JPS62188567U - - Google Patents
Info
- Publication number
- JPS62188567U JPS62188567U JP7614786U JP7614786U JPS62188567U JP S62188567 U JPS62188567 U JP S62188567U JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP S62188567 U JPS62188567 U JP S62188567U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage side
- exhaust port
- passageway
- suction chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims 1
- 238000005192 partition Methods 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は本考案に係る真空ポンプの横断面図、
第２図は弁装置の詳細図である。
１…一段側真空ポンプ、１１…二段側真空ポン
プ、２４…一段側真空ポンプの排気口、２５…二
段側真空ポンプの吸気口、２６…通路、２９…隔
壁、３５…連通孔、３６…弁装置。
FIG. 1 is a cross-sectional view of the vacuum pump according to the present invention.
FIG. 2 is a detailed view of the valve device. 1... First-stage vacuum pump, 11... Second-stage vacuum pump, 24... Exhaust port of first-stage vacuum pump, 25... Inlet port of second-stage vacuum pump, 26... Passage, 29... Partition wall, 35... Communication hole, 36 ...Valve device.
Claims (1)
二段側の真空ポンプと、 前記一段側の真空ポンプの排気口と前記二段側
の真空ポンプの吸入室に形成された吸気口とを接
続する通路と、 該通路と二段側の真空ポンプにおける排気口側
との間に設けられ該通路側の圧力に応じて前記排
気口側で前記通路を大気に開放する弁装置と、を
備えてなる真空ポンプ。[Scope of Claim for Utility Model Registration] A vacuum pump on the first stage side, a vacuum pump on the second stage side whose pumping speed is lower than that of the vacuum pump on the first stage side, an exhaust port of the vacuum pump on the first stage side, and an exhaust port of the vacuum pump on the second stage side. A passageway connecting an inlet formed in a suction chamber of the vacuum pump, and a passage provided between the passageway and an exhaust port side of the vacuum pump on the second stage side, the passageway connecting the intake port formed in the suction chamber of the vacuum pump; A vacuum pump comprising: a valve device that opens the passage to the atmosphere.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188567U true JPS62188567U (en) | 1987-12-01 |
| JPH0229259Y2 JPH0229259Y2 (en) | 1990-08-06 |
Family
ID=30922954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7614786U Expired JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229259Y2 (en) |
-
1986
- 1986-05-20 JP JP7614786U patent/JPH0229259Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0229259Y2 (en) | 1990-08-06 |