JPS61257468A - Crucible for evaporating metallic atom - Google Patents
Crucible for evaporating metallic atomInfo
- Publication number
- JPS61257468A JPS61257468A JP9608785A JP9608785A JPS61257468A JP S61257468 A JPS61257468 A JP S61257468A JP 9608785 A JP9608785 A JP 9608785A JP 9608785 A JP9608785 A JP 9608785A JP S61257468 A JPS61257468 A JP S61257468A
- Authority
- JP
- Japan
- Prior art keywords
- crucible
- hearth
- graphite
- graphite crucible
- heat insulating
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/24—Vacuum evaporation
- C23C14/243—Crucibles for source material
Abstract
Description
【発明の詳細な説明】
［産業上の利用分野１
本発明は真空雰囲気下で黒鉛ルツボ内の金属を蒸発する
蒸発ルツボに係り、特にその黒鉛ルツボを支持するハー
スと黒鉛ルツボの断熱構造を改良した金属原子蒸発ルツ
ボに関するものである。[Detailed Description of the Invention] [Industrial Application Field 1] The present invention relates to an evaporation crucible that evaporates metal in a graphite crucible in a vacuum atmosphere, and particularly improves the heat insulation structure of the hearth that supports the graphite crucible and the graphite crucible. The present invention relates to a metal atom evaporation crucible.
［従来の技術］
従来、金属を真空雰囲気下で蒸発させる蒸発ルツボは、
蒸発させる金属を収容する黒鉛ルツボと、その黒鉛ルツ
ボを支持するハースとからなり、そのハースの収容部と
黒鉛ルツボ間に石綿。[Prior Art] Conventionally, evaporation crucibles that evaporate metals in a vacuum atmosphere are
It consists of a graphite crucible that houses the metal to be evaporated and a hearth that supports the graphite crucible, and asbestos is placed between the housing part of the hearth and the graphite crucible.
セラミックスファイバーなどの断熱材を敷設したもので
、黒鉛ルツボ内の金属を電子ビーム、プラズマビーム等
により加熱蒸発させるようにしている。It is covered with a heat insulating material such as ceramic fiber, and the metal inside the graphite crucible is heated and evaporated by electron beams, plasma beams, etc.
［発明が解決しようとする問題点コ
しかしながら石綿などの断熱材は柔軟性があり、黒鉛ル
ツボの支持強度が弱い問題がある。また断熱層に剛性の
断熱材を使用すると黒鉛ルツボの支持強度は良くなるが
熱伝導が大きくなりハースの温度が高くなると共に蒸発
のためのエネルギー効率が悪くなる問題がある。[Problems to be Solved by the Invention] However, insulating materials such as asbestos are flexible, and there is a problem in that the supporting strength of the graphite crucible is weak. Further, if a rigid heat insulating material is used for the heat insulating layer, the support strength of the graphite crucible is improved, but there is a problem that heat conduction increases, the temperature of the hearth increases, and the energy efficiency for evaporation deteriorates.
［発明の目的］
本発明は、上記事情を考慮してなされたもので、黒鉛ル
ツボをハースで強固に支持できしかも黒鉛ルツボとハー
ス間を良好に断熱できる蒸発ルツボを提供することを目
的とする。[Object of the Invention] The present invention has been made in consideration of the above circumstances, and an object thereof is to provide an evaporation crucible that can firmly support a graphite crucible with a hearth and can provide good insulation between the graphite crucible and the hearth. .
［発明の概要］
本発明は上記の目的を達成するために、金属を蒸発させ
る黒鉛ルツボを断熱層を介してハースの収容凹部に支持
した金属原子蒸発ルツボにおいて、ハースの収容凹部内
面と黒鉛ルツボの外面間に多数の黒鉛球を介設して断熱
層を形成して構成し、上記断熱層に黒鉛球を用いること
により黒鉛ルツボの外面どハースの収容凹部内面に接す
る黒鉛球は点接触どなり、良好な断熱が行えると共に黒
鉛球が剛体のため黒鉛ルツボを強固に支持できるように
したものである。[Summary of the Invention] In order to achieve the above object, the present invention provides a metal atom evaporation crucible in which a graphite crucible for evaporating metal is supported in a housing recess of a hearth via a heat insulating layer. A large number of graphite balls are interposed between the outer surfaces of the graphite crucible to form a heat insulating layer, and by using the graphite balls in the heat insulating layer, the graphite balls that are in contact with the outer surface of the graphite crucible and the inner surface of the housing recess of the hearth form a point contact. In addition to providing good heat insulation, the graphite spheres are rigid and can firmly support the graphite crucible.
［実施例］
以下本発明の金属原子蒸発ルツボの好適一実施例を添付
図面に基づいて説明する。[Example] A preferred example of the metal atom evaporation crucible of the present invention will be described below with reference to the accompanying drawings.
