JPS62102864U - - Google Patents
Info
- Publication number
- JPS62102864U JPS62102864U JP19633185U JP19633185U JPS62102864U JP S62102864 U JPS62102864 U JP S62102864U JP 19633185 U JP19633185 U JP 19633185U JP 19633185 U JP19633185 U JP 19633185U JP S62102864 U JPS62102864 U JP S62102864U
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage side
- passage
- opening
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005086 pumping Methods 0.000 claims 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
第１図は、本考案の一実施例を示す真空ポンプ
の横断面図、第２図は、第１図のＡ―Ａ断面拡大
図を示す。
１……一段側の真空ポンプ、１１……二段側の
真空ポンプ、２４……一段側の真空ポンプの排気
口、２５……二段側の真空ポンプの吸気口、２６
……通路、２７……開口部、２８……弁装置。
FIG. 1 is a cross-sectional view of a vacuum pump showing an embodiment of the present invention, and FIG. 2 is an enlarged cross-sectional view taken along line AA in FIG. 1...Vacuum pump on the first stage side, 11...Vacuum pump on the second stage side, 24...Exhaust port of the vacuum pump on the first stage side, 25...Intake port of the vacuum pump on the second stage side, 26
... passage, 27 ... opening, 28 ... valve device.
Claims (1)
段側の真空ポンプと、 前記一段側の真空ポンプの排気口と前記二段側
の真空ポンプの吸気口とを接続する通路と、 該通路と外部とを連通する開口部と、 該開口部に設けられ、前記通路内の圧力に応じ
て開口部を開閉する弁装置と、を備えてなる真空
ポンプ。[Scope of Claim for Utility Model Registration] A vacuum pump on the first stage side, a vacuum pump on the second stage side that has a lower pumping speed than the vacuum pump on the first stage side, an exhaust port of the vacuum pump on the first stage side, and a vacuum on the second stage side. A passage connecting the intake port of the pump, an opening communicating the passage with the outside, and a valve device provided in the opening to open and close the opening according to the pressure in the passage. A vacuum pump.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19633185U JPH027268Y2 (en) | 1985-12-20 | 1985-12-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19633185U JPH027268Y2 (en) | 1985-12-20 | 1985-12-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62102864U true JPS62102864U (en) | 1987-06-30 |
| JPH027268Y2 JPH027268Y2 (en) | 1990-02-21 |
Family
ID=31155056
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19633185U Expired JPH027268Y2 (en) | 1985-12-20 | 1985-12-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH027268Y2 (en) |
-
1985
- 1985-12-20 JP JP19633185U patent/JPH027268Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH027268Y2 (en) | 1990-02-21 |