JPS63313882A - Laser oscillator - Google Patents
Laser oscillatorInfo
- Publication number
- JPS63313882A JPS63313882A JP14921187A JP14921187A JPS63313882A JP S63313882 A JPS63313882 A JP S63313882A JP 14921187 A JP14921187 A JP 14921187A JP 14921187 A JP14921187 A JP 14921187A JP S63313882 A JPS63313882 A JP S63313882A
- Authority
- JP
- Japan
- Prior art keywords
- electrode
- main electrode
- main
- cooling
- dielectric
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 claims abstract description 44
- 230000010355 oscillation Effects 0.000 claims description 15
- 239000003989 dielectric material Substances 0.000 claims description 10
- 238000007740 vapor deposition Methods 0.000 claims description 3
- 238000003466 welding Methods 0.000 claims description 2
- 239000002826 coolant Substances 0.000 claims 1
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
- 239000003507 refrigerant Substances 0.000 abstract description 7
- 230000006866 deterioration Effects 0.000 abstract description 2
- 230000017525 heat dissipation Effects 0.000 abstract 1
- 238000010586 diagram Methods 0.000 description 4
- 239000007772 electrode material Substances 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/03—Constructional details of gas laser discharge tubes
- H01S3/038—Electrodes, e.g. special shape, configuration or composition
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Lasers (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Stabilization Of Oscillater, Synchronisation, Frequency Synthesizers (AREA)
Abstract
Description
【発明の詳細な説明】
〔産業上の利用分野〕
この発明は、レーザ発振装置、特に、そのメツシュ電極
すなわち第２の主電極及び誘電体の冷却に関するもので
ある。DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a laser oscillation device, and particularly to cooling of a mesh electrode, that is, a second main electrode, and a dielectric thereof.
第５図は、例えば、第４７回応用物理学会予稿集Ｐ１０
９に記載の従来のコロナ予備電離又は沿面予備電離方式
のレーザ発振装置を示す図である。Figure 5 shows, for example, Proceedings of the 47th Japan Society of Applied Physics, P10.
9 is a diagram showing a conventional corona pre-ionization or creeping pre-ionization type laser oscillation device as described in FIG.
図において、（１）は第１の主電極、（２）は第１の主
電極（１）に対向して配置されかつ複数個の開孔を有す
るＭ２の主電極、（４）は上記第１の主電極（１）に対
して第２の主電極（２）の背後に密着して設けられてい
る誘電体、（３）は該誘電体（４）に密着して配置され
かつ第１の主電極に対向して設けられている補助電極で
ある。また、第１の主電極（１）と第２の主電極（２）
との間にはパルス電圧を印加する主回路（５Ｊが、また
、第２の主電極（２）と補助電極（６）との間には予備
電離回路（６）が設けられている。In the figure, (1) is the first main electrode, (2) is the M2 main electrode that is arranged opposite to the first main electrode (1) and has a plurality of openings, and (4) is the above-mentioned main electrode. A dielectric body (3) is disposed closely behind the second main electrode (2) with respect to the first main electrode (1); This is an auxiliary electrode provided opposite to the main electrode. In addition, a first main electrode (1) and a second main electrode (2)
A main circuit (5J) for applying a pulse voltage is provided between the second main electrode (2) and the auxiliary electrode (6), and a pre-ionization circuit (6) is provided between the second main electrode (2) and the auxiliary electrode (6).
次に上記従来装置の動作について説明する。Next, the operation of the above-mentioned conventional device will be explained.
予備電離回路（６）によって第２の主電極（２）と補助
電極（３）との間に高電圧を発生させる。A preionization circuit (6) generates a high voltage between the second main electrode (2) and the auxiliary electrode (3).
これにより、第２の主電極（２）の開孔部の誘電体（４
）の表面でコロナ放電が起こり、ここで発生する電子及
び紫外光によって、第１の主電極（１）と第２の主電極
（２）との間の主放電空間を均一に予備電離する。As a result, the dielectric material (4) in the opening of the second main electrode (2)
), and the electrons and ultraviolet light generated uniformly pre-ionize the main discharge space between the first main electrode (1) and the second main electrode (2).
このようにして、予備電離された後、直ちｌこ主放電回
路（５）によって、第１の主電極（１）と第２の主電極
（２）との間には高電圧が発生し、両生電極（１）。In this way, after pre-ionization, a high voltage is immediately generated between the first main electrode (1) and the second main electrode (2) by the main discharge circuit (5). , amphibious electrode (1).
