JPS58154484A - Method for converting laser beam - Google Patents
Method for converting laser beamInfo
- Publication number
- JPS58154484A JPS58154484A JP56182393A JP18239381A JPS58154484A JP S58154484 A JPS58154484 A JP S58154484A JP 56182393 A JP56182393 A JP 56182393A JP 18239381 A JP18239381 A JP 18239381A JP S58154484 A JPS58154484 A JP S58154484A
- Authority
- JP
- Japan
- Prior art keywords
- laser beam
- reflecting mirror
- annular
- mirror
- converting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/073—Shaping the laser spot
- B23K26/0734—Shaping the laser spot into an annular shape
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
Abstract
Description
【発明の詳細な説明】
本発明は中実レーザビームから円環状レーザビームへの
変換方法に係り、特に反射鏡を使用した光学系を使用し
て任意の直径の円環状レーザビームを得る変換方法に関
する。DETAILED DESCRIPTION OF THE INVENTION The present invention relates to a method for converting a solid laser beam into an annular laser beam, and more particularly, a conversion method for obtaining an annular laser beam of an arbitrary diameter using an optical system using a reflecting mirror. Regarding.
中実レーザビームから円環状レーザビームへの変換方法
は第１図に示す様なレンズやプリズムを組合せた方法が
とられている。第１図はレーザビーム発振器１からの中
実レーザビーム２が円錐状透明板（プリズム）３ｆ：通
過して円環状レーザビーム４となり集光レンズ５によっ
て円周溶接部６に集光される。この方法では集光レーザ
ビームをテフォーカスして円周溶接部にレーザビームを
照射するため、円周溶接部の直径が大きくなると、声璋
のためのエネルギー密度が低下して溶接できなくなる。A method for converting a solid laser beam into an annular laser beam uses a combination of lenses and prisms as shown in FIG. In FIG. 1, a solid laser beam 2 from a laser beam oscillator 1 passes through a conical transparent plate (prism) 3f and becomes an annular laser beam 4, which is focused onto a circumferential welding part 6 by a condenser lens 5. In this method, a focused laser beam is telefocused to irradiate the circumferential weld with the laser beam, so if the diameter of the circumferential weld increases, the energy density for welding decreases and welding becomes impossible.
そこで、新たに、円周溶接部の直径に適合する透明板及
び集光レンズを製作する必要がある。新しい光学系を組
込んだ場合は光学系の光軸合せの調整作業を必要として
段取りに手間がかかる。また、レンズやプリズムを１吏
用した光学系″′ １
は部品表面からの反射や吸収によるレーザエネルギーの
ロスが太きい。円環状に集光したレーザビームで円周溶
接する場合は大出力のレーザビームが使用されるためレ
ーザビームの吸収によってレンズやプリズムを破損した
り、ダメージを与えて照射レーザパワが変動する原因と
なることがある。Therefore, it is necessary to newly manufacture a transparent plate and a condensing lens that match the diameter of the circumferential weld. When a new optical system is installed, it is necessary to adjust the optical axis alignment of the optical system, which takes time and effort. In addition, an optical system that uses a single lens or prism has a large loss of laser energy due to reflection or absorption from the component surface.When performing circumferential welding with a laser beam focused in an annular shape, high output power is required. Since a laser beam is used, absorption of the laser beam may cause damage to lenses and prisms, causing fluctuations in the irradiation laser power.
本発明の目的は発振器からの中実レーザビームを反射鏡
によって任意の直径の円環状レーザビームにに候する方
法を提供するにある。SUMMARY OF THE INVENTION An object of the present invention is to provide a method for converting a solid laser beam from an oscillator into an annular laser beam having an arbitrary diameter using a reflecting mirror.
