JPS6084849A - Semiconductor device - Google Patents

Semiconductor device

Info

Publication number
JPS6084849A
JPS6084849A JP19273983A JP19273983A JPS6084849A JP S6084849 A JPS6084849 A JP S6084849A JP 19273983 A JP19273983 A JP 19273983A JP 19273983 A JP19273983 A JP 19273983A JP S6084849 A JPS6084849 A JP S6084849A
Authority
JP
Japan
Prior art keywords
heat
semiconductor
chip
plate
semiconductor chip
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19273983A
Other languages
Japanese (ja)
Inventor
Keiichi Matsuo
慶一 松尾
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP19273983A priority Critical patent/JPS6084849A/en
Publication of JPS6084849A publication Critical patent/JPS6084849A/en
Pending legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/34Arrangements for cooling, heating, ventilating or temperature compensation ; Temperature sensing arrangements
    • H01L23/38Cooling arrangements using the Peltier effect
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48245Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic
    • H01L2224/48247Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being metallic connecting the wire to a bond pad of the item

Landscapes

  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Cooling Or The Like Of Semiconductors Or Solid State Devices (AREA)

Abstract

PURPOSE:To obtain the titled device effectively dissipating the heat of a semiconductor chip and having stable temperature characteristics by a method wherein an electronic refrigerator is provided in the neighborhood of the chip. CONSTITUTION:A heat-absorbing plate 7 brings the opposite side of the surface, where the N type semiconductor 5 and the P type semiconductor 6 have been mounted, into contact with the back of a substrate 8 where the semiconductor chip 1 is mounted, and is installed to the substrate. The semiconductor 5 is connected also to the first heat-dissipating plate 10 having the first electrode 9, and the semiconductor 6 is connected also to the second heat-dissipating plate 10 having the second electrode 11. Thus constructed, the electronic refrigerator is molded with a resin 4 by excluding the first electrode, second electrode, partial surface of the first heat-dissipating plate, and partial surface of the second heat- dissipating plate. When a current is passed in the arrow direction, the plate 7 becomes lower in temperature in proportion to the current, the temperature gradient between the chip and this plate becoming larger, and the amount of heat transfer from the chip then increasing; accordingly the temperature of the chip decreases.

Description

【発明の詳細な説明】 〔発明の技術分野〕 この発明r」、放熱の良好な半導体咬IJTLVL関す
る。
DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a semiconductor chip IJTLVL with good heat dissipation.

〔従来技術〕[Prior art]

従来、半得体素子の動作時に発する熱の放散は、第1図
に示す方法で行なわnていた。すなわち。
Conventionally, heat generated during operation of a semiconductor device has been dissipated by the method shown in FIG. Namely.

第1図において、(1)は半導体チップであり、(2)
は半導体チップ(1)と引き出しリード(8)とWe続
する内部リード線であり、(4)はパッケージを構成す
る樹脂である。半導体チップ(1)の接合部で七の動I
’ll’によV発生した熱は、王として側11i1 (
4)の表面から対流伝熱と輻射伝熱とにエフ放畝丁ゐ。
In Figure 1, (1) is a semiconductor chip, (2)
is an internal lead wire that connects the semiconductor chip (1) and the lead-out lead (8), and (4) is a resin that constitutes the package. Seven movements I at the junction of the semiconductor chip (1)
The heat generated by 'll' is the side 11i1 (
4) Convection heat transfer and radiation heat transfer from the surface.

ま7j、同時Vt、引き出しリード(8)を通して図示
しない配設基板への伝専伝熱に工ってt放熱さitてい
る。
At the same time, the heat is dissipated by means of heat transfer to the mounting board (not shown) through the lead Vt and lead (8).

