JPS6312185A - Cooling equipment for gas laser oscillator - Google Patents
Cooling equipment for gas laser oscillatorInfo
- Publication number
- JPS6312185A JPS6312185A JP2520187A JP2520187A JPS6312185A JP S6312185 A JPS6312185 A JP S6312185A JP 2520187 A JP2520187 A JP 2520187A JP 2520187 A JP2520187 A JP 2520187A JP S6312185 A JPS6312185 A JP S6312185A
- Authority
- JP
- Japan
- Prior art keywords
- temperature
- pure water
- cooling
- demineralized water
- cooled
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001816 cooling Methods 0.000 title claims abstract description 49
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 68
- 230000003213 activating effect Effects 0.000 claims 1
- 230000003287 optical effect Effects 0.000 abstract description 10
- 239000012267 brine Substances 0.000 abstract 2
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 abstract 2
- 239000007789 gas Substances 0.000 description 38
- 238000010586 diagram Methods 0.000 description 9
- 230000005494 condensation Effects 0.000 description 7
- 238000009833 condensation Methods 0.000 description 7
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 6
- 230000005284 excitation Effects 0.000 description 4
- 229910002092 carbon dioxide Inorganic materials 0.000 description 3
- 239000001569 carbon dioxide Substances 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- 239000002826 coolant Substances 0.000 description 2
- 239000008367 deionised water Substances 0.000 description 2
- 229910021641 deionized water Inorganic materials 0.000 description 2
- 230000017525 heat dissipation Effects 0.000 description 2
- 230000003685 thermal hair damage Effects 0.000 description 2
- 230000007704 transition Effects 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 239000012809 cooling fluid Substances 0.000 description 1
- 239000000498 cooling water Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006378 damage Effects 0.000 description 1
- 230000009849 deactivation Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 230000002542 deteriorative effect Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005265 energy consumption Methods 0.000 description 1
- 230000020169 heat generation Effects 0.000 description 1
- JEIPFZHSYJVQDO-UHFFFAOYSA-N iron(III) oxide Inorganic materials O=[Fe]O[Fe]=O JEIPFZHSYJVQDO-UHFFFAOYSA-N 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 230000035939 shock Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000005406 washing Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/02—Constructional details
- H01S3/04—Arrangements for thermal management
- H01S3/041—Arrangements for thermal management for gas lasers
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
Description
【発明の詳細な説明】
（産業上の利用分野）
本発明はガスレーザ装置の冷却装置に関し、特にその光
学系及び電源・電極系の機能を低下させることな（、効
率的に冷却することを可能とした冷却装置に関するもの
である。DETAILED DESCRIPTION OF THE INVENTION (Field of Industrial Application) The present invention relates to a cooling device for a gas laser device, and in particular, to a cooling device for a gas laser device, in particular, it is possible to efficiently cool the optical system and the power supply/electrode system without deteriorating their functions. The invention relates to a cooling device with a cooling system.
（従来の技術）
まず、従来のこの種冷却装置を説明する前に、ガスをレ
ーザ媒質とする気体循環形レーザ装置について、その概
要を説明する。(Prior Art) First, before explaining a conventional cooling device of this type, an outline of a gas circulation laser device using gas as a laser medium will be explained.
第２図は一般に３軸直交形と呼ばれているガスレーザ発
振器を示し、■はレーザ媒質ガス（以下レーザガスとい
う。）を大気と隔絶するための密閉容器で、通常ステン
レスが使われる。汐がガスブロアで前記密閉容器１内の
レーザガスを放電領域４−熱交換器３−放電領域４左回
流させるものである。ここで、熱交換器３は放電により
高温化したレーザガスを冷却するために設置さｎている
。Figure 2 shows a gas laser oscillator that is generally referred to as a three-axis orthogonal type, and ◯ is an airtight container for isolating the laser medium gas (hereinafter referred to as laser gas) from the atmosphere, and stainless steel is usually used. A gas blower is used to circulate the laser gas in the sealed container 1 through the discharge area 4 - the heat exchanger 3 - and the discharge area 4 to the left. Here, the heat exchanger 3 is installed to cool down the laser gas that has become hot due to discharge.