本発明は中実レーザビーム島光路に対而して組入れた第
１反射鏡によって反射した円環状レーザビームを受ける
第２反射鏡が中実レーザビーム光軸を捷たからない様に
配置し、第２反射鏡を円環状レーザビームの光軸上で平
行移動することによって任意の直径の円環状レーザビー
ムを得る方法である。また第１反射鏡からの円環状レー
ザビーム・の光軸と中実レーザビームの光軸を直交させ
ることにより、中実レーザビームに平行な同芯円の円環
状レーザビームを中実レーザビームと同じ方向に変換で
きる。さらに、第１反射鏡または第２□
反射鏡に集光性をもたせることにより第２反射鏡を介し
て円環状レーザビーム′ｆ：来光し円周状の接合部のろ
う付、はんだ付、溶接などができる。In the present invention, the second reflecting mirror that receives the annular laser beam reflected by the first reflecting mirror incorporated in the optical path of the solid laser beam island is arranged so as not to deviate the optical axis of the solid laser beam. This is a method of obtaining an annular laser beam with an arbitrary diameter by moving two reflecting mirrors in parallel on the optical axis of the annular laser beam. In addition, by orthogonalizing the optical axis of the annular laser beam from the first reflecting mirror and the optical axis of the solid laser beam, a concentric annular laser beam parallel to the solid laser beam can be made into a solid laser beam. can be converted in the same direction. Furthermore, by giving the first reflecting mirror or the second □ reflecting mirror a light-condensing property, the annular laser beam 'f: enters through the second reflecting mirror, brazing or soldering the circumferential joint. Can do things like welding.
以下、本発明の一実施例を第２図、第３図により説明す
る。第２図は中実レーザビーム２を第１反射鏡８により
円環状し〜ザビーム４に変形し、中実レーザビーム２と
同じ方向に第２反射鏡９により断面で同心円形の円環状
レーザビームに変形し１円環状集光レンズ１１によって
円環状東光ビ〜ム１２として円周接合部に照射し、ろう
付、はんだ付、溶接などの接合をする方法を示す。すな
わち、中実レーザビーム２は光軸と４５度をなす平面７
と中実レーザビーム２の中心軸との交点よりαの角度を
なす円錐形の第１反射鏡８によって円環状レーザビーム
４に変換される。第１反射鏡８からの反射した円環状レ
ーザビーム４は平行でなく、エネルギー密着分布が不均
等なので、第１反射鏡８と対をなす第２反射鏡９を第１
反射鏡８から反射した円環状レーザビーム４の光軸上で
、第１反射鏡８で仮定した４５度の平面と平行な平面に
第１反射鏡と同じαの角度を有する様に凹形円錐状の第
２反射鏡９の鏡面（第１反射鏡８の鏡面と平行な而）全
反射したレーザビームに対而して設けて第２反射鏡９か
らの反射ビームを平行な円芯円の円環状レーザビーム４
に変形した。円環状レーザビーム４の直径の選択は第１
反射鏡８カ・らの反射ビームの中心軸方向の矢印１５の
方向に第２反射鏡９を平行移動することによって光学部
品全変換する′ことなく行うことができた。第２図の点
線は大径への集光状態を示す。大径への変換は第１反射
鏡８からの反射ビームの中心軸上の矢印１５方向に第２
反射鏡９を動かしレンズ焦点が交差する円環状の集光レ
ンズ１１で集光し円周状接合部に照射し、ろう付、はん
だ付、溶接などの接合が出来た。円環状レーザビームの
直径を変えた場合の光軸合せは第２反射鏡９と円環状集
光レンズ１１を一体化することにより調量なしでも使用
できた。第１反射鏡８と第２反射鏡９の角度ａは１０度
以下の範囲が好適であった。第３図は中実レーザビーム
の中心軸と３０贋をなす平面１５とβの角度をなす円錐
形鏡面の第１反射鏡８からの反射光を受ける集光反射鏡
１４と円環状集光ビーム１２とその円周溶接部１３を示
す。すなわち、曲面を有する集光反射鏡１４を中天レー
ザビーム２の光路外の位置に配して第１反射鏡８と集光
反射鏡１４との２個の反射説の組合せのみで円周接合し
たものである。円周接合部の直径に適合する円環状レー
ザビーム４の直径選定は第２図同様に第１反射鏡８カ・
ら反射した円環状レーザビーム４の中心軸上を集光反射
鏡１４を平行移動調整することで適合した。なお第１反
射鏡８のβ角度は１０度以下で適用した。An embodiment of the present invention will be described below with reference to FIGS. 2 and 3. In FIG. 2, a solid laser beam 2 is transformed into an annular shape by a first reflecting mirror 8 and transformed into the beam 4, and then a toroidal laser beam with a concentric circular cross section is produced by a second reflecting mirror 9 in the same direction as the solid laser beam 2. A method is shown in which a circular Toko beam 12 is transformed into a circular condenser lens 11 to irradiate the circumferential joint portion, and the joint is performed by brazing, soldering, welding, or the like. That is, the solid laser beam 2 lies on a plane 7 that makes a 45 degree angle with the optical axis.
