JPS6436766A - Formation of rigid carbon film - Google Patents

Formation of rigid carbon film

Info

Publication number
JPS6436766A
JPS6436766A JP62156090A JP15609087A JPS6436766A JP S6436766 A JPS6436766 A JP S6436766A JP 62156090 A JP62156090 A JP 62156090A JP 15609087 A JP15609087 A JP 15609087A JP S6436766 A JPS6436766 A JP S6436766A
Authority
JP
Japan
Prior art keywords
source component
carbon film
film
carbon source
base body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62156090A
Other languages
Japanese (ja)
Inventor
Toshimichi Ito
Ikuo Hosoya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Idemitsu Petrochemical Co Ltd
Niterra Co Ltd
Original Assignee
Idemitsu Petrochemical Co Ltd
NGK Spark Plug Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Idemitsu Petrochemical Co Ltd, NGK Spark Plug Co Ltd filed Critical Idemitsu Petrochemical Co Ltd
Priority to JP62156090A priority Critical patent/JPS6436766A/en
Publication of JPS6436766A publication Critical patent/JPS6436766A/en
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Carbon And Carbon Compounds (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To improve adhesion of carbon film to a base body by decomposing carbon source component in a gaseous phase to form the rigid carbon film on the base body and heat-treating the formed film. CONSTITUTION:A base body 5 is placed on a placing stand 6 thereof in a plasma generation chamber 1. Carbon source component is introduced into the plasma generation chamber 1 from a reactive gas feeder 3 and the gas in the device is substituted with the carbon source component. Microwave is fed to the plasma generation chamber 1 through a waveguide 10 by actuating a microwave oscillator 2 and the carbon source component is made to an excited state and at least one part thereof is made to a plasma state. The carbon source component being a plasma state is deposited on the surface of the base body 5 and a rigid carbon film of a diamond film or a diamond-like carbon film is formed. This rigid carbon film is heat-treated at the temp. not higher than about 1,500 deg.C in the time out less than about 5min by utilizing a built-in heater 7 of the placing stand 6.
JP62156090A 1987-06-23 1987-06-23 Formation of rigid carbon film Pending JPS6436766A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62156090A JPS6436766A (en) 1987-06-23 1987-06-23 Formation of rigid carbon film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62156090A JPS6436766A (en) 1987-06-23 1987-06-23 Formation of rigid carbon film

Publications (1)

Publication Number Publication Date
JPS6436766A true JPS6436766A (en) 1989-02-07

Family

ID=15620088

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62156090A Pending JPS6436766A (en) 1987-06-23 1987-06-23 Formation of rigid carbon film

Country Status (1)

Country Link
JP (1) JPS6436766A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03273611A (en) * 1990-03-23 1991-12-04 Nec Corp Mask for x-ray lithography and manufacture thereof
JP2011252179A (en) * 2010-05-31 2011-12-15 Jtekt Corp Method of producing coated member

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03273611A (en) * 1990-03-23 1991-12-04 Nec Corp Mask for x-ray lithography and manufacture thereof
JP2011252179A (en) * 2010-05-31 2011-12-15 Jtekt Corp Method of producing coated member

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