しかしながら、半導体テップ(1)の接合部あたジの発
熱量かわず〃・であっても、工Cv果績度が大きくなる
と、半導体テップ(1)でのつも隔置が人きくなるので
、半畳体チップ(1)と側屈(4)の表面との111」
の熱姐抗を下け、また、佃鹿(4J QJ表曲を沌IL
る生気の鮎を増加させ°ても、放熱か十分子c達成ざI
Lず、半4体の特性が発熱にエリ劣化することがある。
However, even if the amount of heat generated per joint of the semiconductor chip (1) is small, as the engineering Cv performance increases, the spacing of the semiconductor chip (1) becomes difficult, so 111 between the body tip (1) and the surface of the lateral bend (4)
He lowered the heat resistance of Tsukuda (4J QJ) and Chaos IL.
Even if you increase the vitality of sweetfish, you won't be able to achieve heat dissipation or ten children.
However, the characteristics of the halves may deteriorate due to heat generation.

〔発明の概要〕[Summary of the invention]

この発明は、前dピφ悄に基ついてなさIしたものであ
り、半導体チップの近ffJTL電子冷沫装匝葡設けて
、半導体チップの発熱を効果的に放熱し、温度特性の安
定した半導体装置を提供することを目的とするものでお
る。
This invention is based on the previous idea, and includes a ffJTL electronic cooling droplet in the vicinity of the semiconductor chip to effectively dissipate the heat generated by the semiconductor chip and create a semiconductor with stable temperature characteristics. The purpose is to provide equipment.

〔発明の実施例〕[Embodiments of the invention]

次に、この発明の一′実施ψUについて図1を参照しな
からd発明する。
Next, a first embodiment ψU of the present invention will be described with reference to FIG.

第2図に2いて、(5)にN型半導体であり、(6)a
P型半導体であり、いずnも吸熱板(7)VC取り付け
らnる。吸熱板(7)に、MIJ記N型半尋半導5)3
工びP型半導体(6)葡取り付けた血とに反対側の囲を
、半導体チップ(1)を搭載する鎖板(8Jの表面に接
触して、扉板(8)に取り付けらnる。前aCN型半専
半導体)に、第1の′l14i倹(9)を有する第1の
放熱板調にも接続さn、捷た、削配P型半寺体(句は、
第2の′電極Qη會准する第2の放熱板(−にも依絖さ
fLる。削配の工うにして電子冷体装置が構成さfL、
第1の′嘔健(転用2(1)’電極+111.1i14
1の放熱板調の一部表面あ・工び第2の放熱板(I21
の一部表InI會噸いて、−子冷体鉄匝に碩11iq 
L匍Vtモールドさnている。なお、第2図VCおいて
、MI図におけるのと同一の査号を付したものは第1図
に2けるのとIOJ様の愼龍を市する部材である。
2 in Figure 2, (5) is an N-type semiconductor, and (6) a
It is a P-type semiconductor, and a heat absorbing plate (7) is attached to the VC. On the heat absorption plate (7), MIJ N type half fat semiconductor 5) 3
The P-type semiconductor (6) is attached to the door plate (8) by touching the surface of the chain plate (8J) on which the semiconductor chip (1) is mounted. The first aCN type half-dedicated semiconductor) is also connected to the first heat sink having the first 'l14i(9) n, twisted, and cut-out P type half-dedicated body (the phrase is,
The second heat dissipation plate (-) is also used to connect the second electrode Qη.
1st 'Kyoken (diversion 2 (1)' electrode + 111.1i14
The second heat sink (I21
Part of the table InI meeting, - 11iq in the cold body iron box
There is a L-shaped Vt mold. In addition, in Figure 2 VC, the parts with the same symbols as those in the MI diagram are those shown in Figure 1 at 2 and are the parts that connect IOJ's Shinryu.

