JPS6047482A - Laser irradiating device - Google Patents
Laser irradiating deviceInfo
- Publication number
- JPS6047482A JPS6047482A JP58154960A JP15496083A JPS6047482A JP S6047482 A JPS6047482 A JP S6047482A JP 58154960 A JP58154960 A JP 58154960A JP 15496083 A JP15496083 A JP 15496083A JP S6047482 A JPS6047482 A JP S6047482A
- Authority
- JP
- Japan
- Prior art keywords
- beams
- reflector
- laser beams
- hole
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/04—Automatically aligning, aiming or focusing the laser beam, e.g. using the back-scattered light
Landscapes
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Lasers (AREA)
- Laser Beam Processing (AREA)
Abstract
Description
【発明の詳細な説明】
〔発明の技術分野〕
本発明はレーザ照射装置に係り%特にCOlなどの気体
レーザ発振器から出力される不可視光の照射位置を認識
する装置に関する。DETAILED DESCRIPTION OF THE INVENTION [Technical Field of the Invention] The present invention relates to a laser irradiation device, and more particularly to a device for recognizing the irradiation position of invisible light output from a gas laser oscillator such as CO1.
近年数KW以上の大出力CO,レーザ発振器が開発され
強力なエネルギーを本って出力されるレーザビームは金
属、無機物その他の各種材料の加工に適用されている。In recent years, high-output CO laser oscillators with several kilowatts or more have been developed, and laser beams that emit powerful energy are used to process metals, inorganic materials, and various other materials.
上記レーザビームは通常複数個の反射鏡を組合せた伝送
光学系で加工点まで伝送される。ところで、上記レーザ
ビームは不可視である赤外光であるため、加工点での照
射位置を認識する必要から、He−He等のレーザ発振
器から出力された可視光を上記レーザビームに重畳して
伝送光学系に入射させることが行われている。上記の装
置としては第1図に示すように45°に傾けて配置され
た中央に透孔(1a)の形成しである反射鏡(1)の反
射面に大出力CO,レーザ発振器(2)からの不可視レ
ーザビーム(Ll)を入射させる一方、可視光し−ザ発
振器(3)からの可視レーザビーム(L2)を上記透孔
(1a)に向けて出力し、上記反射鏡fl)で反射され
た不可視レーザビーム(Ll)の光路に通常、同軸に重
畳させ、さらにそれら重畳した二つのレーザビームを全
反射鏡(4)および集光レンズ(5)で被加工物(6)
の加工点に伝送する構成のものが知られている。しかし
この装置では二つのレーザビームの進行する光軸は重畳
させる反射鏡(1)の保持角度が狂うとずれてしまい、
加工点での不可視レーザビームの照射位置を正確に認識
できなくなり、位置認識の役目をもつ可視光レーザ発振
器(3)を設置したことが無意味になってしまう欠点が
あった。The laser beam is usually transmitted to the processing point by a transmission optical system that combines a plurality of reflecting mirrors. By the way, since the above laser beam is invisible infrared light, it is necessary to recognize the irradiation position at the processing point, so visible light output from a laser oscillator such as He-He is superimposed on the above laser beam and transmitted. The light is introduced into an optical system. As shown in Fig. 1, the above device includes a high output CO and a laser oscillator (2) on the reflecting surface of a reflecting mirror (1) with a through hole (1a) formed in the center, which is tilted at an angle of 45 degrees. While the invisible laser beam (Ll) from the laser oscillator (3) is incident, the visible laser beam (L2) from the laser oscillator (3) is output toward the through hole (1a) and reflected by the reflecting mirror fl). The optical path of the invisible laser beam (Ll) is usually superimposed coaxially, and the two superimposed laser beams are then directed to the workpiece (6) using a total reflection mirror (4) and a condensing lens (5).
A configuration in which the information is transmitted to the processing point is known. However, with this device, the optical axes of the two laser beams will shift if the holding angle of the superimposing mirror (1) is incorrect.