第１図、第２図において、１は蒸発させる金属２を収容
する黒鉛ルツボで、半円筒形状に形成される。３は黒鉛
ルツボ１を収容するためのハースで、熱伝導の良好な銅
などて直方体状に形成され、その」二面に黒鉛ルツボ１
を収容すべく半円柱状の収容四部４が形成される。この
収容四部４の内面には輻射熱を反則する反則メッキ層５
が形成され、その反射メッキ層５と黒鉛ルツボ１の外面
１ａ間に多数の黒鉛球６が介設された断熱層７が設ｃノ
られる。In FIGS. 1 and 2, reference numeral 1 denotes a graphite crucible that houses the metal 2 to be evaporated, and is formed into a semi-cylindrical shape. Reference numeral 3 denotes a hearth for housing the graphite crucible 1, which is made of copper or the like with good thermal conductivity and is shaped like a rectangular parallelepiped.
A semi-cylindrical housing section 4 is formed to accommodate the. On the inner surface of this housing part 4, there is a repellent plating layer 5 that repels radiant heat.
is formed, and a heat insulating layer 7 in which a large number of graphite balls 6 are interposed is provided between the reflective plating layer 5 and the outer surface 1a of the graphite crucible 1.
黒鉛ルツボ１の外面１ａの半径ｒ１は、収容凹部４の半
径ｒ４より黒鉛球６の直径Ｄ６分小さい径に形成され、
かつその長ざ膚１は収容凹部４の長ざｆ１４．Ｊ：り黒
鉛球６の直径Ｄ６の２倍分少ない長さに形成される。The radius r1 of the outer surface 1a of the graphite crucible 1 is formed to be smaller than the radius r4 of the accommodation recess 4 by the diameter D6 of the graphite sphere 6,
And the length of the skin 1 is the length f14 of the accommodation recess 4. J: The length is twice the diameter D6 of the graphite ball 6.
またハース３内にはその収容凹部４の内面からの熱を冷
却する冷却孔８が形成され、その冷却孔８に冷却水等を
供給排出するパイプ９，１０が接続される。Further, a cooling hole 8 is formed in the hearth 3 to cool the heat from the inner surface of the housing recess 4, and pipes 9 and 10 for supplying and discharging cooling water and the like are connected to the cooling hole 8.
この蒸発ルツボは真空雰囲気１１下に置かれ、かつその
黒鉛ルツボ１の上方には、そのルツボ１内の金属２を加
熱蒸発させるための電子銃（図示せず）が設（プられて
いる。This evaporation crucible is placed under a vacuum atmosphere 11, and an electron gun (not shown) is installed above the graphite crucible 1 to heat and evaporate the metal 2 in the crucible 1.
次に本発明の詳細な説明する。Next, the present invention will be explained in detail.
真空雰囲気１１下で電子銃により黒鉛ルツボ１内の金属
２は高温に加熱され蒸発され、この蒸発金属が例えば真
空蒸着などに使用される。The metal 2 in the graphite crucible 1 is heated to a high temperature and evaporated by an electron gun in a vacuum atmosphere 11, and this evaporated metal is used, for example, in vacuum evaporation.
さて黒鉛ルツボ１の外面１ａは高温となるが、この外面
１ａには黒鉛球６が点接触した断熱層７が形成され、他
方収容凹部４の内面とも黒鉛球６は点接触するため、黒
鉛ルツボ１からハース３への熱伝導は極めて少なく、ま
た収容凹部４の内面に反則メッキ層５が形成されるため
、黒鉛ルツボ１からの輻射熱もこのメッキ層５に反射さ
れてハース３に伝わらない。またハース３はその冷却孔
８内を流れる冷却水により冷却され低温に保持され健全
性が保持される。Now, the outer surface 1a of the graphite crucible 1 becomes hot, but a heat insulating layer 7 with which the graphite balls 6 are in point contact is formed on this outer surface 1a, and the graphite balls 6 are in point contact with the inner surface of the accommodation recess 4, so that the graphite crucible Heat conduction from the graphite crucible 1 to the hearth 3 is extremely small, and since the repulsive plating layer 5 is formed on the inner surface of the accommodation recess 4, the radiant heat from the graphite crucible 1 is reflected by this plating layer 5 and is not transmitted to the hearth 3. Further, the hearth 3 is cooled by the cooling water flowing through the cooling holes 8 and kept at a low temperature, thereby maintaining its soundness.
また黒鉛ルツボ１はハース３の収容凹部４に黒鉛球６を
介して支持されるため、その支持が強固に行える。Furthermore, since the graphite crucible 1 is supported in the housing recess 4 of the hearth 3 via the graphite balls 6, it can be supported firmly.
尚上述の実施例においては黒鉛ルツボ１と収容凹部４の
内面間には一層の黒鉛球６を介在させる例で説明したが
、黒鉛球６を多層に設【プてもよい。In the above embodiment, one layer of graphite balls 6 is interposed between the graphite crucible 1 and the inner surface of the housing recess 4, but the graphite balls 6 may be provided in multiple layers.
