CN101441150B - Vacuum thermal insulation heating apparatus - Google Patents
Vacuum thermal insulation heating apparatus Download PDFInfo
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- CN101441150B CN101441150B CN2008101990516A CN200810199051A CN101441150B CN 101441150 B CN101441150 B CN 101441150B CN 2008101990516 A CN2008101990516 A CN 2008101990516A CN 200810199051 A CN200810199051 A CN 200810199051A CN 101441150 B CN101441150 B CN 101441150B
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Abstract
The invention discloses a vacuum insulation heating device for providing local high-temperature environment 600 to 800 DEG C when high-energy particles bombard target (sample). The device comprises an upper cover, a lower cover and a vacuum closed space formed in a base, wherein the vacuum closed space is provided with a heating block connected with a power supply, a heat conducting bar is arranged on the heating block and connected with a sample rack for placing the sample. In the process of transferring heat from a heat source to an objective area, convection heat transfer losses and radiation heat transfer losses can be generated greatly if contacting with the air. The device is designed by utilizing vacuum insulation technology which can effectively reduce convection heat transfer losses.
Description
Technical field
The present invention relates to a kind of being used for is warmed up to sample 600～800 ℃ heating arrangement, is applicable in the physics research with high-energy particle bombardment target range (sample), thereby produces the occasion of certain effect.
Background technology
In the research of microphysicss such as quantum physics, usually need a kind of special environment, the particle that the particle emission instrument is sent is got on the sample, and the high-temperature vacuum environment is wherein a kind of.By prior art is retrieved discovery, there is not to find introduction about the heating arrangement aspect technology that is specifically designed to the required hot environment in high-energy particle bombardment target range (sample).
Owing to need on narrow and small specimen holder, realize one 600～800 ℃ high temperature, be difficult under the usual terms accomplish, because cross-ventilation is very big to the influence of heat conductor under the hot conditions, make the temperature of heat conductor be difficult to rise to 600～800 ℃ high temperature.Experimental results show that: under atmospheric conditions, the sample on the specimen holder is heated, be subjected to the restriction of heat block power, when being heated to about 300 ℃, temperature just again can't continue to raise.
Summary of the invention
The technical problem to be solved in the present invention is to overcome the deficiencies in the prior art, provides a kind of when being used for high-energy particle bombardment target range (sample), and the vacuum thermal insulation heating apparatus of local 600～800 ℃ of hot environments is provided.
Technical scheme of the present invention is: a kind of vacuum thermal insulation heating apparatus, it is characterized in that: described device comprises the vacuum sealing space that is formed by upper outlet body, lower cover, base, be provided with the heat block that is connected with power supply in this vacuum sealing space, heat block is provided with heat conductive rod, is connected with the specimen holder that is used to lay sample on the heat conductive rod; Be provided with shape metallic leak-proof structure between described upper outlet body and the lower cover, weld together between lower cover and the base, base is provided with metal support, and heating block is located on the support; Be provided with protective shield of radiation (14) around described heat block and the heat conductive rod, described protective shield of radiation (14) is two layers or more, and is separated from each other between the adjacent layer; Described specimen holder is provided with thermopair, and thermopair links to each other with temperature controller by power lead, and temperature controller is connected with power supply, and the power lead outside is with the ceramic jacket ring; Position corresponding with sample on the specimen holder on the sidewall of described vacuum sealing space is provided with the particle bombardment inlet tube; Be connected with the particle generator wall of described vacuum sealing space of described particle bombardment inlet tube is provided with an interface, and described interface is connected with vacuum pump.Thereby the particle that the guiding particle generator sends is got on the sample accurately.This device utilizes vaccum thermal insulation technique, with heating source and air insulated, reduces the convection heat transfer loss, makes more available heat be delivered to the appointed area.The power lead outside is with the ceramic jacket ring, keeps operate as normal thereby guarantee to be placed under the hot conditions like this by the power supply line that thermal source is drawn.
Described shape metallic leak-proof structure comprises the red copper O-ring seal that is arranged between upper outlet body, the lower cover, and upper outlet body, lower cover link together by securing member.
The wherein setting of protective shield of radiation, purpose are in order to reduce the radiation heat transfer loss of thermal source, to have adopted the multilayer protective shield of radiation, the radiation heat transfer loss being significantly reduced.
Protective shield of radiation is tubular, and its upper end is corresponding with the heat conductive rod upper surface, and its lower end extends on the base.
In order to reduce the thermal contact resistance between thermal source and the heat conductive rod, be provided with in the described heat block and the corresponding cavity of heat conductive rod sectional dimension, heat conductive rod is plugged in this cavity, and welds together by silver brazing and heat block.