すなわち、放電領域４には低温とさｎたレーザガスが流
入し、放電領域４で高温となって該領域４から流出し、
熱交換器で冷やさｔて再び放電領域４内に流入すること
になる。That is, low temperature laser gas flows into the discharge region 4, becomes high temperature in the discharge region 4, and flows out from the region 4,
It is cooled by a heat exchanger and flows into the discharge area 4 again.
５は全反射メリャミラー、６は半反射の出方ミラーであ
り、両者は放電領域４で励起され反転分布を形成したレ
ーザガスの利得領域を挾んで配置さｎ、出力ミラー６よ
ジレーザビームが屯ｖ出さｎる。Reference numeral 5 designates a total reflection mellah mirror, and 6 a semireflection output mirror, both of which are arranged to sandwich the gain region of the laser gas excited in the discharge region 4 to form a population inversion. nru.
このようなガスレーザ装置にあっては、ガス巴度をコン
トロールすることが重要であり、その理由を炭酸ガスレ
ーザの場合を例にとって説明する。In such a gas laser device, it is important to control the gas efficiency, and the reason for this will be explained using a carbon dioxide laser as an example.
一般に炭酸ガスレーザのレーザガス成分はＣＯ，。Generally, the laser gas component of a carbon dioxide laser is CO.
Ｈｅ、Ｎ、が混合さｎた基本ガスからなり、加工時には
これにアシストガスが使用さする。It consists of a basic gas consisting of a mixture of He and N, and is used as an assist gas during processing.
このうち、特に励起・発振に寄与するのはＣＯ７とＮ２
ガスである。Of these, CO7 and N2 particularly contribute to excitation and oscillation.
It's gas.
第３図によってそのメカニズムについて説明すると、基
底準位にあるｃｏ、及びＮ２は放電プラズマ中の電子と
の衝突により上位の振動準位に励起さｎるが、レーザ遷
移に直接寄与するＣＯ，の上位準位〈００１〉への励起
は、Ｃｏ、の基底準位（０００）分子と励起さｔた窒素
分子＜１＞との衝突によるエイ・ルギー移乗が支配、的
である。To explain the mechanism with reference to Figure 3, CO and N2 at the ground level are excited to an upper vibrational level by collision with electrons in the discharge plasma, but CO, which directly contributes to laser transition, The excitation to the upper level <001> is dominated by the energy transfer due to the collision between the Co base level (000) molecule and the excited nitrogen molecule <1>.
こうして励起さした００１分子が下位の（ｌ ＯＯ）に
遷移する際に１０．６μｍの波長をもつレーザ光を放出
し、（ｏ １０＞準位及び〈０２０〉’ｌｊＡ位を経て
基底準位く０００〉へ緩和する６
ところで、ガス温度が上昇するとく０１０〉準位へと熱
励起さね易くなり、その準位に滞在する分子が増加し、
＜１００＞準位にある分子の緩和を妨げるようになる。When the excited 001 molecule transits to the lower level (l OO), it emits a laser beam with a wavelength of 10.6 μm, and passes through the (o 10> level and <020>'ljA level to the ground level). By the way, as the gas temperature rises, it becomes easier to thermally excite to the 010> level, and the number of molecules staying at that level increases.
This will hinder the relaxation of molecules at the <100> level.
この準位間の分布温度のガス依存性が算４図に示されて
いる。同図により、温度の上昇に伴いく１００〉準位の
分子密度が増加し、破線で示されている如（分子のくＯ
Ｏｌ〉準位から〈１００〉準位への遷移が急激に減少す
る様子が理解できる。The dependence of the temperature distribution between the levels on the gas is shown in Figure 4. The figure shows that the molecular density at the 100〉 level increases as the temperature rises, as shown by the broken line (the
It can be seen that the transition from the Ol> level to the <100> level decreases rapidly.
そこで、ガス温度のコントロールが必要になるわけであ
るが、そのための被冷却物としては（１）し。Therefore, it is necessary to control the gas temperature, and the object to be cooled for this purpose is (1).
−ザガス、（２）送風機のモータ、（３）放電部の電極
、（４）ミラー類の光学系、（５）放電エネルギーの供
給源である高周波電源があり、冷却手段としては冷凍機
、内・外熱交換器冷却液循環管路等が挙げらする。- The gas, (2) the blower motor, (3) the electrode of the discharge section, (4) the optical system of mirrors, and (5) the high frequency power supply that is the source of the discharge energy, and the cooling means are a refrigerator, an internal - Examples include external heat exchanger coolant circulation pipes, etc.
