JPS6450578A - Manufacture of superconducting film - Google Patents
Manufacture of superconducting filmInfo
- Publication number
- JPS6450578A JPS6450578A JP62208647A JP20864787A JPS6450578A JP S6450578 A JPS6450578 A JP S6450578A JP 62208647 A JP62208647 A JP 62208647A JP 20864787 A JP20864787 A JP 20864787A JP S6450578 A JPS6450578 A JP S6450578A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- ultraviolet rays
- irradiated
- heat
- superconducting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000000758 substrate Substances 0.000 abstract 6
- 239000001301 oxygen Substances 0.000 abstract 5
- 229910052760 oxygen Inorganic materials 0.000 abstract 5
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 abstract 4
- 239000000919 ceramic Substances 0.000 abstract 3
- 150000001875 compounds Chemical class 0.000 abstract 3
- 239000007789 gas Substances 0.000 abstract 3
- -1 N2O Chemical compound 0.000 abstract 1
- 239000011521 glass Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 abstract 1
- 230000001590 oxidative effect Effects 0.000 abstract 1
- 229910021521 yttrium barium copper oxide Inorganic materials 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0268—Manufacture or treatment of devices comprising copper oxide
- H10N60/0661—Processes performed after copper oxide formation, e.g. patterning
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
- Superconductors And Manufacturing Methods Therefor (AREA)
Abstract
PURPOSE:To enable a superconducting film in excellent crystalizability to be formed by heat treatment without shortage of oxygen at all also enabling glass, etc., to be used as a substrate, by a method wherein the substrate is coated with a superconducting compound ceramic oxide layer to be irradiated with a light including at least ultraviolet rays in gas atmosphere containing oxygen. CONSTITUTION:A substrate 16 is coated with a superconducting compound ceramic oxide layer 23 to be irradiated with a light including at least ultraviolet rays in gas atmosphere containing oxygen. For example, the substrate coated with the compound ceramic oxide 23 such as YBCO etc., is arranged in a vessel 11 of a heat. treatment device sufficiently insulating air while a gas containing oxygen such as N2O, O2, etc., is led in the vessel 11 and then the substrate surface is irradiated with ultraviolet rays from a light source 14 such as excimer laser,etc. through a light leadingin window 15. At this time, the ultraviolet rays heat only the surface of the substrate 16 simultaneously decomposing N2O halfway to produce oxygen radical so that the film surface may produce an active oxidizing atmosphere to form a superconducting film 22 heat treated by the photoirradiation.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208647A JPS6450578A (en) | 1987-08-21 | 1987-08-21 | Manufacture of superconducting film |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62208647A JPS6450578A (en) | 1987-08-21 | 1987-08-21 | Manufacture of superconducting film |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6450578A true JPS6450578A (en) | 1989-02-27 |
Family
ID=16559709
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62208647A Pending JPS6450578A (en) | 1987-08-21 | 1987-08-21 | Manufacture of superconducting film |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6450578A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01262680A (en) * | 1988-04-13 | 1989-10-19 | Semiconductor Energy Lab Co Ltd | Processing of superconductor oxide |
FR2671446A1 (en) * | 1991-01-08 | 1992-07-10 | Alsthom Cge Alcatel | Heating device for a chamber for deposition under partial vacuum of thin films on a substrate |
-
1987
- 1987-08-21 JP JP62208647A patent/JPS6450578A/en active Pending
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01262680A (en) * | 1988-04-13 | 1989-10-19 | Semiconductor Energy Lab Co Ltd | Processing of superconductor oxide |
FR2671446A1 (en) * | 1991-01-08 | 1992-07-10 | Alsthom Cge Alcatel | Heating device for a chamber for deposition under partial vacuum of thin films on a substrate |
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