半導体装置を、第2図に示すようVC電子冷?JIL装
置を組み込んで構成した場合、第2図に示す矢印方間に
′亀訛を通じると、通じる電流に比V11シて吸熱板(
7ンが低温になる。そうすると、半導体チップ(υと吸
熱板(7ンとの間の温度勾配が大きくなり、半導体チッ
プ(1)からの伝熱量が増加し、半導体チップ(1)の
温度が低下することとなる。また、半導体チップ(1ン
で光生じた熱Mは、吸熱板(7へN型半専体(5]およ
びP型半寺体(6)を伝導して、第1の放熱板調と第2
の放熱板調とyc集中する。その結果、第1の放熱板調
2工びか2の放熱板(I21は、仙1j飢句の表11]
、cり尚温VCなり、つまり第1の放熱板調お工び第2
の放熱板(121と夕本気との温度差が大きくなり、対
流伝熱お工ひ暢射伝熱が増加することVCより、半導体
装置全体からの放熱を十分な1%のとすることができる
。したがって、半導体テップ(υの動作中Vt過熱する
の全有効に防止することができ、半導体装置の温度特性
を一段と同上させることができる。
Is the semiconductor device VC electronically cooled as shown in Figure 2? When a JIL device is installed in the configuration, if a curve is passed in the direction of the arrow shown in Fig. 2, the heat absorbing plate (
7n becomes low temperature. Then, the temperature gradient between the semiconductor chip (υ) and the heat absorption plate (7) increases, the amount of heat transferred from the semiconductor chip (1) increases, and the temperature of the semiconductor chip (1) decreases. , the heat M generated by the semiconductor chip (1) is conducted to the heat absorbing plate (7) through the N-type half-body (5) and the P-type half-body (6), and is transferred to the first heat sink and the second heat sink.
The heat sink tone and yc are concentrated. As a result, the first heat sink (I21 is Table 11 of Sen 1j Hikiku)
, C is a still temperature VC, that is, the first heat sink is similar to the second heat sink.
The temperature difference between the heat dissipation plate (121 and the heat sink) increases, and convection heat transfer increases radiant heat transfer.By VC, the heat dissipation from the entire semiconductor device can be reduced to a sufficient 1%. Therefore, overheating of Vt during operation of the semiconductor chip (υ) can be completely prevented, and the temperature characteristics of the semiconductor device can be further improved.

以上、この発明の一実施例について詳述したが、この発
明#′;を前aC冥施世’JVC眠足さILるものでは
なく、Cの発明の要旨の軛囲内で極々変形して実施する
ことができるのはいうまでI[11ない。
Although one embodiment of this invention has been described in detail above, this invention #' is not intended to be based on the previous aC 'JVC sleepy IL', but is carried out in a very modified manner within the scope of the gist of the invention of C. Needless to say, the only thing that can be done is I[11.

M’lJ記央71!i例に半導体テップを冷却してその
発熱を外部に放散するものであるが、この発明に、LS
I、トランジスタ、サイリスク等の、動作により発熱を
伴なう能!II]部品にも通用することができる。葦だ
、曲配実施例に、電子冷凍装置1段を組み込んだ半導体
装置であるが、より効率良〈冷却するために、を子冷凍
装置葡2段または七fL以上のy劫を血タリvc黴枕し
、半纏体表直VC組み込んでもよい。
M'lJKio71! An example of this invention is to cool a semiconductor chip and dissipate its heat to the outside.
Functions that generate heat due to operation, such as I, transistors, and Cyrisk! II] It can also be applied to parts. It is a semiconductor device that incorporates one stage of electronic refrigeration device in the arrangement example, but in order to achieve more efficient cooling, it is possible to use two stages of electronic refrigeration equipment or a y kalpa of more than 7 fL. It is also possible to incorporate a semi-integrated VC directly on the surface.

〔発明の効果〕〔Effect of the invention〕

以上Vt詳述したようVClこの発明VCよると、動作
することVC工V兄熱する半寺悴テップ金直接に、効率
良く冷却するので、半導体チップの過熱を防止して、半
部′I4−装匝の温就峙注金一段と同上することができ
る。また1組み込んだ′電子冷凍装置にθ1t、丁xl
Acを調節すると、電子冷凍装置による冷却能力を任意
PCすることができる。ま1ヒ、この発明の半導体装置
Vtは、可動部分のない゛電子Cv凍装置を組み込んで
いるので、冷却に除し、騒音を発さす、また、摩耗もな
いので、寿命を半永久的なものとすることができる。
As detailed above, VCl according to this invention VC operates by efficiently cooling the semiconductor chip directly to the heated metal, thereby preventing the semiconductor chip from overheating. It can be said to be the same as the 1st step of the pouring process. In addition, θ1t, dxl are installed in the electronic refrigeration system
By adjusting Ac, the cooling capacity of the electronic refrigeration system can be controlled arbitrarily. Also, since the semiconductor device Vt of the present invention incorporates an electronic CV freezing device that has no moving parts, it does not generate noise during cooling, and does not wear out, so its lifespan is semi-permanent. It can be done.

