JPS6170954U - - Google Patents
Info
- Publication number
- JPS6170954U JPS6170954U JP1984155195U JP15519584U JPS6170954U JP S6170954 U JPS6170954 U JP S6170954U JP 1984155195 U JP1984155195 U JP 1984155195U JP 15519584 U JP15519584 U JP 15519584U JP S6170954 U JPS6170954 U JP S6170954U
- Authority
- JP
- Japan
- Prior art keywords
- piezoelectric
- piezoelectric laminate
- clamping
- outer end
- driving section
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/028—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors along multiple or arbitrary translation directions, e.g. XYZ stages
-
- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
- H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
- H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
- H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
- H02N2/023—Inchworm motors
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/50—Piezoelectric or electrostrictive devices having a stacked or multilayer structure
- H10N30/503—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view
- H10N30/505—Piezoelectric or electrostrictive devices having a stacked or multilayer structure having a non-rectangular cross-section in a plane orthogonal to the stacking direction, e.g. polygonal or circular in top view the cross-section being annular
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/88—Mounts; Supports; Enclosures; Casings
- H10N30/886—Additional mechanical prestressing means, e.g. springs
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Description
第1〜3図は本考案の実施例を示し第1図は斜
視図、第2図は縦断側面図、第3図は圧電積層体
2,3の縦断側面図、第4図は第二実施例の斜視
図である。 1…中央ブロツク、2,2a〜2d…直進用圧
電積層体、3,3a〜3d…クランプ用圧電積層
体、4…圧電素子板、7…連結板、14,14…
クランプ板、16…X方向駆動部、17…Y方向
駆動部、22a〜22d…直進用圧電積層体、2
3a〜23d…クランプ用圧電積層体、w,w…
壁面。
視図、第2図は縦断側面図、第3図は圧電積層体
2,3の縦断側面図、第4図は第二実施例の斜視
図である。 1…中央ブロツク、2,2a〜2d…直進用圧
電積層体、3,3a〜3d…クランプ用圧電積層
体、4…圧電素子板、7…連結板、14,14…
クランプ板、16…X方向駆動部、17…Y方向
駆動部、22a〜22d…直進用圧電積層体、2
3a〜23d…クランプ用圧電積層体、w,w…
壁面。
Claims (1)
- 直進用圧電積層体をX軸方向に配置し、かつそ
の外端にZ方向のクランプ用圧電積層体を設けな
るX方向駆動部と、直進用圧電積層体をY軸方向
に配置し、かつその外端にZ方向のクランプ用圧
電積層体を設けてなるY方向駆動部とを連結して
構成される圧電走査装置。
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984155195U JPS6170954U (ja) | 1984-10-15 | 1984-10-15 | |
US06/786,476 US4651046A (en) | 1984-10-15 | 1985-10-11 | Piezoelectric scanning device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1984155195U JPS6170954U (ja) | 1984-10-15 | 1984-10-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6170954U true JPS6170954U (ja) | 1986-05-15 |
Family
ID=15600569
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1984155195U Pending JPS6170954U (ja) | 1984-10-15 | 1984-10-15 |
Country Status (2)
Country | Link |
---|---|
US (1) | US4651046A (ja) |
JP (1) | JPS6170954U (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0476193U (ja) * | 1990-11-15 | 1992-07-02 |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6162370A (ja) * | 1984-08-31 | 1986-03-31 | Tokyo Juki Ind Co Ltd | ピエゾモ−タ |
US4877957A (en) * | 1986-07-14 | 1989-10-31 | Olympus Optical Co., Ltd. | Scanning type tunnel microscope |
US4798989A (en) * | 1986-09-26 | 1989-01-17 | Research Development Corporation | Scanning tunneling microscope installed in electron microscope |
US4725753A (en) * | 1986-10-06 | 1988-02-16 | Baker Manufacturing Company | Piezoelectric transducer |
US4849668A (en) * | 1987-05-19 | 1989-07-18 | Massachusetts Institute Of Technology | Embedded piezoelectric structure and control |
US4958100A (en) * | 1989-02-22 | 1990-09-18 | Massachusetts Institute Of Technology | Actuated truss system |
US4968914A (en) * | 1989-03-24 | 1990-11-06 | Quanscan, Inc. | High resolution electromechanical translation device |
JP2839543B2 (ja) * | 1989-04-12 | 1998-12-16 | 株式会社東芝 | 変位発生装置 |
JPH04264784A (ja) * | 1991-02-20 | 1992-09-21 | Nec Corp | 電歪効果素子およびその製造方法 |
JPH0670565A (ja) * | 1992-08-18 | 1994-03-11 | Olympus Optical Co Ltd | 超音波振動子及び超音波アクチュエータ |
US5751090A (en) * | 1995-05-17 | 1998-05-12 | Burleigh Instruments Inc | Peristaltic driver apparatus |
CN102565458A (zh) * | 2012-02-15 | 2012-07-11 | 北京航空航天大学 | 一种推挽式二维微移动/定位装置 |
WO2015190944A1 (ru) * | 2014-06-10 | 2015-12-17 | Общество С Ограниченной Ответственностью "Илмасоник-Наука" | Скважинный акустический прибор для обработки призабойных зон нефтяных и газовых пластов |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55100059A (en) * | 1979-01-27 | 1980-07-30 | Ngk Spark Plug Co Ltd | Linear step motor |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1071648A (en) * | 1964-11-06 | 1967-06-07 | Standard Telephones Cables Ltd | Position control device |
US3684904A (en) * | 1969-04-24 | 1972-08-15 | Gennady Vasilievich Galutva | Device for precision displacement of a solid body |
JPS5315060A (en) * | 1976-07-28 | 1978-02-10 | Hitachi Ltd | Inching device |
SU752560A1 (ru) * | 1978-02-08 | 1980-07-30 | Московский институт электронной техники | Пьезоэлектрический линейный шаговый двигатель |
US4455501A (en) * | 1982-02-09 | 1984-06-19 | Tokyo Shibaura Denki Kabushiki Kaisha | Precision rotation mechanism |
-
1984
- 1984-10-15 JP JP1984155195U patent/JPS6170954U/ja active Pending
-
1985
- 1985-10-11 US US06/786,476 patent/US4651046A/en not_active Expired - Fee Related
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS55100059A (en) * | 1979-01-27 | 1980-07-30 | Ngk Spark Plug Co Ltd | Linear step motor |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0476193U (ja) * | 1990-11-15 | 1992-07-02 |
Also Published As
Publication number | Publication date |
---|---|
US4651046A (en) | 1987-03-17 |