JPWO2021070381A1 - - Google Patents

Info

Publication number
JPWO2021070381A1
JPWO2021070381A1 JP2021551088A JP2021551088A JPWO2021070381A1 JP WO2021070381 A1 JPWO2021070381 A1 JP WO2021070381A1 JP 2021551088 A JP2021551088 A JP 2021551088A JP 2021551088 A JP2021551088 A JP 2021551088A JP WO2021070381 A1 JPWO2021070381 A1 JP WO2021070381A1
Authority
JP
Japan
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021551088A
Other languages
Japanese (ja)
Other versions
JP7378098B2 (en
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Publication of JPWO2021070381A1 publication Critical patent/JPWO2021070381A1/ja
Application granted granted Critical
Publication of JP7378098B2 publication Critical patent/JP7378098B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67144Apparatus for mounting on conductive members, e.g. leadframes or conductors on insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67132Apparatus for placing on an insulating substrate, e.g. tape
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67242Apparatus for monitoring, sorting or marking
    • H01L21/67259Position monitoring, e.g. misposition detection or presence detection
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H01L21/681Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment using optical controlling means

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Supply And Installment Of Electrical Components (AREA)
JP2021551088A 2019-10-11 2019-10-11 parts supply device Active JP7378098B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/040302 WO2021070381A1 (en) 2019-10-11 2019-10-11 Component supply device

Publications (2)

Publication Number Publication Date
JPWO2021070381A1 true JPWO2021070381A1 (en) 2021-04-15
JP7378098B2 JP7378098B2 (en) 2023-11-13

Family

ID=75437844

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021551088A Active JP7378098B2 (en) 2019-10-11 2019-10-11 parts supply device

Country Status (4)

Country Link
JP (1) JP7378098B2 (en)
CN (1) CN114556535A (en)
DE (1) DE112019007800T5 (en)
WO (1) WO2021070381A1 (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW460906B (en) * 1999-03-05 2001-10-21 Siemens Ag Equipment to insert a substrate with flip-chips
JP3636127B2 (en) * 2001-10-12 2005-04-06 松下電器産業株式会社 Electronic component mounting apparatus and electronic component mounting method
DE10203601A1 (en) * 2002-01-30 2003-08-14 Siemens Ag Chip removal device, chip removal system, placement system and method for removing chips from a wafer
JP3832460B2 (en) 2003-09-17 2006-10-11 松下電器産業株式会社 Electronic component mounting apparatus and electronic component mounting method
JP2008066472A (en) * 2006-09-06 2008-03-21 Canon Machinery Inc Composite processor for workpiece
DE102016117815B4 (en) * 2016-09-21 2018-04-12 Asm Assembly Systems Gmbh & Co. Kg Caching of FCOB chips in a chip transfer device
DE102017124582A1 (en) * 2017-10-20 2019-04-25 Asm Assembly Systems Gmbh & Co. Kg Complementary tool for chip transfer device with removal tool and turning tool

Also Published As

Publication number Publication date
JP7378098B2 (en) 2023-11-13
DE112019007800T5 (en) 2022-08-11
WO2021070381A1 (en) 2021-04-15
CN114556535A (en) 2022-05-27

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