JPS6447857A - Vapor deposition method with laser - Google Patents
Vapor deposition method with laserInfo
- Publication number
- JPS6447857A JPS6447857A JP20194587A JP20194587A JPS6447857A JP S6447857 A JPS6447857 A JP S6447857A JP 20194587 A JP20194587 A JP 20194587A JP 20194587 A JP20194587 A JP 20194587A JP S6447857 A JPS6447857 A JP S6447857A
- Authority
- JP
- Japan
- Prior art keywords
- source
- evaporating
- sources
- laser beams
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Lasers (AREA)
Abstract
PURPOSE:To form a film having a desired compsn. and a desired thickness by combining plural evaporating sources in a bar shape or other shape to form an evaporating source and by projecting laser beams on the source while vibrating the beams. CONSTITUTION:An evaporating source 2 is divided into every desired components or every group of plural desired components and the divided evaporating sources 2a, 2b, 2c are combined in the longitudinal direction to form an evaporating source 2 in a bar or cylinder shape. Laser beams from a laser beam generating source are projected on a vibrating mirror 7 and the mirror 7 is vibrated in the axial direction of the formed evaporating source 2. By the vibration, the laser beams are continuously moved back and forth along the source 2 and projected on the source 2 over the nearly full length. The surfaces of the sources 2a-2c are separately evaporated and fine particles deposit together on the surface of a substrate 3 to form a dense film of a compd. oxide superconductive material, etc.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20194587A JPS6447857A (en) | 1987-08-14 | 1987-08-14 | Vapor deposition method with laser |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20194587A JPS6447857A (en) | 1987-08-14 | 1987-08-14 | Vapor deposition method with laser |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447857A true JPS6447857A (en) | 1989-02-22 |
Family
ID=16449377
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20194587A Pending JPS6447857A (en) | 1987-08-14 | 1987-08-14 | Vapor deposition method with laser |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447857A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5411772A (en) * | 1994-01-25 | 1995-05-02 | Rockwell International Corporation | Method of laser ablation for uniform thin film deposition |
-
1987
- 1987-08-14 JP JP20194587A patent/JPS6447857A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5411772A (en) * | 1994-01-25 | 1995-05-02 | Rockwell International Corporation | Method of laser ablation for uniform thin film deposition |
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