JPS6415986A - Equipment for measuring semiconductor photosensor - Google Patents
Equipment for measuring semiconductor photosensorInfo
- Publication number
- JPS6415986A JPS6415986A JP62172136A JP17213687A JPS6415986A JP S6415986 A JPS6415986 A JP S6415986A JP 62172136 A JP62172136 A JP 62172136A JP 17213687 A JP17213687 A JP 17213687A JP S6415986 A JPS6415986 A JP S6415986A
- Authority
- JP
- Japan
- Prior art keywords
- chip
- measured
- supersonic wave
- equipment
- photo sensor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To prevent the malfuction due to dust and the like, by providing a means which projects supersonic wave on the main surface of a semiconductor photo sensor chip to be measured, just before starting the measurement or during the measurement. CONSTITUTION:A probe 1 having electrical continuity brings a specified chip 7' to be measured among a plurarity of semiconductor photo sensor chips into contact with a metal pad 6. A photo sensor part 5 detects light, and the converted electric signal is delivered to a signal processing equipment. A light projecting equipment 4 to project a light having a specific light quantity and wavelength on a chip 7' to be measured, and a supersonic wave projecting equipment 3 to project a supersonic wave on a chip 7' to be measured are installed. Dust attaching to the chip 7' is exfoliated from the surface, and made to float by projecting the supersonic wave. An air suction opening 2 sucks and discharges the floating dust.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172136A JPS6415986A (en) | 1987-07-09 | 1987-07-09 | Equipment for measuring semiconductor photosensor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62172136A JPS6415986A (en) | 1987-07-09 | 1987-07-09 | Equipment for measuring semiconductor photosensor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6415986A true JPS6415986A (en) | 1989-01-19 |
Family
ID=15936234
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62172136A Pending JPS6415986A (en) | 1987-07-09 | 1987-07-09 | Equipment for measuring semiconductor photosensor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6415986A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6224983B1 (en) | 1989-05-04 | 2001-05-01 | Ad Tech Holdings Limited | Deposition of silver layer on nonconducting substrate |
JP2007205869A (en) * | 2006-02-01 | 2007-08-16 | Sumida Corporation | Ultrasonic proximity switch |
CN106653637A (en) * | 2016-11-29 | 2017-05-10 | 芜湖赋兴光电有限公司 | Camera chip cleaning detection device |
-
1987
- 1987-07-09 JP JP62172136A patent/JPS6415986A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6224983B1 (en) | 1989-05-04 | 2001-05-01 | Ad Tech Holdings Limited | Deposition of silver layer on nonconducting substrate |
JP2007205869A (en) * | 2006-02-01 | 2007-08-16 | Sumida Corporation | Ultrasonic proximity switch |
CN106653637A (en) * | 2016-11-29 | 2017-05-10 | 芜湖赋兴光电有限公司 | Camera chip cleaning detection device |
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