JPS6483510A - Production of beta type silicon carbide powder - Google Patents
Production of beta type silicon carbide powderInfo
- Publication number
- JPS6483510A JPS6483510A JP62243450A JP24345087A JPS6483510A JP S6483510 A JPS6483510 A JP S6483510A JP 62243450 A JP62243450 A JP 62243450A JP 24345087 A JP24345087 A JP 24345087A JP S6483510 A JPS6483510 A JP S6483510A
- Authority
- JP
- Japan
- Prior art keywords
- beta type
- fine powder
- production
- silicon carbide
- type silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Carbon And Carbon Compounds (AREA)
Abstract
PURPOSE:To obtain high-purity beta type SiC fine powder inexpensively and efficiently, by thermally decomposing an organosilicon compound with a specific gas and heat-treating the obtained fine powder. CONSTITUTION:An organosilicon compound shown by formula I (R is CH3 or C2H5; X is Cl; n is 1-2) and a carrier gas containing >=95wt.% hydrocarbon gas shown by formula II such as methane are introduced into a reaction system and chemically reacted in a gas phase at 800-1,200 deg.C to give fine powder. Then the powder is heat-treated at 1,200-2,200 deg.C to produce beta type SiC fine powder having >=95wt.% purity and 1-6m<2>/g specific surface area.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243450A JPS6483510A (en) | 1987-09-28 | 1987-09-28 | Production of beta type silicon carbide powder |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243450A JPS6483510A (en) | 1987-09-28 | 1987-09-28 | Production of beta type silicon carbide powder |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6483510A true JPS6483510A (en) | 1989-03-29 |
Family
ID=17104063
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62243450A Pending JPS6483510A (en) | 1987-09-28 | 1987-09-28 | Production of beta type silicon carbide powder |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6483510A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004036631A3 (en) * | 2002-10-18 | 2004-06-24 | Applied Materials Inc | Silicon-containing layer deposition with silicon compounds |
-
1987
- 1987-09-28 JP JP62243450A patent/JPS6483510A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004036631A3 (en) * | 2002-10-18 | 2004-06-24 | Applied Materials Inc | Silicon-containing layer deposition with silicon compounds |
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