JPS6379777A - セラミツクス基板上への被覆体の製造法 - Google Patents

セラミツクス基板上への被覆体の製造法

Info

Publication number
JPS6379777A
JPS6379777A JP61223710A JP22371086A JPS6379777A JP S6379777 A JPS6379777 A JP S6379777A JP 61223710 A JP61223710 A JP 61223710A JP 22371086 A JP22371086 A JP 22371086A JP S6379777 A JPS6379777 A JP S6379777A
Authority
JP
Japan
Prior art keywords
ceramic
metal
yttria
coating
intermediate layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61223710A
Other languages
English (en)
Other versions
JPH0510309B2 (ja
Inventor
坂田　君子
忠夫 徳島
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Research Institute for Metals
Original Assignee
National Research Institute for Metals
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Research Institute for Metals filed Critical National Research Institute for Metals
Priority to JP61223710A priority Critical patent/JPS6379777A/ja
Publication of JPS6379777A publication Critical patent/JPS6379777A/ja
Priority to US07/388,096 priority patent/US4911987A/en
Publication of JPH0510309B2 publication Critical patent/JPH0510309B2/ja
Granted legal-status Critical Current

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    • C04B41/00—After-treatment of mortars, concrete, artificial stone or ceramics; Treatment of natural stone
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Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。

