JPWO2009054121A1 - 弾性境界波装置 - Google Patents
弾性境界波装置Info
- Publication number
- JPWO2009054121A1 JPWO2009054121A1 JP2009537934A JP2009537934A JPWO2009054121A1 JP WO2009054121 A1 JPWO2009054121 A1 JP WO2009054121A1 JP 2009537934 A JP2009537934 A JP 2009537934A JP 2009537934 A JP2009537934 A JP 2009537934A JP WO2009054121 A1 JPWO2009054121 A1 JP WO2009054121A1
- Authority
- JP
- Japan
- Prior art keywords
- medium layer
- boundary acoustic
- medium
- acoustic wave
- transverse wave
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000463 material Substances 0.000 claims abstract description 39
- 229910013641 LiNbO 3 Inorganic materials 0.000 claims description 24
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 5
- TWNQGVIAIRXVLR-UHFFFAOYSA-N oxo(oxoalumanyloxy)alumane Chemical compound O=[Al]O[Al]=O TWNQGVIAIRXVLR-UHFFFAOYSA-N 0.000 claims description 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims description 3
- 230000008878 coupling Effects 0.000 abstract description 21
- 238000010168 coupling process Methods 0.000 abstract description 21
- 238000005859 coupling reaction Methods 0.000 abstract description 21
- 238000006073 displacement reaction Methods 0.000 description 8
- 229910018068 Li 2 O Inorganic materials 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 229910052738 indium Inorganic materials 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 229910052748 manganese Inorganic materials 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000010453 quartz Substances 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 230000035945 sensitivity Effects 0.000 description 2
- 229910052709 silver Inorganic materials 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
Images
Classifications
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/0222—Details of interface-acoustic, boundary, pseudo-acoustic or Stonely wave devices
-
- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/02—Details
- H03H9/02535—Details of surface acoustic wave devices
- H03H9/02543—Characteristics of substrate, e.g. cutting angles
- H03H9/02574—Characteristics of substrate, e.g. cutting angles of combined substrates, multilayered substrates, piezoelectrical layers on not-piezoelectrical substrate
Landscapes
- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
Description
12 媒質層(第3の媒質層)
13 媒質層(第2の媒質層)
14 電極
51 高周波回路
1001 弾性境界波装置
1001A 界面
2001 電子機器
12 媒質層(第3の媒質層)
13 媒質層(第2の媒質層)
14 電極
51 高周波回路
1001 弾性境界波装置
1001A 界面
2001 電子機器
Claims (9)
- 圧電材料よりなる第1の媒質層と、
前記第1の媒質層上に設けられた第2の媒質層と、
前記第2の媒質層上に設けられた第3の媒質層と、
前記第2の媒質と前記第3の媒質層との間の界面に設けられ、前記第3の媒質層を駆動して横波を発生させる電極と、
を備え、
前記第3の媒質層における横波の伝播速度は前記第1の媒質層における横波の伝播速度より小さく、
前記第2の媒質層における横波の伝播速度が前記第1の媒質層における横波の伝播速度よりも小さい、
弾性境界波装置。 - 前記第1の媒質層はLiNbO3を主に含有する、請求項1に記載の弾性境界波装置。
- 前記第3の媒質層はSiO2を主に含有する、請求項2に記載の弾性境界波装置。
- 前記第2の媒質層の主成分は前記第1の媒質層の主成分と同じである、請求項1に記載の弾性境界波装置。
- 圧電材料よりなる第1の媒質層と、
