JPS5696075A - Production of porous film - Google Patents

Production of porous film

Info

Publication number
JPS5696075A
JPS5696075A JP17188279A JP17188279A JPS5696075A JP S5696075 A JPS5696075 A JP S5696075A JP 17188279 A JP17188279 A JP 17188279A JP 17188279 A JP17188279 A JP 17188279A JP S5696075 A JPS5696075 A JP S5696075A
Authority
JP
Japan
Prior art keywords
porous
film
low
porous material
porous film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP17188279A
Other languages
Japanese (ja)
Other versions
JPS6035993B2 (en
Inventor
Mitsuteru Kimura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ricoh Co Ltd
Original Assignee
Ricoh Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ricoh Co Ltd filed Critical Ricoh Co Ltd
Priority to JP54171882A priority Critical patent/JPS6035993B2/en
Publication of JPS5696075A publication Critical patent/JPS5696075A/en
Publication of JPS6035993B2 publication Critical patent/JPS6035993B2/en
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Catalysts (AREA)
  • Physical Vapour Deposition (AREA)

Abstract

PURPOSE:To produce a porous film of extremely large surface area in a low-temp. dry state by forming a porous film material on the porous surface of porous material thoroughly until the fine parts of the porous surface by sputtering or low vacuum deposition. CONSTITUTION:For example, Au, is vacuum-deposited in a low degree of vacuum of about several millimeters on a glass substrate 1, and a so-colled gold black film 2 is formed. This film 2 is a porous material consisting of gold fine particles. For example, Pt, is deposited on this porous material by a sputtering or low vacuum deposition method, in an Ar gas of about 100mm. torr, to about 100Angstrom thickness. By this method, Pt goes into the fine parts on the porous surface of the porous material, thereby forming a porous film 3 of Pt. This film 3 has extremely large surface areas like platinum black formed by other method, and this is suitable for using Pt as a catalyst.
JP54171882A 1979-12-29 1979-12-29 Method for manufacturing porous fine particle layer Expired JPS6035993B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP54171882A JPS6035993B2 (en) 1979-12-29 1979-12-29 Method for manufacturing porous fine particle layer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP54171882A JPS6035993B2 (en) 1979-12-29 1979-12-29 Method for manufacturing porous fine particle layer

Publications (2)

Publication Number Publication Date
JPS5696075A true JPS5696075A (en) 1981-08-03
JPS6035993B2 JPS6035993B2 (en) 1985-08-17

Family

ID=15931537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP54171882A Expired JPS6035993B2 (en) 1979-12-29 1979-12-29 Method for manufacturing porous fine particle layer

Country Status (1)

Country Link
JP (1) JPS6035993B2 (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272475A (en) * 1986-05-20 1987-11-26 Sanyo Electric Co Ltd Alkaline zinc storage battery
EP0587237A1 (en) * 1992-09-08 1994-03-16 Koninklijke Philips Electronics N.V. Display device

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0318718Y2 (en) * 1985-11-27 1991-04-19

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62272475A (en) * 1986-05-20 1987-11-26 Sanyo Electric Co Ltd Alkaline zinc storage battery
EP0587237A1 (en) * 1992-09-08 1994-03-16 Koninklijke Philips Electronics N.V. Display device

Also Published As

Publication number Publication date
JPS6035993B2 (en) 1985-08-17

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