JPS6444040A - Manufacture of semiconductor device - Google Patents
Manufacture of semiconductor deviceInfo
- Publication number
- JPS6444040A JPS6444040A JP20151887A JP20151887A JPS6444040A JP S6444040 A JPS6444040 A JP S6444040A JP 20151887 A JP20151887 A JP 20151887A JP 20151887 A JP20151887 A JP 20151887A JP S6444040 A JPS6444040 A JP S6444040A
- Authority
- JP
- Japan
- Prior art keywords
- film
- groove
- etching
- forming
- sio2 film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Semiconductor Integrated Circuits (AREA)
- Local Oxidation Of Silicon (AREA)
- Element Separation (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20151887A JPS6444040A (en) | 1987-08-11 | 1987-08-11 | Manufacture of semiconductor device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20151887A JPS6444040A (en) | 1987-08-11 | 1987-08-11 | Manufacture of semiconductor device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6444040A true JPS6444040A (en) | 1989-02-16 |
Family
ID=16442374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20151887A Pending JPS6444040A (en) | 1987-08-11 | 1987-08-11 | Manufacture of semiconductor device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6444040A (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6194787B1 (en) | 1996-04-04 | 2001-02-27 | Nec Corporation | Multistage coupling semiconductor carrier, semiconductor device using the semiconductor carrier |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6122661A (ja) * | 1984-07-10 | 1986-01-31 | Nec Corp | 半導体装置の製造方法 |
JPS61214446A (ja) * | 1985-03-19 | 1986-09-24 | Toshiba Corp | 半導体装置の製造方法 |
-
1987
- 1987-08-11 JP JP20151887A patent/JPS6444040A/ja active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6122661A (ja) * | 1984-07-10 | 1986-01-31 | Nec Corp | 半導体装置の製造方法 |
JPS61214446A (ja) * | 1985-03-19 | 1986-09-24 | Toshiba Corp | 半導体装置の製造方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6194787B1 (en) | 1996-04-04 | 2001-02-27 | Nec Corporation | Multistage coupling semiconductor carrier, semiconductor device using the semiconductor carrier |
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