前記第1の媒質層上に設けられた第2の媒質層と、
前記第2の媒質層上に設けられた第3の媒質層と、
前記第2の媒質と前記第3の媒質層との間の界面に設けられ、前記第3の媒質層を駆動して横波を発生させる電極と、
を備え、
前記第3の媒質層における横波の伝播速度は前記第1の媒質層における横波の伝播速度より大きく、
前記第2の媒質層における横波の伝播速度が前記第1の媒質層における横波の伝播速度よりも大きい、
弾性境界波装置。 - 前記第1の媒質層はLiNbO3を主に含有する、請求項5に記載の弾性境界波装置。
- 前記第3の媒質層が酸化アルミニウムと酸化ケイ素とを主に含有する混合酸化物よりなる、請求項6に記載の弾性境界波装置。
- 前記第2の媒質層の主成分は前記第1の媒質層の主成分と同じである、請求項5に記載の弾性境界波装置。
- 請求項1から8のいずれか1つに記載の弾性境界波装置と、
前記弾性境界波装置が結合する高周波回路と、
を備えた電子機器。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2009537934A JP5041004B2 (ja) | 2007-10-23 | 2008-10-21 | 弾性境界波装置 |
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007274972 | 2007-10-23 | ||
JP2007274972 | 2007-10-23 | ||
PCT/JP2008/002976 WO2009054121A1 (ja) | 2007-10-23 | 2008-10-21 | 弾性境界波装置 |
JP2009537934A JP5041004B2 (ja) | 2007-10-23 | 2008-10-21 | 弾性境界波装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPWO2009054121A1 true JPWO2009054121A1 (ja) | 2011-03-03 |
JP5041004B2 JP5041004B2 (ja) | 2012-10-03 |
Family
ID=40579229
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2009537934A Active JP5041004B2 (ja) | 2007-10-23 | 2008-10-21 | 弾性境界波装置 |
Country Status (3)
Country | Link |
---|---|
US (1) | US8154171B2 (ja) |
JP (1) | JP5041004B2 (ja) |
WO (1) | WO2009054121A1 (ja) |
Family Cites Families (19)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0346232U (ja) * | 1989-09-12 | 1991-04-30 | ||
WO1998052279A1 (fr) * | 1997-05-12 | 1998-11-19 | Hitachi, Ltd. | Dispositif a onde elastique |
JPH10335974A (ja) | 1997-05-29 | 1998-12-18 | Matsushita Electric Ind Co Ltd | 弾性境界波素子 |
EP1610460B1 (en) * | 2003-02-10 | 2009-12-09 | Murata Manufacturing Co., Ltd. | Elastic boundary wave device |
JP4337816B2 (ja) | 2003-04-18 | 2009-09-30 | 株式会社村田製作所 | 弾性境界波装置 |
JP3894917B2 (ja) * | 2003-11-12 | 2007-03-22 | 富士通メディアデバイス株式会社 | 弾性境界波デバイス及びその製造方法 |
CN101964642A (zh) * | 2004-01-13 | 2011-02-02 | 株式会社村田制作所 | 边界声波装置 |
KR100850861B1 (ko) | 2004-01-19 | 2008-08-06 | 가부시키가이샤 무라타 세이사쿠쇼 | 탄성 경계파 장치 |
DE102004045181B4 (de) * | 2004-09-17 | 2016-02-04 | Epcos Ag | SAW-Bauelement mit reduziertem Temperaturgang und Verfahren zur Herstellung |
DE112007001259B4 (de) * | 2006-05-30 | 2015-07-23 | Murata Manufacturing Co., Ltd. | Schallwellenvorrichtung |
EP2023485A4 (en) * | 2006-05-30 | 2010-02-03 | Murata Manufacturing Co | RAND SOUND WAVE DEVICE |
JP2008067289A (ja) * | 2006-09-11 | 2008-03-21 | Fujitsu Media Device Kk | 弾性波デバイスおよびフィルタ |
JP4894861B2 (ja) * | 2006-12-25 | 2012-03-14 | 株式会社村田製作所 | 弾性境界波装置 |
DE102007012383B4 (de) * | 2007-03-14 | 2011-12-29 | Epcos Ag | Mit geführten akustischen Volumenwellen arbeitendes Bauelement |
JP4920750B2 (ja) * | 2007-08-14 | 2012-04-18 | 太陽誘電株式会社 | 弾性境界波装置 |
JP4943514B2 (ja) * | 2007-12-17 | 2012-05-30 | 太陽誘電株式会社 | 弾性波素子、通信モジュール、および通信装置 |
JP5125729B2 (ja) * | 2008-04-28 | 2013-01-23 | パナソニック株式会社 | 弾性波素子と、これを用いたフィルタ及び電子機器 |
WO2009139108A1 (ja) * | 2008-05-12 | 2009-11-19 | 株式会社村田製作所 | 弾性境界波装置 |
