JPS6414914A - Jig for manufacture of semiconductor - Google Patents

Jig for manufacture of semiconductor

Info

Publication number
JPS6414914A
JPS6414914A JP62170791A JP17079187A JPS6414914A JP S6414914 A JPS6414914 A JP S6414914A JP 62170791 A JP62170791 A JP 62170791A JP 17079187 A JP17079187 A JP 17079187A JP S6414914 A JPS6414914 A JP S6414914A
Authority
JP
Japan
Prior art keywords
silicon
silicon carbide
crystal
jig
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62170791A
Other languages
Japanese (ja)
Inventor
Masanori Kobayashi
Tsutomu Ogawa
Kunihiko Wada
Takao Yokoyama
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ibiden Co Ltd
Fujitsu Ltd
Original Assignee
Ibiden Co Ltd
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibiden Co Ltd, Fujitsu Ltd filed Critical Ibiden Co Ltd
Priority to JP62170791A priority Critical patent/JPS6414914A/en
Publication of JPS6414914A publication Critical patent/JPS6414914A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)

Abstract

PURPOSE:To provide excellent thermal conductivity and to improve thermal unlformity and responsiveness by forming a coating layer made of silicon on a silicon carblde surface and effectively ntilizing the property of silicon. CONSTITUTION:A silicon carbide member 11 for forming a jig 10 for manufacture of semiconductor is composed of a composlte material made of silicon carbide and silicon in such a manner that the member 11 mainly contains the silicon carbide. when it has 3-dimensional matrix structure, a 3-dimenslonal matrix-like skeleton is formed of silicon carbide crystal having loym or less of mean grain size in such a manner that the mean grain size of the crystal is preferably 5mum or less and 30wt.% or more a beta-type crystal silicon carbide is preferably contained. A coating layer to be formed on the member 11 is composed of silicon, and its thickness is preferably 1-100mum.
JP62170791A 1987-07-08 1987-07-08 Jig for manufacture of semiconductor Pending JPS6414914A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170791A JPS6414914A (en) 1987-07-08 1987-07-08 Jig for manufacture of semiconductor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170791A JPS6414914A (en) 1987-07-08 1987-07-08 Jig for manufacture of semiconductor

Publications (1)

Publication Number Publication Date
JPS6414914A true JPS6414914A (en) 1989-01-19

Family

ID=15911425

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170791A Pending JPS6414914A (en) 1987-07-08 1987-07-08 Jig for manufacture of semiconductor

Country Status (1)

Country Link
JP (1) JPS6414914A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60174772A (en) * 1984-02-20 1985-09-09 Sumitomo Chem Co Ltd Preparation of optically active alcohol derivative
JPH05152229A (en) * 1991-11-26 1993-06-18 Mitsubishi Materials Corp Heat treatment furnace
EP0901152A1 (en) * 1997-09-03 1999-03-10 Nippon Pillar Packing Co., Ltd. Semiconductor wafer holder with CVD silicon carbide film coating
JP2002226285A (en) * 2000-11-29 2002-08-14 Kyocera Corp Lightweight ceramic member and method for manufacturing the same

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60174772A (en) * 1984-02-20 1985-09-09 Sumitomo Chem Co Ltd Preparation of optically active alcohol derivative
JPH05152229A (en) * 1991-11-26 1993-06-18 Mitsubishi Materials Corp Heat treatment furnace
EP0901152A1 (en) * 1997-09-03 1999-03-10 Nippon Pillar Packing Co., Ltd. Semiconductor wafer holder with CVD silicon carbide film coating
JP2002226285A (en) * 2000-11-29 2002-08-14 Kyocera Corp Lightweight ceramic member and method for manufacturing the same

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