JPS6257922B2 - - Google Patents
Info
- Publication number
- JPS6257922B2 JPS6257922B2 JP692178A JP692178A JPS6257922B2 JP S6257922 B2 JPS6257922 B2 JP S6257922B2 JP 692178 A JP692178 A JP 692178A JP 692178 A JP692178 A JP 692178A JP S6257922 B2 JPS6257922 B2 JP S6257922B2
- Authority
- JP
- Japan
- Prior art keywords
- medium substrate
- displacement
- thin plate
- rotating
- position detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 34
- 238000001514 detection method Methods 0.000 claims description 23
- 238000006073 displacement reaction Methods 0.000 claims description 21
- 238000005259 measurement Methods 0.000 claims description 13
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
- Length Measuring Devices With Unspecified Measuring Means (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
Description
【発明の詳細な説明】
本発明は、例えば磁気デイスク装置に用いられ
る磁気デイスク基板等の薄板状回転記録媒体基板
の実際に使用される回転状態でその直径方向の面
精度を測定する薄板状回転記録媒体基板の面精度
測定装置に関するものである。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a thin plate rotating recording medium substrate, such as a magnetic disk substrate used in a magnetic disk device, for measuring the diametrical surface accuracy of the thin plate rotating recording medium substrate in the rotating state in which it is actually used. The present invention relates to a surface accuracy measuring device for a recording medium substrate.
近年磁気デイスク装置において磁気デイスク基
板の記録密度を上げるため磁気ヘツドの浮上量が
非常に小さくなつて来ており、微小な平滑の乱れ
が高速回転中では強く作用する。このため磁気デ
イスク基板の回転状態における面精度を正確に測
定する必要がある。この場合に特に磁気ヘツドは
磁気デイスク基板上をその直径方向に浮上しなが
ら移動するので、磁気デイスク基板回転状態の直
径方向の面精度が要求されるが、従来は回転した
状態では円周方向の面精度しか測定することがで
きず、同一回転位置における直径方向は静止した
状態でしか測定することができなかつた。 In recent years, in order to increase the recording density of magnetic disk substrates in magnetic disk devices, the flying height of magnetic heads has become extremely small, and minute disturbances in smoothness act strongly during high-speed rotation. Therefore, it is necessary to accurately measure the surface accuracy of the magnetic disk substrate in its rotating state. In this case, the magnetic head moves above the magnetic disk substrate while floating in its diametrical direction, so surface accuracy in the diametrical direction is required while the magnetic disk substrate is rotating. Only the surface accuracy could be measured, and the diameter direction at the same rotational position could only be measured in a stationary state.
本発明はこのような点に鑑み、磁気デイスク基
板の実際の使用状態に対応した回転状態で直径方
向の面精度を測定することを目的としたものであ
る。そして、この目的は、薄板状回転記録媒体基
板を回転可能に保持する回転軸の特定位置が到来
したことを検出して検出信号を出力する回転位置
検出手段と、被検出部材の変位を非接触で検出す
る変位測定手段と、該媒体基板面に対して当該媒
体基板の理想的回転平面と平行な平面内で且つ該
回転軸の半径方向に該変位測定手段を移動させる
移動手段と、該回転軸を回転駆動する回転駆動手
段と、該移動手段及び回転駆動手段を動作させ、
該媒体基板を回転させると共に、該変位測定手段
を一方向に移動させた時に、該回転位置検出手段
より出力される検出信号が入力される毎に、該変
位測定手段の測定値を記録する記録手段と、を備
え、該薄板状回転記録媒体基板の回転状態での半
径方向の該媒体基板面の変位を略連続的に測定す
るようにしたことを特徴とする薄板状回転記録媒
体基板の面精度測定装置を提供することにより達
成される。 In view of these points, it is an object of the present invention to measure the surface accuracy in the diametrical direction in a rotating state corresponding to the actual usage state of a magnetic disk substrate. The purpose is to provide a rotational position detection means that detects when a specific position of a rotation shaft that rotatably holds a thin plate-shaped rotational recording medium substrate has arrived and outputs a detection signal, and a rotational position detection means that detects the displacement of a member to be detected in a non-contact manner. a displacement measuring means for detecting a displacement in a plane parallel to an ideal rotational plane of the medium substrate relative to the surface of the medium substrate and a moving means for moving the displacement measuring means in a radial direction of the rotational axis; a rotational drive means for rotationally driving the shaft; operating the moving means and the rotational drive means;
A record for recording a measured value of the displacement measuring means each time a detection signal output from the rotational position detecting means is input when the medium substrate is rotated and the displacement measuring means is moved in one direction. A surface of a thin plate-like rotating recording medium substrate, characterized in that the surface of the thin plate-like rotating recording medium substrate is characterized in that it comprises: means for substantially continuously measuring displacement of the medium substrate surface in the radial direction while the thin plate-like rotating recording medium substrate is in a rotating state. This is achieved by providing an accuracy measuring device.