JP2010011440A (ja) * | 2008-05-30 | 2010-01-14 | Hitachi Ltd | 弾性波装置及びそれを用いた高周波フィルタ |
-
2008
- 2008-10-21 US US12/680,774 patent/US8154171B2/en active Active
- 2008-10-21 WO PCT/JP2008/002976 patent/WO2009054121A1/ja active Application Filing
- 2008-10-21 JP JP2009537934A patent/JP5041004B2/ja active Active
Also Published As
Publication number | Publication date |
---|---|
US20100219718A1 (en) | 2010-09-02 |
WO2009054121A1 (ja) | 2009-04-30 |
JP5041004B2 (ja) | 2012-10-03 |
US8154171B2 (en) | 2012-04-10 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP4692629B2 (ja) | 弾性波装置 | |
JP4483785B2 (ja) | 弾性境界波装置 | |
US10938367B2 (en) | Solidly mounted layer thin film device with grounding layer | |
JP5141763B2 (ja) | 弾性境界波装置 | |
JPWO2004070946A1 (ja) | 弾性境界波装置 | |
JP5187444B2 (ja) | 弾性表面波装置 | |
KR101087438B1 (ko) | 탄성파 소자, 통신 모듈, 및 통신 장치 | |
CN111010130B (zh) | 带温补层和电学层的体声波谐振器、滤波器及电子设备 | |
JP6806907B2 (ja) | 弾性波装置、分波器および通信装置 | |
JPWO2011158445A1 (ja) | 弾性波素子 | |
US20070182279A1 (en) | Surface acoustic wave device and electronic apparatus | |
JPWO2009139108A1 (ja) | 弾性境界波装置 | |
JPWO2010052914A1 (ja) | 弾性波素子と、これを用いた電子機器 | |
WO2014087799A1 (ja) | 圧電部材、弾性波装置及び圧電部材の製造方法 | |
JP2014175885A (ja) | 弾性波素子とこれを用いた電子機器 | |
JP2014207540A (ja) | アンテナ共用器およびこれを用いた電子機器 | |
JP5110091B2 (ja) | 弾性表面波装置 | |
JP5579429B2 (ja) | 弾性波素子、通信モジュール、通信装置 | |
JP2006246050A (ja) | 複合圧電ウエハ及び弾性表面波装置 | |
JP5041004B2 (ja) | 弾性境界波装置 | |
CN110313130A (zh) | 声表面波元件 | |
JP2012169760A (ja) | 弾性表面波装置 | |
JP6198536B2 (ja) | 弾性波素子とこれを用いた電子機器 | |
WO2015052888A1 (ja) | 弾性波素子と、これを用いたデュプレクサ、電子機器 | |
JP2005045432A (ja) | 弾性表面波デバイス |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20120321 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20120515 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20120612 |
|
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20120625 |
|
R151 | Written notification of patent or utility model registration |
Ref document number: 5041004 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R151 |
|
FPAY | Renewal fee payment (event date is renewal date of database) |
Free format text: PAYMENT UNTIL: 20150720 Year of fee payment: 3 |
|
S111 | Request for change of ownership or part of ownership |
Free format text: JAPANESE INTERMEDIATE CODE: R313111 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
RD02 | Notification of acceptance of power of attorney |
Free format text: JAPANESE INTERMEDIATE CODE: R3D02 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
S533 | Written request for registration of change of name |
Free format text: JAPANESE INTERMEDIATE CODE: R313533 |
|
R350 | Written notification of registration of transfer |
Free format text: JAPANESE INTERMEDIATE CODE: R350 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |
|
R250 | Receipt of annual fees |
Free format text: JAPANESE INTERMEDIATE CODE: R250 |