Description

【発明の詳細な説明】 （産業上の利用分野） 本発明は、セラミックス基板表面に複合化中間層をプラ
ズマ溶射（真空溶射を含む）し、該中間層を介してその
中間層表面に異種セラミックスあるいは金属を溶射する
ことによって、母材及び被覆材の選択自由度を保持し、
前記セラミックス基板上に絶縁性、誘電惇声電性等種々
の機能をもたせ、しかも被覆層形成中あるいは使用中に
剥離の生じない密着性従来からセラミックス基板にセラ
ミックスを被覆することによって、その母材となるセラ
ミックス材が有する特性に絶縁性あるいは導電性等種々
の機能を付加して機能的に優れた材料を作成する試みが
行なわれている。
しかし、このような材料の大きな欠点は、母材と被覆材
との接着強度が小さいため、外部からの応力が母材に十
分に伝達されず被覆材自身に応力が掛り被覆材が破壊し
たり、剥離する現象を起こし、当初の目的を達成出来る
ものではなかりた。
そこで母材と被覆材の接着の向上を図るために、各種の
手段が講じられている。例えばセラミックス表面をプラ
ストして粗面を形成して溶射したり、また金属基板上へ
のセラミックス溶射法の類推から、下地溶射として、Ｎ
ｉ　−ＡＩ　％Ｎｉ　−ＡＩ　−Ｍｏ、　Ｎｉ　−Ｃｒ
　−ＡＩ　−Ｙ、　Ｃｏ　−Ｃｒ　−Ａｒ−Ｙ等が用い
られると考えられているが、これは基板と被覆体との間
の材料物性を考慮したものではない。
半導体分野では、母材にセラミックス材を採用し、金属
をＣＶＤや真空蒸着やスパッタリング法で被覆して導電
性を持たせたり、積層膜を作るなどマイクロエレクトロ
ニクスの分野で１μｍ以下の薄膜は作らｎていたが、１
μｍ以上の厚さを持つ強固な被覆は類例をみず、前記同
様、その密着性に問題があった。
（発明が解決しようとする問題点） 従来のセラミックス基板上の被覆体及びその製造法によ
れば、母材と被覆材の接着面が単に機械的な噛合いであ
ったり、下地溶射をしても母材と被覆材の組合せくよっ
ては、熱膨張係数の差が大きいため、母材と被覆材の境
界面に熱的応力歪が発生し、またもろい金属間化合物が
出来たりして本質的な密着性の解決法にはならなかった
。その為、３〜４　Ｋｇ／−の強度が常識的であった。
（問題点を解決するための手段及び作用）本発明は、上
記に鑑みてなされたものであり、基板材及び当該基板材
が有する機能に加えて、被覆材が有する機能を付加して
選択自由度を大きく保持しながら、特に密着性に優れた
セラミックス基板上への被覆体及びその製−造法を提供
するために、セラミックス基板材と金属あるいは溶射複
合セラミックスとの間に酸化物と前記金属主成分粉末あ
るいは溶射セラミックス主成分粉末とからなる複合体で
ある中間層を介在させて、具体的にはセラミックス基板
上に中間層を直接溶射（真空溶射も含む）し、その上に
複合セラミックス粉を溶射被覆し、前記セラミックス基
板と中間層との界面では、化学的な反応層及び投錨効果
により、一方前記中間層と溶射金属との界面では同種金
属の相互拡散あるいはもろくない異種金属間化合物によ
って、あるいは前記中間層と溶射セラミックスとの界面
では反応層によって接合する様に基板と被覆体の多様な
組合わせに対応したセラミックス基板上への被覆体及び
その製造法を提供するものである。
（実施例） 以下、本発明によるセラミックス基板上への被覆体及び
その製造法を詳細に説明する。
本発明は、セラミックス基板上に金属あるいは前記セラ
ミックスと異種セラミックスをプラズマ溶射（この場合
真空溶射も含む）する際に、当該構成体の中間に複合化
中間層を介在させ、該複合化中間層と前記構成体の界面
において、その組み合わせに起因する特有の接合体を有
することによって密着性のよいセラミックス基板上への