以下に図面を参照して本発明の一実施例を具体
的に説明すると、添付の図面において磁気デイス
ク基板１は支持台２のエアーベアリング等により
回転自在に支持されており、その回転軸３がモー
タ４からの動力でベルト５とプーリ６を介して回
転され、この回転軸３に位置検出装置７が設けら
れている。この位置検出装置７は回転軸３に位置
検出マーク８，８′の付いた位置検出板９が取付
けられており、その位置検出マーク８，８′を位
置検出センサ１０，１０′で検出し且つ位置検出
センサ１０，１０′からの検出信号をチヤンネル
切換器１１で切換えるようになつている。また磁
気デイスク基板１上には変位測定センサ１２が高
精度のエアースライダ１３に取付けて非接触で磁
気デイスク基板１上の面変位を測定すべく設けら
れており、このような変位測定センサ１２は送り
モータ１４でエアースライダ１３を動作すること
により磁気デイスク基板１上をその直径方向内側
から外側に移動する。また更にこれらのチヤンネ
ル切換器１１と変位測定センサ１２は測定同期ゲ
ート開閉器１５に接続され、こゝから更に形状測
定器１６を介して記録計１７に電気的に接続され
ている。 An embodiment of the present invention will be described in detail below with reference to the drawings. In the attached drawings, a magnetic disk substrate 1 is rotatably supported by an air bearing or the like on a support base 2, and its rotation axis 3 is It is rotated by power from a motor 4 via a belt 5 and a pulley 6, and a position detection device 7 is provided on this rotating shaft 3. This position detection device 7 has a position detection plate 9 with position detection marks 8, 8' attached to the rotating shaft 3, and detects the position detection marks 8, 8' with position detection sensors 10, 10'. The detection signals from the position detection sensors 10, 10' are switched by a channel switch 11. Further, a displacement measurement sensor 12 is installed on the magnetic disk substrate 1 to measure surface displacement on the magnetic disk substrate 1 in a non-contact manner by attaching it to a high-precision air slider 13. By operating the air slider 13 with the feed motor 14, the air slider 13 is moved from the inside to the outside in the diametrical direction on the magnetic disk substrate 1. Furthermore, the channel switch 11 and the displacement measurement sensor 12 are connected to a measurement synchronization gate switch 15, which is further electrically connected to a recorder 17 via a shape measurement device 16.
これによりモータ４の動力でベルト５とプーリ
６を介して回転軸３と共に磁気デイスク基板１が
実際の使用状態と一致した例えば3600rpmの高速
で回転すると、位置検出装置７においては位置検
出マーク８，８′を位置検出センサ１０，１０′で
検出し且つその検出信号をチヤンネル切換器１１
で切換えることにより、磁気デイスク基板１の直
径方向に測定指示信号が断続的に発生するように
なる。一方送りモータ１４によりエアースライダ
１３が動作することにより変位測定センサ１２は
磁気デイスク基板１上を直径方向に移動しながら
常時その面の変位を測定しており、このような変
位測定センサ１２による測定値が位置検出装置７
から測定指示信号が発生して測定同期ゲート開閉
器１５により形状測定器１６のゲートが開く毎に
記録計１７に順次記録される。こうして磁気デイ
スク基板１の直径方向に略連続的にその面の変位
が測定され、この場合の測定精度は0.2μｍ以下
であつた。 As a result, when the magnetic disk substrate 1 is rotated together with the rotary shaft 3 by the power of the motor 4 via the belt 5 and the pulley 6 at a high speed of, for example, 3600 rpm, which corresponds to the actual usage condition, the position detecting device 7 detects the position detecting mark 8, 8' is detected by the position detection sensors 10, 10', and the detection signal is sent to the channel switch 11.
By switching, the measurement instruction signal is intermittently generated in the diametrical direction of the magnetic disk substrate 1. On the other hand, as the air slider 13 is operated by the feed motor 14, the displacement measurement sensor 12 constantly measures the displacement of the surface of the magnetic disk substrate 1 while moving in the diametrical direction. The value is position detection device 7
A measurement instruction signal is generated from , and is sequentially recorded in the recorder 17 each time the gate of the shape measuring device 16 is opened by the measurement synchronization gate switch 15 . In this way, the displacement of the surface of the magnetic disk substrate 1 was measured substantially continuously in the diametrical direction, and the measurement accuracy in this case was 0.2 μm or less.
