JPH0229259Y2 - - Google Patents
Info
- Publication number
- JPH0229259Y2 JPH0229259Y2 JP7614786U JP7614786U JPH0229259Y2 JP H0229259 Y2 JPH0229259 Y2 JP H0229259Y2 JP 7614786 U JP7614786 U JP 7614786U JP 7614786 U JP7614786 U JP 7614786U JP H0229259 Y2 JPH0229259 Y2 JP H0229259Y2
- Authority
- JP
- Japan
- Prior art keywords
- vacuum pump
- stage
- exhaust
- chamber
- passage
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004891 communication Methods 0.000 claims description 14
- 238000005086 pumping Methods 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 18
- 238000005192 partition Methods 0.000 description 4
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- 230000002159 abnormal effect Effects 0.000 description 1
- 230000003247 decreasing effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
Description
【考案の詳細な説明】
（産業上の利用分野）
本考案は、二つの真空ポンプを直列に接続して
２段式にした真空ポンプに関する。[Detailed Description of the Invention] (Industrial Application Field) The present invention relates to a vacuum pump in which two vacuum pumps are connected in series to form a two-stage vacuum pump.
（従来の技術）
従来、高い真空度を得ることを目的とした無給
油式真空ポンプとして本出願人より、特開昭60−
222574号公報（特願昭59−79956号）に開示され
る技術があり、これは、一対のロータが協動して
回転することにより気体を吸引する回転式の一段
側真空ポンプと、該回転式の一段側真空ポンプか
らの気体を吸引する往復式の二段側真空ポンプと
から構成されるものである。このように、回転式
の一段側真空ポンプと往復式の二段側真空ポンプ
を直列に接続したことにより高真空を得ることが
できる。(Prior art) Conventionally, the present applicant has developed a non-lubricated vacuum pump for the purpose of obtaining a high degree of vacuum, as described in Japanese Patent Application Laid-open No.
There is a technology disclosed in Japanese Patent Application No. 222574 (Japanese Patent Application No. 59-79956), which consists of a rotary single-stage vacuum pump that suctions gas by a pair of rotors rotating together; It is composed of a reciprocating type two-stage vacuum pump that sucks gas from the first-stage vacuum pump. In this way, a high vacuum can be obtained by connecting the rotary first-stage vacuum pump and the reciprocating second-stage vacuum pump in series.
しかしながら、このような２段式の真空ポンプ
では、回転式の真空ポンプの排気速度が他の形式
のものより大きいので、大気圧から真空引きを開
始したとき、二つの真空ポンプを接続した部分の
圧力、すなわち各真空ポンプの各真空室間の中間
圧が一時的に大気圧以上になり異常な温度上昇を
起こして各部材に損傷を与えることになる。 However, in such a two-stage vacuum pump, the evacuation speed of the rotary vacuum pump is higher than that of other types, so when evacuation starts from atmospheric pressure, the part where the two vacuum pumps are connected The pressure, that is, the intermediate pressure between the vacuum chambers of each vacuum pump, temporarily exceeds atmospheric pressure, causing an abnormal temperature rise and damaging each member.
また、この問題点を解決するために、まず二段
側の真空ポンプを作動させておき、中間圧をある
程度下降させたところで一段側の真空ポンプを作
動させて中間圧の急激な上昇を防止する方法があ
る。しかし、この方法においては、各真空ポンプ
を作動させるタイミングを調整する複雑な機構が
必要となり、コストアツプや作動時間が長くなる
等の欠点がある。 In order to solve this problem, the vacuum pump on the second stage side is operated first, and once the intermediate pressure has decreased to a certain extent, the vacuum pump on the first stage side is operated to prevent a sudden rise in the intermediate pressure. There is a way. However, this method requires a complicated mechanism for adjusting the timing at which each vacuum pump is activated, which has drawbacks such as increased costs and increased operating time.
そこでこれに対処するため、一段側の真空ポン
プと、該一段側の真空ポンプより排気速度が小さ
い二段側の真空ポンプと、前記一段側の真空ポン
プの排気口と前記二段側の真空ポンプの吸気口と
を接続する通路と、該通路と外部とを連通する開
口部と、該開口部に設けられ、前記通路内の圧力
に応じて開口部を開閉する弁装置と、を備えた真
空ポンプが提案されている。 Therefore, in order to deal with this, we installed a vacuum pump on the first stage side, a vacuum pump on the second stage side which has a lower pumping speed than the vacuum pump on the first stage side, an exhaust port of the vacuum pump on the first stage side, and a vacuum pump on the second stage side. A vacuum device comprising: a passageway connecting the intake port of the vacuum cleaner to an intake port of the vacuum cleaner; A pump is proposed.