被覆体及びその製造法を提供するものである。
本発明によると、基板、中間層及び被覆体の各構成体の
材料はその組み合わせＫより種々選択されるものである
が、基板セラミックス及び被覆体用金属は特に限定しな
いが、被覆用セラミックス材料は、例えば、基板との熱
膨張率の差を小さく押さえたり、あるいは溶射性の向上
を図る丸め、複合化して、その組合せにより生ずる特有
の性質も制御することが必要である。
一方、前記複合化中間層は、基板セラミックスと被覆体
の組み合わせによっては、中間層を介在させずにセラミ
ックス基板上に被覆体を直接溶射するか、あるいはセラ
ミックス基板が酸化物（Ａ１２０３系、ＺｒＯ２系、８
ｉ０２系、ＴｉＯ２系、ＮｂｔＯｓ系、にρ系等）、炭
化物（ＴｉＣ系、Ｎｂｓ系、ＷＥ系）あるいは窒化物（
ＡＩＮ系、ＴｉＮ系、ＮｂＮ系）の場合にあっては、溶
射金属主成分又は溶射セラミックス基板上主成分くイツ
トリア（ｙ、ｏ、　ｏ〜２０Ｍｏｌ％）単独若しくはイ
ットリ゛ア（ＹｚＯｓ　）に基板セラミックス成分の一
部を添加したもの、あるいは又、低級酸化物を添加した
ものを中間層として選択される。
更に、セラミックス基板がＳｉＣ系、Ｓｉ３Ｎａ系の場
合にあっては、活性金属（Ｔｉ　、ＡＩ、Ｎｂ、Ｃｕ）
を中間層として溶射するか、あるいは又、前記活性金属
にイツトリア（Ｙ２Ｏ２０〜２０　Ｍｏｌ％）単独、若
しくはイツトリア（Ｙ２Ｏ２）にλ１２０３．８ｉ０２
、Ｃａ０％ＺｒＯ２、ＭｇＯ，ＣｅＯ２等ｔ　添加シｆ
ｒ−４のを中間層として選択される。
以上の各構成体の組み合わせによって基板セラミックス
の加工処理（投錨）をした表面に前記複合化中間層をＡ
ｒガス、ＨｅガスあるいはＡｒ　−Ｎ２ガス等不活性ガ
スを介して所定条件で溶射し、その後、基板セラミック
スと異なった機能、例えば、絶縁性、誘導性、磁性、導
電性、耐熱性、耐摩耗性および伝熱性等を有する被覆用
の金属（例えば、鉄系材料、非鉄系材料、Ａ１合金、Ｃ
ｕ合金、貴金属、耐熱性材料等）、あるいは異種セラミ
ックスを前記同様所定条件によって溶射し、セラミック
ス基板上に所定の機能を有する被覆体を生成することが
できる。
以上述べた本願によるセラミックス基板上への被覆体及
びその製造法を構成する各々の材料の組み合わせ及びそ
の界面での反応を表示したのが表−１である。
表−１ 〔セラミックス基板上への金属溶射〕 〔セラミックス基板上への異種セラミックス溶射〕この
ようＫして得られたセラミックス被覆体の性質は、特に
粉末組成の適当な選択及び粉末の物理的性質の制御およ
び溶射条件の選択によって制御する事が出来、これらの
選択により所望な性質を有する材料を得ることが出来る
。更に１本発明によると、セラミックス基板表面に単一
の材料の被覆体を構成する必要はなく、目的に応じて機
能性を持たせた金属及び異種セラミックスを組み合わせ
パターン化あるいは積層して機能性を持たせることが可
能である。
（実施例１） ジルコルア系セラミックス基板上に、複合化中間層Ｆｅ
　−２５Ｍｏ　１％ＦｅＯを溶射条件Ａｒガス１００ｓ
ｃＦＨ、Ｈｅガス２０５ｃＦＨ、５０Ｖ　、　７００Ａ
　、溶射距離１００■で３分間溶射後、Ｆｅを溶射条件
Ｍガス１００（実施例２） 中間層Ｔ　ｉ　−５Ｍｏ　１％Ｙ２Ｏ５を溶射条件Ａｒ
カス１００ｓｃＦＨ，Ｈｅガス２０　ａｃＦＨ、５０ｖ
、　７００Ａ　、溶射距離１００■で３分間溶射後、Ｔ
ｉを溶射条件Ａｒガス１００＋）。
（実施例３） アルミナ系セラミックス基板上に、複合化中間層Ｃｕ　
−５Ｍｏ　１％Ｙ２Ｏ３を溶射条件Ａｒガス１００ｓｃ
ＦＨ、Ｈｅガス２０５ｃＦＨ，５０Ｖ　、　７００Ａ　
、溶射距離１００■で３分間溶射後、Ｃｕを溶射条件Ａ
ｒガス（実施例４） チタニア系セラミックス基板上に、複合化中間層ＡＩ　