（２）間で主放電が起こる。(2) The main discharge occurs between.
従来のレーザ発振装置は、以上のように構成されている
ので、放電を高い繰返し度によって行なうと、各電極や
誘電体が加熱され、従って、電極材料が溶融したシ、あ
るいは、誘電体を破損したシ、更には、レーザガス温度
を上昇させてレーザ出力を低下させるなどの問題点があ
った。Conventional laser oscillation devices are configured as described above, so when discharge is performed at a high repetition rate, each electrode and dielectric material are heated, which may melt the electrode material or damage the dielectric material. Furthermore, there were other problems such as raising the laser gas temperature and lowering the laser output.
この発明は、上記のような問題点を解決するためになさ
れたもので、第２の電極や誘電体の劣化や破損を防ぐと
共に、放電空間における温度上昇を抑制し、安定した放
電を得ることのできるレーザ発振装置を得ることを目的
とする。This invention was made to solve the above-mentioned problems, and it is possible to prevent deterioration and damage of the second electrode and dielectric, suppress temperature rise in the discharge space, and obtain stable discharge. The purpose of this invention is to obtain a laser oscillation device that can perform the following functions.
この発明に係るレーザ発振装置は、開口部を有する第２
の主電極か又は補助電極かに、冷却部材を密着又は埋設
して、相互に密着して設けられている第２の主電極及び
誘電体の熱を奪って冷却するものである。The laser oscillation device according to the present invention provides a second laser oscillation device having an opening.
A cooling member is placed in close contact with or embedded in either the main electrode or the auxiliary electrode to remove heat from the second main electrode and the dielectric material, which are provided in close contact with each other, thereby cooling the second main electrode and the dielectric.
この発明における第２の主電極及び誘電体は、そのいず
れかに密着又は埋設によって設けられている冷却部材に
よってその埋設又は密着している側が冷却されると共に
、直接冷却される側と密着している他方も間接的に冷却
される。In the present invention, the second main electrode and the dielectric are cooled by a cooling member that is provided in close contact with or embedded in either of them, and the side that is buried or in close contact with the second main electrode and the dielectric body is cooled by the cooling member that is provided in close contact with or embedded in either of them. The other side is also indirectly cooled.
以下、この発明をその一実施例を示す図に基づいて説明
する。The present invention will be explained below based on the drawings showing one embodiment thereof.
第１図において、第１の主電極（１）、第２の主電極（
２）、補助電極（３）、誘電体（４）は従来装置におけ
るそれらと同−又は同等のものである。In FIG. 1, a first main electrode (1), a second main electrode (
2), the auxiliary electrode (3) and the dielectric (4) are the same or equivalent to those in the conventional device.
また、符号（１１）は第２の電極（２）に例えば蒸着に
より取シ付けられている冷却部材、例えば、フロン等の
冷媒が流通している中空の冷却パイプである。（１２）
は上記冷却パイプ（１１）中に冷却を流通させるポンプ
であり、（１３）は冷媒を放熱して冷却する熱交換器で
ある。Further, reference numeral (11) indicates a cooling member attached to the second electrode (2), for example, by vapor deposition, for example, a hollow cooling pipe through which a refrigerant such as Freon flows. (12)
is a pump that circulates cooling through the cooling pipe (11), and (13) is a heat exchanger that cools the refrigerant by dissipating heat.
次にこの実施例の動作について説明する。Next, the operation of this embodiment will be explained.
第２の主電極（２）と補助電極（３）との間に高電圧が
かけられると、誘電体（４）を介して放電が起こシ、コ
ロナ放電が誘電体（４）の表面に広がり、予備電子がば
らまかれる。When a high voltage is applied between the second main electrode (2) and the auxiliary electrode (3), a discharge occurs through the dielectric (4), and corona discharge spreads to the surface of the dielectric (4). , spare electrons are scattered.
次に、第１の主電極（１）と第２の主電極（２）との間
に十分なパルス電圧が負荷されると、グロー放電が生じ
、これによって、レーザガスが励起されてレーザ発振が
起こる。Next, when a sufficient pulse voltage is applied between the first main electrode (1) and the second main electrode (2), a glow discharge occurs, which excites the laser gas and causes laser oscillation. happen.
