JPS61170084A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS61170084A JPS61170084A JP907185A JP907185A JPS61170084A JP S61170084 A JPS61170084 A JP S61170084A JP 907185 A JP907185 A JP 907185A JP 907185 A JP907185 A JP 907185A JP S61170084 A JPS61170084 A JP S61170084A
- Authority
- JP
- Japan
- Prior art keywords
- cathode
- heat transfer
- path
- cooling
- laser oscillator
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の利用分野〕
本発Ｆ！Ａは、レーザ発振器の放電部電極構造に係シ、
特に、電極高温によるレーザガス温度上昇を防ぐため、
冷却性能の高い好適な電極冷却構造に関する。[Detailed description of the invention] [Field of application of the invention] The present F! A is related to the electrode structure of the discharge part of the laser oscillator,
In particular, to prevent the laser gas temperature from rising due to the high temperature of the electrode,
The present invention relates to a suitable electrode cooling structure with high cooling performance.
電極の冷却方法は、電極と冷却媒質が直接接触する直接
冷却方式と、絶縁物を介して冷却する間接冷却方式とに
大別できるが、そのほとんどは、水、油等の冷却媒体の
通る通路が電極内部、又は、Ｊ−小：圧体ｆ姶魯イ躬４
榔光Ｌ１ハイ１＾７１此鴫圀５７−１８０１９０号）。Electrode cooling methods can be roughly divided into direct cooling methods, in which the electrodes and cooling medium come into direct contact, and indirect cooling methods, in which they are cooled through an insulator, but most of them involve a passage through which a cooling medium such as water or oil passes. is inside the electrode or J-small: Pressure body 4
Sakamitsu L1 High 1^71 Kono Shikuni 57-180190).
しかし、単に冷却通路を設置するだけでは冷却効率が低
く、十分に電極で発生する熱を冷却することができなか
った。However, simply installing a cooling passage resulted in low cooling efficiency, and it was not possible to sufficiently cool the heat generated in the electrodes.
本発明の目的は、電極の冷却効果を上げることによシ、
電極の温度を下げて、さらにレーザガス温度を下げ、レ
ーザ発振を安定させ、効率の高いレーザ発振器を提供す
ることにある。The purpose of the present invention is to improve the cooling effect of the electrode by
The object of the present invention is to provide a highly efficient laser oscillator by lowering the electrode temperature and further lowering the laser gas temperature to stabilize laser oscillation.
本発明は電極部に、冷却媒体通過を目的として設置され
九冷却通路において、冷却媒体との伝熱面積を上げ、か
つ、流路抵抗の小さい熱伝導率の高い材質でできたフィ
ン形状の伝熱板を通路内部に設置することによシ、伝熱
量を上げ、電極で発生する熱を効率よく除・去し、レー
ザガス温度を下げることができる。The present invention has nine cooling passages installed in the electrode part for the purpose of passing the cooling medium, which increases the heat transfer area with the cooling medium and has a fin shape made of a material with low flow path resistance and high thermal conductivity. By installing a hot plate inside the passage, it is possible to increase the amount of heat transfer, efficiently remove the heat generated at the electrodes, and lower the laser gas temperature.
以下、本発明の実施例を第１図、２図により、説明する
。Embodiments of the present invention will be described below with reference to FIGS. 1 and 2.
第１図は、レーザ発振器放電部の光軸方向よシ見た断面
図を示す。対向して設置された陰極ｌと陽極２間に、直
流電源３よυ高電圧が印加されて上記陰極１陽極２間に
、グロー放電４が形成されて、強制循環されてきたガス
流５が、上記グロー放電領域を通過する時、レーザガス
が励起され、ガス流方向、グロー放電方向に対し垂直方
向に設置された光学系６によシ、レーザ光が取り出され
る。FIG. 1 shows a cross-sectional view of the laser oscillator discharge section as viewed from the optical axis direction. A high voltage υ from a DC power source 3 is applied between the cathode 1 and the anode 2 which are placed facing each other, and a glow discharge 4 is formed between the cathode 1 and the anode 2, and the forcedly circulated gas flow 5 is When the laser gas passes through the glow discharge region, the laser gas is excited, and the laser light is extracted by the optical system 6 installed perpendicularly to the gas flow direction and the glow discharge direction.
この時、陰極１は、内部に冷却媒体８が通過する通路を
持つパイプ形状をしていて、その通路に、熱伝導率の高
い銅でできたフィン７が設置されている。陰極内部に、
冷却媒体８流れ方向８Ａに６枚のフィン７を挿入したも
ので、伝熱面積は、約３倍に増加し、大幅な熱交換量上
昇となり、陰極ｌの温度を下げることができた。At this time, the cathode 1 has a pipe shape with a passage inside which a cooling medium 8 passes, and fins 7 made of copper having high thermal conductivity are installed in the passage. Inside the cathode,
By inserting six fins 7 in the flow direction 8A of the cooling medium 8, the heat transfer area increased approximately three times, resulting in a significant increase in the amount of heat exchange, and the temperature of the cathode 1 could be lowered.
本発明によれば、簡単な構造で、電極部の冷却効果を上
げ、安定したレーザ発振が実現でき、電極自体の過熱を
防ぐことＫより、信頼性向上、寿命の向上を計ることが
できる。According to the present invention, with a simple structure, it is possible to improve the cooling effect of the electrode part, realize stable laser oscillation, and prevent overheating of the electrode itself, thereby improving reliability and longevity.
第１図は本発明の実施例である３軸直交形ガスレ一ザ発
振器の側断面図、第２図は第１図に使用した陰極の斜視
図である。
ｌ・・・陰極、２・・・陽極、３・・・直流電源、４・
・・グロー放電、５・・・ガス流方向、６・・・光学系
軸、７・・・冷却フィン、８・・・冷却媒体。FIG. 1 is a sectional side view of a three-axis orthogonal gas laser oscillator according to an embodiment of the present invention, and FIG. 2 is a perspective view of the cathode used in FIG. 1. l... cathode, 2... anode, 3... DC power supply, 4...
... Glow discharge, 5... Gas flow direction, 6... Optical system axis, 7... Cooling fin, 8... Cooling medium.
Claims (1)
せたグロー放電により、混合ガスを励起させてレーザ光
を発生させるレーザ発振器において、上記電極内部に冷
却用突起部を設けたことを特徴とするレーザ発振器。1. A laser oscillator that excites a mixed gas and generates laser light by a glow discharge between a pair of electrodes that circulates a cooling medium inside the laser oscillator, which is characterized by providing a cooling protrusion inside the electrode. Laser oscillator.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP907185A JPS61170084A (en) | 1985-01-23 | 1985-01-23 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP907185A JPS61170084A (en) | 1985-01-23 | 1985-01-23 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS61170084A true JPS61170084A (en) | 1986-07-31 |
Family
ID=11710374
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP907185A Pending JPS61170084A (en) | 1985-01-23 | 1985-01-23 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61170084A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62290189A (en) * | 1986-06-09 | 1987-12-17 | Toshiba Corp | Water-cooling type gas laser tube device |
| US6738400B1 (en) | 1993-07-07 | 2004-05-18 | The United States Of America As Represented By The United States Department Of Energy | Large diameter lasing tube cooling arrangement |
-
1985
- 1985-01-23 JP JP907185A patent/JPS61170084A/en active Pending
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62290189A (en) * | 1986-06-09 | 1987-12-17 | Toshiba Corp | Water-cooling type gas laser tube device |
| US6738400B1 (en) | 1993-07-07 | 2004-05-18 | The United States Of America As Represented By The United States Department Of Energy | Large diameter lasing tube cooling arrangement |
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