このような真空ポンプでは一段側の真空ポンプ
の排気速度が大きく、真空ポンプを接続する通路
内の圧力が上昇しても、所定圧力（たとえば、大
気圧）に達したときに弁装置が開いて圧力上昇を
抑えることができる。 In such a vacuum pump, the pumping speed of the first-stage vacuum pump is high, and even if the pressure in the passage connecting the vacuum pump increases, the valve device will open when the predetermined pressure (for example, atmospheric pressure) is reached. Pressure rise can be suppressed.
（考案が解決しようとする問題点）
上記のような従来例では、排気すべき気体が二
段側真空ポンプの排気口からばかりでなく弁装置
からも放出されるため、放出される気体が窒素や
空気の場合には問題ないが、特殊ガスの場合に
は、一旦処理した後に外気に放出する必要がある
ため、二段側真空ポンプの排気口ばかりでなく弁
装置にも特殊ガス処理用の配管をしなければなら
ず、排気処理のために構造が複雑とならざるを得
なかつた。(Problem to be solved by the invention) In the conventional example described above, the gas to be exhausted is not only released from the exhaust port of the second-stage vacuum pump but also from the valve device, so the gas released is nitrogen. There is no problem in the case of gas or air, but in the case of special gases, it is necessary to discharge them to the outside air after being treated, so a special gas processing Piping had to be installed, and the structure had to be complicated due to exhaust treatment.
また、上記従来例では通路に弁装置が介装され
ているため、一段側および二段側真空ポンプ間の
配管が複雑となるばかりでなく、大型化するとい
う問題もあつた。 Furthermore, in the conventional example described above, since a valve device is interposed in the passage, there is a problem in that the piping between the first-stage and second-stage vacuum pumps is not only complicated but also large in size.
本考案はかかる問題点を解決するためになされ
たもので、排気処理が容易な真空ポンプを得るこ
とを目的とする。 The present invention was devised to solve such problems, and an object of the present invention is to obtain a vacuum pump that is easy to perform evacuation processing.
（問題点を解決するための手段）
本考案は、通路と二段側の真空ポンプにおける
排気室とを連通する連通路に設けられ、前記通路
側の圧力に応じて前記排気室の排気口を介して前
記通路を大気に開放する弁装置を備えてなるもの
である。(Means for Solving Problems) The present invention is provided in a communicating passage that communicates a passage with an exhaust chamber in a second-stage vacuum pump, and the exhaust port of the exhaust chamber is opened in accordance with the pressure on the passage side. A valve device is provided for opening the passageway to the atmosphere through the valve.
（作用）
一段側および二段側真空ポンプの作動により、
二段側真空ポンプの真空室が所定の圧力に達する
と、弁装置が開き、通路内の気体が二段側真空ポ
ンプの排気室の排気口から大気に放出される。(Function) By the operation of the first-stage and second-stage vacuum pumps,
When the vacuum chamber of the second-stage vacuum pump reaches a predetermined pressure, the valve device opens and the gas in the passage is released to the atmosphere from the exhaust port of the exhaust chamber of the second-stage vacuum pump.
また、通路内の圧力が所定値以下になると、弁
装置が閉じるため、真空室の気体は、一旦圧縮さ
れた後に二段側真空ポンプの排気室の排気口から
大気に放出される。 Further, when the pressure in the passage becomes equal to or lower than a predetermined value, the valve device closes, so that the gas in the vacuum chamber is once compressed and then released to the atmosphere from the exhaust port of the exhaust chamber of the second-stage vacuum pump.
（実施例）
以下、本考案の実施例を図面を参照しながら説
明すると、第１図において、１は、一段側の回転
式のスクリユ真空ポンプで、該真空ポンプは、筒
状のケーシング２の両端を吸気側のカバー３と排
気側のカバー４で覆つた真空室５の内部に、ベア
リング６，６…で軸７，８の部分を回動自在に支
持された雌ロータ９と雄ロータ１０で概略構成さ
れる。吸気側のカバー３には、図示しない吸込口
が設けられ、該吸込口を真空にしたい被真空体に
接続されるようになつている。(Embodiment) Hereinafter, an embodiment of the present invention will be described with reference to the drawings. In FIG. A female rotor 9 and a male rotor 10 are rotatably supported at shafts 7 and 8 by bearings 6, 6, . It is roughly composed of. The cover 3 on the intake side is provided with a suction port (not shown), and the suction port is connected to an object to be evacuated which is desired to be evacuated.