The solid laser beam 2 is converted into an annular laser beam 4 by a conical first reflecting mirror 8 that forms an angle α from the intersection of the solid laser beam 2 and the central axis of the solid laser beam 2. The annular laser beam 4 reflected from the first reflecting mirror 8 is not parallel and the energy adhesion distribution is uneven, so the second reflecting mirror 9 that is paired with the first reflecting mirror 8 is
On the optical axis of the annular laser beam 4 reflected from the reflecting mirror 8, a concave cone is formed on a plane parallel to the 45-degree plane assumed by the first reflecting mirror 8 so as to have the same angle α as the first reflecting mirror. The mirror surface of the second reflecting mirror 9 (parallel to the mirror surface of the first reflecting mirror 8) is provided in opposition to the totally reflected laser beam, so that the reflected beam from the second reflecting mirror 9 is reflected by a parallel circular center circle. Annular laser beam 4
transformed into. The diameter of the annular laser beam 4 is selected in the first step.
By moving the second reflecting mirror 9 in parallel in the direction of the arrow 15, which is the direction of the central axis of the reflected beam from the reflecting mirrors 8, this could be done without completely converting the optical components. The dotted line in FIG. 2 indicates the state of condensing light to a large diameter. The conversion to a larger diameter is performed by moving the second mirror in the direction of the arrow 15 on the central axis of the reflected beam from the first reflecting mirror 8.
By moving the reflecting mirror 9 and condensing the light with the annular condensing lens 11 whose lens focal points intersect, the light was irradiated onto the circumferential joint, and joining by brazing, soldering, welding, etc. was achieved. By integrating the second reflecting mirror 9 and the annular condensing lens 11, alignment of the optical axis when the diameter of the annular laser beam is changed can be performed without adjustment. The angle a between the first reflecting mirror 8 and the second reflecting mirror 9 was preferably within a range of 10 degrees or less. FIG. 3 shows a condenser reflector 14 that receives reflected light from a first reflector 8 having a conical mirror surface that forms an angle β with a plane 15 that is 30 degrees square with the central axis of a solid laser beam, and a toroidal condensed beam. 12 and its circumferential weld 13 are shown. That is, the condensing reflector 14 having a curved surface is arranged at a position outside the optical path of the mid-height laser beam 2, and the circumference is joined only by the combination of the two reflection theory, the first reflector 8 and the condensing reflector 14. This is what I did. The diameter of the annular laser beam 4 that matches the diameter of the circumferential joint is selected by selecting the first reflecting mirror 8 as shown in Figure 2.
This was achieved by adjusting the condensing reflector 14 to move in parallel on the central axis of the annular laser beam 4 reflected by the laser beam. Note that the β angle of the first reflecting mirror 8 was set to 10 degrees or less.
本発明によれば、中実レーザビームから平行な同芯Ｈの
円環状レーザビームを得ることができるので集光光学系
の位置に制限がなく自由な形状の集光光学系を使用でき
る。また、光学系の距離の移動によって円環状レーザビ
ームの直径を任意に選択できるので直径変更と光軸アラ
イメントが容易である。According to the present invention, since a parallel concentric annular laser beam can be obtained from a solid laser beam, there is no restriction on the position of the focusing optical system, and a freely shaped focusing optical system can be used. Furthermore, since the diameter of the annular laser beam can be arbitrarily selected by moving the distance of the optical system, changing the diameter and aligning the optical axis are easy.
第１反射鏡の鏡面に曲率をもたせることによっても円環
状集光ビームが得られる。An annular condensed beam can also be obtained by providing a curvature to the mirror surface of the first reflecting mirror.
第１図は従来のレーザビーム変換方法を説明する概略構
成図、第２図、第３図は本発明の一実施例を説明する断
面概略構成図である。
２・・・中実レーザビーム、４・・・円環状レーザビー
ム、８・・・第１反射鏡、９・・・第２反射鏡、１０・
・・第２反射鏡移動方向、１１・・・円環状集光レンズ
、１３・・・第１図
省２図FIG. 1 is a schematic block diagram explaining a conventional laser beam conversion method, and FIGS. 2 and 3 are cross-sectional schematic diagrams explaining an embodiment of the present invention. 2... Solid laser beam, 4... Annular laser beam, 8... First reflecting mirror, 9... Second reflecting mirror, 10...
