JPS5643539A - Defect inspection device of face plate - Google Patents

Defect inspection device of face plate

Info

Publication number
JPS5643539A
JPS5643539A JP11941979A JP11941979A JPS5643539A JP S5643539 A JPS5643539 A JP S5643539A JP 11941979 A JP11941979 A JP 11941979A JP 11941979 A JP11941979 A JP 11941979A JP S5643539 A JPS5643539 A JP S5643539A
Authority
JP
Japan
Prior art keywords
laser
ray
face plate
reverse side
case
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP11941979A
Other languages
Japanese (ja)
Inventor
Mitsuyoshi Koizumi
Nobuyuki Akiyama
Yoshimasa Oshima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP11941979A priority Critical patent/JPS5643539A/en
Publication of JPS5643539A publication Critical patent/JPS5643539A/en
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)

Abstract

PURPOSE:To make it possible to exactly inspect the defects on the surface and the reverse side of the face plate even in case its thickness is thin, by focusing 2 pairs of irradiation ray on the surface and the reverse side of the face plate repsectively, and separating and detecting the scattered ray. CONSTITUTION:Both the laser ray B through the focus regulator 14 from the laser oscillator 12 and the laser ray B from the laser oscillator 13 are reflected by the rotary polyhedral mirror 15. And the laser rays A, B are subject to time division through the diaphragm 16 and the objective lens 7, respectively, are focused asynchronously on the reverse side and the surface of the sample 6, and when there is a defect on the surface, they become scattered rays, and are detected by the photoelectric tube 10 through the condenser 8. By the afore-mentioned structure, a defect on the surface and the reverse side of the face plate such as glass for the image pickup tube, etc. can be inspected exactly even in case its thickness is thin. In this regard, when the scattered ray is separated and detected by the dichroic mirror, the filter, etc. by irradiating 2 kinds of laser rays of different wave length at the same time, its result becomes same as the above mentioned case, too.
JP11941979A 1979-09-19 1979-09-19 Defect inspection device of face plate Pending JPS5643539A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11941979A JPS5643539A (en) 1979-09-19 1979-09-19 Defect inspection device of face plate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11941979A JPS5643539A (en) 1979-09-19 1979-09-19 Defect inspection device of face plate

Publications (1)

Publication Number Publication Date
JPS5643539A true JPS5643539A (en) 1981-04-22

Family

ID=14760989

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11941979A Pending JPS5643539A (en) 1979-09-19 1979-09-19 Defect inspection device of face plate

Country Status (1)

Country Link
JP (1) JPS5643539A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880544A (en) * 1981-11-10 1983-05-14 Hitachi Ltd Detector for foreign matter on reticle of exposure device
JPS636444A (en) * 1986-06-27 1988-01-12 Hitachi Ltd Foreign matter inspection device
JPH02194352A (en) * 1989-01-24 1990-07-31 Fuji Electric Co Ltd Inspection device for surface of transparent substrate
JP5979567B1 (en) * 2015-04-30 2016-08-24 パナソニックＩｐマネジメント株式会社 Plant stress detection apparatus and plant stress detection method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288085A (en) * 1976-01-17 1977-07-22 Canon Inc Defect detection system
JPS52129582A (en) * 1976-04-23 1977-10-31 Hitachi Ltd Flaw detector
JPS52130381A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Device for detecting faulty part on plate surface

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5288085A (en) * 1976-01-17 1977-07-22 Canon Inc Defect detection system
JPS52129582A (en) * 1976-04-23 1977-10-31 Hitachi Ltd Flaw detector
JPS52130381A (en) * 1976-04-26 1977-11-01 Hitachi Ltd Device for detecting faulty part on plate surface

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5880544A (en) * 1981-11-10 1983-05-14 Hitachi Ltd Detector for foreign matter on reticle of exposure device
JPS6361613B2 (en) * 1981-11-10 1988-11-29
JPS636444A (en) * 1986-06-27 1988-01-12 Hitachi Ltd Foreign matter inspection device
JPH02194352A (en) * 1989-01-24 1990-07-31 Fuji Electric Co Ltd Inspection device for surface of transparent substrate
JP5979567B1 (en) * 2015-04-30 2016-08-24 パナソニックＩｐマネジメント株式会社 Plant stress detection apparatus and plant stress detection method
WO2016174803A1 (en) * 2015-04-30 2016-11-03 パナソニックＩｐマネジメント株式会社 Device for detecting plant stress and method for detecting plant stress

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