このように本発明によると、磁気デイスク基板
１を回転した状態で磁気ヘツドの移動と同じ直径
方向の変位を測定することができるので、この測
定結果は実際の場合と直接対応し非常に都合の良
いものになる。また敏速且つ容易に測定すること
ができるので取扱いが簡単になり、高精度で正確
に測定することができる。 As described above, according to the present invention, it is possible to measure the displacement in the diametrical direction, which is the same as the movement of the magnetic head while the magnetic disk substrate 1 is being rotated, so this measurement result directly corresponds to the actual case and is very convenient. It will be good. Moreover, since it can be measured quickly and easily, it is easy to handle and can be measured with high precision.
添付の図面は、本発明による薄板状回転記録媒
体基板の面精度測定装置の一実施例を示す構成図
である。
１…磁気デイスク基板、２…支持台、３…回転
軸、４…モータ、５…ベルト、６…プーリ、７…
位置検出装置、８，８′…位置検出マーク、９…
位置検出板、１０，１０′…位置検出センサ、１
１…チヤンネル切換器、１２…変位測定センサ、
１３…エアースライダ、１４…送りモータ、１５
…測定同期ゲート開閉器、１６…形状測定器、１
７…記録計。
The accompanying drawing is a configuration diagram showing an embodiment of a surface accuracy measuring device for a thin plate-shaped rotating recording medium substrate according to the present invention. DESCRIPTION OF SYMBOLS 1... Magnetic disk board, 2... Support stand, 3... Rotating shaft, 4... Motor, 5... Belt, 6... Pulley, 7...
Position detection device, 8, 8'...Position detection mark, 9...
Position detection plate, 10, 10'...Position detection sensor, 1
1...Channel switch, 12...Displacement measurement sensor,
13...Air slider, 14...Feed motor, 15
...Measurement synchronization gate switch, 16...Shape measuring device, 1
7...Recorder.
Claims (1)
る回転軸の特定位置が到来したことを検出して検
出信号を出力する回転位置検出手段と、 被検出部材の変位を非接触で検出する変位測定
手段と、 該媒体基板面に対して当該媒体基板の理想的回
転平面と平行な平面内で且つ該回転軸の半径方向
に該変位測定手段を移動させる移動手段と、 該回転軸を回転駆動する回転駆動手段と、 該移動手段及び回転駆動手段を動作させ、該媒
体基板を回転させると共に、該変位測定手段を一
方向に移動させた時に、該回転位置検出手段より
出力される検出信号が入力される毎に、該変位測
定手段より出力される該薄板状回転記録媒体基板
の変位測定値を記録する記録手段と、 を備え、該薄板状回転記録媒体基板の回転状態で
の半径方向の該媒体基板面の変位を略連続的に測
定するようにしたことを特徴とする薄板状回転記
録媒体基板の面精度測定装置。[Scope of Claims] 1. Rotation position detection means for detecting arrival of a specific position of a rotating shaft that rotatably holds a thin plate-like rotating recording medium substrate and outputting a detection signal; a displacement measuring means for detecting by contact; a moving means for moving the displacement measuring means in a plane parallel to an ideal rotational plane of the medium substrate and in a radial direction of the rotation axis with respect to the surface of the medium substrate; a rotational drive means for rotationally driving a rotating shaft; and an output from the rotational position detection means when the moving means and the rotational drive means are operated to rotate the medium substrate and move the displacement measuring means in one direction. recording means for recording a displacement measurement value of the thin plate-like rotating recording medium substrate outputted from the displacement measuring means each time a detection signal is input; 1. A surface accuracy measuring device for a thin plate-like rotating recording medium substrate, characterized in that the displacement of the surface of the medium substrate in the radial direction is approximately continuously measured.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP692178A JPS54100769A (en) | 1978-01-25 | 1978-01-25 | Aurface accuracy meter for magnetic disc substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP692178A JPS54100769A (en) | 1978-01-25 | 1978-01-25 | Aurface accuracy meter for magnetic disc substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS54100769A JPS54100769A (en) | 1979-08-08 |
| JPS6257922B2 true JPS6257922B2 (en) | 1987-12-03 |
Family
ID=11651697
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP692178A Granted JPS54100769A (en) | 1978-01-25 | 1978-01-25 | Aurface accuracy meter for magnetic disc substrate |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS54100769A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02113462A (en) * | 1988-10-21 | 1990-04-25 | Matsushita Electric Ind Co Ltd | Braking device for reel mechanism of tape recorder |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63105010U (en) * | 1986-12-26 | 1988-07-07 | ||
| JPH0615971B2 (en) * | 1987-02-18 | 1994-03-02 | 日立造船株式会社 | Plane shape accuracy measurement method |
-
1978
- 1978-01-25 JP JP692178A patent/JPS54100769A/en active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02113462A (en) * | 1988-10-21 | 1990-04-25 | Matsushita Electric Ind Co Ltd | Braking device for reel mechanism of tape recorder |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS54100769A (en) | 1979-08-08 |
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