...Second reflecting mirror movement direction, 11...Annular condensing lens, 13...Fig. 1 Ministry of Fig. 2
Claims (1)
方法において、前記中実レーザビームを凸型円錐面の第
１反射鏡で反射させて円環状に変換するとともに、該円
環状ビームの直径が該ビームの進行方向に広がるように
したことを特徴とするレーザビームの変換方法。 ２、前記円環状ビームを中天レーザビームをまたがらな
い様に反射させる特許請求の範囲第１項記載のＶ−ザビ
ームの変換方法。 ３、前記第１反射鏡の頂点を中実レーザビームの中心軸
に一致させ、その鏡面の角度が鏡面の頂点で中実レーザ
ビームと４５匿をなす平面から等角度に配置されている
特許請求の範囲第１項記載のＶ−ザビームの変換方法。 ４、前記第１反射鏡の鏡面が中実レーザビームの中心軸
と４５度の平面となす角度を１０度以下にした特許請求
の範囲第３項記載のレーザビームの変換方法。 ５、前記円環状ビームを凹型円錐面の第２反射鏡により
反射させ真直な円環状ビームに変換する特許請求の範囲
第１項又は第２項記載のＶ−ザビームの変換方法。 ６、前記第２反射鏡が第１反射鏡の頂点で仮定した中実
レーザビームに対面して４５度をなす平面繞から反射す
る中実レーザビームの中心軸方向に平行移動させて円環
状レーザビームの直径を調整する特許請求の範囲第５項
記載のレーザビームの変換方法。 ７、第２反射鏡の鏡面が円環状の焦点を有する曲率の鏡
面を有する特許請求の範囲第５項記載のレーザビームの
変換方法。 ８、前記真直な円環状ビームを円環状を保ち来光させる
特許請求の範囲第５項記載のレーザビームの変換方法。[Claims] 1. A method for converting a solid laser beam into an annular laser beam, which includes converting the solid laser beam into an annular shape by reflecting it on a first reflecting mirror having a convex conical surface, and converting the solid laser beam into an annular laser beam. A method for converting a laser beam, characterized in that the diameter of the annular beam is expanded in the direction in which the beam travels. 2. The V-the-beam conversion method according to claim 1, wherein the annular beam is reflected so as not to straddle the mid-height laser beam. 3. A patent claim in which the apex of the first reflecting mirror is aligned with the central axis of the solid laser beam, and the angle of the mirror surface is equiangular from a plane that is 45 degrees secluded from the solid laser beam at the apex of the mirror surface. The method for converting the V-the-beam according to item 1. 4. The laser beam conversion method according to claim 3, wherein the mirror surface of the first reflecting mirror makes an angle of 10 degrees or less with the central axis of the solid laser beam and a 45 degree plane. 5. The V-the-beam conversion method according to claim 1 or 2, wherein the annular beam is reflected by a second reflecting mirror having a concave conical surface and converted into a straight annular beam. 6. The second reflecting mirror faces the assumed solid laser beam at the apex of the first reflecting mirror and moves in parallel in the direction of the central axis of the solid laser beam reflected from a plane that forms an angle of 45 degrees to form an annular laser. 6. A method of converting a laser beam according to claim 5, wherein the diameter of the beam is adjusted. 7. The laser beam conversion method according to claim 5, wherein the mirror surface of the second reflecting mirror has a curvature having an annular focal point. 8. The method for converting a laser beam according to claim 5, in which the straight annular beam is made to come while maintaining its annular shape.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182393A JPS58154484A (en) | 1981-11-16 | 1981-11-16 | Method for converting laser beam |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56182393A JPS58154484A (en) | 1981-11-16 | 1981-11-16 | Method for converting laser beam |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS58154484A true JPS58154484A (en) | 1983-09-13 |
Family
ID=16117529
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56182393A Pending JPS58154484A (en) | 1981-11-16 | 1981-11-16 | Method for converting laser beam |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS58154484A (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63249813A (en) * | 1987-03-21 | 1988-10-17 | ヘレウス・インスツルメンツ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Beam guide optical system for laser beam |