このうち、°被冷却物である（１）のレーザガスはレー
ザ出力を高めるためには上述の如く、その温度を低（抑
える必要があＶ、そのため熱交換機能を十分に発揮させ
ねばならず、（２）の送風機のモータについては、その
発熱を極力抑えるために可能な限り低温水を循環させて
やることが必要となるが、（３）の放電電極及び（５）
の高周波電源については冷却能を高めるよりも、むしろ
使用部・材として耐錆・耐食性のものを選び、かつ冷却
液として防錆・防食性に優ね、同時に電流がまわり込ま
ないように導電率の低いものを選ぶ必要がある。そのた
め、冷却部として純水や絶縁油などが用いらｎる。Among these, the laser gas (1), which is the object to be cooled, needs to be kept at a low temperature (V) in order to increase the laser output, so it must be able to fully demonstrate its heat exchange function. Regarding the blower motor (2), it is necessary to circulate low-temperature water as much as possible in order to suppress heat generation as much as possible, but the discharge electrode (3) and (5)
For high-frequency power supplies, rather than increasing the cooling capacity, the parts and materials used should be rust-resistant and corrosion-resistant, and the coolant should have excellent rust- and corrosion-proofing properties, while at the same time maintaining conductivity to prevent current from circulating. You need to choose the one with the lowest value. Therefore, pure water, insulating oil, etc. are used as the cooling part.
（４）の光学系についてみｎば、冷卸水の温度を低（設
定し過ぎてミラ一部分に結露が生じてはならず、更に冷
却の前後で液温の差が多すぎるとミラーにサーマルショ
ックをかける形となり、ミラーが歪んでしまう結果とな
るので前後での液温度差を多（とることができない。ま
たミラーに汚物が付着しないように液の汚を等をも十分
に排除する必要がある。、。Regarding the optical system (4), the temperature of the cooling water must be set too low (so that condensation does not form on a portion of the mirror), and if there is too much of a difference in liquid temperature before and after cooling, thermal damage may occur on the mirror. This will cause a shock and distort the mirror, so it is not possible to create a large difference in liquid temperature between the front and the rear.Also, it is necessary to sufficiently remove dirt from the liquid so that dirt does not adhere to the mirror. There is...
以上を踏まえて、従来から冷却液の選定をレーザガス及
び送風機の冷却にはプラインを、また光学系及び電極・
電源系の冷却には純水又は絶縁油が梗われている。Based on the above, the selection of cooling fluids has traditionally been to use prine for cooling the laser gas and blower, and for cooling the optical system and electrodes.
Pure water or insulating oil is used to cool the power supply system.
第５図及び第６図は従来のガスレーザ装置における冷却
系統図で、光学系及び電α・電極系の冷却に純水を用い
た例を示している。第５図は水冷式のチラーを使用して
いる例を示し、第６図は空冷式のチラーを使用する例で
ある。FIGS. 5 and 6 are cooling system diagrams in a conventional gas laser device, showing an example in which pure water is used to cool the optical system and the electric α/electrode system. FIG. 5 shows an example in which a water-cooled chiller is used, and FIG. 6 shows an example in which an air-cooled chiller is used.
両面において異なるところは機外の冷却部であジ、レー
ザ発振器内における冷却は図から明らかな如くレーザガ
ス及び送風機のモータにはプラインを循環させて行い、
光学系及び電極・電源系は純水を循環させることによっ
て行っている。The difference between the two sides is the cooling section outside the machine.As is clear from the figure, the cooling inside the laser oscillator is done by circulating plines around the laser gas and blower motor.
The optical system, electrodes, and power supply system are operated by circulating pure water.
水冷式チラーを用いる場合（第５図）と空冷式チラーを
用いる場合（第６図）を比較すると、前者では純水の冷
却を熱交換器Ｂを介してクーリンダタワーで行うことが
できるが、後者にあっては純水の熱交換系が無いために
純水の冷却をラジェータファンにより行５か、或は水冷
の系統を別途用意する必要がある。Comparing the case of using a water-cooled chiller (Fig. 5) and the case of using an air-cooled chiller (Fig. 6), it is found that in the former case, pure water can be cooled in a cool cylinder tower via heat exchanger B, but In the latter case, since there is no heat exchange system for pure water, it is necessary to cool the pure water using a radiator fan (5) or to prepare a separate water cooling system.