排気側のカバー４には二段側の往復動式の真空
ポンプ１１のケーシング１２が結合されている。
該ケーシング１２の他側はカバー１３で閉塞され
ており、側部にはシリンダ１４が取付けられてい
る。さらに、該ケーシング１２の内部には、駆動
軸１５に結合されたクランク軸１６がベアリング
１７，１７…により回転自在に貫通しており、カ
バー４の内部に設けられたクラツチ１８を介して
軸８に結合されている。軸７と軸８はギヤ１９，
２０によつて結合されている。クランク軸１６に
はコンロツド２１を介してピストン２２が結合さ
れており、該ピストン２２の作動により後述する
吸入室２３内の気体を負圧にするようになつてい
る。 A casing 12 of a reciprocating vacuum pump 11 on the second stage side is coupled to the cover 4 on the exhaust side.
The other side of the casing 12 is closed with a cover 13, and a cylinder 14 is attached to the side. Further, a crankshaft 16 coupled to a drive shaft 15 passes through the inside of the casing 12 so as to be rotatable by means of bearings 17, 17, . is combined with Shaft 7 and shaft 8 are gear 19,
20. A piston 22 is connected to the crankshaft 16 via a connecting rod 21, and the operation of the piston 22 makes the gas in a suction chamber 23, which will be described later, a negative pressure.
一段側の真空ポンプ１の排気側のカバー４は真
空室５の排気口２４が形成されており、該排気口
２４は、二段側の真空ポンプ１１の吸入室２３の
吸気口２５と通路２６とで接続されている。 The cover 4 on the exhaust side of the vacuum pump 1 on the first stage side is formed with an exhaust port 24 of the vacuum chamber 5, and the exhaust port 24 is connected to an intake port 25 of the suction chamber 23 of the vacuum pump 11 on the second stage side and a passage 26 is connected with.
ピストン２２が摺動自在に嵌挿されたシリンダ
ボア２７の開口部には、弁座２７ａを介してシリ
ンダヘツド２８が設置されている。該シリンダヘ
ツド２８は隔壁２９によつて２つの室、すなわち
吸入室２３と排気室３０とが画成され、それぞれ
の室２３，３０の底部には、シリンダボア２７と
連通する通孔３１，３２が形成され、各通孔３
１，３２には、これらを開閉する開閉弁３３，３
４が取付けられている。上記隔壁２９には、吸入
室２３と排気室３０とを連通させる連通路である
連通孔３５が形成され、該連通孔３５には、吸入
室２３の圧力に応じて該連通孔３５を開閉する弁
装置３６が設けられている。 A cylinder head 28 is installed at the opening of the cylinder bore 27 into which the piston 22 is slidably inserted, with a valve seat 27a interposed therebetween. The cylinder head 28 is defined by a partition wall 29 into two chambers, namely, a suction chamber 23 and an exhaust chamber 30. At the bottom of each chamber 23, 30, there are through holes 31, 32 communicating with the cylinder bore 27. formed, each through hole 3
1 and 32 have on-off valves 33 and 3 that open and close these.
4 is installed. A communication hole 35 is formed in the partition wall 29 and is a communication path for communicating the suction chamber 23 and the exhaust chamber 30, and the communication hole 35 is opened and closed according to the pressure in the suction chamber 23. A valve arrangement 36 is provided.
第２図は、該弁装置３６を示すもので、連通孔
３５は小径部３５ａと大径部３５ｂとからなり、
小径部３５ａと大径部３５ｂとの段差部における
角部は切除され、該切除部には弁座３７が取付け
られている。大径部３５ｂの端部には、ボルト３
８を介して環状部材３９が取付けられ、該部材３
９の一端面は連通孔３５内に位置して段部を形成
している該大径部３５ｂ内には、弁体４０と、該
弁体４０を弁座３７方向に弾発付勢するばね４１
とが配設されてあつて、該ばね４１の一端は弁体
４０に取付けられ、また他端は環状部材３９に取
付けらている。 FIG. 2 shows the valve device 36, in which the communication hole 35 consists of a small diameter part 35a and a large diameter part 35b,
A corner of the stepped portion between the small diameter portion 35a and the large diameter portion 35b is cut out, and a valve seat 37 is attached to the cut out portion. A bolt 3 is attached to the end of the large diameter portion 35b.
