JPS6423144A - Method for detecting flaw in thin film layer of crystal substrate - Google Patents
Method for detecting flaw in thin film layer of crystal substrateInfo
- Publication number
- JPS6423144A JPS6423144A JP18031287A JP18031287A JPS6423144A JP S6423144 A JPS6423144 A JP S6423144A JP 18031287 A JP18031287 A JP 18031287A JP 18031287 A JP18031287 A JP 18031287A JP S6423144 A JPS6423144 A JP S6423144A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- film layer
- angle
- incidence
- laser beam
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
- Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180312A JPH0625740B2 (ja) | 1987-07-20 | 1987-07-20 | 結晶基板の薄膜層内欠陥検出方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62180312A JPH0625740B2 (ja) | 1987-07-20 | 1987-07-20 | 結晶基板の薄膜層内欠陥検出方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6423144A true JPS6423144A (en) | 1989-01-25 |
JPH0625740B2 JPH0625740B2 (ja) | 1994-04-06 |
Family
ID=16081011
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62180312A Expired - Fee Related JPH0625740B2 (ja) | 1987-07-20 | 1987-07-20 | 結晶基板の薄膜層内欠陥検出方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0625740B2 (ja) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5995218A (en) * | 1997-01-17 | 1999-11-30 | Nec Corporation | Method for inspecting defects of wafer and inspection equipment thereof |
KR19990088623A (ko) * | 1998-05-28 | 1999-12-27 | 가부시키가이샤 어드밴티스트 | 표면상태측정방법및장치 |
JP2006214818A (ja) * | 2005-02-02 | 2006-08-17 | Sharp Corp | 光学部品の欠陥検出方法および欠陥検出装置 |
JP2012063330A (ja) * | 2010-09-17 | 2012-03-29 | Kansai Paint Co Ltd | 複層塗膜の非接触非破壊評価方法及びそれを用いた装置 |
KR20150066447A (ko) * | 2013-12-06 | 2015-06-16 | 도쿄엘렉트론가부시키가이샤 | 거리를 구하는 방법, 정전 척을 제전하는 방법, 및, 처리 장치 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888982A (ja) * | 1972-02-23 | 1973-11-21 |
-
1987
- 1987-07-20 JP JP62180312A patent/JPH0625740B2/ja not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4888982A (ja) * | 1972-02-23 | 1973-11-21 |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5995218A (en) * | 1997-01-17 | 1999-11-30 | Nec Corporation | Method for inspecting defects of wafer and inspection equipment thereof |
KR19990088623A (ko) * | 1998-05-28 | 1999-12-27 | 가부시키가이샤 어드밴티스트 | 표면상태측정방법및장치 |
JP2006214818A (ja) * | 2005-02-02 | 2006-08-17 | Sharp Corp | 光学部品の欠陥検出方法および欠陥検出装置 |
JP2012063330A (ja) * | 2010-09-17 | 2012-03-29 | Kansai Paint Co Ltd | 複層塗膜の非接触非破壊評価方法及びそれを用いた装置 |
KR20150066447A (ko) * | 2013-12-06 | 2015-06-16 | 도쿄엘렉트론가부시키가이샤 | 거리를 구하는 방법, 정전 척을 제전하는 방법, 및, 처리 장치 |
Also Published As
Publication number | Publication date |
---|---|
JPH0625740B2 (ja) | 1994-04-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP2671241B2 (ja) | ガラス板の異物検出装置 | |
US6144446A (en) | Method and apparatus for inspecting foreign substance | |
US7643139B2 (en) | Method and apparatus for detecting defects | |
US4342515A (en) | Method of inspecting the surface of an object and apparatus therefor | |
JPS61100932A (ja) | 露光装置 | |
JP4104924B2 (ja) | 光学的測定方法およびその装置 | |
JPS6330570B2 (ja) | ||
JPS6423144A (en) | Method for detecting flaw in thin film layer of crystal substrate | |
JP2512093B2 (ja) | 異物検出装置及び方法 | |
CA1179036A (en) | Method and apparatus for detecting surface defects in mechanical workpieces | |
JPS57161813A (en) | Optical head driver | |
JP2873450B2 (ja) | 光による欠点検査装置 | |
JPS57161642A (en) | Inspecting device for defect of surface | |
JPS62119446A (ja) | 結晶欠陥検査方法及びその検査装置 | |
JPS61176838A (ja) | 透明または半透明の板状体の欠点検査方法 | |
JPH05273137A (ja) | 表面欠陥検査装置 | |
JP2000131220A (ja) | 多孔質部材の気孔率評価方法および装置 | |
JPH09218162A (ja) | 表面欠陥検査装置 | |
JP3336392B2 (ja) | 異物検査装置及び方法 | |
JPS60222756A (ja) | 異物検査装置 | |
JPH0141922B2 (ja) | ||
JPS5643539A (en) | Defect inspection device of face plate | |
JPS62261045A (ja) | 表面検査装置 | |
JPH10293103A (ja) | 光学測定方法および装置およびパターン付き基板用光学測定装置 | |
JPH04143640A (ja) | 異物検査装置 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |