JPS6057123U - Process tube for semiconductors - Google Patents

Process tube for semiconductors

Info

Publication number
JPS6057123U
JPS6057123U JP14883183U JP14883183U JPS6057123U JP S6057123 U JPS6057123 U JP S6057123U JP 14883183 U JP14883183 U JP 14883183U JP 14883183 U JP14883183 U JP 14883183U JP S6057123 U JPS6057123 U JP S6057123U
Authority
JP
Japan
Prior art keywords
process tube
semiconductors
tube
lid provided
protrusion
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14883183U
Other languages
Japanese (ja)
Inventor
古屋　明雪
Original Assignee
株式会社東芝
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by 株式会社東芝 filed Critical 株式会社東芝
Priority to JP14883183U priority Critical patent/JPS6057123U/en
Publication of JPS6057123U publication Critical patent/JPS6057123U/en
Pending legal-status Critical Current

Links

Abstract

(57)【要約】本公報は電子出願前の出願データであるた
め要約のデータは記録されません。(57) [Summary] This bulletin contains application data before electronic filing, so abstract data is not recorded.

Description

【図面の簡単な説明】[Brief explanation of drawings]

第１図、はウェーハに熱処理を施す装置を説明するため
の断面図、第２図および第３図はいずれも夫々が従来の
プロセスチューブを説明するためのユ部を示す断面図、
第４図および第５図はいずれも夫々がこの考案の実施例
のプロセスチューブを説明するための一部を示す断面図
である。 １１．２１・・・プロセスチューブ、２，２・・・ウェ
ーハ、３・・・ウェーハ支持治具、４・・・ふた体、５
ａ・・・ガス導入管（ガス導入手段）、１０．２１ｂ・
・・突起部、１２．２２・・・固定部材。FIG. 1 is a cross-sectional view for explaining an apparatus for heat-treating wafers, and FIGS. 2 and 3 are cross-sectional views showing a U part for explaining a conventional process tube, respectively.
4 and 5 are sectional views showing a part of a process tube according to an embodiment of this invention. 11.21... Process tube, 2, 2... Wafer, 3... Wafer support jig, 4... Lid, 5
a... Gas introduction pipe (gas introduction means), 10.21b.
...Protrusion, 12.22...Fixing member.

Claims (1)

【実用新案登録請求の範囲】[Scope of utility model registration request] 耐熱材でなるプロセスチューブと、半導体ウェーハを戚
せたウェーハ支持治具を前記チューブ内を滑らせて装脱
させるため前記プロセスチューブの一方の開端に設けら
れたふた体と、前記プロセスチューブ内の雰囲気を形成
するガス導入手段と、前記プロセスチューブの外周面に
その一部を***し形成された突起部とを備え、前記突起
部を外部の固定機構に係止した半導体用プロセスチュー
ブ。A process tube made of a heat-resistant material, a lid provided at one open end of the process tube for allowing a wafer support jig holding a semiconductor wafer to be inserted and removed by sliding the inside of the tube, and a lid provided inside the process tube. A process tube for semiconductors, comprising a gas introducing means for forming an atmosphere, and a protrusion formed by partially raising the outer peripheral surface of the process tube, the protrusion being locked to an external fixing mechanism.
JP14883183U 1983-09-28 1983-09-28 Process tube for semiconductors Pending JPS6057123U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14883183U JPS6057123U (en) 1983-09-28 1983-09-28 Process tube for semiconductors

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14883183U JPS6057123U (en) 1983-09-28 1983-09-28 Process tube for semiconductors

Publications (1)

Publication Number Publication Date
JPS6057123U true JPS6057123U (en) 1985-04-20

Family

ID=30330550

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14883183U Pending JPS6057123U (en) 1983-09-28 1983-09-28 Process tube for semiconductors

Country Status (1)

Country Link
JP (1) JPS6057123U (en)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433955A (en) * 1977-08-23 1979-03-13 Komatsu Ltd Hydraulic power transmission system

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5433955A (en) * 1977-08-23 1979-03-13 Komatsu Ltd Hydraulic power transmission system

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