An annular member 39 is attached via 8, and the member 3
One end surface of the valve body 9 is located within the communication hole 35 and forms a stepped portion. Inside the large diameter portion 35b, there is a valve body 40 and a spring that biases the valve body 40 toward the valve seat 37. 41
One end of the spring 41 is attached to the valve body 40, and the other end is attached to the annular member 39.
つぎに上記構成に係る真空ポンプの作用につい
て述べる。排気すべきチヤンバ内の圧力が大気圧
または大気圧付近の状態にあるとき、真空ポンプ
を始動させると、吸引された気体は真空ポンプ１
で圧縮され、一段側の真空ポンプ１の排気速度が
二段側の真空ポンプ２の排気速度より大きいた
め、真空室５と吸入室２３とを結ぶ通路２６内の
圧力が上昇して大気圧以上となり、吸入室２３内
の圧力も大気圧以上となる。この結果、弁体４０
はばね４１の弾発付勢力に抗して弁座３７から離
れるため、吸入室２３内の気体は連通孔３５から
排気室３０内に流入し、さらに排気室３０の排気
口４２から外部に流出する。 Next, the operation of the vacuum pump according to the above configuration will be described. When the vacuum pump is started when the pressure inside the chamber to be evacuated is at atmospheric pressure or near atmospheric pressure, the sucked gas flows through the vacuum pump 1.
Since the pumping speed of the vacuum pump 1 on the first stage side is higher than the pumping speed of the vacuum pump 2 on the second stage side, the pressure in the passage 26 connecting the vacuum chamber 5 and the suction chamber 23 rises and exceeds atmospheric pressure. Therefore, the pressure inside the suction chamber 23 also becomes equal to or higher than atmospheric pressure. As a result, the valve body 40
Because the gas in the suction chamber 23 moves away from the valve seat 37 against the urging force of the spring 41, the gas in the suction chamber 23 flows into the exhaust chamber 30 through the communication hole 35, and further flows out through the exhaust port 42 of the exhaust chamber 30. do.
そしてこの状態からある時間経過すると、吸入
室２３内の圧力は大気圧かまたは大気圧以下にな
り、この結果、弁体４０はばね４１の弾発付勢力
によつて弁座３７に当接し、吸入室２３と排気室
３０との連通は遮断され、吸入室２３内の気体は
開閉弁３３をその圧力によつて開き、シリンダボ
ア２７内に流入する。流入した気体は、ピストン
２２によつて圧縮され、その圧力によつて開閉弁
３４を開き排気室３０内に流入する。 After a certain period of time has elapsed from this state, the pressure within the suction chamber 23 becomes atmospheric pressure or lower, and as a result, the valve body 40 comes into contact with the valve seat 37 due to the biasing force of the spring 41. Communication between the suction chamber 23 and the exhaust chamber 30 is cut off, and the gas in the suction chamber 23 opens the on-off valve 33 due to its pressure and flows into the cylinder bore 27. The inflowing gas is compressed by the piston 22, and the pressure opens the on-off valve 34 and flows into the exhaust chamber 30.
なお、上記実施例ではシリンダヘツド２８の隔
壁２９に連通路である連通孔３５を形成し、連通
孔３５に弁装置３６を設けるようにしたが、本考
案はこれに限らず連通路をどのように配置しても
よく、例えば、通路２６の途中から分岐させた側
路を排気室３０に接続し、該側路を連通路として
該側路に上記弁装置３６を設けるようにしてもよ
い。 In the above embodiment, the communication hole 35, which is a communication path, is formed in the partition wall 29 of the cylinder head 28, and the valve device 36 is provided in the communication hole 35. However, the present invention is not limited to this, and it is possible to For example, a side passage branched from the middle of the passage 26 may be connected to the exhaust chamber 30, and the valve device 36 may be provided in the side passage by using the side passage as a communication passage.
上記の如くして排気室３０に流入した気体は、
排気管４３から排気処理装置４４に流入し、ここ
で処理された後、外気に放出される。 The gas that has flowed into the exhaust chamber 30 as described above is
The exhaust gas flows from the exhaust pipe 43 into the exhaust treatment device 44, where it is treated and then released to the outside air.
（考案の効果）
本考案は、以上から明らかなように、気体の放
出個所は一個所だけであるから、排気処理装置は
一個所だけに設ければよく、したがつて構成の簡
素化が図れることになる。(Effects of the invention) As is clear from the above, in the present invention, the gas is released from only one location, so the exhaust treatment device only needs to be installed at one location, and the configuration can therefore be simplified. It turns out.