【図面の簡単な説明】 第1図は従来の半4悸装置を示す1lfT曲図、および
、第2図はこの発明の一実施例である半導体装置を示す
断lf[]図である。 (1):半導体テップ L5J : N減半専拝(6)
:P型半導体 (7):吸熱板 (8)二基板 調:第1の放熱板 (助:第2の放熱板 代理人 人 岩 瑠 雄
BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a 1lfT diagram showing a conventional half-quadrupter device, and FIG. 2 is a cross-sectional lf[] diagram showing a semiconductor device as an embodiment of the present invention. (1): Semiconductor chip L5J: N reduction by half (6)
: P-type semiconductor (7): Heat absorbing plate (8) Two substrates Coordination: First heat sink (Assistant: Second heat sink agent) Ruo Iwa

Claims (1)

【特許請求の範囲】[Claims] 半導体チップと、こlrLに近接して成り、半導体チッ
プを搭載する基板に配置する吸熱板と、前=1吸熱板に
一端全接触するN型半尋体寂工びP型半導体と、前記N
型半導体の他端Vt接触して設けた第1の放熱板あ・工
び削配P型半尋体の他端にう安触して設けた第2の放熱
板とを儂え、N型半導体の他端から吸熱板を介してP型
半導体の他端へと′亀θILを辿しることにエフ半導体
チックを冷却する電子冷凍装置金儲えたことを特徴とす
る半尋体装直。
a semiconductor chip, a heat absorbing plate disposed in close proximity to the semiconductor chip on the substrate on which the semiconductor chip is mounted;
The first heat dissipation plate is placed in contact with the other end Vt of the type semiconductor, and the second heat dissipation plate is provided in contact with the other end of the machined P-type semicircular body. An electronic refrigeration device for cooling an F-semiconductor chip by tracing the ``torque θIL'' from the other end of the semiconductor to the other end of the P-type semiconductor via a heat absorbing plate.
JP19273983A 1983-10-15 1983-10-15 Semiconductor device Pending JPS6084849A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19273983A JPS6084849A (en) 1983-10-15 1983-10-15 Semiconductor device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19273983A JPS6084849A (en) 1983-10-15 1983-10-15 Semiconductor device

Publications (1)

Publication Number Publication Date
JPS6084849A true JPS6084849A (en) 1985-05-14

Family

ID=16296253

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19273983A Pending JPS6084849A (en) 1983-10-15 1983-10-15 Semiconductor device

Country Status (1)

Country Link
JP (1) JPS6084849A (en)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625651U (en) * 1985-06-25 1987-01-14
JPH01245549A (en) * 1988-03-26 1989-09-29 Matsushita Electric Works Ltd Semiconductor device and manufacture thereof
JPH04216655A (en) * 1990-12-18 1992-08-06 Nec Kyushu Ltd Semiconductor device
JPH04320360A (en) * 1991-03-23 1992-11-11 Samsung Electron Co Ltd Semiconductor package
US5224908A (en) * 1989-11-15 1993-07-06 Aisin Aw Co., Ltd. Automatic transmission
US5537342A (en) * 1990-08-28 1996-07-16 Lsi Logic Corporation Encapsulation of electronic components

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS625651U (en) * 1985-06-25 1987-01-14
JPH01245549A (en) * 1988-03-26 1989-09-29 Matsushita Electric Works Ltd Semiconductor device and manufacture thereof
US5224908A (en) * 1989-11-15 1993-07-06 Aisin Aw Co., Ltd. Automatic transmission
US5537342A (en) * 1990-08-28 1996-07-16 Lsi Logic Corporation Encapsulation of electronic components
JPH04216655A (en) * 1990-12-18 1992-08-06 Nec Kyushu Ltd Semiconductor device
JPH04320360A (en) * 1991-03-23 1992-11-11 Samsung Electron Co Ltd Semiconductor package

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