このように、空冷式チラーを用いる場合には純水循環系
統における純水の冷却にはラジェータファンが関われる
が、このとぎの可能放熱量は次式罠より決まる。In this way, when an air-cooled chiller is used, a radiator fan is involved in cooling the pure water in the pure water circulation system, but the amount of heat that can be dissipated is determined by the following equation.
Ｑ−α・Ｋ−Ａ・ΔＴ ただし、α：修正係数に：放
熱係数
Ａ：放熱面積
ΔＴ：気水温度差
純水の冷却では、通常は気水温度差ΔＴの値が小さいた
め、放熱量を高めようとすれば必然的に放熱面積を多（
しなければならず、従ってラジェータファンを大型化せ
ざるを得な（なる。Q-α・K-A・ΔT However, α: Correction coefficient: Heat radiation coefficient A: Heat radiation area ΔT: Air-water temperature difference In pure water cooling, the value of the air-water temperature difference ΔT is usually small, so the amount of heat radiation is If you try to increase the heat dissipation area, you will inevitably increase the heat dissipation area (
Therefore, the radiator fan had to be made larger.
一方、第５図に示す如き水冷式のチラーを用いる場合に
あっても、プライン系のテラーとは別に小型の空冷式チ
ラー等や、水冷式チラーの冷却能力に熱交換器Ｂの熱交
換量を加えた分の能力を持つクーリングタワーを取り付
ける必要があり、そのための配管系統が増加し、装置も
大型化してコスト高になるという問題点があった。On the other hand, even when using a water-cooled chiller as shown in Fig. 5, a small air-cooled chiller may be used in addition to the prine-type teller, or the heat exchange amount of heat exchanger B is dependent on the cooling capacity of the water-cooled chiller. It is necessary to install a cooling tower with a capacity equal to that of the above, which increases the number of piping systems, making the equipment larger and increasing costs.
更に、以上の冷却装置ではそのいずｎも光学系（ミラー
）の冷却温度の制御が困難で、上述の如（ミラーの過冷
却に伴う結露現象の発生、冷却の前後における水温差が
大きい場合のサーマル７９ツクによるミラーの歪発生等
があって、こねもがレーザ出力を変動させる大きな要因
ともなっていた。Furthermore, in all of the above cooling devices, it is difficult to control the cooling temperature of the optical system (mirror), and as mentioned above (occurrence of dew condensation due to overcooling of the mirror, or when there is a large difference in water temperature before and after cooling) There was distortion of the mirror due to thermal damage, etc., and this was also a major cause of fluctuations in laser output.
（発明が解決しようとする問題点）
このように、従来のガスレーザ発振器における冷却＠置
にあっては、純水又は絶縁油系の冷却を十分に行おうと
すると装置の大型化コストアップにつながり、また余り
に純水又は絶縁油系の冷却能を上げ過ぎるとミラーに変
形等を発生させてたり、純水の場合は特に結露なども生
じたりさせて。(Problems to be Solved by the Invention) As described above, in the conventional cooling system for gas laser oscillators, attempting to sufficiently cool the pure water or insulating oil system leads to an increase in the size and cost of the device. Also, if the cooling capacity of pure water or insulating oil systems is increased too much, it may cause deformation of the mirror, and in the case of pure water, condensation may occur.
レーザ出力を変動させるという問題点を有していた。This had the problem of varying the laser output.
不発明は、こｔらの問題点を解決すべ（なさｔたもので
、装置を大型化することなくガス、送風機のモータの冷
却能を確保すると共にミラーの冷却を大気温度に近づけ
、冷却によるミラー面の結露或は変形を防いで安定、か
つ人出カが得らするようなガスレーザ装置の冷却装置を
提供しようとするものである。The invention was designed to solve these problems by ensuring the cooling performance of the gas and blower motor without increasing the size of the device, and by bringing the cooling of the mirror close to atmospheric temperature, thereby increasing the cooling efficiency. It is an object of the present invention to provide a cooling device for a gas laser device that is stable by preventing dew condensation or deformation on the mirror surface and that can attract a large number of people.
