JPS6434650A - Surface grinding method - Google Patents

Surface grinding method

Info

Publication number
JPS6434650A
JPS6434650A JP18757887A JP18757887A JPS6434650A JP S6434650 A JPS6434650 A JP S6434650A JP 18757887 A JP18757887 A JP 18757887A JP 18757887 A JP18757887 A JP 18757887A JP S6434650 A JPS6434650 A JP S6434650A
Authority
JP
Japan
Prior art keywords
grinding
grindstone
workpiece
elastic deformation
resistance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP18757887A
Other languages
English (en)
Inventor
Satoshi Matsui
Takeshi Horiuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Via Mechanics Ltd
Original Assignee
Hitachi Seiko Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Seiko Ltd filed Critical Hitachi Seiko Ltd
Priority to JP18757887A priority Critical patent/JPS6434650A/ja
Publication of JPS6434650A publication Critical patent/JPS6434650A/ja
Pending legal-status Critical Current

Links

Landscapes

  • Grinding Of Cylindrical And Plane Surfaces (AREA)
JP18757887A 1987-07-29 1987-07-29 Surface grinding method Pending JPS6434650A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18757887A JPS6434650A (en) 1987-07-29 1987-07-29 Surface grinding method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18757887A JPS6434650A (en) 1987-07-29 1987-07-29 Surface grinding method

Publications (1)

Publication Number Publication Date
JPS6434650A true JPS6434650A (en) 1989-02-06

Family

ID=16208555

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18757887A Pending JPS6434650A (en) 1987-07-29 1987-07-29 Surface grinding method

Country Status (1)

Country Link
JP (1) JPS6434650A (ja)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066915A (ja) * 2000-08-29 2002-03-05 Nagase Integrex Co Ltd 研削方法
JP2004042174A (ja) * 2002-07-10 2004-02-12 Daisho Seiki Kk 平面研削方法
JP2007203432A (ja) * 2006-02-06 2007-08-16 Disco Abrasive Syst Ltd 基板の研削装置および研削方法
JP2010012565A (ja) * 2008-07-04 2010-01-21 Disco Abrasive Syst Ltd ウエーハの研削方法

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2002066915A (ja) * 2000-08-29 2002-03-05 Nagase Integrex Co Ltd 研削方法
JP2004042174A (ja) * 2002-07-10 2004-02-12 Daisho Seiki Kk 平面研削方法
JP2007203432A (ja) * 2006-02-06 2007-08-16 Disco Abrasive Syst Ltd 基板の研削装置および研削方法
JP2010012565A (ja) * 2008-07-04 2010-01-21 Disco Abrasive Syst Ltd ウエーハの研削方法

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