JPH0229521U - - Google Patents
Info
- Publication number
- JPH0229521U JPH0229521U JP10715788U JP10715788U JPH0229521U JP H0229521 U JPH0229521 U JP H0229521U JP 10715788 U JP10715788 U JP 10715788U JP 10715788 U JP10715788 U JP 10715788U JP H0229521 U JPH0229521 U JP H0229521U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- gas introduction
- raw material
- material gas
- introduction pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000002488 metal-organic chemical vapour deposition Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 2
- 239000002994 raw material Substances 0.000 claims 2
- 238000010438 heat treatment Methods 0.000 description 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Description
第１図は本考案ＭＯＣＶＤ装置の一実施例を示
す断面図、第２図は従来のＭＯＣＶＤ装置の断面
図である。
１…反応管、２…第１原料ガス導入管、３…排
気管、４…サセプタ、５…基板、６…高周波加熱
コイル、７…第２原料ガス導入管、８…シヤツタ
、９…雰囲気ガス導入管。
FIG. 1 is a sectional view showing an embodiment of the MOCVD apparatus of the present invention, and FIG. 2 is a sectional view of a conventional MOCVD apparatus. DESCRIPTION OF SYMBOLS 1... Reaction tube, 2... First source gas introduction tube, 3... Exhaust pipe, 4... Susceptor, 5... Substrate, 6... High frequency heating coil, 7... Second source gas introduction tube, 8... Shutter, 9... Atmospheric gas Introductory tube.
Claims (1)
と上記反応管内に配され、基板を載置するサセプ
タと、上記原料ガス導入管と上記サセプタの間に
設けられた開閉自在のシヤツタと、を具備するこ
とを特徴とするＭＯＣＶＤ装置。 a reaction tube, a raw material gas introduction pipe communicating with the reaction tube, a susceptor disposed within the reaction tube on which a substrate is placed, and a shutter that can be opened and closed between the raw material gas introduction pipe and the susceptor; An MOCVD apparatus comprising:
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715788U JPH0229521U (en) | 1988-08-12 | 1988-08-12 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10715788U JPH0229521U (en) | 1988-08-12 | 1988-08-12 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0229521U true JPH0229521U (en) | 1990-02-26 |
Family
ID=31341319
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10715788U Pending JPH0229521U (en) | 1988-08-12 | 1988-08-12 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0229521U (en) |
-
1988
- 1988-08-12 JP JP10715788U patent/JPH0229521U/ja active Pending
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