（問題点を解決するための手段）
このため、本発明はプライン系統と純水系統又は絶縁油
系統の２系統から構成さゎる力゛スレーザ発振器の冷却
装置において、ブライ／系統に新管路を分岐させ、熱交
換器を介して純水系統又は絶縁油系統の熱交換を行うと
共に、純水系統又は絶縁油系統の往路にはラジェータフ
ァンと、こｎを設定温度を基準として作動・非作動にす
る温度セッサを設けることを構成とし、こｎを上記問題
点の解決手段とするものである。(Means for Solving the Problems) Therefore, the present invention provides a cooling system for a power laser oscillator that is composed of two systems, a prine system and a pure water system or an insulating oil system, by connecting a new pipe to the bleed/system. The deionized water system or insulated oil system is branched to exchange heat with the pure water system or insulated oil system via a heat exchanger, and a radiator fan is installed on the outbound path of the deionized water system or insulated oil system, which operates and deactivates based on the set temperature. The structure is such that a temperature sensor is provided for operation, and this is used as a means for solving the above-mentioned problems.
（作 用）
新たに分岐させたプラインの管路により、熱交換器を介
して純水又は絶縁油を冷却する。この冷却された純水又
は絶縁油の温度センナにより検知し、設定温度（大気温
度）に近いときはラジェータファンを作物させずに純水
又は絶縁油を現状温度でガスレーザ発振器内の光学系及
び電極・電源系疋送り、純水又は絶縁油温度が設定温度
（大気温度）より高（ても或は低い場合にも、前記ラジ
ェータファンを作動させるようにする。(Function) Pure water or insulating oil is cooled through a heat exchanger using a newly branched pline pipe. The cooled pure water or insulating oil is detected by a temperature sensor, and when it is close to the set temperature (atmospheric temperature), the radiator fan is not turned on and the pure water or insulating oil is supplied to the optical system and electrodes in the gas laser oscillator at the current temperature. - The radiator fan is operated even if the power supply system feed, pure water or insulating oil temperature is higher (or lower) than the set temperature (atmospheric temperature).
純水又は絶縁油の温度が設定温度（大汽温ヴ）よジ高い
ためにラジェータファンが作動しているときは、ラジェ
ータファンは純水又は絶縁油を更に冷却する冷却機とし
ての機能を有し、純水又は絶縁油温度が設定温度（大気
温度）より低いためにラジェータファンが作動している
ときは、ラジェータファンは純水又は絶縁油の温度を高
める加熱機としての機能を有している。When the radiator fan is operating because the temperature of pure water or insulating oil is higher than the set temperature (Oki temperature), the radiator fan functions as a cooler to further cool the pure water or insulating oil. However, when the radiator fan is operating because the pure water or insulating oil temperature is lower than the set temperature (atmospheric temperature), the radiator fan functions as a heater to raise the temperature of the pure water or insulating oil. There is.
このよう罠、ラジェータファンの作動・非作動により、
純水又は絶縁油は常に設定温度に近づき、例えば殆んど
大気温度と差がな（なって、純水が低温になり過ぎるた
めに発生するミラー面での結露を防止し、或は純水又は
絶縁油が高温であり過ぎることにより発生するミラーの
歪を防止する。Due to such traps and activation/deactivation of the radiator fan,
Pure water or insulating oil is always close to the set temperature, for example, with almost no difference from the atmospheric temperature (this prevents dew condensation on the mirror surface that occurs when pure water becomes too cold, or Or to prevent distortion of the mirror caused by the insulating oil being too hot.
（実施例）
以下１本発明の実施例を図面に基づいて具体的に説明す
る。(Example) An example of the present invention will be specifically described below based on the drawings.
第１図は本発明の実施例を示すガスレーザ発振器におけ
る冷却装置の冷却系統図である。FIG. 1 is a cooling system diagram of a cooling device in a gas laser oscillator showing an embodiment of the present invention.