−５Ｍｏ　１％Ｙ２Ｏ３を溶射条件Ａｒカス１００ｓｃ
Ｆ）ＬＨｅガス２０ｓｃＦＨ，５０Ｖ、７５０Ａ、溶射
距離１００■で３分間溶射後、Ｃｕを溶射条件Ａｒガス
１００鱈で３分間溶射し九（＠４）。
（実施例５） アルミナ系セラミックス基板上に、複合化中間層Ａｌ−
ＺｒＯ２を溶射し念後、部分安定化ジルコニア（ＰＳＺ
）を、溶射条件Ａｒガス１００ＳＣＦＩＨ１（実施例６
） 部分安定化ジルコニア（ｐｓｚ）基板上に、複（実施例
７） アルミナ系セラミックス基板上に、複合化（実施例８） アルミナ系セラミックス基板上に、複合化（実施例９） アルミナ系セラミックス基板上に、複合化（実施例１０
） アルミナ系セラミックス基板よに、複合化（実施例１１
） ＰＳｚ基板上に、マスクを用いてＣｕのパターンを直接
溶射し、その上にＰ８Ｚ、さらＫＣｕのパターン、Ｐ８
Ｚというように積層溶射することができる。
以上の実施例１〜１０の被覆体に治具を接着剤（アルダ
イ）ＡＩ）で取り付けてテストピースを作製して引張強
度を測定したが、何れも接着剤の部分で破断したため、
７今／−以上の引張強度を持ち、従来の引張強度の３〜
４に２／−程度に比べ何れも接着性がよかった。
又、図１〜１０は以上の実施例１〜１０の接合−で 面界隅の接合状態を光学顕微鏡写真妻示したものである
。
（発明の効果） 以上説明した通り、本発明のセラミックス基板上への被
覆体及びその製造法によれば、セラミックス基板材と金
属あるいは溶射セラミックスとの間に酸化物と前記金属
主成分粉末あるいは溶゛射セラきツクス主成分粉末とを
′混合した複合体である中間層を介在させて、具体的Ｋ
ｔｉセラミックス基板上に中間層を直接溶射（真空溶射
も含む）するか、あるいは塗布後に加熱処理し、その上
に複合セラミックス粉を溶射被覆し、前記セラミックス
基板と中間層との界面では、反応層及び投錨効果により
、一方前記中間層と溶射金属との界面では同種金属相互
拡散あるいは異種金属間化合物によりて、あるいは前記
中間層と溶射セラミ・クスとの界面毎は反応層によ・て
接合する様に各構成体を種々選択するようにしたため、
基板材及び当該基板材が有する機能に加えて、被覆材が
有する機能を付加して選択自由度を大きく保持しながら
、特に密着性に優れたセラミックス基板上への被覆体及
びその製造法を提供することができる。
【図面の簡単な説明】
第１図はジルコニア系セラミックス基板上に中間ｍ　Ｆ
ｅ０１被覆体Ｆｅの試料断面の光学顕微鏡像、第２図は
アルミナ系セラミックス基板上に中間ｒＮ　Ｔｉ−Ｙｚ
０３被覆体Ｔｉの試料断面の光学顕微鏡像、第３図はア
ルミナ系セラミックス基板上にＣｕ−Ｙ２Ｏ３の中間層
ＫＣｕｔ溶射した試料断面の光学顕微鏡像、第４図はチ
タニア系セラミックス基板上にＡＩ−’ｈｏ３の中間層
ＫＡＩを溶射した試料断面の光学顕微鏡像、第５図はア
ルミナ系セラミックス基板上にＡＩ　−ＺｒＯ２に部分
安定化ジルコニア（ＰＳＺ）を溶射した試料断面の光学
顕微鏡像、第６図はＰＳｚ基板上Ｋ　Ｔｉ−ＺｒＣｈの
中間層にＴｉＣを溶射した試料断面の光学顕微鏡像、第
７図はアルミナ系セラミックス基板上にＴｉ　−Ｙ２Ｏ
３の中間層にＴｉＮを溶射した試料断面の光学顕微鏡像
、第８図はアルミナ系セラミックス基板上Ｋ　Ｔｉ−Ｙ
２Ｏ３溶射後、前を溶射した試料断面の光学顕微鏡像、
第９図はアルミナ系セラミックス基板上ＫＴｉ−Ｙ２Ｏ
３溶射後、５ｉＣ−Ｙ２Ｏ３を溶射した試料断面の光学
顕微鏡像、第１０図はアルミナ系セラミックス基板上Ｋ
Ｔｉ−Ｙ２Ｏ３溶射後、５ｉ３Ｎｎ　−Ｙ２Ｏ３を溶射
した試料断面の光学顕微鏡像。 特許出願人　科学技術庁金属材料技術研究所長中　　川
　　龍　　− 手続補正書 昭和６２年　６　月　７７　日

