JPS6472532A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6472532A JPS6472532A JP62228270A JP22827087A JPS6472532A JP S6472532 A JPS6472532 A JP S6472532A JP 62228270 A JP62228270 A JP 62228270A JP 22827087 A JP22827087 A JP 22827087A JP S6472532 A JPS6472532 A JP S6472532A
- Authority
- JP
- Japan
- Prior art keywords
- film
- passivation film
- si3n4
- contact
- final passivation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Formation Of Insulating Films (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62228270A JPS6472532A (en) | 1987-09-14 | 1987-09-14 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62228270A JPS6472532A (en) | 1987-09-14 | 1987-09-14 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6472532A true JPS6472532A (en) | 1989-03-17 |
Family
ID=16873841
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62228270A Pending JPS6472532A (en) | 1987-09-14 | 1987-09-14 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6472532A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998024121A1 (de) * | 1996-11-29 | 1998-06-04 | Siemens Aktiengesellschaft | Halbleiterchip und wafer mit schutzschicht, insbesondere aus keramik |
-
1987
- 1987-09-14 JP JP62228270A patent/JPS6472532A/ja active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1998024121A1 (de) * | 1996-11-29 | 1998-06-04 | Siemens Aktiengesellschaft | Halbleiterchip und wafer mit schutzschicht, insbesondere aus keramik |
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