１は密閉８器、２は送風機、３は熱交換器、５はリヤミ
ラー、６は出力ミラーであり、こｎらの部分は第２図に
示した部分と同一であって、７は放電工坏ルギーを供１
、ａする高周波電源、４−１．４−２は放電電極で両者
間に放電領域を形成する。1 is a sealing device, 2 is a blower, 3 is a heat exchanger, 5 is a rear mirror, 6 is an output mirror, these parts are the same as the parts shown in Figure 2, and 7 is an electric discharge machine. Serve 1 serving
, a, a high frequency power source, and 4-1.4-2 are discharge electrodes that form a discharge region between them.
密閉容器１内にガスが封入され、ガスは熱交換器３で冷
やさｎて送風機２により放電領域に送られ、放電領域内
で高温になり前記熱交換器３を通さｎて再び冷却され、
こｎが繰り返さｎて回流する。Gas is sealed in an airtight container 1, the gas is cooled by a heat exchanger 3, and sent to a discharge area by a blower 2, where it reaches a high temperature in the discharge area, passes through the heat exchanger 3, and is cooled again.
This is repeated n and circulated.
既述の如く、前記熱交換器３及び送風機２のモータ部に
は外部に設置さｎた水冷式又は空冷式チラー８内の蒸発
器によって冷却さｔたプラインによる循環管路が形成さ
ね、レーザガス及び送風機２内のモータ部の冷却を行っ
ている。As mentioned above, a circulation pipe is formed in the heat exchanger 3 and the motor section of the blower 2 by a pline cooled by an evaporator in an externally installed water-cooled or air-cooled chiller 8. The laser gas and the motor inside the blower 2 are cooled.
一方、全反射ミラー５、半反射ミラー６等の光学系及び
放電電極４−１．４−２．電源７等の電気系には、純水
又、は絶縁油の冷却循環管路が形成されて、夫々を純水
又は絶縁油により冷却する。この純水又は絶縁油管路の
発振器外の部分は熱交換器９を通さｎており、同熱交換
器９から出た管路の下流側にはラジェータファン１ｏ及
び温度センサエｌが取ジ付けらｎる。On the other hand, optical systems such as a total reflection mirror 5 and a half reflection mirror 6, and discharge electrodes 4-1, 4-2. A cooling circulation pipe for pure water or insulating oil is formed in the electric system such as the power source 7, and the cooling circulation pipes are cooled by pure water or insulating oil, respectively. The portion of this pure water or insulating oil pipeline outside the oscillator passes through a heat exchanger 9, and a radiator fan 1o and a temperature sensor 1 are attached to the downstream side of the pipeline exiting from the heat exchanger 9. nru.
前記発振器外の熱交換器９には前記チラー８内を出入す
るプライン循環管路に新たに分岐形成さｎた管路が通さ
れ、ここで発振器内を通って暖められた純水又は絶縁油
を冷却する。A new branch line is passed through the heat exchanger 9 outside the oscillator to the prine circulation line that goes in and out of the chiller 8, and the heated pure water or insulating oil passes through the oscillator. to cool down.
ところで、一般にレーザ出力が一定の場合、純水又は絶
縁油系の発熱量は一定なので純水又は絶縁油とプライン
の流量はほぼ一定となる。しかし、純水又は絶縁油の冷
却前後の水又は油温は大気温に近い状態におかｎるのが
良い。また、熱交換器９における熱交換量はプライン温
度と純水又は絶縁油温度の差によって決まるために、大
気温度が高い場合には水温又は油温を高く設定する必要
があり、熱交換量が太き（なる。逆に大気温度が低い場
合は純水又は絶縁油温度を低（設定するために熱交換量
が小さくなる。このため、熱交換器９だけでは適冷°却
になったり、或は冷却し切ｎな（なったりする。By the way, in general, when the laser output is constant, the calorific value of pure water or insulating oil is constant, so the flow rates of pure water or insulating oil and pline are almost constant. However, it is preferable that the water or oil temperature before and after cooling the pure water or insulating oil be close to atmospheric temperature. Furthermore, the amount of heat exchanged in the heat exchanger 9 is determined by the difference between the pline temperature and the pure water or insulating oil temperature, so if the atmospheric temperature is high, it is necessary to set the water temperature or oil temperature high, and the amount of heat exchanged is On the other hand, when the atmospheric temperature is low, the pure water or insulating oil temperature is set low, which reduces the amount of heat exchanged. Therefore, the heat exchanger 9 alone may not provide adequate cooling. Or it will cool down and become painful.
