1012 | 1×1017 | 1×1017 | 1×1017 | 1×1017 |
계면 전단 강도(MPa) | 100 | 130 | 200 | 250 | 300 |
성형체 이용 | 소결체 이용 | |||||||||
비교예 1 | 비교예 2 | 비교예 3 | 비교예 4 | 비교예 5 | 실시예 12 | 실시예 13 | 실시예 14 | 실시예 15 | 실시예 16 | |
소결 온도 (℃) | 1350 | 1400 | 1600 | 1650 | 1700 | 1350 | 1400 | 1600 | 1650 | 1700 |
평탄도 (mm) | 0.51 | 0.20 | 0.34 | 0.46 | 0.50 | 0.19 | 0.05 | 0.12 | 0.15 | 0.20 |
Claims (9)
- 알루미나 소결체 또는 알루미나 예비소결체를 형성하는 단계와,상기 알루미나 소결체 또는 알루미나 예비소결체 상에 내화 금속을 포함하는 인쇄 페이스트를 인쇄함으로써 금속부재를 형성하는 단계와,상기 금속부재 상에 알루미나 성형체(compact)를 형성하는 단계와,알루미나 성형체, 금속부재, 그리고 알루미나 소결체 또는 알루미나 예비소결체를 소결하는 단계를 포함하고,상기 금속부재는 텅스텐을 포함하며, 상기 인쇄 페이스트는 약 5 내지 약 30 중량%의 알루미나를 함유하는 것인 금속부재 내장 소결체의 제조 방법.
- 제1항에 있어서, 상기 금속부재 내장 소결체는 히터, 정전 척 또는 서셉터인 것인 금속부재 내장 소결체의 제조 방법.
- 제1항에 있어서, 상기 금속부재의 융점은 약 1650℃ 이상이고, 금속부재와 알루미나 사이의 열팽창 계수의 차이는 약 5×10-6/K 이하인 것인 금속부재 내장 소결체의 제조 방법.
- 삭제
- 삭제
- 제1항에 있어서, 상기 알루미나 성형체는 바인더를 함유하는 것인 금속부재 내장 소결체의 제조 방법.
- 제1항에 있어서, 상기 알루미나 소결체 또는 알루미나 예비소결체 및 상기 알루미나 성형체용 알루미나 분말의 순도는 약 99.5% 이상인 것인 금속부재 내장 소결체의 제조 방법.
- 제1항에 있어서, 상기 알루미나 성형체, 금속부재, 그리고 알루미나 소결체 또는 알루미나 예비소결체는 약 1400℃ 내지 약 1650℃의 소결 온도에서 고온 프레싱(hot pressing)에 의해 소결되는 것인 금속부재 내장 소결체의 제조 방법.
- 제1항에 있어서, 상기 알루미나 성형체는 금속 부재 상에 충전된 알루미나 분말을 금형에서 프레싱함으로써 형성되는 것인 금속부재 내장 소결체의 제조 방법.
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JP2004164415A JP4476701B2 (ja) | 2004-06-02 | 2004-06-02 | 電極内蔵焼結体の製造方法 |
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EP (1) | EP1602635B1 (ko) |
JP (1) | JP4476701B2 (ko) |
KR (1) | KR100645349B1 (ko) |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100883155B1 (ko) | 2006-07-19 | 2009-02-10 | 니뽄 가이시 가부시키가이샤 | 정전척 히터 |
Families Citing this family (82)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US9101978B2 (en) | 2002-12-08 | 2015-08-11 | Baker Hughes Incorporated | Nanomatrix powder metal compact |
US9682425B2 (en) | 2009-12-08 | 2017-06-20 | Baker Hughes Incorporated | Coated metallic powder and method of making the same |
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JP2007258610A (ja) * | 2006-03-24 | 2007-10-04 | Ngk Insulators Ltd | アルミナ焼成体 |
JP4796523B2 (ja) * | 2006-03-24 | 2011-10-19 | 日本碍子株式会社 | セラミックス焼成体の製造方法 |
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JP5111954B2 (ja) * | 2007-06-22 | 2013-01-09 | 新光電気工業株式会社 | 静電チャック及びその製造方法 |
KR100841039B1 (ko) * | 2007-09-21 | 2008-06-24 | 김문수 | 마이크로파 소결장치 |
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US8425651B2 (en) | 2010-07-30 | 2013-04-23 | Baker Hughes Incorporated | Nanomatrix metal composite |
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US9227243B2 (en) | 2009-12-08 | 2016-01-05 | Baker Hughes Incorporated | Method of making a powder metal compact |
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US9243475B2 (en) | 2009-12-08 | 2016-01-26 | Baker Hughes Incorporated | Extruded powder metal compact |
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US8528633B2 (en) | 2009-12-08 | 2013-09-10 | Baker Hughes Incorporated | Dissolvable tool and method |
US8424610B2 (en) | 2010-03-05 | 2013-04-23 | Baker Hughes Incorporated | Flow control arrangement and method |
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US9090955B2 (en) | 2010-10-27 | 2015-07-28 | Baker Hughes Incorporated | Nanomatrix powder metal composite |
JP5458050B2 (ja) | 2011-03-30 | 2014-04-02 | 日本碍子株式会社 | 静電チャックの製法 |
