JPS6414914A - Jig for manufacture of semiconductor - Google Patents
Jig for manufacture of semiconductorInfo
- Publication number
- JPS6414914A JPS6414914A JP62170791A JP17079187A JPS6414914A JP S6414914 A JPS6414914 A JP S6414914A JP 62170791 A JP62170791 A JP 62170791A JP 17079187 A JP17079187 A JP 17079187A JP S6414914 A JPS6414914 A JP S6414914A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- silicon carbide
- crystal
- jig
- semiconductor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
PURPOSE:To provide excellent thermal conductivity and to improve thermal unlformity and responsiveness by forming a coating layer made of silicon on a silicon carblde surface and effectively ntilizing the property of silicon. CONSTITUTION:A silicon carbide member 11 for forming a jig 10 for manufacture of semiconductor is composed of a composlte material made of silicon carbide and silicon in such a manner that the member 11 mainly contains the silicon carbide. when it has 3-dimensional matrix structure, a 3-dimenslonal matrix-like skeleton is formed of silicon carbide crystal having loym or less of mean grain size in such a manner that the mean grain size of the crystal is preferably 5mum or less and 30wt.% or more a beta-type crystal silicon carbide is preferably contained. A coating layer to be formed on the member 11 is composed of silicon, and its thickness is preferably 1-100mum.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170791A JPS6414914A (en) | 1987-07-08 | 1987-07-08 | Jig for manufacture of semiconductor |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62170791A JPS6414914A (en) | 1987-07-08 | 1987-07-08 | Jig for manufacture of semiconductor |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6414914A true JPS6414914A (en) | 1989-01-19 |
Family
ID=15911425
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62170791A Pending JPS6414914A (en) | 1987-07-08 | 1987-07-08 | Jig for manufacture of semiconductor |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6414914A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60174772A (en) * | 1984-02-20 | 1985-09-09 | Sumitomo Chem Co Ltd | Preparation of optically active alcohol derivative |
JPH05152229A (en) * | 1991-11-26 | 1993-06-18 | Mitsubishi Materials Corp | Heat treatment furnace |
EP0901152A1 (en) * | 1997-09-03 | 1999-03-10 | Nippon Pillar Packing Co., Ltd. | Semiconductor wafer holder with CVD silicon carbide film coating |
JP2002226285A (en) * | 2000-11-29 | 2002-08-14 | Kyocera Corp | Lightweight ceramic member and method for manufacturing the same |
-
1987
- 1987-07-08 JP JP62170791A patent/JPS6414914A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS60174772A (en) * | 1984-02-20 | 1985-09-09 | Sumitomo Chem Co Ltd | Preparation of optically active alcohol derivative |
JPH05152229A (en) * | 1991-11-26 | 1993-06-18 | Mitsubishi Materials Corp | Heat treatment furnace |
EP0901152A1 (en) * | 1997-09-03 | 1999-03-10 | Nippon Pillar Packing Co., Ltd. | Semiconductor wafer holder with CVD silicon carbide film coating |
JP2002226285A (en) * | 2000-11-29 | 2002-08-14 | Kyocera Corp | Lightweight ceramic member and method for manufacturing the same |
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