Claims (5)

    【特許請求の範囲】
  1. （１）セラミックス基板表面に金属又は異種複合セラミ
    ックスで被覆されたセラミックス基板の被覆体において
    、 前記セラミックス基板と、前記金属又は被 覆複合セラミックスの中間に、 （ａ）被覆金属主成分に、イットリア単独若しくはイッ
    トリアに基板セラミックスの一部 を添加したもの （ｂ）被覆金属主成分に、低級酸化物を添加したもの （ｃ）活性金属にイットリア単独若しくはイットリアに
    基板セラミックスの一部若しくは イットリアにＡｌ＿２Ｏ＿３、ＳｉＯ＿２、ＣａＯ、Ｚ
    ｒＯ＿２、ＭｇＯ、ＣｅＯ＿２を添加したもの （ｄ）活性金属に低級酸化物を添加したもの（ｅ）被覆
    セラミックスにイットリア単独若しくはイットリアに基
    板セラミックスの一部 を添加したもの （ｆ）介在しない のいづれかの複合化中間層を介在させ、 該複合化中間層と被覆複合セラミックスの 界面では化学的に接合され、複合化中間層と前記金属の
    界面においては両構成体に存する同種金属の相互拡散又
    は異種金属間化合物の接合によって、 複合化中間層とセラミックス基板の界面に おいては化学的に接合されることを特徴とするセラミッ
    クス基板上への被覆体。
  2. （２）セラミックス基板表面に金属又は異種複合セラミ
    ックスで被覆されたセラミックス基板の被覆体において
    、 前記セラミックス基板と、前記金属又は被 覆複合セラミックスの中間に、 （ａ）被覆金属主成分に、イットリア単独若しくはイッ
    トリアに基板セラミックスの一部 を添加したもの （ｂ）被覆金属主成分に、低級酸化物を添加したもの （ｃ）活性金属にイットリア単独若しくはイットリアに
    基板セラミックスの一部若しくは イットリアにＡｌ＿２Ｏ＿３、ＳｉＯ＿２、ＣａＯ、Ｚ
    ｒＯ＿２、ＭｇＯ、ＣｅＯ＿２を添加したもの （ｄ）活性金属に低級酸化物を添加したもの（ｅ）被覆
    セラミックスにイットリア単独若しくはイットリアに基
    板セラミックスの一部 を添加したもの （ｆ）介在しない のいづれかの複合化中間層を溶射し、界面において投錨
    及び化学的に接合する工程と、 積層した前記複合化中間層の表面に金属又 は被覆複合セラミックスを溶射し、複合化中間層と被覆
    複合セラミックスの界面では化学的に接合する工程と、
    複合化中間層と前記金属の界面においては両構成体に存
    する同種金属の相互拡散又は異種金属間化合物の接合す
    る工程とを特徴とするセラミックス被覆体の製造法。
  3. （３）被覆複合セラミックスは酸化物系、炭化物系及び
    窒化物系からなる特許請求の範囲委細第１項および第２
    項のいづれかに記載のセラミックス基板への被覆体。
  4. （４）複合化中間層は溶射金属の主成分若しくは溶射セ
    ラミックス主成分と、０〜２０Ｍｏｌ％イットリア若し
    くは０〜２０Ｍｏｌ％イットリアと０〜１０Ｍｏｌ％基
    板セラミックス主成分、若しくは溶射金属主成分と１０
    〜８０Ｍｏｌ％の低級酸化物である特許請求の範囲第１
    項および第２項いづれか記載のセラミックス基板上への
    被覆体。
  5. （５）複合化中間層はセラミックス基板がＳｉＣあるい
    はＳｉ＿３Ｎ＿４であるときは、活性金属および０〜２
    ０Ｍｏｌ％イットリア単独あるいは０〜２０Ｍｏｌ％イ
    ットリアにＡｌ＿２Ｏ＿３、ＣａＯ、ＳｉＯ＿２、Ｚｒ
    Ｏ＿２、ＭｇＯ、ＣｅＯ＿２を添加した特許請求の範囲
    第１項および第２項のいづれかに記載のセラミックス基
    板上への被覆体。
JP61223710A 1986-09-24 1986-09-24 セラミツクス基板上への被覆体の製造法 Granted JPS6379777A (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP61223710A JPS6379777A (ja) 1986-09-24 1986-09-24 セラミツクス基板上への被覆体の製造法
US07/388,096 US4911987A (en) 1986-09-24 1989-08-01 Metal/ceramic or ceramic/ceramic bonded structure