There was a drawback that the irradiation position of the invisible laser beam at the processing point could not be accurately recognized, and the installation of the visible light laser oscillator (3) that had the role of position recognition became meaningless.
本発明は不可視レーザビームの加工点での照射位置を常
に正確に認識するレーザ照射装置を提供することを目的
とする。An object of the present invention is to provide a laser irradiation device that always accurately recognizes the irradiation position of an invisible laser beam at a processing point.
不安定形共振器の構成要素である出力結合ミラーの穴に
可視レーザビームを通過させ出力結合ミラーから環状に
出力される不可視レーザビームに同軸的に重畳させ、こ
の重畳された二つのレーザビームを正しく加工点に導く
ようにしたものである。A visible laser beam is passed through the hole of the output coupling mirror, which is a component of the unstable resonator, and coaxially superimposed on the invisible laser beam outputted from the output coupling mirror in an annular shape. It is designed to lead to the processing point.
本発明をその実施例を示す図面に基すいて説明する。第
2図において、θ0はたとえば大出力のC02レーザビ
ームを出力する第1のレーザ発振器で、その内部には不
安定形共振器を構成する凸面ミラーu9.凹面ミラー(
1り、出力結合ミラー+13が設・けられている。上記
出力結合ミラー(1騰は中央部に穴04)をもつ環状の
ミラーで、赤外光である不可視レーザビーム(Ll)を
出力窓四から外部に環状ビームにして出力させるもので
ある。aeは可視光である可視レーザビーム(L2)を
出力する第2のレーザ発振器で出力された可視レーザビ
ーム(L2)が上記出力結合ミ9−(13)の穴を通過
しかつ不可視レーザビーム(L + )に例えば同軸に
重畳するように配置されている。上記重畳された二つの
レーザビーム(Lx) 。The present invention will be explained based on drawings showing embodiments thereof. In FIG. 2, θ0 is, for example, a first laser oscillator that outputs a high-output C02 laser beam, and inside it is a convex mirror u9 that forms an unstable resonator. concave mirror (
1, an output coupling mirror +13 is provided. The output coupling mirror is an annular mirror having a hole 04 in the center, and outputs an invisible laser beam (Ll), which is infrared light, to the outside through an output window 4 as an annular beam. ae is a visible laser beam (L2) outputted by a second laser oscillator that outputs a visible laser beam (L2) that is visible light, and the visible laser beam (L2) passes through the hole of the output coupling hole 9-(13) and becomes an invisible laser beam ( L + ), for example, so as to coaxially overlap. The above two superimposed laser beams (Lx).
(L2)は調整用反射鏡a7)で反射され、さらに伝送
用反射鏡α樽で反射され集光レンズUつにより被加工物
四に照射されるように構成されている。(L2) is reflected by the adjustment reflecting mirror a7), further reflected by the transmission reflecting mirror α barrel, and is irradiated onto the workpiece 4 through the condenser lenses U.
上記の構成では調整用反射鏡(17)で反射される以前
に不可視レーザビーム(Ll)および可視レーザビーム
(Lりが重畳されているので、調整用反射鏡の角度を変
化させた場合でも上記二つのレーザビーム(Ls)、
(IQ)は同軸の状態での進行が保たれる。In the above configuration, the invisible laser beam (Ll) and the visible laser beam (Ll) are superimposed before being reflected by the adjusting reflector (17), so even if the angle of the adjusting reflector is changed, the two laser beams (Ls),
(IQ) is maintained in a coaxial state.