一方、第２の主電極（２）は、その表面に冷却パイプ（
１１）が密着して設けられているために、この冷却パイ
プ（１１）を通してアースされていると共に、冷却パイ
プ（１１）内の冷媒により、第２の主電極（２）は冷却
され、更に第２の主電極（２）に密着している誘電体（
４）及び補助電極（３）も冷却される。On the other hand, the second main electrode (2) has a cooling pipe (
11) are provided in close contact with each other, the second main electrode (2) is grounded through the cooling pipe (11), and the second main electrode (2) is cooled by the refrigerant in the cooling pipe (11). The dielectric (2) in close contact with the main electrode (2) of
4) and the auxiliary electrode (3) are also cooled.
また、冷却パイプ（１り中の冷媒は、ポンプ（１２）に
よって冷却パイプ（１１）内を循環し、その途中におい
て、熱交換器（１３）によって放熱冷却される。Further, the refrigerant in the cooling pipe (1) is circulated within the cooling pipe (11) by a pump (12), and is cooled by heat radiation by a heat exchanger (13) along the way.
なお、第２図に示す実施例は、補助電極（３）を冷却パ
イプに構成し、この冷却パイプ兼用の補助電極（３）に
よって冷却するものであシ、この場合も、上記実施例と
同様の効果が得られると共に、第２の主電極（２）を高
圧部に構成することもできる。In the embodiment shown in FIG. 2, the auxiliary electrode (3) is configured as a cooling pipe and is cooled by the auxiliary electrode (3) which also serves as the cooling pipe. In addition to obtaining the above effects, the second main electrode (2) can also be configured in the high voltage section.
また、第３図に示す実施例は、第１図の冷却パイプを断
面長方形の管に構成して更に冷却効率を上げようとする
ものである。Further, in the embodiment shown in FIG. 3, the cooling pipe shown in FIG. 1 is constructed into a tube having a rectangular cross section to further increase the cooling efficiency.
更に、第４図に示す実施例は、補助電極（３）側からの
冷却が誘電体（４）全体に均一になるように冷却パイプ
（１１）を交互に往復するように蛇行させたものである
。Furthermore, in the embodiment shown in FIG. 4, the cooling pipe (11) is meandered so as to alternately go back and forth so that the cooling from the auxiliary electrode (3) side is uniform over the entire dielectric (4). be.
また、図示し【いないが、冷却パイプ（１１）中に冷媒
を流通させることなく、熱伝導度の高い材料によって冷
却部材を構成し、熱伝導によって伝熱冷却するようにし
てもよく、あるいは、冷却部材をヒートパイプにより構
成してもよい。Although not shown, the cooling member may be made of a material with high thermal conductivity without flowing a refrigerant through the cooling pipe (11), and cooling may be performed by heat conduction. The cooling member may be formed of a heat pipe.
更に、上記実施例では、冷却部材を密着させたが、接す
る部材すなわち第２の主電極や補助電極に埋設して設け
てもよい。Further, in the above embodiment, the cooling member is placed in close contact with the cooling member, but it may be provided embedded in the contacting member, that is, the second main electrode or the auxiliary electrode.
更には又、上記実施例では、第２の主電極及び補助電極
を誘電体に密着させたが、蒸着、接着あるいは溶着して
密着させてもよく、あるいは、単に、密着するように押
圧して設けてもよい。Furthermore, in the above embodiments, the second main electrode and the auxiliary electrode are brought into close contact with the dielectric material, but they may also be brought into close contact by vapor deposition, adhesion, or welding, or simply by being pressed so that they come into close contact. It may be provided.
以上のように、この発明によれば、開孔な有する第２の
電極及び補助電極のいずれかに密着又は埋設によって冷
却部材を設けて、第２の主電極及び誘電体（４）を直接
又は間接的に冷却するようにしているので、繰返し放電
が行なわれても、加熱することなく、従って、第２の主
電極も誘電体も劣化や破損をすることなく、主放電が安
定すると共に、レーザガスの温度上昇を抑制して、レー
ザ出力を安定させ得るレーザ発振装置が得られる効果を
有している。As described above, according to the present invention, the cooling member is provided in close contact with or embedded in either the second electrode and the auxiliary electrode having an open hole, and the second main electrode and the dielectric (4) are directly or Since indirect cooling is used, even if repeated discharges occur, there is no heating, and therefore neither the second main electrode nor the dielectric material deteriorates or is damaged, and the main discharge is stabilized. This has the effect of providing a laser oscillation device that can suppress the temperature rise of the laser gas and stabilize the laser output.