JP5972630B2 (ja) * | 2011-03-30 | 2016-08-17 | 日本碍子株式会社 | 静電チャックの製法 |
US9080098B2 (en) | 2011-04-28 | 2015-07-14 | Baker Hughes Incorporated | Functionally gradient composite article |
US8631876B2 (en) | 2011-04-28 | 2014-01-21 | Baker Hughes Incorporated | Method of making and using a functionally gradient composite tool |
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US9707739B2 (en) | 2011-07-22 | 2017-07-18 | Baker Hughes Incorporated | Intermetallic metallic composite, method of manufacture thereof and articles comprising the same |
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US9057242B2 (en) | 2011-08-05 | 2015-06-16 | Baker Hughes Incorporated | Method of controlling corrosion rate in downhole article, and downhole article having controlled corrosion rate |
US9033055B2 (en) | 2011-08-17 | 2015-05-19 | Baker Hughes Incorporated | Selectively degradable passage restriction and method |
US9109269B2 (en) | 2011-08-30 | 2015-08-18 | Baker Hughes Incorporated | Magnesium alloy powder metal compact |
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US9090956B2 (en) | 2011-08-30 | 2015-07-28 | Baker Hughes Incorporated | Aluminum alloy powder metal compact |
US9643144B2 (en) | 2011-09-02 | 2017-05-09 | Baker Hughes Incorporated | Method to generate and disperse nanostructures in a composite material |
US9133695B2 (en) | 2011-09-03 | 2015-09-15 | Baker Hughes Incorporated | Degradable shaped charge and perforating gun system |
US9187990B2 (en) | 2011-09-03 | 2015-11-17 | Baker Hughes Incorporated | Method of using a degradable shaped charge and perforating gun system |
US9347119B2 (en) | 2011-09-03 | 2016-05-24 | Baker Hughes Incorporated | Degradable high shock impedance material |
US9284812B2 (en) | 2011-11-21 | 2016-03-15 | Baker Hughes Incorporated | System for increasing swelling efficiency |
US9010416B2 (en) | 2012-01-25 | 2015-04-21 | Baker Hughes Incorporated | Tubular anchoring system and a seat for use in the same |
US9068428B2 (en) | 2012-02-13 | 2015-06-30 | Baker Hughes Incorporated | Selectively corrodible downhole article and method of use |
JP6049509B2 (ja) | 2012-03-28 | 2016-12-21 | 日本碍子株式会社 | セラミックヒーター、ヒーター電極及びセラミックヒーターの製法 |
US9605508B2 (en) | 2012-05-08 | 2017-03-28 | Baker Hughes Incorporated | Disintegrable and conformable metallic seal, and method of making the same |
KR101495850B1 (ko) * | 2013-02-28 | 2015-02-25 | (주)나노엘엔피 | 세라믹 정전척 및 그 제조방법 |
JP6049510B2 (ja) * | 2013-03-21 | 2016-12-21 | 日本碍子株式会社 | セラミックヒータ及びその製法 |
US9816339B2 (en) | 2013-09-03 | 2017-11-14 | Baker Hughes, A Ge Company, Llc | Plug reception assembly and method of reducing restriction in a borehole |
CA2936851A1 (en) | 2014-02-21 | 2015-08-27 | Terves, Inc. | Fluid activated disintegrating metal system |
US10689740B2 (en) | 2014-04-18 | 2020-06-23 | Terves, LLCq | Galvanically-active in situ formed particles for controlled rate dissolving tools |
US11167343B2 (en) | 2014-02-21 | 2021-11-09 | Terves, Llc | Galvanically-active in situ formed particles for controlled rate dissolving tools |
US10865465B2 (en) | 2017-07-27 | 2020-12-15 | Terves, Llc | Degradable metal matrix composite |
TWI553723B (zh) * | 2014-05-27 | 2016-10-11 | Crystalwise Technology | Sapphire wafer processing methods and their processing in the process of intermediates |