ところで、第3図、および第4図に示すように伝送用反
射鏡a8に可視レーザビーム(L、)の中心強度のほぼ
半分となる強度が得られる円周上の位置pHに4個の透
過孔01を90度毎に穿設し、これら透過孔Qυを通過
した可視レーザビーム(L、)を赤外光カットフィルタ
翰付きの光検出器(23a)乃至(23d)でそれぞれ
検出し縦方向、横方向をそれぞれに対応する差動増幅器
(24a)、 (24b)で増幅することにより、重畳
されたビーム(Ll)、 (Lt)が目標とする照射点
からはずれだ場合に出力信号を得ることができる。しか
して、この出力信号により、調整用反射鏡(17)の調
整用駆動装置(2!iilを操作して上記重畳した二つ
のレーザビーム(Ll)、(Lt) ヲそれラノ同軸度
を常に保つfcまま照射点に進むようにすることができ
る。すなわち上記4個の透過孔からの透過光を検出する
ことにより第2のレーザ光(L2)の5進行中の光軸の
ずれ5すなわぢ、互いに直交する方向、たとえば、垂直
方向と水平方向のそれぞれの変位が検出でき、調整用反
射鏡(17)を正しい角度に保てる。なお、第5図に示
すようにそれぞれに2個の透過孔(25)、(2[i)
を穿設した2枚の伝送用反射鏡a?)、弼を上記透過孔
CJ5) 、 (26)の各センタ一方向が直交交差す
るように設置することで上記伝送用反射鏡(18)の機
能と同等にするととができる。By the way, as shown in Figs. 3 and 4, four transmitting mirrors are placed on the transmission reflector a8 at positions pH on the circumference where an intensity that is approximately half of the central intensity of the visible laser beam (L,) can be obtained. Holes 01 are drilled every 90 degrees, and the visible laser beams (L,) that have passed through these transmission holes Qυ are detected by photodetectors (23a) to (23d) each equipped with an infrared light cut filter. , by amplifying in the lateral direction with the corresponding differential amplifiers (24a) and (24b), to obtain an output signal when the superimposed beams (Ll) and (Lt) are deviated from the target irradiation point. be able to. Using this output signal, the adjusting drive device (2!iil) of the adjusting reflector (17) is operated to maintain the coaxiality of the two superimposed laser beams (Ll) and (Lt) at all times. In other words, by detecting the transmitted light from the four transmission holes, the deviation of the optical axis of the second laser beam (L2) during its progress can be detected. , displacements in directions orthogonal to each other, for example, vertical and horizontal directions, can be detected and the adjusting reflector (17) can be kept at the correct angle.As shown in Fig. 5, each has two transmission holes. (25), (2[i)
Two transmission reflectors a? ), and the center of the transmission holes CJ5) and (26) are installed so that one direction of each center intersects orthogonally, so that the function can be made equivalent to that of the transmission reflector (18).
加工用のレーザビームとこのビームの照射位装置を認識
する可視レーザビームを伝送光学系に入射させる前に同
軸に重畳させ、加工中も照射位置を常に確認できるよう
に構成し、さらに必要があれば自動的にレーザビームの
ずれを修正することにより適切な加工が可能になった。The laser beam for processing and the visible laser beam that recognizes the irradiation position of this beam are coaxially superimposed before entering the transmission optical system, and the configuration is configured so that the irradiation position can be constantly confirmed even during processing. By automatically correcting the deviation of the laser beam, appropriate processing is now possible.
また、エネルギの有効利用が一段と向上し、また、ずれ
たビームによる人体等へ危険も防止することができた。In addition, the effective use of energy has been further improved, and the danger to the human body due to misaligned beams has been prevented.