第１図はこの発明の一実施例の構成説明図、第２図〜第
４図はこの発明の他の３種の実施例の構成説明図、第５
図は従来のレーザ発振装置の概略構成斜視図である。
（１）・拳第１の主電極、（２）・―第２の主電極、（
６）・・補助電極、（４）・−誘電体、（５）・・主回
路、（６）・―予備電離回路、（１１）・・冷却部材（
冷却）くイブ）。
なお、各図中、同一符号は同−又は相当部分を示す。
罠１図FIG. 1 is an explanatory diagram of the configuration of one embodiment of the present invention, FIGS. 2 to 4 are explanatory diagrams of the configuration of three other embodiments of the invention, and FIG.
The figure is a schematic perspective view of a conventional laser oscillation device. (1)・Fist first main electrode, (2)・-second main electrode, (
6) Auxiliary electrode, (4) Dielectric, (5) Main circuit, (6) Pre-ionization circuit, (11) Cooling member (
cooling). In each figure, the same reference numerals indicate the same or corresponding parts. Trap 1 diagram
Claims (6)
方向とする第１の主電極、該第１の主電極に対向して配
置されておりかつ複数個の間口部を有する第２の主電極
、上記第１の主電極に対して該第２の主電極の背後に密
着して配置されている誘電体、該誘電体に密着して配置
されておりかつ上記第１の主電極に対向して設けられて
いる補助電極、上記第１及び第２の主電極間にパルス電
圧を印加する主回路、並びに上記主回路の一部、及び、
上記主回路とは独立した回路のいずれかであつて上記補
助電極と第２の主電極との間に電圧を印加する予備電離
回路を備えている放電励起形短パルスレーザ装置におい
て、上記第２の主電極及び誘電体を冷却する冷却部材が
、第２の主電極及び補助電極のいずれかに密着及び埋設
のいずれかの手段によつて設けられていることを特徴と
するレーザ発振装置。(1) A first main electrode disposed in the laser gas and having its longitudinal direction in the direction of the laser optical axis; a second main electrode disposed opposite to the first main electrode and having a plurality of frontages; an electrode, a dielectric material disposed in close contact behind the second main electrode with respect to the first main electrode, a dielectric material disposed in close contact with the dielectric material and facing the first main electrode; an auxiliary electrode provided as an auxiliary electrode, a main circuit that applies a pulse voltage between the first and second main electrodes, and a part of the main circuit;
In the discharge-excited short-pulse laser device, the discharge-excited short-pulse laser device includes a pre-ionization circuit that is a circuit independent of the main circuit and applies a voltage between the auxiliary electrode and the second main electrode. 1. A laser oscillation device characterized in that a cooling member for cooling the main electrode and the dielectric is provided in either the second main electrode or the auxiliary electrode by either contacting or embedding the cooling member.
求の範囲第１項記載のレーザ発振装置。(2) The laser oscillation device according to claim 1, wherein the second main electrode is constituted by a hollow member.
冷却部材として兼用されている特許請求の範囲第２項記
載のレーザ発振装置。(3) The second main electrode is made of a hollow member,
The laser oscillation device according to claim 2, which also serves as a cooling member.
１項ないし第３項のいずれかに記載のレーザ発振装置。(4) The laser oscillation device according to any one of claims 1 to 3, wherein the cooling member is a heat pipe.
ている特許請求の範囲第１項ないし第４項のいずれかに
記載のレーザ発振装置。(5) The laser oscillation device according to any one of claims 1 to 4, wherein the cooling member allows a coolant such as fluorocarbon to circulate therein.
着、溶着のいずれかにより完全に密着させて設けられて
いる特許請求の範囲第１項ないし第５項のいずれかに記
載のレーザ発振装置。(6) The second main electrode and the auxiliary electrode are provided in complete contact with the dielectric material by vapor deposition, adhesion, or welding, according to any one of claims 1 to 5. laser oscillation device.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14921187A JPS63313882A (en) | 1987-06-17 | 1987-06-17 | Laser oscillator |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14921187A JPS63313882A (en) | 1987-06-17 | 1987-06-17 | Laser oscillator |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS63313882A true JPS63313882A (en) | 1988-12-21 |
Family
ID=15470269
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14921187A Pending JPS63313882A (en) | 1987-06-17 | 1987-06-17 | Laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63313882A (en) |
-
1987
- 1987-06-17 JP JP14921187A patent/JPS63313882A/en active Pending
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