Described particle bombardment inlet tube is arranged on the sidewall of upper outlet body, and welds together by silver brazing with upper outlet body.
This device utilizes vaccum thermal insulation technique to design, transmit in the process of heat to the target area at thermal source, if contact and to lose by a large amount of convection heat transfer loss and the radiation heat transfers of generation with air, vaccum thermal insulation technique can effectively reduce the convection heat transfer loss, simultaneously, according to radiant heat transfer scientific principle opinion, at limited vacuum area protective shield of radiation is set and reduces the radiation heat transfer loss.Therefore, this device has following advantage:
First: solved under the hot conditions cross-ventilation to the influence of heat conductor;
Second: solve the sealing problem under the hot conditions in the vacuum (-tight) housing cavity;
The 3rd: heat block is given by heat conductive rod and is produced a large amount of external radiation heat transfer losses in the specimen holder heating process under the protective shield of radiation solution hot conditions;
The 4th: heat block combines with heat conductive rod, has solved because the gap thermal resistance that the loose contact meeting produces causes the bad problem of heat production effect;
The the 5th: temperature controller control heat block heating power is set; The ceramic collar is set on power lead, guarantees that power lead at high temperature normally uses.
Description of drawings
Fig. 1 is an assembling synoptic diagram of the present invention;
Fig. 2 is a work synoptic diagram of the present invention.
Embodiment:
Below in conjunction with the drawings and specific embodiments vacuum thermal insulation heating apparatus of the present invention is further described.
As shown in Figure 1, this vacuum thermal insulation heating apparatus has utilized vaccum thermal insulation technique, promptly in the outer cover (comprising upper outlet body 8, base 1 and lower cover 2) of device, form a vacuum sealing space, utilize the interface 16 (shown in Figure 2) of base 1 bottom to be connected with oil-sealed rotary pump 17, it is vacuumized, make in the vacuum sealing space to reach 10
-4Vacuum tightness about Pa drops to air convection loss minimum.For the ease of changing the sample on the specimen holder 9, shell system is designed to the upper outlet body 8 and the lower cover 2 of the stainless steel structure that can install and remove, adopt metallic seal, be designed to the metal o-ring 6 of a red copper in the middle of promptly; Be provided with a stainless bracing frame 13 on base 1, support 13 upper ends are provided with heat block 12, are provided with cavity in the middle of the heat block 12, and heat conductive rod 11 is plugged in this cavity, and welds together.The specimen holder 9 that is used to place sample adopts the copper sheet of 10x10x5.Be subjected to the influence of assembly space, the power selection 1000W of heat block 12, heat conductive rod 11 adopts the bigger red copper of heat-conduction coefficient, to adopt the silver solder welding that contains certain percentage composition in order realizing well connecting between heat block 12 and the heat conductive rod 11, at utmost to have reduced thermal contact resistance between the two; Consider that heat conductive rod 11 has a large amount of radiation heat in work, be dispersed in the sky body by cover body and can cause a large amount of thermal loss, cause not reaching range of set temperature on the specimen holder 9, be provided with two-layer protective shield of radiation 3 and 14 for this reason, according to the radiant heat transfer computing formula, through Theoretical Calculation as can be known, through radiation heat loss' about 20% before being after protective shield of radiation 3 and 14 shieldings.The bracing frame 13 that make with stainless-steel tube the below of heat block 12 is fixed on the base 1, and temperature controller 15 is connected with heat block 12 and thermopair 10 by power lead 4, the temperature of control heat block 12.Thermopair 15 is installed on the specimen holder 9.Because power lead 4 will be placed oneself in the midst of under the high temperature of degree more than 500, common power lead will soon melt away.We adopt the resistant to elevated temperatures power lead 4 of epidermis, put the ceramic collar 5 of excellent heat insulating performance simultaneously in the outside of power lead 4.
Get to accurately on the sample for the particle that guides particle generator to send, designed particle bombardment inlet tube 7.This particle bombardment inlet tube 7 welds by silver solder with upper outlet body 8, and the one end is relative with specimen holder 9, and the other end links to each other (as shown in Figure 2) with particle generator 19.
As shown in Figure 2, this heating arrangement is placed on the platform with certain bearing capacity, temperature controller 15 is connected with power supply and thermopair 10, heat block 12 also is connected with power supply 18 simultaneously, connect oil-sealed rotary pump 17 simultaneously, determine that each position of heating arrangement all is in sealing state, at first open oil-sealed rotary pump 17, it is vacuumized, wait until that simultaneously the interior vacuum tightness of heating arrangement is 10
-4About Pa, the time probably needs 30 minutes, and opening power 18 heats with heat block 12, at this moment the transient temperature on the meeting show sample frame 9 on the temperature controller 15.After about 30 minutes, the temperature on the specimen holder 9 reaches 600～800 ℃.
