JPS6461307A - Production of beta-type silicon carbide fine powder - Google Patents
Production of beta-type silicon carbide fine powderInfo
- Publication number
- JPS6461307A JPS6461307A JP62216067A JP21606787A JPS6461307A JP S6461307 A JPS6461307 A JP S6461307A JP 62216067 A JP62216067 A JP 62216067A JP 21606787 A JP21606787 A JP 21606787A JP S6461307 A JPS6461307 A JP S6461307A
- Authority
- JP
- Japan
- Prior art keywords
- fine powder
- beta
- production
- silicon carbide
- reaction
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
PURPOSE:To obtain the titled high-purity fine powder with enhanced productivity, free from sticking to the reaction tube wall, by reaction of an organosilicon compound of specific structure with a carrier gas consisting chiefly of H2 followed by heat treatment of the resulting powder. CONSTITUTION:An organosilicon compound of structural formula R-SiHnX3-n (R is CH3 or C2H5; X is Cl; n is 1 or 2) (e.g. CH3SiHCl2) is incorporated into a carrier gas with a H2 content of >=95wt.% followed by introduction into a reaction tube with its center temperature kept at 800-1,200 deg.C to carry out a gaseous phase chemical reaction. The resultant powder is heat-treated at 1,200-2,200 deg.C under normal pressure in a nonoxidative atmosphere (e.g. Ar), thus obtaining the objective fine powder.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62216067A JPS6461307A (en) | 1987-08-29 | 1987-08-29 | Production of beta-type silicon carbide fine powder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62216067A JPS6461307A (en) | 1987-08-29 | 1987-08-29 | Production of beta-type silicon carbide fine powder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6461307A true JPS6461307A (en) | 1989-03-08 |
Family
ID=16682752
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62216067A Pending JPS6461307A (en) | 1987-08-29 | 1987-08-29 | Production of beta-type silicon carbide fine powder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6461307A (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666799A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Preparation of silicon carbide by a gas route in the presence of an additive |
FR2666798A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Process for the preparation, via the gas route, of a metal carbide, especially silicon carbide, in a silicon carbide reactor |
FR2666797A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Process for the preparation, via the gas route, of a metal carbide, especially silicon carbide |
JPH06239609A (en) * | 1992-11-23 | 1994-08-30 | Cvd Inc | New light transmitting independent beta-sic and preparation thereof |
JPH07206418A (en) * | 1994-01-24 | 1995-08-08 | Korea Advanced Inst Of Sci Technol | Preparation of beta type silicon carbide fine powder by pyrolysis of trisilaalkane compound |
JP2020124656A (en) * | 2019-02-01 | 2020-08-20 | 一般財団法人ファインセラミックスセンター | Gas separation material and manufacturing method for the same |
-
1987
- 1987-08-29 JP JP62216067A patent/JPS6461307A/en active Pending
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2666799A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Preparation of silicon carbide by a gas route in the presence of an additive |
FR2666798A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Process for the preparation, via the gas route, of a metal carbide, especially silicon carbide, in a silicon carbide reactor |
FR2666797A1 (en) * | 1990-09-13 | 1992-03-20 | Rhone Poulenc Chimie | Process for the preparation, via the gas route, of a metal carbide, especially silicon carbide |
JPH06239609A (en) * | 1992-11-23 | 1994-08-30 | Cvd Inc | New light transmitting independent beta-sic and preparation thereof |
JPH07206418A (en) * | 1994-01-24 | 1995-08-08 | Korea Advanced Inst Of Sci Technol | Preparation of beta type silicon carbide fine powder by pyrolysis of trisilaalkane compound |
JP2020124656A (en) * | 2019-02-01 | 2020-08-20 | 一般財団法人ファインセラミックスセンター | Gas separation material and manufacturing method for the same |
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