JPS64329U - - Google Patents
Info
- Publication number
- JPS64329U JPS64329U JP9422987U JP9422987U JPS64329U JP S64329 U JPS64329 U JP S64329U JP 9422987 U JP9422987 U JP 9422987U JP 9422987 U JP9422987 U JP 9422987U JP S64329 U JPS64329 U JP S64329U
- Authority
- JP
- Japan
- Prior art keywords
- boat
- reaction tube
- elevator
- vertical
- vertical diffusion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000009792 diffusion process Methods 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- 235000012431 wafers Nutrition 0.000 claims 1
Description
第１図は本考案装置の一実施例の構成を示す説
明用斜視図、第２図は本考案の主要部を示す断面
図、第３図ａ，ｂはそれぞれ従来装置の一例を反
応管内にボートを挿入した状態及びボートを取り
出した状態を示す斜視図である。
１……反応管、２……ウエーハ、３……ボート
、４……エレベータ、５……炉口扉、６……回転
アーム。
Fig. 1 is an explanatory perspective view showing the configuration of one embodiment of the device of the present invention, Fig. 2 is a sectional view showing the main parts of the invention, and Fig. 3 a and b are examples of the conventional device installed in a reaction tube. FIG. 3 is a perspective view showing a state in which the boat is inserted and a state in which the boat is taken out. 1... Reaction tube, 2... Wafer, 3... Boat, 4... Elevator, 5... Furnace door, 6... Rotating arm.
Claims (1)
体ウエーハ等を保持するためのボートと、このボ
ートを反応管内に挿入、取出しするためのエレベ
ータとにより構成される縦型拡散・ＣＶＤ装置に
おいて、ボートの取出し時（エレベータの下降時
）に、反応管開口部を閉じる炉口扉を回転アーム
に支持せしめてなる縦型拡散・ＣＶＤ装置。 In a vertical diffusion/CVD apparatus consisting of a reaction tube provided in a vertical tubular heater, a boat for holding semiconductor wafers, etc., and an elevator for inserting and taking out the boat into the reaction tube, A vertical diffusion/CVD device in which a rotary arm supports a furnace door that closes the reaction tube opening when the boat is taken out (when the elevator is lowered).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9422987U JPS64329U (en) | 1987-06-19 | 1987-06-19 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9422987U JPS64329U (en) | 1987-06-19 | 1987-06-19 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS64329U true JPS64329U (en) | 1989-01-05 |
Family
ID=30957486
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9422987U Pending JPS64329U (en) | 1987-06-19 | 1987-06-19 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS64329U (en) |
-
1987
- 1987-06-19 JP JP9422987U patent/JPS64329U/ja active Pending