JPS6454649A - Electron emission element - Google Patents

Electron emission element

Info

Publication number
JPS6454649A
JPS6454649A JP21032187A JP21032187A JPS6454649A JP S6454649 A JPS6454649 A JP S6454649A JP 21032187 A JP21032187 A JP 21032187A JP 21032187 A JP21032187 A JP 21032187A JP S6454649 A JPS6454649 A JP S6454649A
Authority
JP
Japan
Prior art keywords
electrode
electron emission
projection
deflecting
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21032187A
Other languages
Japanese (ja)
Other versions
JP2627622B2 (en
Inventor
Ichiro Nomura
Hidetoshi Suzuki
Seishiro Yoshioka
Toshihiko Takeda
Tetsuya Kaneko
Yoshikazu Sakano
Kojiro Yokono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP21032187A priority Critical patent/JP2627622B2/en
Publication of JPS6454649A publication Critical patent/JPS6454649A/en
Application granted granted Critical
Publication of JP2627622B2 publication Critical patent/JP2627622B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J1/00—Details of electrodes, of magnetic control means, of screens, or of the mounting or spacing thereof, common to two or more basic types of discharge tubes or lamps
    • H01J1/02—Main electrodes
    • H01J1/30—Cold cathodes, e.g. field-emissive cathode
    • H01J1/304—Field-emissive cathodes
    • H01J1/3042—Field-emissive cathodes microengineered, e.g. Spindt-type

Landscapes

  • Cold Cathode And The Manufacture (AREA)

Abstract

PURPOSE:To make an electron emission element stably manufacturable in terms of good reproducibility by installing an electron emission electrode with a projection, a drawer electrode with an electron emission port approximated and opposed to this projection, and a deflecting electrode deflecting the drawn electron vertically all on the same substrate. CONSTITUTION:Conductive layers are stacked on an insulating substrate 6, and there are provided with an electron emission electrode 7 with a projection 7a, a drawer electrode 8 with an opening 8a or an electron emission port being opposed to this projection 7a, and a deflecting electrode 9 at the side of the this electrode 8 by means of a maskless etching technique. Voltage V1 is impressed on the electrode 7 against the electrode 7 by a power source 10a and voltage V2 on the electrode 9 by a powder source 10b, respectively. Thus, an electron emission element, generating an electron beam deflected in the almost rectangular direction with the substrate 6, is stably manufacture in terms of good reproducibility.
JP21032187A 1987-08-26 1987-08-26 Electron-emitting device Expired - Fee Related JP2627622B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21032187A JP2627622B2 (en) 1987-08-26 1987-08-26 Electron-emitting device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21032187A JP2627622B2 (en) 1987-08-26 1987-08-26 Electron-emitting device

Publications (2)

Publication Number Publication Date
JPS6454649A true JPS6454649A (en) 1989-03-02
JP2627622B2 JP2627622B2 (en) 1997-07-09

Family

ID=16587489

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21032187A Expired - Fee Related JP2627622B2 (en) 1987-08-26 1987-08-26 Electron-emitting device

Country Status (1)

Country Link
JP (1) JP2627622B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH048246U (en) * 1990-05-01 1992-01-24
JPH05274997A (en) * 1992-03-27 1993-10-22 Agency Of Ind Science & Technol Field emission element

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417551A (en) * 1977-06-30 1979-02-08 Rosenblad Corp Falling film heat exchanger and condensation method
JPS5718324A (en) * 1980-07-07 1982-01-30 Mitsubishi Electric Corp Method of working
JPS5916255A (en) * 1982-07-19 1984-01-27 Nippon Telegr & Teleph Corp <Ntt> Electron gun

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5417551A (en) * 1977-06-30 1979-02-08 Rosenblad Corp Falling film heat exchanger and condensation method
JPS5718324A (en) * 1980-07-07 1982-01-30 Mitsubishi Electric Corp Method of working
JPS5916255A (en) * 1982-07-19 1984-01-27 Nippon Telegr & Teleph Corp <Ntt> Electron gun

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH048246U (en) * 1990-05-01 1992-01-24
JPH05274997A (en) * 1992-03-27 1993-10-22 Agency Of Ind Science & Technol Field emission element

Also Published As

Publication number Publication date
JP2627622B2 (en) 1997-07-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees