JPS6444040A - Manufacture of semiconductor device - Google Patents

Manufacture of semiconductor device

Info

Publication number
JPS6444040A
JPS6444040A JP20151887A JP20151887A JPS6444040A JP S6444040 A JPS6444040 A JP S6444040A JP 20151887 A JP20151887 A JP 20151887A JP 20151887 A JP20151887 A JP 20151887A JP S6444040 A JPS6444040 A JP S6444040A
Authority
JP
Japan
Prior art keywords
film
groove
etching
forming
sio2 film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20151887A
Other languages
English (en)
Inventor
Kazuo Itabashi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP20151887A priority Critical patent/JPS6444040A/ja
Publication of JPS6444040A publication Critical patent/JPS6444040A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Semiconductor Integrated Circuits (AREA)
  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
JP20151887A 1987-08-11 1987-08-11 Manufacture of semiconductor device Pending JPS6444040A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20151887A JPS6444040A (en) 1987-08-11 1987-08-11 Manufacture of semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20151887A JPS6444040A (en) 1987-08-11 1987-08-11 Manufacture of semiconductor device

Publications (1)

Publication Number Publication Date
JPS6444040A true JPS6444040A (en) 1989-02-16

Family

ID=16442374

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20151887A Pending JPS6444040A (en) 1987-08-11 1987-08-11 Manufacture of semiconductor device

Country Status (1)

Country Link
JP (1) JPS6444040A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6194787B1 (en) 1996-04-04 2001-02-27 Nec Corporation Multistage coupling semiconductor carrier, semiconductor device using the semiconductor carrier

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122661A (ja) * 1984-07-10 1986-01-31 Nec Corp 半導体装置の製造方法
JPS61214446A (ja) * 1985-03-19 1986-09-24 Toshiba Corp 半導体装置の製造方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6122661A (ja) * 1984-07-10 1986-01-31 Nec Corp 半導体装置の製造方法
JPS61214446A (ja) * 1985-03-19 1986-09-24 Toshiba Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6194787B1 (en) 1996-04-04 2001-02-27 Nec Corporation Multistage coupling semiconductor carrier, semiconductor device using the semiconductor carrier

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