JPS6462457A - Coating method with diamond film - Google Patents
Coating method with diamond filmInfo
- Publication number
- JPS6462457A JPS6462457A JP21653087A JP21653087A JPS6462457A JP S6462457 A JPS6462457 A JP S6462457A JP 21653087 A JP21653087 A JP 21653087A JP 21653087 A JP21653087 A JP 21653087A JP S6462457 A JPS6462457 A JP S6462457A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- diamond film
- film
- carbon
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To improve the adhesion of a diamond film to a substrate by coating the substrate with a hard carbon film by a vapor phase synthesis method and then coating the substrate with the diamond film by CVD or PVD. CONSTITUTION:A silicon layer is formed on a substrate by pretreatment and the substrate is coated with a hard carbon film 2 having a carbon-based amorphous structure by a vapor phase synthesis method in a flow of a hydrocarbon- based gas. The substrate is then coated with a diamond film 3 having the same crystal structure and compsn. as natural diamond by CVD from a carbon-contg. gaseous compd. with a hot filament or microwave plasma or by PVD with charged carbon particles. Thus, the diamond film 3 can be formed on the substrate of various metals, glass, ceramics, etc.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21653087A JPS6462457A (en) | 1987-09-01 | 1987-09-01 | Coating method with diamond film |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP21653087A JPS6462457A (en) | 1987-09-01 | 1987-09-01 | Coating method with diamond film |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6462457A true JPS6462457A (en) | 1989-03-08 |
Family
ID=16689877
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP21653087A Pending JPS6462457A (en) | 1987-09-01 | 1987-09-01 | Coating method with diamond film |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6462457A (en) |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5190823A (en) * | 1989-07-31 | 1993-03-02 | General Electric Company | Method for improving adhesion of synthetic diamond coatings to substrates |
| US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
| JPH07316818A (en) * | 1994-05-31 | 1995-12-05 | Sanyo Electric Co Ltd | Head carbon coating film covered substrate and its formation |
| JP2007211309A (en) * | 2006-02-10 | 2007-08-23 | Toyota Motor Corp | Cavitation-erosion resistant member and manufacturing method therefor |
| CN113755815A (en) * | 2021-09-10 | 2021-12-07 | 安徽光智科技有限公司 | Substrate pretreatment method and preparation method of diamond film |
-
1987
- 1987-09-01 JP JP21653087A patent/JPS6462457A/en active Pending
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5190823A (en) * | 1989-07-31 | 1993-03-02 | General Electric Company | Method for improving adhesion of synthetic diamond coatings to substrates |
| US5455081A (en) * | 1990-09-25 | 1995-10-03 | Nippon Steel Corporation | Process for coating diamond-like carbon film and coated thin strip |
| JPH07316818A (en) * | 1994-05-31 | 1995-12-05 | Sanyo Electric Co Ltd | Head carbon coating film covered substrate and its formation |
| JP2007211309A (en) * | 2006-02-10 | 2007-08-23 | Toyota Motor Corp | Cavitation-erosion resistant member and manufacturing method therefor |
| CN113755815A (en) * | 2021-09-10 | 2021-12-07 | 安徽光智科技有限公司 | Substrate pretreatment method and preparation method of diamond film |
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