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61223710A JPS6379777A (ja) 1986-09-24 1986-09-24 セラミツクス基板上への被覆体の製造法

Publications (2)

Publication Number Publication Date
JPS6379777A true JPS6379777A (ja) 1988-04-09
JPH0510309B2 JPH0510309B2 (ja) 1993-02-09

Family

ID=16802451

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61223710A Granted JPS6379777A (ja) 1986-09-24 1986-09-24 セラミツクス基板上への被覆体の製造法

Country Status (2)

Country Link
US (1) US4911987A (ja)
JP (1) JPS6379777A (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217748A (ja) * 2006-02-16 2007-08-30 Taiheiyo Cement Corp マシナブルセラミックス基板への溶射皮膜の形成方法

Families Citing this family (28)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3450023B2 (ja) * 1992-01-24 2003-09-22 日本碍子株式会社 金属・セラミックス接合体およびそれを使用した金属セラミックス複合構造体とその製造方法
US6123797A (en) * 1995-06-23 2000-09-26 The Dow Chemical Company Method for coating a non-wetting fluidizable and material onto a substrate
US5702464A (en) * 1996-02-20 1997-12-30 Smith & Nephew Inc. Modular trial tibial insert
US6354824B1 (en) * 2000-03-09 2002-03-12 Kudu Industries, Inc. Ceramic hardfacing for progressing cavity pump rotors
US6620520B2 (en) * 2000-12-29 2003-09-16 Lam Research Corporation Zirconia toughened ceramic components and coatings in semiconductor processing equipment and method of manufacture thereof
JP4277973B2 (ja) * 2001-07-19 2009-06-10 日本碍子株式会社 イットリア−アルミナ複合酸化物膜の製造方法、イットリア−アルミナ複合酸化物膜および耐蝕性部材
US6568465B1 (en) * 2002-05-07 2003-05-27 Modine Manufacturing Company Evaporative hydrophilic surface for a heat exchanger, method of making the same and composition therefor
US8157936B2 (en) * 2004-02-27 2012-04-17 Ngk Spark Plug Co., Ltd. Composite ceramic green sheet, ceramic sintered body, gas sensor device, gas sensor, and method for manufacturing composite ceramic green sheet
EP1735143A2 (en) * 2004-04-12 2006-12-27 Carbo Ceramics Inc. Coating and/or treating hydraulic fracturing proppants to improve wettability, proppant lubrication, and/or to reduce damage by fracturing fluids and reservoir fluids
JP2008505835A (ja) * 2004-07-09 2008-02-28 カーボ、サラミクス、インク 噴霧乾燥プロセスを使用して固体セラミック粒子を生成する方法
WO2006135386A2 (en) * 2004-08-06 2006-12-21 Westinghouse Electric Company Llc A method of repairing a metallic surface wetted by a radioactive fluid
AU2005284787A1 (en) * 2004-09-14 2006-03-23 Carbo Ceramics Inc. Sintered spherical pellets
US20070059528A1 (en) * 2004-12-08 2007-03-15 Carbo Ceramics Inc. Low resin demand foundry media
AU2006218614A1 (en) * 2005-03-01 2006-09-08 Carbo Ceramics Inc. Methods for producing sintered particles from a slurry of an alumina-containing raw material
US20070023187A1 (en) * 2005-07-29 2007-02-01 Carbo Ceramics Inc. Sintered spherical pellets useful for gas and oil well proppants
DE102005045180B4 (de) * 2005-09-21 2007-11-15 Center For Abrasives And Refractories Research & Development C.A.R.R.D. Gmbh Kugelförmige Korundkörner auf Basis von geschmolzenem Aluminiumoxid sowie ein Verfahren zu ihrer Herstellung
JP2009512557A (ja) * 2005-10-19 2009-03-26 カーボ、サラミクス、インク 低熱膨張鋳造媒体
US7828998B2 (en) 2006-07-11 2010-11-09 Carbo Ceramics, Inc. Material having a controlled microstructure, core-shell macrostructure, and method for its fabrication
US8063000B2 (en) * 2006-08-30 2011-11-22 Carbo Ceramics Inc. Low bulk density proppant and methods for producing the same
US8562900B2 (en) * 2006-09-01 2013-10-22 Imerys Method of manufacturing and using rod-shaped proppants and anti-flowback additives
US20080066910A1 (en) * 2006-09-01 2008-03-20 Jean Andre Alary Rod-shaped proppant and anti-flowback additive, method of manufacture, and method of use
WO2009009370A1 (en) * 2007-07-06 2009-01-15 Carbo Ceramics Inc. Proppants for gel clean-up
US20090118145A1 (en) * 2007-10-19 2009-05-07 Carbo Ceramics Inc. Method for producing proppant using a dopant
TWI466650B (zh) * 2010-11-08 2015-01-01 Ind Tech Res Inst 鍋具及其製造方法
JP2020512691A (ja) * 2017-03-21 2020-04-23 コンポーネント リ−エンジニアリング カンパニー インコーポレイテッド 高い腐食性又は浸食性の半導体処理用途に使用するためのセラミック材料アセンブリ
US10808490B2 (en) 2018-05-17 2020-10-20 Weatherford Technology Holdings, Llc Buoyant system for installing a casing string
US10883333B2 (en) 2018-05-17 2021-01-05 Weatherford Technology Holdings, Llc Buoyant system for installing a casing string
US11426818B2 (en) 2018-08-10 2022-08-30 The Research Foundation for the State University Additive manufacturing processes and additively manufactured products

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4649084A (en) * 1985-05-06 1987-03-10 General Electric Company Process for adhering an oxide coating on a cobalt-enriched zone, and articles made from said process
US4719151A (en) * 1986-05-09 1988-01-12 Corning Glass Works Laminated ceramic structure
US4702970A (en) * 1987-01-20 1987-10-27 Gte Laboratories Incorporated Composite coatings on ceramic substrates

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007217748A (ja) * 2006-02-16 2007-08-30 Taiheiyo Cement Corp マシナブルセラミックス基板への溶射皮膜の形成方法

Also Published As

Publication number Publication date
US4911987A (en) 1990-03-27
JPH0510309B2 (ja) 1993-02-09

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