そこで、前記温度センサ１１により前記熱交換器１１で
熱交換さｎた冷却純水の温度を検出すると共に大気の温
度と比較して、もし検出温度と大気温度との差が所定の
許容（直の範囲内にあるときは前記ラジェータファンｌ
Ｏを作動させる信号を発せずにおき、前記温度差がその
許容値を超えたとき初めてラジェータファン１０を作動
させるための信号を出力するようにしている。Therefore, the temperature sensor 11 detects the temperature of the cooled pure water heat exchanged in the heat exchanger 11, and compares it with the atmospheric temperature.If the difference between the detected temperature and the atmospheric temperature is within a predetermined tolerance (direct When it is within the range of , the radiator fan l
A signal for operating the radiator fan 10 is not issued, and a signal for operating the radiator fan 10 is output only when the temperature difference exceeds the allowable value.
即ち、本実施列に係るガスレーザ発振器における冷却製
蓋にあっては、チラー８内の蒸発器により低温に冷却さ
れたプラインを使って純水又は絶縁油を効率よく冷却す
ると共に、この冷却さした純水又は絶縁油の温度を検知
し、もし大気温度との間に大きな差があるときはラジェ
ータファン１０を作動させようとするものである。That is, in the case of the cooling lid for the gas laser oscillator according to this embodiment, the pure water or insulating oil is efficiently cooled using the pline cooled to a low temperature by the evaporator in the chiller 8, and the cooling The temperature of pure water or insulating oil is detected, and if there is a large difference between the temperature and the atmospheric temperature, the radiator fan 10 is activated.
そして、このラジエータフ７ノ１００作動は、純水又は
絶縁油の温度よりも低いときは大気によって純水を暖め
２加熱機として作用し、また逆に純水又は絶縁油の温度
が大気より高いときは同じ（大気によって純水又は絶縁
油を冷やす冷却機として作用することになる。In this Radiator Tough 7/100 operation, when the temperature of pure water or insulating oil is lower than the temperature of pure water or insulating oil, the pure water is warmed by the atmosphere and acts as a 2-heater, and conversely, the temperature of pure water or insulating oil is higher than the atmosphere. At the same time (atmospheric air acts as a cooler to cool pure water or insulating oil).
く、ミラー類、電極、電源の冷却機能を十分に発揮する
ことができるものであり、加えてミラー類の冷却がほぼ
大気温度と同温度でなされるために結露の発生の心配が
な（、かつ冷却前後の温度差もそｎ種火きくならないた
め歪みを起すようなこともない。The cooling function of the mirrors, electrodes, and power supply can be fully demonstrated.In addition, since the mirrors are cooled at almost the same temperature as the atmospheric temperature, there is no need to worry about condensation. Moreover, the difference in temperature before and after cooling does not cause any kind of ignition, so distortion does not occur.
（発明の効果）
以上、詳細に説明した如（本発明によると、チラー内で
冷却さｔたプラインにより純水又は絶縁油の熱交換を行
うため、冷却系独自の冷却システムを構成する必要がな
（、構造が簡単で小型な上、に効率的な熱交換が可能と
なり、また冷却さｎた純水又は絶縁油の温度を検知して
、設定温度に近いときは純水又は絶縁油圧ラジェータフ
ァンが作用せず、設定温度との差が大ぎいときに初めて
同うジエータフ、アンを作動させて純水又は絶縁油の温
度を常洗設定厘度に近づけるようにしたため、ミラー類
に過度の冷却が行わｎることがな（、従ってミラー類に
結露を発生させることな（、かつ熱歪等の変形も防止で
きるものである。(Effects of the Invention) As explained above in detail (according to the present invention, since heat exchange between pure water or insulating oil is performed by the cooled pline inside the chiller, it is not necessary to configure a cooling system unique to the cooling system). (The structure is simple and compact, and it enables efficient heat exchange. It also detects the temperature of cooled pure water or insulating oil, and when the temperature is close to the set temperature, the pure water or insulated hydraulic radiator is activated.) When the fan does not work and there is a large difference between the temperature and the set temperature, the same Jetaph and Anne are activated to bring the temperature of pure water or insulating oil closer to the set temperature for regular washing, which causes excessive damage to the mirrors. There is no need for cooling (therefore, no condensation occurs on the mirrors), and deformation such as thermal distortion can be prevented.