The foregoing description is a kind of embodiment of the present invention, only is used to illustrate the present invention, but not is used to limit the present invention.
Claims (5)
1. vacuum thermal insulation heating apparatus, it is characterized in that: described device comprises the vacuum sealing space that is formed by upper outlet body, lower cover, base, be provided with the heat block that is connected with power supply in this vacuum sealing space, heat block is provided with heat conductive rod, is connected with the specimen holder that is used to lay sample on the heat conductive rod; Be provided with shape metallic leak-proof structure between described upper outlet body and the lower cover, weld together between lower cover and the base, base is provided with metal support, and heating block is located on the support; Be provided with protective shield of radiation (14) around described heat block and the heat conductive rod, described protective shield of radiation (14) is two layers or more, and is separated from each other between the adjacent layer; Described specimen holder is provided with thermopair, and thermopair links to each other with temperature controller by power lead, and temperature controller is connected with power supply, and the power lead outside is with the ceramic jacket ring; Position corresponding with sample on the specimen holder on the sidewall of described vacuum sealing space is provided with the particle bombardment inlet tube, and described particle bombardment inlet tube is connected with particle generator; The wall of described vacuum sealing space is provided with an interface, and described interface is connected with vacuum pump.
2. vacuum thermal insulation heating apparatus according to claim 1 is characterized in that: described shape metallic leak-proof structure comprises the red copper O-ring seal that is arranged between upper outlet body, the lower cover, and upper outlet body, lower cover link together by securing member.
3. vacuum thermal insulation heating apparatus according to claim 1 is characterized in that: described protective shield of radiation (14) is tubular, and its upper end is corresponding with the heat conductive rod upper surface, and its lower end extends on the base.
4. vacuum thermal insulation heating apparatus according to claim 2 is characterized in that: be provided with in the described heat block and the corresponding cavity of heat conductive rod sectional dimension, heat conductive rod is plugged in this cavity, and welds together by silver brazing and heat block.
5. according to each described vacuum thermal insulation heating apparatus of claim 1 to 4, it is characterized in that: described particle bombardment inlet tube is arranged on the sidewall of upper outlet body, and welds together by silver brazing with upper outlet body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101990516A CN101441150B (en) | 2008-10-09 | 2008-10-09 | Vacuum thermal insulation heating apparatus |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2008101990516A CN101441150B (en) | 2008-10-09 | 2008-10-09 | Vacuum thermal insulation heating apparatus |
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| CN101441150A CN101441150A (en) | 2009-05-27 |
| CN101441150B true CN101441150B (en) | 2011-09-14 |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101774708B (en) * | 2009-12-29 | 2013-06-19 | 常州浩瀚新材料科技有限公司 | Treatment technology and device for providing safeguards for drinking water source |
| CN102059448A (en) * | 2010-12-20 | 2011-05-18 | 中国电子科技集团公司第三十八研究所 | Device for welding microwave circuit base plate based on vacuum directed radiation |
| CN102744484B (en) * | 2011-04-22 | 2014-09-17 | 中国科学院电子学研究所 | Special system for braze joint between radiator and collector of STWT (Spatial Travelling Wave Tube) |
| CN102489819A (en) * | 2011-12-26 | 2012-06-13 | 北方夜视科技集团有限公司 | Fluctuated tube body solder vacuum pouring device |
| CN102589964B (en) * | 2012-02-15 | 2013-08-28 | 中国科学院上海应用物理研究所 | Heating device |
| CN107680922B (en) * | 2017-10-11 | 2020-12-01 | 德淮半导体有限公司 | Wafer acceptance test system and method for improving heat utilization efficiency thereof |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987330A (en) * | 2005-12-22 | 2007-06-27 | 骆俊光 | Vacuum heat conductive device and method |
| CN201298001Y (en) * | 2008-10-09 | 2009-08-26 | 海信科龙电器股份有限公司 | Vacuum insulated heating device |
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2008
- 2008-10-09 CN CN2008101990516A patent/CN101441150B/en active Active
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1987330A (en) * | 2005-12-22 | 2007-06-27 | 骆俊光 | Vacuum heat conductive device and method |
| CN201298001Y (en) * | 2008-10-09 | 2009-08-26 | 海信科龙电器股份有限公司 | Vacuum insulated heating device |
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| CN101441150A (en) | 2009-05-27 |
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