KR101581920B1 (ko) * | 2014-09-03 | 2015-12-31 | 주식회사 케이에스엠컴포넌트 | 세라믹 히터 및 세라믹 히터 제조 방법 |
US9910026B2 (en) | 2015-01-21 | 2018-03-06 | Baker Hughes, A Ge Company, Llc | High temperature tracers for downhole detection of produced water |
US10378303B2 (en) | 2015-03-05 | 2019-08-13 | Baker Hughes, A Ge Company, Llc | Downhole tool and method of forming the same |
US10221637B2 (en) | 2015-08-11 | 2019-03-05 | Baker Hughes, A Ge Company, Llc | Methods of manufacturing dissolvable tools via liquid-solid state molding |
DE102016101249A1 (de) | 2015-11-02 | 2017-05-04 | Epcos Ag | Sensorelement und Verfahren zur Herstellung eines Sensorelements |
US10016810B2 (en) | 2015-12-14 | 2018-07-10 | Baker Hughes, A Ge Company, Llc | Methods of manufacturing degradable tools using a galvanic carrier and tools manufactured thereof |
CN105597931A (zh) * | 2016-02-01 | 2016-05-25 | 郑州新登电热陶瓷有限公司 | 共烧静电吸附片材 |
JP7008571B2 (ja) * | 2018-05-11 | 2022-01-25 | 日本特殊陶業株式会社 | セラミックス体 |
CN112534565A (zh) * | 2018-08-29 | 2021-03-19 | 京瓷株式会社 | 静电卡盘及静电卡盘的制造方法 |
US11309203B2 (en) * | 2018-11-13 | 2022-04-19 | Samsung Electronics Co., Ltd. | Wafer stage and method of manufacturing the same |
JP7214867B2 (ja) | 2019-06-28 | 2023-01-30 | 日本碍子株式会社 | 静電チャック |
DE102019127924B3 (de) * | 2019-10-16 | 2021-01-21 | Tdk Electronics Ag | Bauelement und Verfahren zur Herstellung eines Bauelements |
DE102019127915A1 (de) | 2019-10-16 | 2021-04-22 | Tdk Electronics Ag | Sensorelement und Verfahren zur Herstellung eines Sensorelements |
WO2021172261A1 (ja) | 2020-02-26 | 2021-09-02 | 日本碍子株式会社 | セラミックヒータ及びその製法 |
CN111620701B (zh) * | 2020-03-27 | 2022-05-13 | 烟台睿瓷新材料技术有限公司 | 一种多层复合陶瓷盘及其制造方法 |
JP7465771B2 (ja) | 2020-09-15 | 2024-04-11 | 日本碍子株式会社 | 複合焼結体、半導体製造装置部材および複合焼結体の製造方法 |
KR102416778B1 (ko) * | 2020-11-23 | 2022-07-06 | 한국생산기술연구원 | 유전체와 전극의 어셈블리 및 그 제조 방법 |
CN114851352B (zh) * | 2022-05-23 | 2023-11-28 | 松山湖材料实验室 | 电阻加热元件及其制造方法 |
DE102022210391A1 (de) | 2022-09-30 | 2024-04-04 | Siemens Aktiengesellschaft | Herstellverfahren, Kontaktelement und elektromechanisches Schutzschaltgerät |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20010043454A1 (en) * | 2000-04-25 | 2001-11-22 | Tdk Corporation | Multi-layer ceramic electronic device and method for producing same |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3386683B2 (ja) | 1997-03-12 | 2003-03-17 | 日本碍子株式会社 | 金属部材内蔵セラミックス部材の製造方法 |
JP3554460B2 (ja) | 1997-03-17 | 2004-08-18 | 日本碍子株式会社 | 金属部材内蔵セラミックス部材の製造方法 |
JP3691649B2 (ja) | 1997-10-28 | 2005-09-07 | 日本特殊陶業株式会社 | セラミックヒータ |
JPH11312729A (ja) | 1998-04-28 | 1999-11-09 | Kyocera Corp | 静電チャック |
CN1409871A (zh) | 1999-12-09 | 2003-04-09 | 圣戈本陶瓷及塑料股份有限公司 | 采用平面薄膜电极的静电吸盘 |
JP2001308163A (ja) | 2000-02-08 | 2001-11-02 | Ibiden Co Ltd | 半導体製造・検査装置用セラミック基板 |
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Publication number | Priority date | Publication date | Assignee | Title |
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US20010043454A1 (en) * | 2000-04-25 | 2001-11-22 | Tdk Corporation | Multi-layer ceramic electronic device and method for producing same |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
KR100883155B1 (ko) | 2006-07-19 | 2009-02-10 | 니뽄 가이시 가부시키가이샤 | 정전척 히터 |
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