また黒鉛ルツボ１の形状を半円筒状の例で説明したが、
他のいかなる形状に形成してもＪ：いことは勿論である
。さらに収容四部４の内面に反射メッキ層５を形成して
輻射熱を反射するようにしたが、ハース３の材質により
輻射熱を反射できるものであれば必ずしも設ける必要は
なく、また反則層を形成する場合、メッキによらず伯の
手段で反射層を形成するようにしてもよい。In addition, although the shape of the graphite crucible 1 was explained using a semi-cylindrical example,
Of course, it can be formed into any other shape. Furthermore, a reflective plating layer 5 is formed on the inner surface of the housing section 4 to reflect radiant heat, but it is not necessarily necessary to provide it as long as the material of the hearth 3 can reflect radiant heat. Alternatively, the reflective layer may be formed using the above method instead of plating.
［発明の効果１
以上詳述してぎたことから明らかなように本発明によれ
ば次のごとき優れた効果を発揮する。[Effects of the Invention 1] As is clear from the above detailed description, the present invention provides the following excellent effects.
（１） ハースの収容凹部に黒鉛ルツボを収容するに
おいて、その間に黒鉛球からなる断熱層を介在させたの
で、黒鉛球による点接触で良好な断熱が行える。(1) When the graphite crucible is housed in the housing recess of the hearth, a heat insulating layer made of graphite balls is interposed between the crucibles, so that point contact by the graphite balls can provide good heat insulation.
（２） 黒鉛球は剛性があり、かつ高温強度が高いの
で、金属の加熱蒸発中その黒鉛ルツボを強固に支持する
ことができる。(2) Since the graphite sphere is rigid and has high high-temperature strength, it can firmly support the graphite crucible during heating and evaporation of metal.
（３） 黒鉛球による断熱層で黒鉛ルツボどハース間
を断熱できるので、低湿に保たれ、ハースがその高温度
差による熱応力ににり変形することがない。(3) Since the insulation layer made of graphite balls can insulate the space between the graphite crucible and the hearth, low humidity is maintained and the hearth does not deform due to thermal stress caused by the high temperature difference.
第１図は本発明の金属原子蒸発ルツボの一実施例を示す
断面図、第２図は第１図の■−■線断面図である。
図中、１は黒鉛ルツボ、２は金属、３はハース、４は収
容凹部、６は黒鉛球、７は断熱層である。FIG. 1 is a cross-sectional view showing an embodiment of the metal atom evaporation crucible of the present invention, and FIG. 2 is a cross-sectional view taken along the line ■--■ in FIG. In the figure, 1 is a graphite crucible, 2 is a metal, 3 is a hearth, 4 is a housing recess, 6 is a graphite ball, and 7 is a heat insulating layer.
Claims (1)
収容凹部に支持した金属原子蒸発ルツボにおいて、ハー
スの収容凹部内面と黒鉛ルツボの外面間に多数の黒鉛球
を介設して断熱層を形成したことを特徴とする金属原子
蒸発ルツボ。In a metal atom evaporation crucible in which a graphite crucible for evaporating metal is supported in a housing recess of a hearth via a heat insulating layer, a large number of graphite balls are interposed between the inner surface of the hearth housing recess and the outer surface of the graphite crucible to form a heat insulating layer. A metal atom evaporation crucible characterized by:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9608785A JPS61257468A (en) | 1985-05-08 | 1985-05-08 | Crucible for evaporating metallic atom |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9608785A JPS61257468A (en) | 1985-05-08 | 1985-05-08 | Crucible for evaporating metallic atom |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61257468A true JPS61257468A (en) | 1986-11-14 |
Family
ID=14155615
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9608785A Pending JPS61257468A (en) | 1985-05-08 | 1985-05-08 | Crucible for evaporating metallic atom |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61257468A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007054832A (en) * | 2005-08-23 | 2007-03-08 | Samsung Electronics Co Ltd | Nanoparticle generator |
| CN102758180A (en) * | 2011-04-28 | 2012-10-31 | 日本电波工业株式会社 | Basque for forming optical thin film |
-
1985
- 1985-05-08 JP JP9608785A patent/JPS61257468A/en active Pending
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007054832A (en) * | 2005-08-23 | 2007-03-08 | Samsung Electronics Co Ltd | Nanoparticle generator |
| JP4542069B2 (en) * | 2005-08-23 | 2010-09-08 | 三星電子株式会社 | Nano particle generator |
| CN102758180A (en) * | 2011-04-28 | 2012-10-31 | 日本电波工业株式会社 | Basque for forming optical thin film |
| JP2012233211A (en) * | 2011-04-28 | 2012-11-29 | Nippon Dempa Kogyo Co Ltd | Hearth liner for formation of optical thin film |
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