| US5690845A (en) * | 1994-10-07 | 1997-11-25 | Sumitomo Electric Industries, Ltd. | Optical device for laser machining |
| EP1666188A2 (en) * | 2004-12-01 | 2006-06-07 | Fanuc Ltd | Laser processing device with a light gathering member for irradiating the workpiece with a shape other than a one-point like profile, i.e. like a circle or a ring |
| US7265314B2 (en) * | 2004-07-27 | 2007-09-04 | Snecma | Method and apparatus for laser welding using a CW laser beam combined with a pulsed laser beam |
| JP2009021476A (en) * | 2007-07-13 | 2009-01-29 | Disco Abrasive Syst Ltd | Wafer dividing method |
| WO2013051424A1 (en) * | 2011-10-07 | 2013-04-11 | 株式会社ブイ・テクノロジー | Device for laser-machining glass substrate |
| CN103619527A (en) * | 2011-05-11 | 2014-03-05 | 株式会社V技术 | Lens and laser processing device equipped with same |
| CN105458493A (en) * | 2014-09-30 | 2016-04-06 | 发那科株式会社 | Laser processing apparatus |
| EP3088165A4 (en) * | 2015-02-25 | 2017-02-01 | Technology Research Association For Future Additive Manufacturing | Optical processing head, optical processing device, and optical processing method |
-
1981
- 1981-11-16 JP JP56182393A patent/JPS58154484A/en active Pending
Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH087317B2 (en) * | 1987-03-21 | 1996-01-29 | ヘレウス・インスツルメンツ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Beam guiding optical device for laser beam |
| JPS63249813A (en) * | 1987-03-21 | 1988-10-17 | ヘレウス・インスツルメンツ・ゲゼルシャフト・ミット・ベシュレンクテル・ハフツング | Beam guide optical system for laser beam |
| US5690845A (en) * | 1994-10-07 | 1997-11-25 | Sumitomo Electric Industries, Ltd. | Optical device for laser machining |
| US7265314B2 (en) * | 2004-07-27 | 2007-09-04 | Snecma | Method and apparatus for laser welding using a CW laser beam combined with a pulsed laser beam |
| EP1666188A2 (en) * | 2004-12-01 | 2006-06-07 | Fanuc Ltd | Laser processing device with a light gathering member for irradiating the workpiece with a shape other than a one-point like profile, i.e. like a circle or a ring |
| EP1666188A3 (en) * | 2004-12-01 | 2006-08-16 | Fanuc Ltd | Laser processing device with a light gathering member for irradiating the workpiece with a shape other than a one-point like profile, i.e. like a circle or a ring |
| JP2009021476A (en) * | 2007-07-13 | 2009-01-29 | Disco Abrasive Syst Ltd | Wafer dividing method |
| CN103619527A (en) * | 2011-05-11 | 2014-03-05 | 株式会社V技术 | Lens and laser processing device equipped with same |
| US9310531B2 (en) | 2011-05-11 | 2016-04-12 | V-Technology Co., Ltd. | Lens and laser processing apparatus equipped with the lens |
| JP2013082580A (en) * | 2011-10-07 | 2013-05-09 | V Technology Co Ltd | Laser processing apparatus for glass substrate |
| WO2013051424A1 (en) * | 2011-10-07 | 2013-04-11 | 株式会社ブイ・テクノロジー | Device for laser-machining glass substrate |
| CN105458493A (en) * | 2014-09-30 | 2016-04-06 | 发那科株式会社 | Laser processing apparatus |
| US9656349B2 (en) | 2014-09-30 | 2017-05-23 | Fanuc Corporation | Laser processing apparatus capable of increasing focused beam diameter |
| CN105458493B (en) * | 2014-09-30 | 2017-10-27 | 发那科株式会社 | Laser processing device |
| EP3088165A4 (en) * | 2015-02-25 | 2017-02-01 | Technology Research Association For Future Additive Manufacturing | Optical processing head, optical processing device, and optical processing method |
| US10369661B2 (en) | 2015-02-25 | 2019-08-06 | Technology Research Association For Future Additive Manufacturing | Optical processing head, optical machining apparatus, and optical processing method |
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