また、従来の如く、第一および第二段真空ポン
プ間の通路に弁装置を設ける必要がなく、したが
つて該通路内の簡素化が可能になるとともに該弁
装置に排気処理装置を設ける必要がないため、小
型化が図れることになる。 In addition, there is no need to provide a valve device in the passage between the first and second stage vacuum pumps as in the past, which makes it possible to simplify the inside of the passage, and it is not necessary to provide an exhaust treatment device in the valve device. Since there are no holes, miniaturization can be achieved.
第１図は本考案に係る真空ポンプの横断面図、
第２図は弁装置の詳細図である。
１……一段側真空ポンプ、１１……二段側真空
ポンプ、２４……一段側真空ポンプの排気口、２
５……二段側真空ポンプの吸気口、２６……通
路、２９……隔壁、３０……排気室、３５……連
通孔（連通路）、３６……弁装置、４２……排気
口。
FIG. 1 is a cross-sectional view of a vacuum pump according to the present invention;
FIG. 2 is a detailed view of the valve device. 1... First-stage vacuum pump, 11... Second-stage vacuum pump, 24... Exhaust port of first-stage vacuum pump, 2
5... Intake port of second-stage vacuum pump, 26... Passage, 29... Partition wall, 30... Exhaust chamber, 35... Communication hole (communication path), 36... Valve device, 42... Exhaust port.
Claims (1)
二段側の真空ポンプと、 前記一段側の真空ポンプの排気口と前記二段側
の真空ポンプの吸入室に形成された吸気口とを接
続する通路と、 該通路と二段側の真空ポンプにおける排気室と
を連通する連通路に設けられ、前記通路側の圧力
に応じて前記排気室の排気口を介して前記通路を
大気に開放する弁装置と、 を備えてなる真空ポンプ。[Scope of Claim for Utility Model Registration] A vacuum pump on the first stage side, a vacuum pump on the second stage side whose pumping speed is lower than that of the vacuum pump on the first stage side, an exhaust port of the vacuum pump on the first stage side, and a vacuum pump on the second stage side. A passage connecting an inlet formed in a suction chamber of the vacuum pump, and a communication passage communicating the passage with an exhaust chamber of the vacuum pump on the second stage side, and the exhaust gas is A vacuum pump comprising: a valve device that opens the passage to the atmosphere through an exhaust port of the chamber.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP7614786U JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62188567U JPS62188567U (en) | 1987-12-01 |
| JPH0229259Y2 true JPH0229259Y2 (en) | 1990-08-06 |
Family
ID=30922954
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP7614786U Expired JPH0229259Y2 (en) | 1986-05-20 | 1986-05-20 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229259Y2 (en) |
-
1986
- 1986-05-20 JP JP7614786U patent/JPH0229259Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62188567U (en) | 1987-12-01 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| EP1536140A1 (en) | Multistage dry vacuum pump | |
| KR20040030968A (en) | Vacuum pumping system and method of operating vacuum pumping system | |
| JP2003518228A (en) | Dry compression vacuum pump with gas ballast | |
| JPH0229259Y2 (en) | ||
| JP3906973B2 (en) | Vacuum exhaust device | |
| JPS61123777A (en) | Vacuum pump | |
| JPH027268Y2 (en) | ||
| JPH025107Y2 (en) | ||
| JPH01253583A (en) | Low-pressure type rotary compressor | |
| JPH0716070Y2 (en) | Multi-stage vane pump | |
| JPH021512Y2 (en) | ||
| CN113374673B (en) | Cylinder block for piston compressor and piston compressor | |
| KR100405792B1 (en) | Alternator vacuum pump for noise reduction and improvement in durabilty | |
| JP6620006B2 (en) | Oil rotary vacuum pump | |
| JPH022479B2 (en) | ||
| JP2014231809A (en) | Biaxial rotary pump | |
| JP2942659B2 (en) | Oil-free screw vacuum pump | |
| JPH05215089A (en) | Vacuum pump | |
| JP3754236B2 (en) | Oil-free screw compressor | |
| JPS6042229Y2 (en) | compressor | |
| JPS62247193A (en) | Vacuum pump | |
| JP5663796B2 (en) | Biaxial rotary pump | |
| KR100308268B1 (en) | Backward flow preventing device of compression remaining gas for hermetic type rotary compressor | |
| JP2782945B2 (en) | Scroll fluid device | |
| JPS61192871A (en) | Pressure control device for vacuum pump |