更に、不発明は上記した構成をとることにより構造上の
無駄がな（合理的であり、冷却のために使われる消費エ
ネルギーも従来のそれに比べて少なくて済み、全体とし
て小型化でき、かつ大巾にコストダウンを図れるもので
ある。Furthermore, by adopting the above-mentioned configuration, the invention is not wasteful in structure (it is rational, the energy consumption used for cooling is less than that of the conventional one, the overall size can be reduced, and the size is large. This allows for significant cost reductions.
第１図は本発明の実施例を示すガスレーザ装置における
冷却装置の系統図、第２図は従来のガスレーザ装置の代
表的な例である３軸直交形レ一ザ発撮器の概要を示す全
体構成図、第３図は炭酸ガスレーザの励起原理を説明す
るための図、第４図は各励起準位における分子密度との
関係を示す図、第５図及び第６図は共に従来のガスレー
ザ装置における冷却装置の系統図であり、第５図は水冷
式チラーを用いる例を示すものである。
図の主要部分の説明Fig. 1 is a system diagram of a cooling device in a gas laser device showing an embodiment of the present invention, and Fig. 2 is an overall diagram showing an outline of a 3-axis orthogonal laser emitter, which is a typical example of a conventional gas laser device. 3 is a diagram to explain the excitation principle of a carbon dioxide laser, FIG. 4 is a diagram showing the relationship between molecular density at each excitation level, and FIGS. 5 and 6 are both diagrams of a conventional gas laser device. FIG. 5 is a system diagram of a cooling device in which a water-cooled chiller is used. Description of the main parts of the diagram
Claims (1)
成されるガスレーザ発振器の冷却装置において、プライ
ン系統に新管路を分岐させ、熱交換器を介して純水系統
又は絶縁油系統の熱交換を行うと共に、純水系統又は絶
縁油系統の往路にはラジエータファンとこれを設定温度
を基準として作動・非作動にする温度センサを設けるこ
とを特徴とするガスレーザ発振器における冷却装置。In a cooling system for a gas laser oscillator that consists of two systems: a prine system and a pure water system or an insulating oil system, a new pipe line is branched to the prine system, and heat exchange between the pure water system or the insulating oil system is performed via a heat exchanger. A cooling device for a gas laser oscillator, characterized in that a radiator fan and a temperature sensor for activating or deactivating the radiator fan on the outgoing path of a pure water system or an insulating oil system are provided based on a set temperature.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP4964586 | 1986-03-07 | ||
| JP61-49645 | 1986-03-07 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6312185A true JPS6312185A (en) | 1988-01-19 |
Family
ID=12836942
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2520187A Pending JPS6312185A (en) | 1986-03-07 | 1987-02-05 | Cooling equipment for gas laser oscillator |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6312185A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006000889A1 (en) * | 2006-01-04 | 2007-07-12 | Laser-Laboratorium Göttingen e.V. | Gas discharge laser beam quality improving method for e.g. excimer laser-system, involves providing input temperature of tempering medium flowing through temperature duct with constant flow rate as actuating variable of control loop |
| JP2014229720A (en) * | 2013-05-22 | 2014-12-08 | ビアメカニクス株式会社 | Gas laser oscillator, and laser processing device |
-
1987
- 1987-02-05 JP JP2520187A patent/JPS6312185A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE102006000889A1 (en) * | 2006-01-04 | 2007-07-12 | Laser-Laboratorium Göttingen e.V. | Gas discharge laser beam quality improving method for e.g. excimer laser-system, involves providing input temperature of tempering medium flowing through temperature duct with constant flow rate as actuating variable of control loop |
| DE102006000889B4 (en) * | 2006-01-04 | 2009-04-09 | Laser-Laboratorium Göttingen e.V. | Method for improving the beam quality of a gas discharge laser by optimized cooling and gas discharge laser system |
| JP2014229720A (en) * | 2013-05-22 | 2014-12-08 | ビアメカニクス株式会社 | Gas laser oscillator, and laser processing device |
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