第1図は従来例を示す模式図、第2図は本発明の一実施
例を示す模式図、第3図は可視レーザビーム検出部分の
詳細図、第4図は伝送用反射鏡の詳細図、第5図は本発
明の他の実施例を示す斜視図である。
αe・・・第1のレーザ発振器 (131・・・出力結
合ミラー(LD・・・不可視レーザビーム (16)・
・・第2のレーザ発振器(Lll)・・・可視レーザビ
ーム a7)・・・調整用反射鏡(l卜・・伝送用反射
鏡 eυ・・・透過孔代理人 弁理士 則近憲佑 (ほ
か1名)第1図
第2図
第3図
傑4図
β
第5121Fig. 1 is a schematic diagram showing a conventional example, Fig. 2 is a schematic diagram showing an embodiment of the present invention, Fig. 3 is a detailed diagram of the visible laser beam detection part, and Fig. 4 is a detailed diagram of the transmission reflector. , FIG. 5 is a perspective view showing another embodiment of the present invention. αe...First laser oscillator (131...Output coupling mirror (LD...Invisible laser beam (16)
...Second laser oscillator (Lll)...Visible laser beam a7)...Reflector for adjustment (Lll)...Reflector for transmission eυ...Transmission hole agent Patent attorney Kensuke Norichika (and others) 1 person) Figure 1 Figure 2 Figure 3 Jie Figure 4 β 5121
Claims (4)
ーザ発振器と、可視光を出力しかつこの可視光を上記不
安定形共振器の構成要素である出力結合ミラーの穴に通
過させて上記赤外光に重畳させる位置に設けられる第2
のレーザ発振器と、上記重畳した赤外光および可視光を
反射する調整用反射鏡と、この調整用反射鏡で反射され
た上記赤外光および可視光を被照射部に伝送する複数の
伝送用反射鏡と、これら伝送用反射鏡の少なくとも一つ
に穿設された複数の透過孔と、これら透過孔を通過した
可視光の強度を検出する光検出器とを備えることを特徴
とするレーザ照射装置。(1) A first laser oscillator that has an unstable resonator and outputs infrared light, and a first laser oscillator that outputs visible light and passes this visible light through the hole of the output coupling mirror that is a component of the unstable resonator. A second light source is provided at a position where the infrared light is superimposed on the infrared light.
a laser oscillator, an adjusting reflector that reflects the superimposed infrared light and visible light, and a plurality of transmission mirrors that transmit the infrared light and visible light reflected by the adjusting reflector to the irradiated area. Laser irradiation characterized by comprising a reflecting mirror, a plurality of transmission holes formed in at least one of these transmission reflection mirrors, and a photodetector that detects the intensity of visible light passing through these transmission holes. Device.
角度の調整制御に用いられることを特徴とする特許請求
の範囲第1項記載のレーザ照射装置。(2) The laser irradiation device according to claim 1, wherein the photodetector is used to control the adjustment of the reflection angle of the adjustment reflecting mirror based on the detected value.
とを特徴とする特許請求の範囲第1項記載のレーザ照射
装置。(3) The laser irradiation device according to claim 1, wherein the photodetector includes a filter that blocks infrared light.
許請求の範囲第1演記載のレーザ照射装置。(4) The laser irradiation device according to claim 1, wherein the transmission holes are provided axially symmetrically.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58154960A JPS6047482A (en) | 1983-08-26 | 1983-08-26 | Laser irradiating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP58154960A JPS6047482A (en) | 1983-08-26 | 1983-08-26 | Laser irradiating device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6047482A true JPS6047482A (en) | 1985-03-14 |
Family
ID=15595663
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP58154960A Pending JPS6047482A (en) | 1983-08-26 | 1983-08-26 | Laser irradiating device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6047482A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2627874A1 (en) * | 1988-02-29 | 1989-09-01 | Framatome Sa | SYSTEM FOR ALIGNING A POWER BEAM |
US7605979B2 (en) | 2005-04-19 | 2009-10-20 | Koninklijke Philips Electronics N.V. | Device for directing radiation to a layer, apparatus with such device and method using such apparatus |
-
1983
- 1983-08-26 JP JP58154960A patent/JPS6047482A/en active Pending
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2627874A1 (en) * | 1988-02-29 | 1989-09-01 | Framatome Sa | SYSTEM FOR ALIGNING A POWER BEAM |
US5085509A (en) * | 1988-02-29 | 1992-02-04 | Framatome | Apparatus and method for aligning an optical beam |
US7605979B2 (en) | 2005-04-19 | 2009-10-20 | Koninklijke Philips Electronics N.V. | Device for directing radiation to a layer, apparatus with such device and method using such apparatus |
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